CN210388850U

CN210388850U - Polishing solution recycling device

Info

Publication number: CN210388850U
Application number: CN201921268487.6U
Authority: CN
Inventors: 李炜; 王看看
Original assignee: Xuzhou Weiju Electronic Materials Co Ltd
Current assignee: Xuzhou Weiju Electronic Materials Co Ltd
Priority date: 2019-08-07
Filing date: 2019-08-07
Publication date: 2020-04-24
Anticipated expiration: 2029-08-07

Abstract

The utility model discloses a polishing solution recycling device, which comprises a cylinder body, a water outlet pipe arranged on one side of the bottom of the cylinder body, an end cover movably connected with the opening at the upper end of the cylinder body and a water inlet pipe connected with the end cover, wherein an inner plate is rotatably arranged inside the cylinder body, a plurality of vertically-arranged side frames are circumferentially arranged on the inner plate, and a clamping groove is arranged between two adjacent side frames; the center of end cover rotates installs the center pin, and the outside circumference of center pin has arranged a plurality of stirring leaf. The utility model realizes that the rotation direction of the central shaft is opposite to the rotation direction of the filtering bin driven by the outside toothed ring, and can achieve the simultaneous operation of stirring and filtering, thereby improving the stirring and filtering efficiency; when needs clearance impurity, only need to pour into clear water and reversal motor into the barrel, under the effect of centrifugal force, can realize diluting and scattering the impurity of crossing the inside in filter bin in the barrel, can through the delivery port discharge.

Description

Polishing solution recycling device

Technical Field

The utility model belongs to the technical field of recovery unit, concretely relates to polishing solution retrieves and recycles device.

Background

In the process of polishing and burnishing a silicon wafer by using a rough burnishing machine and a fine burnishing machine, polishing liquid needs to be injected into the silicon wafer, the polishing liquid is generally recycled for reducing the production cost, but the polishing liquid with impurities can not only damage the surface precision of a product, but also block a pipeline to enable the flow of the polishing liquid to be unsmooth, and the defects that the product is not fully polished or pits are generated in the product are caused. In order to avoid the above situation, the polishing solution must be filtered, and nowadays, the machine for filtering the polishing solution has an unobvious filtering effect, and the filtering device is complex to clean and has poor practicability, and therefore, a polishing solution recycling device capable of solving the above problems is urgently needed.

SUMMERY OF THE UTILITY MODEL

To the problem that above-mentioned prior art exists, the utility model provides a polishing solution recycling apparatus can realize retrieving, clear up convenient polishing solution recycling apparatus.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

a polishing solution recycling device comprises a cylinder, a water outlet pipe arranged on one side of the bottom of the cylinder, an end cover movably connected to an opening at the upper end of the cylinder, and a water inlet pipe connected to the end cover, wherein an inner plate is rotatably arranged in the cylinder, a plurality of vertically arranged side frames are circumferentially arranged on the inner plate, and a clamping groove is formed between two adjacent side frames;

the central shaft is rotatably installed at the center of the end cover, a plurality of stirring blades are circumferentially arranged outside the central shaft, a driving gear is fixedly installed outside the upper end of the central shaft, a plurality of connecting gears are meshed and connected with the outer side of the driving gear, the connecting gears are rotatably installed on the end cover, a gear ring is meshed and connected with the outer side of each connecting gear, the gear ring is rotatably installed on the end cover, a plurality of filtering bins are circumferentially installed at the bottom of the gear ring, the filtering bins are matched with the clamping grooves and connected with the inner plates and the side frames to form inner cylinders, inner cavities are formed inside the inner cylinders, and cavities formed between the inner cylinders and the cylinder bodies are outer cavities.

Preferably, a bearing is installed at the bottom of the inner cavity of the cylinder, and the inner plate is movably installed on the bearing.

Preferably, the filtration bin is a triangular prism with an opening formed in one side, and the side wall and the bottom wall of the filtration bin are filter screens.

