CN210367999U - Simple device for drawing tubular material - Google Patents
Simple device for drawing tubular material Download PDFInfo
- Publication number
- CN210367999U CN210367999U CN201921040160.3U CN201921040160U CN210367999U CN 210367999 U CN210367999 U CN 210367999U CN 201921040160 U CN201921040160 U CN 201921040160U CN 210367999 U CN210367999 U CN 210367999U
- Authority
- CN
- China
- Prior art keywords
- crucible
- auxiliary heating
- heating hole
- heater
- tubular material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
A simple device for drawing tubular material relates to the technical field of new material, the utility model sets an auxiliary heating hole A (7.2) at the middle part of a crucible (7), an external heater (5) is arranged at the outer part of the crucible, when the external heater heats the outer ring of the crucible in work, heat can enter the middle part of the crucible through the auxiliary heating hole A, thereby realizing the simultaneous heating of the inner ring and the outer ring of the crucible, the temperature gradient control of the crucible is simpler and more convenient, namely the temperature of the inner ring and the outer ring of the crucible is high, the temperature of the crystal pulling part at the upper part of the crucible is low, thereby forming the temperature gradient capable of growing the tubular material, when the material placed in the crucible is melted, the tubular seed crystal arranged on a seed crystal seat is inserted into the crucible and is contacted with the melt in the crucible to realize the drawing of the tubular material, the utility model has the characteristics of simple operation, high production efficiency, is particularly suitable for wide-range popularization and application.
Description
[ technical field ] A method for producing a semiconductor device
The utility model relates to a new material technical field, concretely relates to simple and easy device of drawing tubular material.
[ background of the invention ]
The new material industry has the characteristics of high technology density, high research and development investment, high added value of products, strong international property of production and market, wide application range, good development prospect and the like, the research and development level and the industrialization scale of the new material industry become important marks for measuring national economy, social development, scientific and technological progress and national defense strength, and all countries in the world, particularly developed countries, pay attention to the development of the new material industry. Taking a target as an example, a sputtering coating process based on the physical vapor deposition principle is widely applied to the technical fields of liquid crystal display equipment, solar cells, solar vacuum tubes, semiconductor chips and the like; the rotary target is a commonly used coating material in the sputtering coating process, generally consists of a tubular metal base material and a coating material layer, and is normally prepared by directly spraying the coating material layer after surface cleaning or sand blowing is carried out on the outer surface of the tubular metal base material.
The other process is to draw a hollow pipe material on a complete ingot or bar-shaped material by using a material drawing device and then bind the pipe material on a tubular metal base material, and the process has the defects of low production efficiency, high production cost, small pipe material length and the like, and cannot be popularized and applied in a large range, so that how to provide the device for drawing the tubular material becomes a long-term technical appeal for technical personnel in the field.
[ summary of the invention ]
In view of the not enough of existence among the background art, the utility model discloses a simple and easy device of drawing tubular material, the utility model discloses a set up auxiliary heating hole A at the middle part of crucible, set up the outer heater in the outside of crucible, the during operation outer heater is when heating the crucible outer lane, the heat can also get into the middle part of crucible through auxiliary heating hole A, and then realize the simultaneous heating of crucible inner and outer lane, the temperature gradient control that makes the crucible is more simple convenient, after the material of placing in the crucible melts, the tubular seed crystal of setting on the seed crystal seat inserts in the crucible and realizes the drawing of tubular material with the interior solution contact of crucible, the utility model has the advantages of easy operation, production efficiency is high, with low costs.
In order to achieve the purpose of the invention, the utility model adopts the following technical scheme:
the simple device for drawing the tubular material comprises a seed crystal seat, an external heater and a crucible, wherein an upright column A extending upwards is arranged in the middle of the crucible, an auxiliary heating hole A is formed in the middle of the upright column A, the external heater is sleeved on the periphery of the outer edge surface of the crucible and connected with a power supply, the seed crystal seat is arranged above the upright column A, the upper end of the seed crystal seat is connected with an upper shaft, and the lower end of the seed crystal seat is provided with a tubular seed crystal to form the simple device for drawing the tubular material.
The simple device for drawing the tubular material is characterized in that an inner heater A is arranged in the auxiliary heating hole A.
The simple device for drawing the tubular material is characterized in that at least one upright column B is arranged on the periphery of the upright column A, an auxiliary heating hole B is arranged in the middle of each upright column B, a seed crystal seat is arranged above each upright column B, and the upper end of each seed crystal seat is connected with an upper shaft.
