CN219653186U - Crystal pulling thermal field structure of single crystal furnace and single crystal furnace - Google Patents
Crystal pulling thermal field structure of single crystal furnace and single crystal furnace Download PDFInfo
- Publication number
- CN219653186U CN219653186U CN202321220004.1U CN202321220004U CN219653186U CN 219653186 U CN219653186 U CN 219653186U CN 202321220004 U CN202321220004 U CN 202321220004U CN 219653186 U CN219653186 U CN 219653186U
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- cooling screen
- guide cylinder
- single crystal
- field structure
- thermal field
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- 239000013078 crystal Substances 0.000 title claims abstract description 82
- 238000001816 cooling Methods 0.000 claims abstract description 67
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 52
- 238000004321 preservation Methods 0.000 claims abstract description 18
- 238000007789 sealing Methods 0.000 claims abstract description 6
- 239000000463 material Substances 0.000 claims description 14
- 239000012774 insulation material Substances 0.000 abstract description 15
- 238000000034 method Methods 0.000 abstract description 12
- 239000011810 insulating material Substances 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
Abstract
The utility model discloses a crystal pulling thermal field structure of a single crystal furnace, which comprises a water cooling screen and a guide cylinder, wherein the guide cylinder is sleeved on the outer side of the water cooling screen, the guide cylinder comprises a heat insulation material layer and an outer guide cylinder, the heat insulation material layer is wrapped on the outer side of the water cooling screen, the outer guide cylinder is wrapped on the outer side of the heat insulation material layer, a supporting ring sleeve is arranged between the bottom end of the water cooling screen and the bottom of the outer guide cylinder, and the supporting ring sleeve is used for sealing the bottom of the heat insulation material layer between the water cooling screen and the outer guide cylinder. The crystal pulling thermal field structure of the single crystal furnace improves the heat preservation performance of the guide cylinder, reduces the heat taken away from the furnace by the water cooling screen, has a certain screen opening distance, improves the wildcard of the crystal pulling process, and improves the yield. The utility model also provides a single crystal furnace.
Description
Technical Field
The utility model relates to the technical field of monocrystalline silicon production, in particular to a crystal pulling thermal field structure of a monocrystalline furnace with a fixed screen opening distance.
Background
In the prior art, as shown in fig. 1, an inner guide cylinder 02 is used for isolation protection in order to prevent a guide cylinder high-efficiency felt 04 from falling into a crucible to influence crystal pulling. The installation of the inner guide cylinder 02 not only increases the purchase cost, but also occupies space, so that the number of layers of the guide cylinder high-efficiency felt 04 is reduced, and the heat preservation of the guide cylinder is poor, thereby increasing the heat taken away from the furnace by the water cooling screen 03 and increasing the energy consumption. The screen opening distance is the distance from the lower edge of the water cooling screen 03 to the lower end of the outer guide cylinder 01. Meanwhile, when the inner guide cylinder 02 is installed, due to inconsistent personnel operation methods, the descending height of the water cooling screen 03 is different during crystal pulling, so that the screen opening distance of each furnace platform is deviated, the size of the screen opening distance can influence the crystal pulling speed, the smaller the screen opening distance is, the closer the water cooling screen 04 is to the liquid level, the higher the pulling speed is, otherwise, the lower the pulling speed is, the inconsistent pulling speed is caused during the crystal pulling process of each furnace platform, the general coordination of the crystal pulling process is reduced, and the yield is influenced.
Disclosure of Invention
In view of the above, the utility model provides a crystal pulling thermal field structure of a single crystal furnace, which improves the heat preservation performance of the guide cylinder, reduces the heat taken away from the furnace by the water cooling screen, has a certain screen opening distance, improves the wildness of the crystal pulling process, and improves the yield.
The utility model also provides a single crystal furnace.
In order to achieve the above purpose, the present utility model provides the following technical solutions:
the utility model provides a crystal pulling thermal field structure of single crystal furnace, includes water-cooling screen and draft tube, the draft tube cover is established the outside of water-cooling screen, the draft tube includes heat preservation material layer and outer draft tube, the heat preservation material layer parcel is in the outside of water-cooling screen, outer draft tube package is established the heat preservation material layer outside, the bottom of water-cooling screen with be provided with the supporting ring cover between the bottom of outer draft tube, the supporting ring cover is used for sealing water-cooling screen with outer draft tube between the bottom of heat preservation material layer.
