CN210087587U - Gas delivery device - Google Patents

Abstract

A gas delivery device, comprising: the air outlet cover plate is provided with an air outlet pipe and an air outlet convergence groove, and the air outlet pipe is communicated with the air outlet convergence groove and correspondingly arranged; a plurality of groups of flow guide seats; the gas pumps are correspondingly arranged in the concave grooves of the flow guide seats; when the gas pump is enabled to carry out gas transmission, gas is guided into the concave groove of each flow guide seat, and the gas is discharged from the gas outlet pipe sequentially through the communicating hole, the confluence chamber and the gas outlet confluence groove.

Description

Gas delivery device

[ technical field ] A method for producing a semiconductor device

The present invention relates to a gas delivery device, and more particularly, to a gas delivery device capable of increasing flow transmission.

[ background of the invention ]

At present, in all fields, no matter the industries such as medicine, computer science and technology, printing, energy and the like, products are developed towards refinement and miniaturization, wherein a gas conveying structure contained in a micropump is a key technology of the products, so that how to break through the technical bottleneck of the products by means of an innovative structure is an important content of development.

With the increasing development of technology, the applications of gas delivery devices are diversified, such as industrial applications, biomedical applications, medical care, electronic heat dissipation, etc., and even recently, the wearable devices are seen in the trace of the gas delivery devices, which means that the conventional gas delivery devices have been gradually developed toward the miniaturization and flow rate maximization of the devices.

In the prior art, the gas conveying device is mainly formed by stacking conventional mechanism components, and each mechanism component is minimized or thinned, so as to achieve the purpose of miniaturization and thinning of the whole device. However, after the conventional mechanism is miniaturized, the dimensional accuracy is difficult to control, and the assembly accuracy is also difficult to control, thereby causing problems of inconsistent product yield, unstable gas delivery flow, and the like.

Furthermore, the known gas delivery devices also have the problem of insufficient delivery flow, and it is still difficult to meet the requirement of large amount of gas delivery through a single gas delivery device. Therefore, how to develop a structure for improving flow transmission of a gas delivery device is a problem that needs to be solved urgently at present.

[ Utility model ] content

The main objective of the present disclosure is to provide a gas delivery device, which is provided with a plurality of miniaturized gas pumps arranged side by side to achieve the best gas transmission efficiency.

To achieve the above object, a gas delivery device according to a broader aspect of the present invention comprises: the air outlet cover plate is provided with an air outlet pipe and an air outlet convergence groove, and the air outlet pipe is communicated with the air outlet convergence groove and correspondingly arranged; a plurality of groups of flow guiding seats, each flow guiding seat is provided with a main board, a convex side frame and a frame body, the main board is provided with a concave groove and a communicating hole, and the communicating hole is communicated with the concave groove; and a plurality of groups of gas pumps which are correspondingly arranged in the concave groove of each flow guide seat;

when the gas pump is enabled to carry out gas transmission, gas is guided into the concave groove of each flow guide seat, and flows through the communication hole, the flow converging cavity and the gas outlet converging groove in sequence, and finally the gas is discharged from the gas outlet pipe.

[ description of the drawings ]

Fig. 1A is a schematic structural diagram of a gas delivery device according to a preferred embodiment of the present disclosure.

Fig. 1B is a disassembled schematic view of the structure of the gas conveying device according to the preferred embodiment of the present disclosure.

Fig. 2A is a schematic structural view of the air outlet cover plate shown in fig. 1B.

Fig. 2B is a schematic structural view of the air outlet cover plate shown in fig. 2A from another viewing angle.

Fig. 3A is a schematic structural view of the diversion seat shown in fig. 1B.

Fig. 3B is a schematic structural view of the diversion seat shown in fig. 3A from another viewing angle.

FIG. 4 is a schematic cross-sectional view A-A of the gas delivery device shown in FIG. 1A.

Fig. 5A is a disassembled view of the structure of the gas pump according to the preferred embodiment of the present invention.