Preferably, the both sides of side bearer all are equipped with the slot, install the sealing strip on filtering the outer wall in storehouse, the sealing strip with correspond slot looks adaptation.

Preferably, a driving motor for driving the central shaft to rotate is mounted at the center of the upper end of the end cover.

Compared with the prior art, the beneficial effects of the utility model are that:

(1) the utility model realizes the rotation direction of the central shaft and the rotation direction of the filtering bin driven by the outside toothed ring are opposite through the connection of the driving gear, the connecting gear and the toothed ring, and can achieve the simultaneous operation of stirring and filtering and improve the stirring and filtering efficiency;

(2) the utility model has the advantages that the filtering bin is arranged into the triangular column with the opening at one side, and the side wall and the bottom plate of the triangular column are both filtering layers, so that the filtered impurities can be left in the filtering bin, and the filtering bin is convenient to clean;

(3) the utility model discloses an inner panel has realized when needs clearance impurity for can dismantling the part, only needs to inject clear water and reversal motor in toward the barrel, under the effect of centrifugal force, can realize diluting and scattering the inside impurity in filter house in the barrel, through the delivery port discharge can.

Drawings

Fig. 1 is a schematic structural view of the present invention;

fig. 2 is an internal cross-sectional view of the present invention;

FIG. 3 is an exploded view of the connection between the filtering bin and the inner plate of the present invention;

fig. 4 is a cross-sectional view taken along line a-a of fig. 2 in accordance with the present invention;

fig. 5 is a partial connection cross-sectional view of the end cover and the filtering bin of the present invention.

Description of reference numerals:

1. the device comprises a cylinder body, 2, a water inlet pipe, 3, a driving motor, 4, an end cover, 5, a water outlet pipe, 6, an inner plate, 7, an outer cavity, 8, a filter bin, 9, a central shaft, 10, a bearing, 11, a side frame, 12, a connecting gear, 13, a clamping groove, 14, a driving gear, 15, a gear ring, 16 and an inner cavity.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

As shown in fig. 1 to 5, a polishing solution recycling device comprises a barrel 1, a water outlet pipe 5 installed on one side of the bottom of the barrel 1, an end cover 4 movably connected to an opening at the upper end of the barrel 1, wherein the end cover 4 is a detachable component, so that a component connected with the end cover 4 can be conveniently taken down, and a water inlet pipe 2 connected to the end cover 4, the water inlet pipe 2 and the water outlet pipe 5 are both connected to a water storage unit of a polishing machine, an inner plate 6 is rotatably installed inside the barrel 1, a bearing 10 is installed at the bottom of an inner cavity of the barrel 1, the inner plate 6 is movably installed on the bearing 10, the inner plate 6 is a detachable component, so that impurities inside a filter bin 8 can be conveniently cleaned after being taken down, a plurality of vertically installed side frames 11 are circumferentially arranged on the inner plate 6, a clamping groove 13 is formed between two adjacent;

the center of the end cover 4 is rotatably provided with a center shaft 9, the center of the upper end of the end cover 4 is provided with a driving motor 3 for driving the center shaft 9 to rotate, a plurality of stirring blades are circumferentially arranged outside the center shaft 9, the center shaft 9 can stir the internal liquid through the stirring blades to improve the filtering effect, the outer part of the upper end of the center shaft 9 is fixedly provided with a driving gear 14, the outer side of the driving gear 14 is meshed and connected with a plurality of connecting gears 12, the connecting gears 12 are rotatably arranged on the end cover 4, the outer side of the connecting gears 12 is meshed and connected with a toothed ring 15, the driving motor 3 drives the center shaft 9 to rotate and simultaneously drives the toothed ring 15 to rotate through the connecting gears 12, the rotating direction of the center shaft 9 is opposite to that of the filtering bin 8, the filtering and impurity removing effects can be improved, and the toothed ring 15 is, the bottom circumference of ring gear 15 is installed a plurality of and is filtered storehouse 8, it is equipped with open-ended triangular prism for one side to filter storehouse 8, and filters the lateral wall and the diapire of storehouse 8 and be the filter screen, filters the inside cavity that is equipped with of storehouse 8 for deposit the impurity after filtering, filter storehouse 8 and draw-in groove 13 looks adaptation and be connected with inner panel 6 and side bearer 11 and form the inner tube, the inner tube is inside to be inner chamber 16, and the chamber that forms between inner tube and the barrel is exocoel 7, the both sides of side bearer 11 all are equipped with the slot, install the sealing strip on filtering storehouse 8's the outer wall, the sealing strip with correspond slot looks adaptation, after the installation, separate through the filter layer between inner chamber 16 and the exocoel 7, play the filter effect.