Optionally, a supporting platform is arranged at the bottom end of the outer guide cylinder, a first limiting ring groove is formed in the surface, close to the water cooling screen, of the supporting platform, and the bottom end of the supporting ring sleeve is placed at the position of the first limiting ring groove.
Optionally, a second limiting ring groove is formed in the bottom end of the water cooling screen, and the top end of the supporting ring sleeve is placed at the position of the second limiting ring groove.
Optionally, the outer diameter of the lower end of the support ring is larger than the outer diameter of the upper end of the support ring.
Optionally, the cross section of the supporting ring sleeve comprises an inner side surface, an upper top surface, an outer side surface and a lower bottom surface which are sequentially arranged, wherein the upper top surface is close to the water cooling screen, and the lower bottom surface is close to the outer guide cylinder;
the inner side surface of the support ring sleeve is an inclined conical surface, and the diameter of one end of the inner side surface of the support ring sleeve, which is close to the water cooling screen, is larger than that of one end of the support ring sleeve, which is close to the outer guide cylinder.
Optionally, the outer side surface comprises a first side surface section, a second side surface section and a third side surface section which are sequentially arranged, the first side surface section is arranged close to the upper top surface, and the third side surface section is arranged close to the lower bottom surface;
the first side section and the third side section are cylindrical surfaces, and the second side section is an inclined surface connected between the first side section and the third side section.
Optionally, the diameter of the first side section is smaller than the diameter of the third side section.
Optionally, the top of draft tube passes through the adjustable connection pendant of length and connects on the water-cooling screen.
Optionally, the connecting pendant comprises a connecting bolt, a supporting arm and an adjusting nut, the supporting arm comprises a supporting head end and a supporting rod end which are integrally arranged, the supporting head end is axially provided with an internal threaded hole, and the supporting rod end is an external threaded rod;
the connecting bolt penetrates through a connecting through hole in the guide cylinder, the tail end of the rod part of the connecting bolt is in threaded connection with the inner threaded hole of the support head end, and the support rod end is connected to the water cooling screen through an adjusting nut.
According to the technical scheme, the crystal pulling thermal field structure of the single crystal furnace provided by the utility model has the advantages that the guide cylinder comprises the heat insulation material layer and the outer guide cylinder, and the inner guide cylinder is not arranged, so that the space between the outer guide cylinder and the water cooling screen is saved, the laying layer number of the heat insulation material layer is increased, the heat insulation performance of the guide cylinder is improved, and the heat taken away from the furnace by the water cooling screen is reduced. The support ring sleeve is arranged between the bottom end of the water cooling screen and the bottom of the outer guide cylinder, so that the bottom position of the space between the outer guide cylinder and the water cooling screen is closed, the leakage of the heat insulation material layer is avoided, the distance between the bottom end of the water cooling screen and the bottom end of the outer guide cylinder is ensured, the screen opening distance is constant, the screen opening distance value is determined by the height of the support ring sleeve, the gap between the screen opening distance values caused by inconsistent operating methods of operators is avoided, the crystal pulling speed in the crystal pulling process of each furnace table is consistent, the wildly matching of the crystal pulling process is improved, and the crystal pulling yield is improved.
The utility model also provides a single crystal furnace, which comprises a crystal pulling thermal field structure, wherein the crystal pulling thermal field structure is the crystal pulling thermal field structure of the single crystal furnace.
Drawings
In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a prior art crystal pulling thermal field structure of a single crystal furnace;
FIG. 2 is a schematic structural diagram of a crystal pulling thermal field structure of a single crystal furnace according to an embodiment of the present utility model;
FIG. 3 is a schematic view of a part of the enlarged structure of the portion A in FIG. 2;
FIG. 4 is a schematic view of a support ring according to an embodiment of the present utility model;
FIG. 5 is a schematic cross-sectional view of a support collar at position B-B according to an embodiment of the present utility model;
FIG. 6 is an enlarged schematic view of the cross-section of the support collar of FIG. 5;
FIG. 7 is an enlarged view of the first limiting ring groove at the bottom of the outer guide shell according to the embodiment of the present utility model;
FIG. 8 is a schematic cross-sectional view of a water-cooled screen according to an embodiment of the present utility model;
fig. 9 is a partially enlarged schematic view of the portion C in fig. 8;
fig. 10 is a schematic cross-sectional view of a connecting hanger according to an embodiment of the present utility model.