Fig. 5B is a disassembled view of the gas pump of the preferred embodiment from another perspective.

Fig. 6 is a schematic cross-sectional view of the piezoelectric actuator shown in fig. 5A.

Fig. 7 is a schematic cross-sectional view of a gas pump according to a preferred embodiment of the present invention.

Fig. 8A to 8E are schematic operation structural diagrams of the gas pump according to the preferred embodiment of the present invention.

[ detailed description ] embodiments

Exemplary embodiments that embody features and advantages of this disclosure are described in detail below in the detailed description. It will be understood that the present disclosure is capable of various modifications without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.

The gas delivery device can be applied to various electronic devices or medical equipment and can improve flow transmission. Referring to fig. 1A and fig. 1B, the gas delivery device 1 of the present disclosure mainly includes a gas outlet cover plate 11, a plurality of sets of flow guiding seats 12, and a plurality of sets of gas pumps 14, wherein each gas pump 14 is correspondingly accommodated in the flow guide seat 12, the flow guide seats 12 are arranged in parallel in the horizontal direction, the gas outlet cover plate 11 is a cover cap to seal the flow guide seats 12, the gas pumps 14 are used for gas transmission, when a plurality of sets of gas pumps 14 simultaneously transmit gas, the gas is converged by the gas outlet cover plate 11, the flow guiding seat 12 and other elements, and finally is rapidly discharged from the gas outlet pipe 111 of the gas outlet cover plate 11, thereby achieving the effect of improving the gas transmission flow, for convenience of describing the technical content of the present application, the present embodiment is described by taking the number of the guide seat 12 and the gas pump 14 as two examples, and the detailed structure and the operation manner thereof will be further detailed in the later section of the description.

The number of the diversion seats 12 and the number of the gas pumps 14 correspond to each other, and if the number of the gas pumps 14 is three, the number of the diversion seats 12 is also three, but the number is not limited thereto, and can be changed arbitrarily according to actual situations. In addition, the size of the outlet cover plate 11 can also vary with the number of the flow guiding seats 12, so that the outlet cover plate 11 can be covered and sealed on a plurality of groups of flow guiding seats 12 for the transmission of gas confluence.

Referring to fig. 2A and 2B, the gas outlet cover plate 11 of the present embodiment includes a gas outlet pipe 111 and a gas outlet converging groove 114, wherein the gas outlet pipe 111 is correspondingly communicated with the gas outlet converging groove 114, the gas outlet pipe 111 includes a discharge opening 112, and the gas outlet converging groove 114 includes an inlet opening 113, the discharge opening 112 is disposed inside the gas outlet pipe 111 and is communicated with the inlet opening 113, a hole diameter of the inlet opening 113 is slightly larger than the discharge opening 112, and an inner diameter of the gas outlet pipe 111 is a taper shape which is gradually reduced from the inlet opening 113 to the discharge opening 112, but not limited thereto, through the arrangement of the taper shape, a significant converging effect is generated for the gas, and the converged gas can be rapidly transmitted through the gas outlet pipe 111.

Referring to fig. 3A and 3B, the structural features of the multiple sets of airflow guiding seats 12 are the same, and in order to avoid repeated descriptions, the following description will only be directed to the structural features of a single airflow guiding seat 12. The flow guiding seat 12 includes a main board 120, a protruding side frame 121 and a frame 122, wherein the main board 120 has a concave groove 124 and a through hole 125, the through hole 125 is connected to the concave groove 124, the protruding side frame 121 protrudes and surrounds above the main board 120, the frame 122 protrudes and surrounds below the main board 120, and the protruding side frame 121 is disposed on the main board 120 and slightly retracts from the main board compared with the frame 122, so as to form a differential space for the air outlet cover plate 11 to be assembled and supported on, the protruding side frame 121 is provided with a sealing opening 127, and the frame 122 of the flow guiding seat 12 is provided with a pin opening 126.

