TWM581636U - Micro gas delivery device - Google Patents
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Abstract
一種微型氣體輸送裝置，包括依序堆疊的設置的進氣板、共振片、壓電致動器、絕緣片及導電片。進氣板具有進氣孔、匯流排孔及匯流腔室。共振片具有中空孔。壓電致動器與共振片之間定義腔室空間，壓電致動器包含懸浮板、外框、連接部及壓電元件，連接部連接於懸浮板及外框之間，並定義間隙以供氣體流通。導電片具有導電內引腳，用以電連接壓電元件。當壓電致動器受驅動時，氣體由進氣孔導入，流經匯流腔室、中空孔導入腔室空間內，再經由間隙排出，以實現氣體之傳輸。A micro gas conveying device comprises an air inlet plate, a resonance plate, a piezoelectric actuator, an insulating sheet and a conductive sheet which are arranged in sequence. The air inlet plate has an air inlet hole, a bus bar hole and a confluence chamber. The resonator piece has a hollow hole. A chamber space is defined between the piezoelectric actuator and the resonator. The piezoelectric actuator comprises a suspension plate, an outer frame, a connecting portion and a piezoelectric element. The connecting portion is connected between the floating plate and the outer frame, and defines a gap. For gas circulation. The conductive sheet has conductive inner leads for electrically connecting the piezoelectric elements. When the piezoelectric actuator is driven, the gas is introduced from the air inlet hole, flows through the confluence chamber, and the hollow hole is introduced into the chamber space, and then discharged through the gap to realize gas transmission.
Description
本案係關於一種氣壓動力裝置，尤指一種微型超薄且靜音之微型氣體輸送裝置。The present invention relates to a pneumatic power device, and more particularly to a miniature ultra-thin and silent micro gas delivery device.
目前於各領域中無論是醫藥、電腦科技、列印、能源等工業，產品均朝精緻化及微小化方向發展，其中微幫浦、噴霧器、噴墨頭、工業列印裝置等產品所包含之流體輸送結構為其關鍵技術，是以，如何藉創新結構突破其技術瓶頸，為發展之重要內容。At present, in various fields, such as medicine, computer technology, printing, energy and other industries, the products are developing in the direction of refinement and miniaturization. Among them, products such as micro-pumps, sprayers, inkjet heads, industrial printing devices, etc. The fluid transport structure is its key technology, which is how to break through its technical bottleneck with innovative structure and be an important part of development.
舉例來說，於醫藥產業中，許多需要採用氣壓動力驅動之儀器或設備，通常採以傳統馬達及氣壓閥來達成其氣體輸送之目的。然而，受限於此等傳統馬達以及氣體閥之體積限制，使得此類的儀器設備難以縮小其整體裝置的體積，即難以實現薄型化之目標，更無法使之達成可攜式之目的。此外，傳統馬達及氣體閥於作動時亦會產生噪音之問題，導致使用上的不便利及不舒適。For example, in the pharmaceutical industry, many instruments or equipment that require pneumatic power drive are usually used with conventional motors and pneumatic valves to achieve their gas delivery. However, limited by the volume limitations of conventional motors and gas valves, it is difficult for such instruments to reduce the size of their overall devices, that is, it is difficult to achieve the goal of thinning, and it is impossible to achieve portable purposes. In addition, conventional motors and gas valves also cause noise problems when they are actuated, resulting in inconvenience and discomfort in use.
因此，如何發展一種能在長期使用下維持微型氣體輸送裝置之一定工作特性及流速，實為目前迫切需要解決之問題。Therefore, how to develop a certain operating characteristic and flow rate that can maintain the micro gas delivery device under long-term use is an urgent problem to be solved.
本案之主要目的在於提供一種微型氣體輸送裝置，氣體自微型氣體輸送裝置上之進氣孔進入，並利用壓電致動器之作動，使氣體於設計後之流道及匯流腔室中產生壓力梯度，進而使氣體高速流動，如此構成微型氣體輸送裝置可達到靜音之功效，更可使微型氣體動力裝置之整體體積減小及薄型化，進而使微型氣體動力裝置達成輕便舒適之可攜式目的。The main purpose of the present invention is to provide a micro gas delivery device in which gas enters from the air inlet of the micro gas delivery device and uses piezoelectric actuators to generate pressure in the designed flow channel and the confluence chamber. The gradient, in turn, allows the gas to flow at a high speed, so that the micro gas delivery device can achieve the effect of mute, and the overall volume of the micro gas power device can be reduced and thinned, thereby making the micro gas power device portable and portable. .