When the device is used, the water inlet pipe 2 is connected to a polishing machine, polished liquid is injected into the device from the water inlet pipe 2, the driving motor 3 is started, the central shaft 9 rotates under the driving of the driving motor 3, blades on the central shaft 9 stir the polishing liquid in the barrel 1, the central shaft 9 drives the gear ring 15 to rotate reversely through the connecting gear 12, the filtering bin 8 arranged at the bottom of the gear ring 15 is arranged in the clamping groove 13 and forms an inner barrel with a side wall sealed by a leakage net with the filtering bin 8 and the side frame 11, the rotating direction of the inner barrel is opposite to the rotating direction of the main shaft under the driving of the gear ring 15, the rotating direction of the inner barrel is the opening direction of the filtering bin 8 to move forwards so as to collect filtered impurities in the filtering bin 8, when the device needs to be cleaned, the inner plate 6 and the side frame 11 are taken out, clean water is injected into the barrel 1, the motor is reversed, the rotating direction of the central shaft 9 is, however, the rotation direction of the filter bin 8 is that the tip end of the filter bin 8 rotates forwards, and internal impurities can be easily removed under the action of the stirring blades on the central shaft 9.

It will be apparent to those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims and their equivalents, the present invention is also intended to include such modifications and variations.

Claims

1. The utility model provides a polishing solution retrieves and recycles device, includes barrel (1), installs outlet pipe (5) in barrel (1) bottom one side, swing joint in end cover (4) of barrel (1) upper end opening part and water inlet pipe (2) of connection on end cover (4), its characterized in that: an inner plate (6) is rotatably arranged in the barrel (1), a plurality of side frames (11) which are vertically arranged are circumferentially arranged on the inner plate (6), and a clamping groove (13) is formed between two adjacent side frames (11);

a central shaft (9) is rotatably arranged at the center of the end cover (4), a plurality of stirring blades are circumferentially arranged outside the central shaft (9), a driving gear (14) is fixedly arranged outside the upper end of the central shaft (9), a plurality of connecting gears (12) are meshed and connected with the outer side of the driving gear (14), the connecting gear (12) is rotatably arranged on the end cover (4), the outer side of the connecting gear (12) is engaged and connected with a gear ring (15), the gear ring (15) is rotatably arranged on the end cover (4), a plurality of filtering bins (8) are circumferentially arranged at the bottom of the gear ring (15), the filter bin (8) is matched with the clamping groove (13) and is connected with the inner plate (6) and the side frame (11) to form an inner cylinder, an inner cavity (16) is formed inside the inner cylinder, and an outer cavity (7) is formed between the inner cylinder and the cylinder body (1).

2. The polishing solution recycling device according to claim 1, wherein a bearing (10) is installed at the bottom of the inner cavity of the barrel (1), and the inner plate (6) is movably installed on the bearing (10).

3. The polishing solution recycling device according to claim 2, wherein the filtering bin (8) is a triangular prism with an opening at one side, and the side wall and the bottom wall of the filtering bin (8) are filter screens.

4. The polishing solution recycling device according to claim 3, wherein the two sides of the side frame (11) are provided with slots, the outer wall of the filtering bin (8) is provided with sealing strips, and the sealing strips are matched with the corresponding slots.

5. The polishing solution recycling device as claimed in claim 4, wherein the end cap (4) is provided with a driving motor (3) at the upper center thereof for driving the central shaft (9) to rotate.