Referring to fig. 5A, 5B and 6, the plurality of sets of gas pumps 14 are the same gas transmission structure, and the operation manner thereof is the same, and for convenience of description, only a single gas pump 14 will be described below. As shown in the figure, the gas pump 14 is mainly composed of an air inlet plate 141, a resonator plate 142, a piezoelectric actuator 143, a first insulating plate 144a, a conductive plate 145 and a second insulating plate 144b, which are stacked in order.

The intake plate 141 of the present embodiment further includes a plurality of intake holes 141a, a plurality of bus holes 141b, and a collecting groove 141c, wherein four intake holes 141a and four bus holes 141b are taken as an example for illustration in the present embodiment, but the number is not limited thereto, the four intake holes 141a are holes penetrating through the intake plate 141 for allowing the gas to flow into the gas pump 14 under the action of the atmospheric pressure from the outside of the apparatus, the four bus holes 141b are respectively disposed corresponding to the four intake holes 141a, and the collecting groove 141c is disposed at the center of the four bus holes 141b and is communicated with the four bus holes 141b, so that the gas can be introduced into the bus holes 141b from the four intake holes 141a, and the gas is guided and collected to the collecting groove 141c to achieve gas transmission. The air intake plate 141 of the present embodiment is integrally formed, but not limited thereto.

The resonator plate 142 of the present embodiment is a flexible sheet material, and the resonator plate 142 has a hollow hole 142c, and the hollow hole 142c is disposed corresponding to the communicating groove 141c of the inlet plate 141 for gas to flow through. The resonator plate 142 of the present embodiment is made of a copper material, but not limited thereto.

The piezoelectric actuator 143 of the present embodiment mainly includes a suspension plate 1431, an outer frame 1432, a plurality of supports 1433, a piezoelectric element 1434, and the like. The number of the holders 1433 in this embodiment is four, but not limited to this, and the number may be changed arbitrarily according to the actual situation. The suspension plate 1431 of the present embodiment further includes a protrusion 1431a, a second surface 1431b and a first surface 1431c, and the protrusion 1431a is disposed on the second surface 1431b, and the protrusion 1431a may be, but not limited to, a circular protrusion structure. The outer frame 1432 of the present embodiment is a frame structure, and is disposed around the periphery of the suspension plate 1431, the four brackets 1433 are connected between the outer frame 1432 and the suspension plate 1431 to provide an elastic support, and a plurality of gaps 1435 are further defined among the four brackets 1433, the outer frame 1432 and the suspension plate 1431, and the plurality of gaps 1435 are used for guiding the air flow. The shapes and the number of the suspension plate 1431, the outer frame 1432 and the bracket 1433 are not limited to this embodiment, and may be changed according to the actual application requirement. In addition, the frame 1432 of the present embodiment further has a conductive pin 1432c protruding outward for electrically connecting an external power device (not shown) to the gas pump 14 and providing a driving power, but not limited thereto. The piezoelectric element 1434 of the present embodiment is attached to the first surface 1431c of the suspension plate 1431, and is used to apply a voltage to the suspension plate 1431, so that the suspension plate 1431 generates a deformation and a vertical bending vibration, thereby performing a gas transmission, and a transmission operation manner of the gas transmission will be further described in detail in a later section of the specification.

As shown in fig. 6, the protrusion 1431a of the suspension plate 1431 is coplanar with the second surface 1432a of the outer frame 1432, the second surface 1431b of the suspension plate 1431 and the second surface 1433a of the bracket 1433 are also coplanar, and a specific depth is provided between the protrusion 1431a of the suspension plate 1431 and the second surface 1432a of the outer frame 1432 and the second surface 1431b of the suspension plate 1431 and the second surface 1433a of the bracket 1433. The first surface 1431c of the suspension plate 1431, the first surface 1432b of the housing 1432 and the first surface 1433b of the support 1433 are flat and coplanar, and the piezoelectric element 1434 is attached to the flat first surface 1431c of the suspension plate 1431. In other embodiments, the suspension plate 1431 may be a plate-shaped square structure with a flat surface, and the shape may be changed according to the actual implementation. In some embodiments, the suspension plate 1431, the bracket 1433 and the outer frame 1432 can be integrally formed and can be made of a metal plate, such as, but not limited to, stainless steel. In yet other embodiments, the sides of the piezoelectric element 1434 are less than the sides of the suspension plate 1431. In still other embodiments, the side length of the piezoelectric element 1434 is equal to the side length of the suspension plate 1431, and is also designed as a square plate-like structure corresponding to the suspension plate 1431, but is not limited thereto.

