CN210583713U - Recovery unit of washing liquid - Google Patents
Recovery unit of washing liquid Download PDFInfo
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- CN210583713U CN210583713U CN201921062113.9U CN201921062113U CN210583713U CN 210583713 U CN210583713 U CN 210583713U CN 201921062113 U CN201921062113 U CN 201921062113U CN 210583713 U CN210583713 U CN 210583713U
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Abstract
The utility model provides a recovery unit of washing liquid, including first distillation unit, second distillation unit, liquid reserve tank and decompression distillation unit, be provided with air duct and catheter between second distillation unit and the decompression distillation unit, second distillation unit is provided with the aspiration pump, is provided with the liquid level detection unit in the decompression distillation unit. The first distillation unit condenses and liquefies the cleaning liquid at low temperature and discharges the gas. The condensed liquid is sent to a vacuum distillation unit to separate the moisture in the liquid. The liquid level in the reduced pressure distillation unit is detected by the liquid level detection unit, the first valve and the second valve are combined, and the gas in the reduced pressure distillation unit is discharged after passing through the second distillation unit and being distilled again at low temperature of the second distillation unit by using the air extracting pump. And the liquid of the washing liquid under the condensation then collect with the liquid reserve tank in, carry out through the liquid reserve tank dump or carry can, accomplish the purpose of recycling to the washing liquid, reduction in production cost.
Description
Technical Field
The utility model relates to a vacuum evaporation equipment field especially relates to a recovery unit of washing liquid.
Background
In the current OLED (Organic Light-Emitting Diode) technology, a mask plate for vacuum evaporation is very important and critical, and the precision and quality of the component directly determine the display effect and quality of an OLED product. Therefore, the Mask (Mask) may stick some organic light emitting material during the evaporation process, and therefore, the Mask must be cleaned before using the Mask.
At present, a mask plate cleaning machine generally uses two kinds of liquid medicines, namely cleaning liquid and rinsing liquid, firstly removes organic materials through the cleaning liquid, then utilizes the rinsing liquid such as hydrofluoroether series solution (HFE) to take away the cleaning liquid, and finally dries to complete the whole cleaning process. The cleaning solution has strong dissolving capacity, but the cleaning solution does not have high volatility, and the cleaning solution on the mask plate needs to be removed by means of mutual dissolution of rinsing solution and the cleaning solution, so that the rinsing solution has strong volatility to avoid residue after the mask plate is dried, but the rinsing solution used by the cleaning equipment is very expensive to meet the process requirement, the volatilization of the rinsing solution in the cleaning tank is difficult to avoid in the cleaning process, so frequent supplement is needed, and no relevant recovery solution is available in the industry at present, so that the cleaning cost of the mask plate is greatly increased, and the production cost of the OLED display screen is directly increased.
SUMMERY OF THE UTILITY MODEL
Therefore, a recovery device for cleaning liquid is needed to be provided, and the problems that an existing mask plate cleaning machine does not have a recovery device and the cleaning cost is high are solved.
In order to achieve the above object, the inventors provide a recovery apparatus of a cleaning liquid, comprising a first distillation unit, a second distillation unit, a liquid storage tank, and a reduced pressure distillation unit; the first distillation unit is connected with the reduced pressure distillation unit through a pipe, a gas guide pipe and a liquid guide pipe are arranged between the second distillation unit and the reduced pressure distillation unit, the gas guide pipe is positioned above the liquid guide pipe, the second distillation unit is provided with a suction pump, the suction pump is connected with a gas outlet of the second distillation unit, and the liquid storage tank is connected with a liquid outlet pipe of the second distillation unit; the liquid level detection unit is arranged in the reduced pressure distillation unit and used for detecting the liquid level in an inner cavity of the reduced pressure distillation unit, a first valve is arranged on a conveying pipe between the first distillation unit and the reduced pressure distillation unit, and a second valve is arranged on the liquid guide pipe.