為達上述目的，本案之一較廣義實施態樣為提供一種微型氣體輸送裝置，包括：一進氣板，具有至少一進氣孔、至少一匯流排孔及一匯流腔室，其中至少一該進氣孔供導入氣體，至少一該進氣孔對應至少一該匯流排孔，至少一該匯流排孔對應連通該匯流腔室，且引導氣體經由至少一該進氣孔匯流至該匯流腔室內；一共振片，貼合組接於該進氣板，具有一中空孔、一可動部及一固定部，該中空孔位於該共振片中心處，並與該進氣板之該匯流腔室相對應；一壓電致動器，透過一填充材組接結合於該共振片上，構成一腔室空間，該壓電致動器包含一懸浮板、一外框、至少一連接部、一壓電元件及至少一間隙，至少一該連接部連接於該懸浮板及該外框之間提供彈性支撐，至少一該間隙設置於該懸浮板及該外框之間提供氣體流通，而該壓電元件貼合於該懸浮板；一絕緣片，結合於該壓電致動器之一側；以及一導電片，與該絕緣片相結合，具有一體沖壓製出之一導電內引腳，由該導電片之任一邊上向內延伸出一導電位置，供以與該壓電元件之表面接觸接合定位連接；其中，該壓電致動器受驅動時，使氣體由該進氣板之至少一該進氣孔導入，經至少一該匯流排孔匯集至該匯流腔室，再流經該共振片之該中空孔導入該腔室空間內，再經該壓電致動器共振作用傳輸氣體。In order to achieve the above object, a broader aspect of the present invention provides a micro gas delivery device comprising: an air inlet plate having at least one air inlet hole, at least one bus bar hole and a confluence chamber, at least one of which The air inlet hole is for introducing a gas, and at least one of the air inlet holes corresponds to at least one of the bus bar holes, at least one of the bus bar holes correspondingly communicating with the bus flow chamber, and the guiding gas is merged into the confluence chamber via the at least one air inlet hole a resonance piece, the bonding group is connected to the air inlet plate, has a hollow hole, a movable portion and a fixing portion, the hollow hole is located at the center of the resonance piece, and is connected with the confluence chamber of the air inlet plate Corresponding to; a piezoelectric actuator is coupled to the resonator through a filler material to form a chamber space, the piezoelectric actuator comprising a suspension plate, an outer frame, at least one connecting portion, and a piezoelectric And at least one gap, at least one of the connecting portions is connected between the suspension plate and the outer frame to provide elastic support, at least one of the gaps is disposed between the floating plate and the outer frame to provide gas circulation, and the piezoelectric element Fitted to the suspension An insulating sheet coupled to one side of the piezoelectric actuator; and a conductive sheet combined with the insulating sheet to integrally stamp one of the conductive inner leads from either side of the conductive sheet Extending a conductive position for contact connection with the surface of the piezoelectric element; wherein, when the piezoelectric actuator is driven, the gas is introduced from at least one of the air inlet holes of the air inlet plate, At least one of the busbar holes is collected into the manifold chamber, and the hollow hole flowing through the resonator plate is introduced into the chamber space, and the gas is resonated by the piezoelectric actuator to transmit gas.
體現本案特徵與優點的實施例將在後段的說明中詳細敘述。應理解的是本案能夠在不同的態樣上具有各種的變化，其皆不脫離本案的範圍，且其中的說明及圖示在本質上係當作說明之用，而非架構於限制本案。Embodiments embodying the features and advantages of the present invention will be described in detail in the following description. It is to be understood that the present invention is capable of various modifications in various aspects, and is not to be construed as a limitation.
請參閱第1圖、第2A圖、第2B圖及第3A圖所示，本案之微型氣體輸送裝置1包含有依序堆疊的一進氣板11、一共振片12、一壓電致動器13、一絕緣片14、一導電片15所組構而成。Referring to FIG. 1 , FIG. 2A , FIG. 2B , and FIG. 3A , the micro gas delivery device 1 of the present invention includes an air inlet plate 11 , a resonant plate 12 , and a piezoelectric actuator stacked in sequence . 13. An insulating sheet 14 and a conductive sheet 15 are assembled.