The first insulating sheet 144a, the conducting sheet 145 and the second insulating sheet 144b of the present embodiment are sequentially disposed on the first surface 1432b of the outer frame 1432 of the piezoelectric actuator 143, and the shape thereof substantially corresponds to the shape of the outer frame 1432 of the piezoelectric actuator 143. In the present embodiment, the first insulating sheets 144a and 144b are made of insulating materials, such as: plastic, but not limited thereto, to provide an insulating function. The conductive sheet 145 of the present embodiment is made of a conductive material, such as a metal material, but not limited thereto, so as to provide an electrical conduction function. In the present embodiment, the conductive sheet 145 further protrudes with a conductive pin 145a to realize an electrical conduction function.

Referring to fig. 7, the gas pump 14 is formed by stacking the gas inlet plate 141, the resonator plate 142, the piezoelectric actuator 143, the first insulating plate 144a, the conducting plate 125, and the second insulating plate 144b in sequence, and a gap h is formed between the resonator plate 142 and the piezoelectric actuator 143, in this embodiment, a filling material, such as but not limited to a conductive adhesive, is filled in the gap h between the resonator plate 142 and the periphery of the outer frame 1432 of the piezoelectric actuator 143, so that the depth of the gap h can be maintained between the resonator plate 142 and the protrusion 1431a of the suspension plate 1431 of the piezoelectric actuator 143, and further the gas flow can be guided to flow more rapidly, and the contact interference between the protrusion 1431a of the suspension plate 1431 and the resonator plate 142 is reduced because the protrusion 1431a and the resonator plate 142 keep a proper distance, so that the generation of noise can be reduced. In other embodiments, the height of the outer frame 1432 of the high voltage electric actuator 143 can be increased to increase a gap when the high voltage electric actuator is assembled with the resonator plate 142, but not limited thereto.

After the air inlet plate 141, the resonator plate 142 and the piezoelectric actuator 143 are assembled in sequence, the resonator plate 142 has a movable portion 142a and a fixed portion 142b, the movable portion 142a and the air inlet plate 141 thereon together form a chamber for collecting gas, and a compression chamber 140 is further formed between the resonator plate 142 and the piezoelectric actuator 143 for temporarily storing gas, and the compression chamber 140 is communicated with the chamber at the collecting groove 141c of the air inlet plate 141 through the hollow hole 142c of the resonator plate 142.

Referring to fig. 1 and 4, a plurality of sets of gas pumps 14 are correspondingly disposed in the frame 122 of the plurality of sets of flow guiding seats 12, the conductive pins 1432c and 145a of the gas pump 14 can protrude from the pin opening 126 of the frame 122 of the pod 12, so that an external power device (not shown) can be electrically connected to the gas pump 14 for providing a driving power, the plurality of sets of guiding seats 12 are arranged side by side in the horizontal direction, and are assembled, supported and sealed on the plurality of sets of guiding seats 12 by covering the section difference space of the convex side frame 121 through the air outlet cover plate 11, so that the air outlet cover plate 11 is in up-and-down sealing connection with the convex side frame 121 of the plurality of sets of guiding seats 12, and the sealing opening 127 of the protruded side frame 121 is used to inject the sealing glue, so as to achieve the effect of airtight gluing, thus, a plurality of confluence chambers 123 are formed between the air outlet cover plate 11 and the protruding side frames 121 of the sets of diversion seats 12 and are communicated with the air outlet confluence grooves 114. Therefore, in the present embodiment, through the special design of the frame body 121, the flow guide seat 12 and the air outlet cover plate 11 are fixed to each other in a vertical sealing connection manner, so that the components can be easily disassembled and assembled, and meanwhile, the time consumed by component assembly is greatly reduced, the effect of easily replacing the components can be achieved, and the flexibility of the assembly and application of the gas conveying device 1 is improved.