Wherein:
01. an outer guide cylinder, 02, an inner guide cylinder, 03, a water cooling screen, 04 and a guide cylinder high-efficiency felt,
1. an outer guide shell is arranged on the inner side of the outer guide shell,
101. barrel 102, first limit ring groove 1021, groove side 1022, groove bottom,
2. the supporting ring is sleeved with the supporting ring,
201. an inner side, 202, an upper top, 203, a first side section, 204, a second side section, 205, a third side section, 206, a lower bottom,
3. a water-cooling screen, wherein the water-cooling screen is provided with a water-cooling cavity,
301. a second limit ring groove is arranged on the inner side of the first limit ring groove,
4. a heat-insulating material layer is arranged on the surface of the heat-insulating material layer,
5. a connecting hanging piece 501, an adjusting nut 502, a supporting arm 503, a connecting bolt,
6. and (3) a crystal bar.
Detailed Description
The utility model discloses a crystal pulling thermal field structure of a single crystal furnace, which improves the heat preservation performance of a guide cylinder, reduces the heat taken away from the furnace by a water cooling screen, has a certain screen opening distance, improves the wildcard property of a crystal pulling process and improves the yield.
The utility model also discloses a single crystal furnace.
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 2 to 10, the crystal pulling thermal field structure of the single crystal furnace comprises a water cooling screen 3 and a guide cylinder, wherein the guide cylinder is sleeved outside the water cooling screen 3. The guide cylinder comprises a heat preservation material layer 4 and an outer guide cylinder 1, wherein the heat preservation material layer 4 is wrapped on the outer side of the water cooling screen 3, the outer guide cylinder 1 is wrapped on the outer side of the heat preservation material layer 4, a support ring sleeve 2 is arranged between the bottom end of the water cooling screen 3 and the bottom of the outer guide cylinder 1, and the support ring sleeve 2 is used for sealing the bottom of the heat preservation material layer 4 between the water cooling screen 3 and the outer guide cylinder 1.
Wherein, the heat preservation material layer 4 comprises a plurality of graphite soft felt layers which are overlapped. The guide cylinder is sleeved in the furnace body of the single crystal furnace. The water cooling screen 3 is internally provided with a crystal bar 6, and the crystal bar 6 is arranged in the axial cavity of the water cooling screen 3 in a penetrating way. The provision of the layer of insulating material 4 prevents the water-cooled screen 3 from taking excessive heat away from the furnace. The water cooling screen 3 mainly takes away the heat of the crystal bar 6 and the heat of the liquid surface to improve the power of crystal growth of the crystal bar 6 and achieve the purpose of pulling speed. The heat insulation material layer 4 of the guide cylinder is used for preventing the water cooling screen 3 from taking heat away from the furnace.
According to the crystal pulling thermal field structure of the single crystal furnace, the guide cylinder comprises the heat insulation material layer 4 and the outer guide cylinder 1, and the inner guide cylinder 02 is not arranged, so that the space between the outer guide cylinder 1 and the water cooling screen 3 is saved, the laying layer number of the heat insulation material layer 4 is increased, the heat insulation performance of the guide cylinder is improved, and the heat taken away from the furnace by the water cooling screen 3 is reduced. The support ring sleeve 2 is arranged between the bottom end of the water cooling screen 3 and the bottom of the outer guide cylinder 1, so that the bottom position of the space between the outer guide cylinder 1 and the water cooling screen 3 is closed, the leakage of the heat insulation material layer 4 is avoided, the distance between the bottom end of the water cooling screen 3 and the bottom end of the outer guide cylinder 1 is ensured, the screen opening distance is constant, the screen opening distance value is determined by the height of the support ring sleeve 2, the difference of the screen opening distance value caused by inconsistent operation methods of operators is avoided, the crystal pulling speed in the crystal pulling process of each hearth is consistent, the wildly of the crystal pulling process is improved, and the yield is improved.
In order to improve the support stability of the bottom of the support ring sleeve 2 and the reliability of sealing the heat insulation material layer 4, a support platform is arranged at the bottom end of the cylinder 101 of the outer guide cylinder 1, a first limit ring groove 102 is arranged on the surface of the support platform, which is close to the water cooling screen 3, as shown in fig. 3 and 7, the bottom end of the support ring sleeve 2 is placed on the bottom surface 1022 of the first limit ring groove 102, and the side surface 1021 of the first limit ring groove 102 and the side surface corresponding to the support ring sleeve 2 are arranged along with the shape.