上述進氣板11具有至少一進氣孔11a、至少一匯流排孔11b及一匯流腔室11c，上述之進氣孔11a與匯流排孔11b其數量相同，於本實施例中，進氣孔11a與匯流排孔11b以數量4個作舉例說明，並不以此為限；4個進氣孔11a分別貫通4個匯流排孔11b，且4個匯流排孔11b匯流到匯流腔室11c。The air inlet plate 11 has at least one air inlet hole 11a, at least one bus bar hole 11b and a confluence chamber 11c. The air intake hole 11a and the bus bar hole 11b have the same number. In the embodiment, the air inlet hole 11a and the bus bar hole 11b are exemplified by the number of four, and are not limited thereto; the four air inlet holes 11a respectively penetrate the four bus bar holes 11b, and the four bus bar holes 11b merge to the confluence chamber 11c.
上述之共振片12，可透過貼合方式組接於進氣板11上，且共振片12上具有一中空孔12a、一可動部12b及一固定部12c，中空孔12a位於共振片12的中心處，並與進氣板11的匯流腔室11c對應，而設置於中空孔12a的周圍且與匯流腔室11c相對的區域為可動部12b，而設置於共振片12的外周緣部分而貼固於進氣板11上則為固定部12c。The resonator piece 12 is assembled to the air inlet plate 11 through a bonding manner, and the resonator piece 12 has a hollow hole 12a, a movable portion 12b and a fixing portion 12c. The hollow hole 12a is located at the center of the resonance plate 12. And corresponding to the confluence chamber 11c of the air inlet plate 11, and a region provided around the hollow hole 12a and opposed to the confluence chamber 11c is a movable portion 12b, and is provided on the outer peripheral portion of the resonance piece 12 to be attached. The air intake plate 11 is a fixing portion 12c.
上述之壓電致動器13，包含有一懸浮板13a、一外框13b、至少一連接部13c、一壓電元件13d、至少一間隙13e及一凸部13f；其中，懸浮板13a為一正方形懸浮板，具有第一表面131a及相對第一表面131a的一第二表面132a，外框13b環繞設置於懸浮板13a的周緣，且外框13b具有一組配表面131b及一下表面132b，並透過至少一連接部13c連接於懸浮板13a與外框13b之間，以提供彈性支撐懸浮板13a的支撐力，其中懸浮板13a的第一表面131a與外框13b的組配表面131b兩者形成共平面，以及懸浮板13a的第二表面132a與外框13b的下表面132b兩者形成共平面，而間隙13e為懸浮板13a、外框13b與連接部13c之間的空隙，用以供氣體通過。此外，懸浮板13a的第一表面131a具有凸部13f，於本實施例中，係將凸部13f的周緣且鄰接於連接部13c的連接處透過蝕刻製程使其下凹，來使懸浮板13a的凸部13f的凸部表面131f高於第一表面131a，形成階梯狀結構。另外，外框13b環繞設置於懸浮板13a之外側，且具有一向外凸設之導電接腳133b，用以供電性連接之用，但不以此為限。The piezoelectric actuator 13 includes a suspension plate 13a, an outer frame 13b, at least one connecting portion 13c, a piezoelectric element 13d, at least one gap 13e and a convex portion 13f. wherein the suspension plate 13a is a square The suspension plate has a first surface 131a and a second surface 132a opposite to the first surface 131a. The outer frame 13b is disposed around the circumference of the suspension plate 13a, and the outer frame 13b has a plurality of matching surfaces 131b and a lower surface 132b. At least one connecting portion 13c is connected between the suspension plate 13a and the outer frame 13b to provide a supporting force for elastically supporting the suspension plate 13a, wherein the first surface 131a of the suspension plate 13a and the assembly surface 131b of the outer frame 13b form a common The plane, and the second surface 132a of the suspension plate 13a and the lower surface 132b of the outer frame 13b form a coplanar, and the gap 13e is a gap between the suspension plate 13a, the outer frame 13b and the connecting portion 13c for the passage of gas. . In addition, the first surface 131a of the suspension plate 13a has a convex portion 13f. In the present embodiment, the peripheral edge of the convex portion 13f and the connection portion adjacent to the connecting portion 13c are recessed by an etching process to make the suspension plate 13a. The convex surface 131f of the convex portion 13f is higher than the first surface 131a to form a stepped structure. In addition, the outer frame 13b is disposed on the outer side of the suspension plate 13a, and has an outwardly protruding conductive pin 133b for power connection, but is not limited thereto.