When the gas pumps 14 are enabled to perform gas transmission, the gas flows through the concave grooves 124, the communication holes 125, the confluence chambers 123 and the gas outlet confluence grooves 114 of the diversion seats 12 by the gas pumps 14, and finally the gas is discharged from the discharge opening 112 of the gas outlet pipe 111; in short, the gas is introduced into the gas conveying device 1 through the multiple sets of gas pumps 14, and the internal flow channels of the multiple sets of flow guide seats 12 are designed to converge and concentrate the transmitted gas, so as to achieve the purpose of improving the transmission efficiency; moreover, in the present embodiment, two sets of gas pumps are disposed side by side and are capable of transmitting gas simultaneously, so that the gas transmission flow rate is greater than that of a single gas pump, thereby achieving the effect of increasing the gas transmission flow rate. Of course, the number of the gas pumps arranged in parallel is not limited to two, and may be changed arbitrarily according to the actual situation.

Referring to fig. 8A to 8E, when the gas pump 14 is operated, the piezoelectric actuator 143 is driven by a voltage to perform reciprocating vibration in the vertical direction with the support 1433 as a fulcrum. First, as shown in fig. 8A, when the piezoelectric actuator 143 is actuated by a voltage to vibrate downward, the volume of the compression chamber 140 is increased, the pressure is decreased, so that the gas enters from the air inlet hole 141a in compliance with the atmospheric pressure, and flows through the bus hole 141B, the bus groove 141 and the hollow hole 142c into the compression chamber 140, then, as shown in fig. 8B, since the resonator plate 142 is a thin and light plate-shaped structure, when the gas enters the compression chamber 140 in compliance with the atmospheric pressure, the movable portion 142a of the resonator plate 142 vibrates downward in compliance with the atmospheric pressure, and adheres to and abuts against the convex portion 1431a of the suspension plate 1431 of the piezoelectric actuator 143, so that the distance between the region other than the convex portion 1431a of the suspension plate 1431 and the fixing portion 142B at both sides of the resonator plate 142 is not decreased, and the deformation of the resonator plate 142 is used to compress the volume of the compression chamber 140 and close the middle flow space of the compression chamber 140, causing the gas therein to flow from the center pushing to the periphery and further downwardly across the flow through the spaces 1435 between the legs 1433 of the piezoelectric actuator 143. Thereafter, as shown in fig. 8C, the movable portion 142a of the resonator plate 142 is bent upward to be vibrated and deformed to return to the initial position, and the piezoelectric actuator 143 is driven by the voltage to vibrate upward, so as to press the volume of the compression chamber 140, but at this time, since the piezoelectric actuator 143 is lifted upward, the gas in the compression chamber 140 flows toward both sides, and the gas continuously enters from at least one gas inlet hole 141a of the gas inlet plate 141 and then flows into the chamber formed by the gas outlet groove 141C. As shown in fig. 8D, the resonance plate 142 resonates upward due to the upward vibration of the piezoelectric actuator 143, and the movable portion 142a of the resonance plate 142 vibrates upward, so that the gas is prevented from continuously entering from the gas inlet hole 141a of the gas inlet plate 141 and then flows into the chamber formed by the gas collecting groove 141 c. Finally, as shown in fig. 8E, the movable portion 142a of the resonator plate 142 is also returned to the initial position, so that when the resonator plate 142 vertically reciprocates, the maximum distance of the vertical displacement is increased by the gap h between the resonator plate and the piezoelectric actuator 143, in other words, the gap h between the two structures can allow the resonator plate 142 to be displaced up and down more greatly at the time of resonance.