In order to improve the support stability of the top of the support ring sleeve 2 and the reliability of sealing the heat insulation material layer 4, the bottom end of the water cooling screen 3 is provided with a second limit ring groove 301, and as shown in fig. 3, 8 and 9, the top end of the support ring sleeve 2 is placed at the position of the second limit ring groove 301. By embedding the top end of the supporting ring sleeve 2 into the second limiting ring groove 301 and the bottom end into the first limiting ring groove 102, the stability of the supporting position of the supporting ring sleeve 2 can be improved, and leakage of the heat insulation material layer 4 from the supporting contact surface position can be avoided. It will be appreciated that the outer diameter of the lower end of the support collar 2 is greater than the outer diameter of the upper end of the support collar 2, thereby improving the stability of the placement of the support collar 2.
Specifically, as shown in fig. 4 to 6, the cross section of the support ring 2 includes an inner side 201, an upper top 202, an outer side and a lower bottom 206, which are sequentially disposed, the upper top 202 is disposed near the water cooling screen 3, and the lower bottom 206 is disposed near the outer guide shell 1. The upper top surface 202 contacts the bottom surface of the second retaining ring groove 301 and the lower bottom surface 206 contacts the bottom surface 1022 of the first retaining ring groove 102.
Further, the inner side surface 201 of the support ring sleeve 2 is an inclined conical surface, and the diameter of one end, close to the water cooling screen 3, of the inner side surface 201 of the support ring sleeve 2 is larger than that of one end, close to the outer guide cylinder 1, so that the side surface of the inner cavity of the support ring sleeve 2 is a conical surface with a large upper part and a small lower part.
In an embodiment, the outer side surface includes a first side surface section 203, a second side surface section 204, and a third side surface section 205 sequentially disposed, the first side surface section 203 is disposed near the upper top surface 202, the third side surface section 205 is disposed near the lower bottom surface 206, and the second side surface section 204 is connected between the first side surface section 203 and the third side surface section 205. The first side section 203 and the third side section 205 are cylindrical surfaces and the second side section 204 is a bevel surface connected between the first side section 203 and the third side section 205. Wherein the diameter of the first side section 203 is smaller than that of the third side section 205, as shown in fig. 6, so as to improve the support stability and the support strength of the support ring 2 near the bottom end.
The top of the guide cylinder is connected to the water cooling screen 3 through a connecting hanger 5 with adjustable length, as shown in fig. 2. Thereby guarantee the top of support ring cover 2 imbeds in the second spacing annular 301 of water-cooling screen 3, simultaneously with the tank bottom contact of second spacing annular 301, realize the purpose of fixed screen mouth spacing.
In an embodiment, the connection hanging piece 5 comprises a connection bolt 503, a support arm 502 and an adjusting nut 501, as shown in fig. 10, the support arm 502 comprises a support head end and a support rod end which are integrally arranged, the support head end is provided with an internal threaded hole along the axial direction, and the support rod end is an external threaded rod. The connecting bolt 503 is arranged in the connecting through hole on the guide cylinder in a penetrating way, the tail end of the rod part of the connecting bolt 503 is in threaded connection with the inner threaded hole of the support head end, and the support rod end is connected to the water cooling screen 3 through the adjusting nut 501, so that the guide cylinder is connected with the water cooling screen 3. The length of the supporting arm 502 is screwed in by adjusting the adjusting nut 501 on the connecting hanging piece 5, so that the top of the supporting ring sleeve 2 placed on the first limiting ring groove 102 is embedded into the second limiting ring groove 301 of the water cooling screen 3.
According to the crystal pulling thermal field structure of the single crystal furnace, the inner guide cylinder 02 is removed from the guide cylinder on the basis of the original structure, so that the space is saved, the number of layers of the heat insulation material layer 4 is increased, the heat insulation performance of the guide cylinder is improved, the heat taken away from the furnace by the water cooling screen 3 is reduced, the energy consumption is reduced, and the purchase cost of the inner guide cylinder 02 is saved. The support ring sleeve 2 is arranged to realize the fixed screen opening distance crystal pulling, and the heat preservation material layer 4 is not leaked, so that the process wild-type property is improved, and the yield is improved.