上述之共振片12與壓電致動器13係透過一填充材g相互堆疊組接，以構成之間具有一腔室空間16，而填充材g可為一導電膠，但不以此為限，以使共振片12與壓電致動器13之凸部13f的凸部表面131f之間可維持間距h之深度，進而可導引氣流更迅速地流動，且因懸浮板13a之凸部13f與共振片12保持適當距離，使彼此接觸干涉減少，促使噪音產生被降低；於另一些實施例中，如第3B圖所示，上述之共振片12與壓電致動器13係透過一填充材g相互堆疊組接，以構成之間具有一腔室空間16，亦可藉由懸浮板13a採以沖壓成形使其向下凹陷，其下陷距離可由至少一連接部13c成形於懸浮板13a與外框13b之間所調整，使在懸浮板13a上的凸部13f的凸部表面131f與外框13b的組配表面131b兩者形成非共平面，亦即凸部13f的凸部表面131f將低於外框13b的組配表面131b，且懸浮板13a的第二表面132a低於外框13b的下表面132b，又壓電元件13d貼附於懸浮板13a的第二表面132a，與凸部13f相對設置，壓電元件13d被施加驅動電壓後，由於壓電效應而產生形變，進而帶動懸浮板13a振動；利用於外框13b的組配表面131b上塗佈少量填充材g，以熱壓方式使壓電致動器13貼合於共振片12的固定部12c，進而使得壓電致動器13得以與共振片12組配結合。其中懸浮板13a之第一表面131a與共振片12之間形成的間距h會影響微型氣體輸送裝置1的傳輸效果，故維持一固定的間距h，對於微型氣體輸送裝置1提供穩定的傳輸效率是十分重要，本案之微型氣體輸送裝置1對壓電致動器13使用沖壓方式，使懸浮板13a向下凹陷，讓懸浮板13a的第一表面131a與外框13b的組配表面131b兩者為非共平面，亦即懸浮板13a的第一表面131a將低於外框13b的組配表面131b，且懸浮板13a的第二表面132a低於外框13b的下表面132b，使得壓電致動器13之懸浮板13a凹陷形成一空間得與共振片12構成一可調整之間距h，直接透過上述壓電致動器13之懸浮板13a採以成形凹陷構成一間距h的結構改良，如此一來，所需的間距h得以透過調整壓電致動器13之懸浮板13a成形凹陷距離來完成，有效地簡化了調整間距h的結構設計，同時也達成簡化製程，縮短製程時間等優點。The resonant plate 12 and the piezoelectric actuator 13 are stacked on each other through a filler g, so as to have a chamber space 16 therebetween, and the filler g can be a conductive adhesive, but not limited thereto. Therefore, the depth of the pitch h can be maintained between the resonator piece 12 and the convex surface 131f of the convex portion 13f of the piezoelectric actuator 13, thereby guiding the airflow to flow more rapidly, and the convex portion 13f of the suspension plate 13a Maintaining an appropriate distance from the resonant plate 12 to reduce contact interference with each other causes noise generation to be reduced; in other embodiments, as shown in FIG. 3B, the resonant plate 12 and the piezoelectric actuator 13 are transmitted through a fill. The materials g are stacked on each other so as to have a chamber space 16 therebetween, and may be recessed by press forming by the suspension plate 13a, and the recessed distance may be formed by the at least one connecting portion 13c on the suspension plate 13a and The outer frame 13b is adjusted such that both the convex surface 131f of the convex portion 13f on the suspension plate 13a and the combined surface 131b of the outer frame 13b form a non-coplanar, that is, the convex surface 131f of the convex portion 13f will Lower than the assembly surface 131b of the outer frame 13b, and the second surface 132a of the suspension plate 13a is lower than The lower surface 132b of the frame 13b is further attached to the second surface 132a of the suspension plate 13a, and is disposed opposite to the convex portion 13f. After the piezoelectric element 13d is applied with a driving voltage, deformation is caused by the piezoelectric effect, and further The suspension plate 13a is driven to vibrate; a small amount of the filler g is applied to the assembly surface 131b of the outer frame 13b, and the piezoelectric actuator 13 is attached to the fixed portion 12c of the resonator piece 12 by heat pressing, thereby further piezoelectrically The actuator 13 is assembled in combination with the resonator piece 12. The spacing h formed between the first surface 131a of the suspension plate 13a and the resonant plate 12 affects the transmission effect of the micro gas delivery device 1, so that a fixed spacing h is maintained, and stable transmission efficiency is provided for the micro gas delivery device 1. It is important that the micro gas delivery device 1 of the present invention uses a stamping method for the piezoelectric actuator 13 to recess the suspension plate 13a downward, so that the first surface 131a of the suspension plate 13a and the assembly surface 131b of the outer frame 13b are both The non-coplanar, that is, the first surface 131a of the suspension plate 13a will be lower than the assembly surface 131b of the outer frame 13b, and the second surface 132a of the suspension plate 13a is lower than the lower surface 132b of the outer frame 13b, so that the piezoelectric actuation The suspension plate 13a of the device 13 is recessed to form a space to form an adjustable distance h from the resonant plate 12, and is directly transmitted through the suspension plate 13a of the piezoelectric actuator 13 to form a recess to form a pitch h. Therefore, the required pitch h can be completed by adjusting the recessed distance of the suspension plate 13a of the piezoelectric actuator 13, thereby effectively simplifying the structural design of the adjustment pitch h, and at the same time achieving the advantages of simplifying the process and shortening the process time.