Further, the vacuum distillation device also comprises a heating unit, wherein the vacuum distillation unit is arranged on a heater of the heating unit.
Further, the heating unit is a water bath heater or an oil bath heater.
Further, still include the washing tank, the washing tank sets up with liquid storage tank union coupling.
Further, a third valve is arranged between the cleaning tank and the liquid storage tank, and the liquid guide pipe is positioned between the third valve and the liquid storage tank.
Further, still include the draught fan, first distillation unit and washing groove union coupling, the draught fan sets up on the connecting pipe between first distillation unit and washing tank, the draught fan is used for pumping the volatile washing liquid gas to first distillation unit in.
Further, the first distillation unit comprises a storage box, the storage box is connected with a liquid outlet pipe of the first distillation unit, and the storage box is connected with a reduced pressure distillation unit pipe.
Further, still include the air supplement jar, the air supplement jar is connected with the vacuum distillation unit pipe, the air supplement jar is used for letting in nitrogen gas and keeping the inside atmospheric pressure of cavity and the equilibrium of outside atmospheric pressure in vacuum distillation unit and the second distillation unit.
Further, the liquid level detection unit comprises a first liquid level sensor and a second liquid level sensor, the first liquid level sensor and the second liquid level sensor are arranged on the side wall of the cavity of the reduced pressure distillation unit, and the first liquid level sensor is located above the second liquid level sensor.
Be different from prior art, above-mentioned technical scheme collects the washing liquid that volatilizees through first distillation unit to carry out the low temperature condensation liquefaction. And the redundant gas is discharged through an exhaust port of the first distillation unit, and the condensed liquid is conveyed to the reduced pressure distillation unit to separate the moisture in the cleaning liquid. And when the liquid level reaches a set high liquid level, the first valve and the second valve are closed, and gas in the reduced pressure distillation unit is discharged after low-temperature redistillation through the second distillation unit by using the air extraction pump. And the liquid of the washing liquid under the condensation then collect with the liquid reserve tank in, carry out through the liquid reserve tank dump or carry can, accomplish the purpose of recycling to the washing liquid, reduction in production cost.
Drawings
Fig. 1 is a schematic view of a cleaning liquid recovery apparatus according to an embodiment.
Description of reference numerals:
10. a first distillation unit; 11. a storage box; 12. a first valve; 211. a second valve;
20. a second distillation unit; 21. a catheter; 22. an air duct; 23. an air pump;
30. a liquid storage tank; 31. a third valve;
40. a reduced pressure distillation unit;
50. a cleaning tank; 60. an induced draft fan; 70. a heating unit; 80. air supply tank
Detailed Description
To explain technical contents, structural features, and objects and effects of the technical solutions in detail, the following detailed description is given with reference to the accompanying drawings in conjunction with the embodiments.
Referring to fig. 1, the present embodiment provides a recycling apparatus for cleaning solution, which includes a first distillation unit 10, a second distillation unit 20, a liquid storage tank 30, and a reduced pressure distillation unit 40. The line of the cleaning solution volatilization and recovery of this embodiment is: the cleaning tank 50, the induced draft fan 60, the first distillation unit, the storage tank 11, the reduced pressure distillation unit, the second distillation unit, the liquid storage tank and the cleaning tank are connected in sequence through pipelines. The washing tank volatilizees promptly, uses the leading-in first distillation unit condensation of draught fan to collect, and first distillation unit can be saved and carry through the storage box, carries out pressure separation moisture with the vacuum distillation unit, again through second distillation unit condensation once more collect to in storage and the liquid reserve tank, in carrying the washing tank back through the liquid case, accomplished the recycle's of washing liquid purpose. Between the vacuum distillation unit and the second distillation unit there is not only a liquid delivery tube 21 for delivering liquid, but also a gas delivery tube 22 for delivering gas, for example water vapour. And exhaust pipes are installed on both the first distillation unit and the second distillation unit for discharging air or water vapor. The first distillation unit and the second distillation unit are closed cryogenic distillators, and the reduced pressure distillation unit is a pressure distiller.