The simple device for drawing the tubular material is characterized in that an inner heater B is arranged in the auxiliary heating hole B.
The simple device for drawing the tubular material comprises a crucible, a heating device and a control device, wherein the crucible comprises a vertical column A and an auxiliary heating hole A; the crucible body is of a circular structure, the melt tank is arranged in the middle of the crucible body and is sunken downwards, the upright post A extending upwards is arranged in the middle of the melt tank, and the auxiliary heating hole A is formed in the middle of the upright post A.
The simple device for drawing the tubular material is characterized in that the crucible replacement structure comprises a crucible body, an auxiliary heating hole A, a molten liquid groove, an auxiliary heating hole B and a crucible column B, the crucible body is of a circular structure, the molten liquid groove which is sunken downwards is arranged in the middle of the crucible body, the upright column A which extends upwards is arranged in the middle of the molten liquid groove, the auxiliary heating hole A is arranged in the middle of the upright column A, at least one upright column B is arranged on the periphery of the upright column A, and the auxiliary heating hole B is arranged in the middle of each upright column B.
According to the simple device for drawing the tubular material, the distance between the outer edge surface of the inner heater A and the inner edge surface of the auxiliary heating hole A is 5-30 mm.
According to the simple device for drawing the tubular material, the distance between the inner edge surface of the outer heater and the outer edge surface of the crucible is 5-30 mm.
According to the simple device for drawing the tubular material, the distance between the outer edge surface of the inner heater B and the inner edge surface of the auxiliary heating hole B is 5-30 mm.
The simple device for drawing the tubular material is characterized in that a bottom heater is arranged at the lower part of the crucible.
Due to the adoption of the technical scheme, the utility model discloses following beneficial effect has:
the utility model arranges the upright post A in the middle of the crucible, arranges the auxiliary heating hole A on the upright post A, the external heater is arranged outside the crucible, when the external heater heats the outer ring of the crucible during working, heat can enter the middle part of the crucible through the auxiliary heating hole A, thereby realizing the simultaneous heating of the inner and outer rings of the crucible, leading the temperature gradient control of the crucible to be simpler and more convenient, namely, the temperature of the inner ring and the outer ring of the crucible is high, so that the temperature of the crystal pulling part at the upper part of the crucible is low, thereby forming the temperature gradient capable of growing the tubular material, after the material placed in the crucible melts, the tubular seed crystal arranged on the seed crystal seat is inserted into the crucible and contacts with the melt in the crucible to realize the drawing of the tubular material, the utility model has the characteristics of simple operation, high production efficiency, low cost, reasonable structural design and the like, and is particularly suitable for popularization and application on a large scale.
[ description of the drawings ]
Fig. 1 is a simple structure diagram of the present invention;
fig. 2 is a schematic top view of the present invention;
FIG. 3 is a schematic structural view of a crucible in the present invention;
FIG. 4 is a schematic view of an alternative structure of the crucible of the present invention;
FIG. 5 is a schematic view of the crucible replacement structure according to the present invention;
fig. 6 is a schematic top view of the present invention shown in fig. 5;
in the figure: 1. an upper shaft; 2. a seed crystal base; 3. tubular seed crystals; 4. a tubular material; 5. an external heater; 6. an internal heater A; 7. a crucible; 7.1, upright A; 7.2, an auxiliary heating hole A; 7.3, a molten liquid groove; 7.4, a crucible body; 7.5, an auxiliary heating hole B; 7.6, column B; 8. the internal heater A is supported by a seat; 9. an external heater support base; 10. an internal heater B; 11. the internal heater B is supported by the base.
[ detailed description ] embodiments
The present invention can be explained in more detail with reference to the following examples; however, the present invention is not limited to these examples.
It should be noted that the directions and positional relationships indicated by "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc. used in describing the structure of the present invention are only for convenience of description and simplification of description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and thus, should not be construed as limiting the present invention.