The utility model also provides a single crystal furnace, which comprises a crystal pulling thermal field structure, wherein the crystal pulling thermal field structure is the crystal pulling thermal field structure of the single crystal furnace.
In the description of the present embodiment, it should be understood that the directions or positional relationships indicated by the terms "upper", "lower", "vertical", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the apparatus or element in question must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present embodiment.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present embodiment, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
In the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other. The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present utility model. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the utility model. Thus, the present utility model is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. The utility model provides a crystal pulling thermal field structure of single crystal furnace, includes water-cooling screen and draft tube, the draft tube cover is established the outside of water-cooling screen, its characterized in that, the draft tube includes heat preservation material layer and outer draft tube, the heat preservation material layer parcel is in the outside of water-cooling screen, outer draft tube package is established the heat preservation material layer outside, the bottom of water-cooling screen with be provided with the support ring cover between the bottom of outer draft tube, the support ring cover is used for sealing the water-cooling screen with the bottom of heat preservation material layer between the outer draft tube.
2. The crystal pulling thermal field structure of a single crystal furnace according to claim 1, wherein a supporting platform is arranged at the bottom end of the outer guide cylinder, a first limiting ring groove is arranged on the surface, close to the water cooling screen, of the supporting platform, and the bottom end of the supporting ring sleeve is placed at the position of the first limiting ring groove.
3. The crystal pulling thermal field structure of the single crystal furnace according to claim 2, wherein a second limiting ring groove is formed in the bottom end of the water cooling screen, and the top end of the supporting ring sleeve is placed at the position of the second limiting ring groove.
4. A single crystal furnace pull thermal field structure according to any one of claims 1-3, wherein the outer diameter of the lower end of the support collar is greater than the outer diameter of the upper end of the support collar.
5. The crystal pulling thermal field structure of the single crystal furnace according to claim 1, wherein the cross section of the supporting ring sleeve comprises an inner side surface, an upper top surface, an outer side surface and a lower bottom surface which are sequentially arranged, the upper top surface is arranged close to the water cooling screen, and the lower bottom surface is arranged close to the outer guide cylinder;
the inner side surface of the support ring sleeve is an inclined conical surface, and the diameter of one end of the inner side surface of the support ring sleeve, which is close to the water cooling screen, is larger than that of one end of the support ring sleeve, which is close to the outer guide cylinder.
6. The single crystal furnace crystal pulling thermal field structure of claim 5, wherein the outer side comprises a first side section, a second side section and a third side section arranged in sequence, the first side section being arranged adjacent to the upper top surface, the third side section being arranged adjacent to the lower bottom surface;
the first side section and the third side section are cylindrical surfaces, and the second side section is an inclined surface connected between the first side section and the third side section.
7. The single crystal furnace pull thermal field structure of claim 6, wherein a diameter of the first side section is smaller than a diameter of the third side section.
8. The crystal pulling thermal field structure of claim 1, wherein the top of the guide cylinder is connected to the water cooling screen through a connecting hanger with adjustable length.
9. The crystal pulling thermal field structure of a single crystal furnace according to claim 8, wherein the connecting hanger comprises a connecting bolt, a supporting arm and an adjusting nut, the supporting arm comprises a supporting head end and a supporting rod end which are integrally arranged, the supporting head end is axially provided with an internal threaded hole, and the supporting rod end is an external threaded rod;
the connecting bolt penetrates through a connecting through hole in the guide cylinder, the tail end of the rod part of the connecting bolt is in threaded connection with the inner threaded hole of the support head end, and the support rod end is connected to the water cooling screen through an adjusting nut.
10. A single crystal furnace comprising a pull thermal field structure, wherein the pull thermal field structure is the single crystal furnace pull thermal field structure of any one of claims 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321220004.1U CN219653186U (en) | 2023-05-18 | 2023-05-18 | Crystal pulling thermal field structure of single crystal furnace and single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321220004.1U CN219653186U (en) | 2023-05-18 | 2023-05-18 | Crystal pulling thermal field structure of single crystal furnace and single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219653186U true CN219653186U (en) | 2023-09-08 |
Family
ID=87860070
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321220004.1U Active CN219653186U (en) | 2023-05-18 | 2023-05-18 | Crystal pulling thermal field structure of single crystal furnace and single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219653186U (en) |
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2023
- 2023-05-18 CN CN202321220004.1U patent/CN219653186U/en active Active
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