The cleaning liquid in the embodiment is used for cleaning a mask plate of vacuum evaporation, if the mask plate is very easy to rust when in contact with water, the liquid component of the recovered cleaning liquid is hydrofluoroether series rinsing liquid, the liquid has high volatility and low boiling point, and the steam pressure value of the liquid is greater than the steam pressure value at the same temperature. The vaporized rinsing liquid is easy to condense and liquefy to become liquid when meeting low temperature, but the rinsing liquid and water are mutually dissolved. It is therefore desirable to collect the volatilized gases, drive out the mixed air, and mix the moisture.
Specifically, the volatilized cleaning liquid is collected and introduced into the first distillation unit, and the gaseous cleaning liquid is collected by using the characteristic that the boiling point of the cleaning liquid is low. In this embodiment use the draught fan with volatile gas pumping in the washing tank to first distillation unit in, through the washing liquid condensation of control temperature in with the gas of mixing for liquid, the air still keeps the gaseous state, reaches the effect through gas, liquid separation. At this time, the first valve is in an open state, so that the condensed mixed liquid conveniently enters the reduced pressure distillation unit through the storage tank and a pipeline below the storage tank, and the air component is discharged from the exhaust pipe above the first distillation unit.
The reduced pressure distillation unit separates by utilizing the characteristic of large pressure difference between the cleaning liquid and the water vapor, so that the cleaning liquid is condensed and liquefied by the first distillation unit, then is conveyed into the reduced pressure distillation unit, is pressurized by the reduced pressure distillation unit, enables the water vapor to be in a gaseous state and the cleaning liquid to be in a liquid state, and removes the moisture of the cleaning liquid collected and in the reduced pressure distillation unit. At this moment, gas in the decompression distillation unit is carried to the second distillation unit in through the air duct, collects the back through condensation once more, discharges unnecessary vapor to and mix with the air in the vapor, and the washing liquid solution after getting rid of moisture then carries to the cleaning tank through the catheter and in order recycling, reduces abluent cost, and the effectual moisture of avoiding liquefaction back washing liquid sneak into, causes the mask plate to rust.
When the vacuum distillation unit performs the water-vapor separation, the vacuum distillation unit may be heated by the heating unit 70. Its heating method can adopt water bath heater or oil bath heater to heat, be about to put into heating unit's heating tank the vacuum distillation unit, add water or conduction oil in this inslot, through the heating to water or conduction oil with heat conduction to the vacuum distillation unit in, carry out even heating to the vacuum distillation unit, and through the pressure in the adjustment vacuum distillation unit, guarantee that the washing liquid is liquid when the volatilization of washing liquid is accelerated, and vapor is the gaseous state, reaches the effect of the moisture in the separation washing liquid with higher speed.
In this embodiment, the air in the second distillation unit is extracted by the air extracting pump 23, and the air in the reduced pressure distillation unit is also extracted by the air guide pipe. And detecting the liquid level in the reduced pressure distillation unit through the liquid level detection unit. The liquid level detection unit comprises a first liquid level sensor and a second liquid level sensor, and the first liquid level sensor is positioned on the upper part of the side wall of the inner cavity of the reduced pressure distillation unit. When the cleaning liquid is continuously accumulated in the reduced pressure distillation unit in a liquidization mode, after the cleaning liquid is sensed or detected by the first liquid level sensor to reach a set position, the first valve 12, the second valve 211 and the third valve 31 are closed, the air pump is started to pump and exhaust air in the inner cavity of the reduced pressure distillation unit, and the air is exhausted after passing through the second distillation unit. Meanwhile, a small amount of nitrogen is continuously introduced into the reduced pressure distillation unit through the air supplement tank 80, so that the cleaning liquid gas in the reduced pressure distillation unit is discharged conveniently and conveyed into the second distillation unit. The first valve, the second valve and the third valve can be electromagnetic valves, and people can conveniently control the valves through the chip.