The simple device for drawing tubular materials described with reference to fig. 1-6 comprises a seed crystal seat 2, an external heater 5 and a crucible 7, wherein the crucible 7 is arranged on a support seat of a lower shaft, an upright post a7.1 extending upwards is arranged in the middle of the crucible 7, an auxiliary heating hole a7.2 for auxiliary heating is arranged in the middle of the upright post a7.1, and in specific implementation, when the external heater 5 heats the outside of the crucible 7, heat can enter the middle of the crucible 7 through the auxiliary heating hole a7.2, so that the inner and outer rings of the crucible 7 can be uniformly heated; further, in order to improve the effects of uniform heating and temperature gradient, an inner heater a6 can be arranged in the auxiliary heating hole a7.2, an inner heater a support seat 8 is arranged at the lower end of the inner heater a6, and the crucible 7 is heated by the inner heater a6 and the outer heater 5 at the same time, so that the temperature of each part of the crucible 7 can be controlled more accurately; the outer heater 5 is sleeved on the periphery of the outer edge surface of the crucible 7, the lower end of the outer heater 5 is provided with an outer heater supporting seat 9, the outer heater 5 is connected with a power supply, the power supply is controlled by a control system, the power supply and the control system are not the key points protected by the utility model, and the power supply and the control system can also purchase standard equipment commonly used on the market, so the structure of the seed crystal seat is not described in detail in order to save examination resources, the seed crystal seat 2 is arranged above the upright post A7.1, in the concrete implementation, the seed crystal seat 2 can be concentrically arranged with the upright post A7.1, so that the tubular material can be conveniently drawn, the upper end of the seed crystal seat 2 is connected with an upper shaft 1, the upper shaft can do rotary motion, the upper shaft is connected with an upper shaft control mechanism, the upper shaft control mechanism is not the key point protected by the utility model, and the concrete structure can also be directly realized by the existing technical scheme, therefore, without being described in detail herein, a tubular seed crystal 3 is provided at the lower end of the seed holder 2 to form the simple means for pulling the tubular material.
Further, in order to make the utility model discloses once can draw many root canal form material simultaneously, can stand A7.1's periphery is equipped with at least one stand B7.6, specifically as shown in fig. 4, is equipped with supplementary heating hole B7.5 respectively at every stand B7.6's middle part, is equipped with seed crystal seat 2 respectively in every stand B7.6's top, and every seed crystal seat 2 sets up with corresponding stand B7.6 is concentric respectively, and upper shaft 1 is connected respectively to every seed crystal seat 2's upper end. In the implementation, an inner heater B10 can be arranged in the auxiliary heating hole B7.5, and the lower part of the inner heater B10 is provided with an inner heater B supporting seat 11, so that the purposes of ensuring the heating uniformity of each part of the crucible 7 and realizing the temperature gradient can be effectively achieved.
Further, in practical implementation, a bottom heater may be disposed at the lower portion of the crucible 7, so as to make the temperature gradient of the crucible 7 more obvious, and the bottom heater may be configured in a planar structure and have an outer shape consistent with the shape of the crucible 7, that is, the bottom heater and the external heater are matched together to form a barrel-shaped structure, but the bottom heater and the external heater are not in actual contact.
Further, the crucible 7 comprises a column A7.1 and an auxiliary heating hole A7.2; the crucible comprises a melt tank 7.3 and a crucible body 7.4, wherein the crucible body 7.4 is of a circular structure, the melt tank 7.3 which is sunken downwards is arranged in the middle of the crucible body 7.4, crushed materials are arranged in the melt tank 7.3, an upright post A7.1 which extends upwards is arranged in the middle of the melt tank 7.3, and an auxiliary heating hole A7.2 is arranged in the middle of the upright post A7.1.
Further, the crucible 7 has an alternative structure that the crucible 7 comprises a column A7.1 and an auxiliary heating hole A7.2; the crucible comprises a molten liquid groove 7.3, a crucible body 7.4, auxiliary heating holes B7.5 and upright columns B7.6, wherein the crucible body 7.4 is of a circular structure, the molten liquid groove 7.3 which is sunken downwards is arranged in the middle of the crucible body 7.4, the upright columns A7.1 which extend upwards are arranged in the middle of the molten liquid groove 7.3, the auxiliary heating holes A7.2 are arranged in the middle of the upright columns A7.1, at least one upright column B7.6 is arranged on the periphery of the upright columns A7.1, and the auxiliary heating holes B7.5 are respectively arranged in the middle of each upright column B7.6.
Further, the distance between the outer edge surface of the inner heater A6 and the inner edge surface of the auxiliary heating hole A7.2 is 5-30 mm. The distance between the inner edge surface of the outer heater 5 and the outer edge surface of the crucible 7 is 5-30 mm. The distance between the outer edge surface of the inner heater B10 and the inner edge surface of the auxiliary heating hole B7.5 is 5-30 mm.