In summary, the present disclosure provides a gas pump assembly, which is disposed in a plurality of flow guide seats respectively, wherein the flow guide seats are horizontally arranged in parallel and are connected to the gas outlet cover plate in an up-down assembly manner, so as to improve the transmission efficiency.

Various modifications may be made by those skilled in the art without departing from the scope of the invention as defined by the appended claims.

[ notation ] to show

1: fluid control device

11: gas outlet cover plate

111: air outlet pipe

112: discharge opening

113: access opening

114: air outlet convergence tank

12: flow guiding seat

120: main board

121: protruding side frame

122: frame body

123: confluence chamber

124: concave groove

125: communicating hole

126: pin opening

127: opening of sealing compound

14: gas pump

140: compression chamber

141: air inlet plate

141 a: air intake

141 b: bus bar hole

141 c: conflux through groove

142: resonance sheet

142 a: movable part

142 b: fixing part

142 c: hollow hole

143: piezoelectric actuator

1431: suspension plate

1431 a: convex part

1431 b: second surface

1431 c: first surface

1432: outer frame

1432 a: second surface

1432 b: first surface

1432 c: conductive pin

1433: support frame

1433 a: second surface

1433 b: first surface

1434: piezoelectric element

1435: voids

144 a: first insulating sheet

144 b: second insulating sheet

145: conductive sheet

h: gap

Claims (5)

1. A gas delivery device, comprising:

the air outlet cover plate is provided with an air outlet pipe and an air outlet convergence groove, and the air outlet pipe is communicated with the air outlet convergence groove and correspondingly arranged;

a plurality of groups of flow guide seats, each flow guide seat is provided with a main board, a convex side frame and a frame body, the main board is provided with a concave groove and a communicating hole, and the communicating hole is communicated with the concave groove; and

a plurality of groups of gas pumps which are correspondingly arranged in the frame body of each flow guide seat;

when the gas pump is enabled to transmit gas, gas is guided into the concave groove of each flow guide seat and flows through the communication hole, the flow converging chamber and the gas outlet flow converging groove in sequence, and finally the gas is discharged from the gas outlet pipe.

2. The gas delivery device according to claim 1, wherein the inner diameter of the outlet tube is tapered from a large taper to a small taper.

3. The gas delivery device according to claim 1, wherein the protruding side frame protrudes around the main plate, the frame protrudes around the main plate, and the protruding side frame is disposed on the main plate and slightly retracted from the main plate to form a gap for the cover plate to be mounted on.

4. The gas conveying device according to claim 1, wherein the protruded side frames of the plural sets of flow-guiding seats have a sealing opening, and the frame has a pin opening.

5. The gas delivery device according to claim 1, wherein at least one of the gas pumps comprises:

an air inlet plate, which comprises at least one air inlet, at least one bus bar hole and a bus bar through groove;

a resonator plate having a hollow hole;

a piezoelectric actuator, including a piezoelectric element, a suspension board, an outer frame, at least one support and a first conductive pin, wherein at least one gap is defined among the suspension board, the outer frame and the at least one support, the suspension board further has a first surface and a second surface, a convex part is arranged on the second surface, and the piezoelectric element is arranged on the first surface;

a first insulating sheet;

a conductive sheet including a second conductive pin; and

a second insulating sheet;

the air inlet plate, the resonance sheet, the piezoelectric actuator, the first insulating sheet, the conducting sheet and the second insulating sheet are correspondingly stacked, and a gap is formed between the resonance sheet and the piezoelectric actuator to define a compression chamber; the suspension plate is applied with voltage through the piezoelectric element to make the suspension plate perform reciprocating up-and-down bending vibration, so that gas is introduced from the at least one air inlet of the air inlet plate, flows through the bus bar hole, the bus through groove, the hollow hole and the compression chamber in sequence, and is finally introduced into the concave groove from the at least one gap.

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