The second liquid level sensor is arranged in the reduced pressure distillation unit, the liquid level is low, the residual liquid moisture content is too high, at the moment, the operation of the reduced pressure distillation unit needs to be stopped, the liquid is discharged through a waste liquid discharging pipe of the reduced pressure distillation unit, and then the repeated operation is carried out, so that the working efficiency of the reduced pressure distillation unit is improved, and the aim of ensuring high purity of the recovered cleaning liquid is fulfilled.
The steam of washing liquid gets into second distillation unit back condensation liquefaction, can obtain pure washing liquid, and the temporary storage is in the stock solution case, treat after the liquid level in the decompression distillation unit reaches the low liquid level of settlement, the aspiration pump can stop bleeding, let in clean nitrogen gas for decompression distillation unit and second distillation unit, make its inside atmospheric pressure reach atmospheric pressure, the atmospheric pressure of the inside atmospheric pressure of decompression distillation unit and second distillation unit is greater than or equal to the atmospheric pressure of outside environment promptly, reach the surplus liquid in the discharge decompression distillation unit that can be normal quick, and open the third valve, make the interior washing liquid of stock solution case get into in the washing tank, thereby realize the recovery and the used repeatedly of washing liquid.
If the moisture content in the cleaning liquid in the liquid storage tank cannot meet the recycling requirement, namely the moisture content is higher, the third valve can be closed, the second valve is opened at the same time, the cleaning liquid in the liquid storage tank flows into the reduced pressure distillation unit again, and the distillation step of removing moisture is repeated once, so that the purification of the cleaning liquid is realized, and the recycled cleaning liquid can achieve the usable effect.
It should be noted that, although the above embodiments have been described herein, the scope of the present invention is not limited thereby. Therefore, based on the innovative concept of the present invention, the changes and modifications of the embodiments described herein, or the equivalent structure or equivalent process changes made by the contents of the specification and the drawings of the present invention, directly or indirectly apply the above technical solutions to other related technical fields, all included in the protection scope of the present invention.
Claims (9)
1. A recovery unit of washing liquid which characterized in that: comprises a first distillation unit, a second distillation unit, a liquid storage tank and a reduced pressure distillation unit;
the first distillation unit is connected with the reduced pressure distillation unit through a pipe, a gas guide pipe and a liquid guide pipe are arranged between the second distillation unit and the reduced pressure distillation unit, the gas guide pipe is positioned above the liquid guide pipe, the second distillation unit is provided with a suction pump, the suction pump is connected with a gas outlet of the second distillation unit, and the liquid storage tank is connected with a liquid outlet pipe of the second distillation unit;
the liquid level detection unit is arranged in the reduced pressure distillation unit and used for detecting the liquid level in an inner cavity of the reduced pressure distillation unit, a first valve is arranged on a conveying pipe between the first distillation unit and the reduced pressure distillation unit, and a second valve is arranged on the liquid guide pipe.
2. A cleaning liquid recovery apparatus according to claim 1, wherein: the vacuum distillation device further comprises a heating unit, and the vacuum distillation unit is arranged on a heater of the heating unit.
3. A cleaning liquid recovery apparatus according to claim 2, wherein: the heating unit is a water bath heater or an oil bath heater.
4. A cleaning liquid recovery apparatus according to claim 1, wherein: still include the washing tank, the washing tank sets up with liquid storage tank union coupling.
5. A cleaning liquid recovery apparatus according to claim 4, wherein: a third valve is arranged between the cleaning tank and the liquid storage tank, and the liquid guide pipe is positioned between the third valve and the liquid storage tank.
6. A cleaning liquid recovery apparatus according to claim 4, wherein: still include the draught fan, first distillation unit and washing groove union coupling, the draught fan sets up on the connecting pipe between first distillation unit and washing tank, the draught fan is used for pumping volatile washing liquid gas to first distillation unit in.