The utility model discloses when specifically using, the complete equipment sets up in inclosed furnace chamber, and the concrete structure of furnace chamber directly can choose current furnace chamber structure for use to technical personnel in the field, and it is not the utility model discloses the key of protection, the event does not tired out the description to the structure of furnace chamber and other supporting devices and the concrete structure of mechanism that use.
The specific application method of the utility model takes drawing the polysilicon tube as an example, firstly, the cleaned polysilicon crushed aggregates are added into the melt tank 7.3 of the crucible 7, the vacuum pump is started to pump the furnace chamber to the required vacuum degree, argon flows, meanwhile, the external heater 5 is started to heat up, so that the crushed polysilicon in the molten bath 7.3 reaches a molten state, the temperature of the molten liquid is reduced, after reaching a proper crystal pulling temperature, the upper shaft 1 is descended to cause the tubular seed crystal 3 to descend to the upper surface of the melt to cause the lower end surface of the tubular seed crystal 3 to be contacted with the upper surface of the melt, at the moment, the upper shaft 1 drives the tubular seed crystal 3 to rotate, when the lower end surface of the tubular seed crystal 3 is integrated with the melt, the upper shaft 1 is slowly lifted, the tubular seed crystal 3 drives the melt to rise, during the rise, the melt is recrystallized to form a new tubular material 4 as the temperature decreases, thereby drawing the tubular material 4. In order to make the heating temperature uniform and to make the temperature of the lower portion of the crucible higher than the temperature of the upper portion thereof (i.e., to make the temperature gradient of the upper portion lower and higher) at the time of drawing, an inner heater a6 may be provided in the auxiliary heating hole a7.2, and the inner heater a6 may be used to heat the crucible 7 simultaneously with the outer heater 5.
When a plurality of tubular materials 4 need to be drawn simultaneously, the outer heater 5, the inner heater A6 and the inner heater B10 are started simultaneously, the crucible 7 is heated simultaneously through the outer heater 5, the inner heater A6 and the inner heater B10, and the purposes of uniform heating and temperature gradient of the crucible 7 are achieved.
The details of the above are not described in detail since they are prior art.
The embodiments selected for the purpose of disclosing the invention, are presently considered to be suitable, it being understood, however, that the invention is intended to cover all variations and modifications of the embodiments, which fall within the scope of the concept and invention.
Claims (10)
1. A simple device for drawing tubular materials comprises a seed crystal seat (2), an external heater (5) and a crucible (7), and is characterized in that: be equipped with upright A (7.1) that upwards extends in the middle part of crucible (7) the middle part of upright A (7.1) is equipped with auxiliary heating hole A (7.2), has cup jointed outer heater (5) in the periphery of crucible (7) outer fringe face, outer heater (5) are connected the power, are equipped with seed crystal seat (2) in the top of upright A (7.1), upper shaft (1) is connected to the upper end of seed crystal seat (2), are equipped with tubular seed crystal (3) formation at the lower extreme of seed crystal seat (2) the simple and easy device of drawing tubular material.
2. A simple apparatus for drawing tubular material as claimed in claim 1, wherein: an inner heater A (6) is arranged in the auxiliary heating hole A (7.2).
3. A simple apparatus for drawing tubular material as claimed in claim 1, wherein: the periphery of the upright column A (7.1) is provided with at least one upright column B (7.6), the middle part of each upright column B (7.6) is provided with an auxiliary heating hole B (7.5), the upper part of each upright column B (7.6) is provided with a seed crystal seat (2), and the upper end of each seed crystal seat (2) is connected with the upper shaft (1) respectively.
4. A simple apparatus for drawing tubular material as claimed in claim 3, wherein: an inner heater B (10) is arranged in the auxiliary heating hole B (7.5).
5. A simple apparatus for drawing tubular material as claimed in claim 1, wherein: the crucible (7) comprises an upright column A (7.1) and an auxiliary heating hole A (7.2); melt groove (7.3) and crucible body (7.4), crucible body (7.4) are circular structure, are equipped with undercut melt groove (7.3) in the middle part of crucible body (7.4), are equipped with upright A (7.1) that upwards extends in the middle part of melt groove (7.3) the middle part of upright A (7.1) is equipped with supplementary heating hole A (7.2).
6. A simple apparatus for drawing tubular material as claimed in claim 1, wherein: the replacement structure of crucible (7) is that crucible (7) includes stand A (7.1), auxiliary heating hole A (7.2), melt groove (7.3), crucible body (7.4), auxiliary heating hole B (7.5) and stand B (7.6), crucible body (7.4) are circular structure, are equipped with undercut melt groove (7.3) in the middle part of crucible body (7.4), are equipped with stand A (7.1) of upwards extending in the middle part of melt groove (7.3) the middle part of stand A (7.1) is equipped with auxiliary heating hole A (7.2), is equipped with at least one stand B (7.6) in the periphery of stand A (7.1), is equipped with auxiliary heating hole B (7.5) respectively in the middle part of every stand B (7.6).
7. A simple apparatus for drawing tubular material as claimed in claim 2, wherein: the distance between the outer edge surface of the inner heater A (6) and the inner edge surface of the auxiliary heating hole A (7.2) is 5-30 mm.
8. A simple apparatus for drawing tubular material as claimed in claim 1, wherein: the distance between the inner edge surface of the outer heater (5) and the outer edge surface of the crucible (7) is 5-30 mm.
9. A simple apparatus for drawing tubular material as claimed in claim 4, wherein: the distance between the outer edge surface of the inner heater B (10) and the inner edge surface of the auxiliary heating hole B (7.5) is 5-30 mm.
10. A simple apparatus for drawing tubular material as claimed in claim 1, wherein: the lower part of the crucible (7) is provided with a bottom heater.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921040160.3U CN210367999U (en) | 2019-06-27 | 2019-06-27 | Simple device for drawing tubular material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921040160.3U CN210367999U (en) | 2019-06-27 | 2019-06-27 | Simple device for drawing tubular material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210367999U true CN210367999U (en) | 2020-04-21 |
Family
ID=70269449
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921040160.3U Active CN210367999U (en) | 2019-06-27 | 2019-06-27 | Simple device for drawing tubular material |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210367999U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110219041A (en) * | 2019-06-27 | 2019-09-10 | 郭李梁 | A kind of easy device drawing tubular material |
-
2019
- 2019-06-27 CN CN201921040160.3U patent/CN210367999U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110219041A (en) * | 2019-06-27 | 2019-09-10 | 郭李梁 | A kind of easy device drawing tubular material |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101805925B (en) | Gallium and indium doped single crystal silicon material for solar battery and preparation method thereof | |
| CN202208779U (en) | Ingot furnace | |
| CN210367999U (en) | Simple device for drawing tubular material | |
| CN104328492A (en) | Device for moving small insulating plate at bottom of polycrystalline silicon ingot furnace and polycrystalline silicon ingot furnace | |
| CN110685011A (en) | Intelligent processing equipment for producing single-product silicon thermal field crucible and processing method thereof | |
| CN105951169B (en) | A kind of big gradient visualization tubular type monocrystal growing furnace | |
| CN210560872U (en) | Device for drawing cylindrical material | |
| CN102433585B (en) | Thermal field structure of quasi-monocrystal ingot furnace | |
| CN105112990B (en) | A kind of method of the special-shaped nearly device frequency-doubling crystal of micro- drop-down oriented growth | |
| CN110195253A (en) | It is a kind of for drawing the device and its drawing method of cylindrical material | |
| CN110670121B (en) | Locally coated quartz crucible and manufacturing method thereof | |
| CN212713842U (en) | Heating device for preparing tubular crystal material | |
| CN212895080U (en) | Crucible for preparing tubular crystal material | |
| CN110219041A (en) | A kind of easy device drawing tubular material | |
| CN212895081U (en) | Crucible for preparing tubular crystal material | |
| CN217173945U (en) | Silicon carbide crystal growth device | |
| CN103628129A (en) | Graphite heater used for Czochralski method preparation of monocrystalline silicon | |
| CN111472043A (en) | Heating device for preparing tubular crystal material | |
| CN212669852U (en) | Crucible for drawing tubular crystal | |
| CN210359161U (en) | Device for drawing tubular material | |
| CN207638621U (en) | A kind of device of monitoring polycrystalline PERC solar cells decaying | |
| CN203795016U (en) | Polysilicon ingot casting furnace jacketing heat insulation cage | |
| CN202297861U (en) | Single-crystal furnace thermal field heater | |
| CN205774917U (en) | Ge mono crystal growth stove | |
| CN207775389U (en) | Ingot furnace |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200616 Address after: 471000 Meilun Xiangsong 26-1-703, Jiudu West Road, Luoyang High-tech Development Zone, Henan Province Patentee after: Liu Jianjun Address before: 471000 Heluo Road Flourishing City, Luoyang High-tech Development Zone, Henan Province, 9-1404 Patentee before: Guo Liliang |