7. A cleaning liquid recovery apparatus according to claim 1, wherein: the first distillation unit comprises a storage box, the storage box is connected with a liquid outlet pipe of the first distillation unit, and the storage box is connected with a reduced pressure distillation unit pipe.
8. A cleaning liquid recovery apparatus according to claim 1, wherein: still include the air supplement jar, the air supplement jar is connected with reduced pressure distillation unit pipe, the air supplement jar is used for letting in nitrogen gas in reduced pressure distillation unit and the second distillation unit and keeps the inside atmospheric pressure of cavity and the balance of outside atmospheric pressure.
9. A cleaning liquid recovery apparatus according to claim 1, wherein: the liquid level detection unit comprises a first liquid level sensor and a second liquid level sensor, the first liquid level sensor and the second liquid level sensor are arranged on the side wall of the cavity of the reduced pressure distillation unit, and the first liquid level sensor is located above the second liquid level sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921062113.9U CN210583713U (en) | 2019-07-09 | 2019-07-09 | Recovery unit of washing liquid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921062113.9U CN210583713U (en) | 2019-07-09 | 2019-07-09 | Recovery unit of washing liquid |
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| Publication Number | Publication Date |
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| CN210583713U true CN210583713U (en) | 2020-05-22 |
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| CN201921062113.9U Active CN210583713U (en) | 2019-07-09 | 2019-07-09 | Recovery unit of washing liquid |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111760317A (en) * | 2020-07-14 | 2020-10-13 | 常州海克莱化学有限公司 | Conveying device of vacuum distillation equipment |
| CN112717453A (en) * | 2021-04-06 | 2021-04-30 | 广州市点滴生物科技有限公司 | Plant material's juice splitter for bio-pharmaceuticals |
| CN113340839A (en) * | 2021-06-30 | 2021-09-03 | 浙江天地环保科技股份有限公司 | Pretreatment system and method for measuring sulfur trioxide at total exhaust port of chimney |
| CN115007523A (en) * | 2021-03-05 | 2022-09-06 | 爱阔特株式会社 | Gasified cleaning liquid recovery device |
| CN115025506A (en) * | 2022-02-26 | 2022-09-09 | 无锡新弘田环保技术有限公司 | Dynamic concentration distillation method of distillation recovery system |
| CN113340839B (en) * | 2021-06-30 | 2024-08-02 | 浙江浙能科技环保集团股份有限公司 | Pretreatment system and method for measuring sulfur trioxide at chimney total discharge |
-
2019
- 2019-07-09 CN CN201921062113.9U patent/CN210583713U/en active Active
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111760317A (en) * | 2020-07-14 | 2020-10-13 | 常州海克莱化学有限公司 | Conveying device of vacuum distillation equipment |
| CN115007523A (en) * | 2021-03-05 | 2022-09-06 | 爱阔特株式会社 | Gasified cleaning liquid recovery device |
| CN112717453A (en) * | 2021-04-06 | 2021-04-30 | 广州市点滴生物科技有限公司 | Plant material's juice splitter for bio-pharmaceuticals |
| CN113340839A (en) * | 2021-06-30 | 2021-09-03 | 浙江天地环保科技股份有限公司 | Pretreatment system and method for measuring sulfur trioxide at total exhaust port of chimney |
| CN113340839B (en) * | 2021-06-30 | 2024-08-02 | 浙江浙能科技环保集团股份有限公司 | Pretreatment system and method for measuring sulfur trioxide at chimney total discharge |
| CN115025506A (en) * | 2022-02-26 | 2022-09-09 | 无锡新弘田环保技术有限公司 | Dynamic concentration distillation method of distillation recovery system |
| CN115025506B (en) * | 2022-02-26 | 2023-11-10 | 无锡新弘田环保技术有限公司 | Dynamic concentration distillation method of distillation recovery system |
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