上述之絕緣片14及導電片15皆為框型的薄型片體，依序堆疊結合於壓電致動器13之一側。於本實施例中，絕緣片14貼附於壓電致動器13之外框13b的下表面132b，而導電片15堆疊結合於絕緣片14上。且其形態大致上對應於壓電致動器13之外框之形態。於一些實施例中，絕緣片14即由可絕緣之材質所構成，例如：塑膠，但不以此為限，以進行絕緣之用；於另一些實施例中，導電片15即由可導電之材質所構成，例如：金屬，但不以此為限，以進行電性導通之用。以及，於本實施例中，導電片15上亦可設置一導電接腳151a，以進行電性導通之用。而壓電致動器13之壓電元件13d的驅動兩電極(未圖示)，習知所使用的方式不外乎使用一條導電線，利用焊接方式將其固定在壓電元件13d上達到導出電極的連接電性作用，但因要將壓電元件13d上電極導出需要使用治具將其固定，且依照不同工序要有不同對位，這些大大造成組裝上的複雜程度，為解決此問題，本案利用導電片15提供一導電內引腳151b作為壓電元件13d的驅動兩電極之其中之一電極，以克服上述電極以導線導出之方式，導電內引腳151b由導電片15一體沖壓製出，且導電內引腳151b可在導電片15外框在任一邊上向內延伸出一導電位置，且可為任意形狀，用於外部連接電極使用，此導電內引腳151b在導電片15外框在任一邊上向內彎折一延伸部1511b，於本實施例，此導電內引腳151b長度為2.0mm至6.5mm，寬度為0.1 mm至1mm，而延伸部1511b向內彎折角度θ為15度，彎折高度H為1mm，且延伸部1511b有一分岔部1512b，分岔部1512b並與導電片15外框保持一彎折高度H，此彎折高度H最佳高度為與壓電元件13d之厚度保持貼合之高度，達到良好接觸效果，於本實施例中，此彎折高度H為1mm，使分岔部1512b可以貼服於壓電元件13d之表面，而分岔部1512b中間間隔距離P為0.1 mm至0.5mm，使分岔部1512b之中間間隔距離P透過合金熔融、導電膠、導電墨水及導電樹酯等方式與壓電元件13d之表面結合介質固定，以達到更好接著效果。The insulating sheet 14 and the conductive sheet 15 are all thin-type sheets of a frame type, and are sequentially stacked and bonded to one side of the piezoelectric actuator 13. In the present embodiment, the insulating sheet 14 is attached to the lower surface 132b of the outer frame 13b of the piezoelectric actuator 13, and the conductive sheet 15 is stacked and bonded to the insulating sheet 14. The shape substantially corresponds to the shape of the outer frame of the piezoelectric actuator 13. In some embodiments, the insulating sheet 14 is made of an insulating material, such as plastic, but not limited thereto for insulation; in other embodiments, the conductive sheet 15 is electrically conductive. The material is composed of, for example, metal, but not limited to it for electrical conduction. Moreover, in the embodiment, a conductive pin 151a may be disposed on the conductive sheet 15 for electrical conduction. On the other hand, the piezoelectric element 13d of the piezoelectric actuator 13 drives two electrodes (not shown), which is conventionally used in such a manner that a conductive wire is used and fixed to the piezoelectric element 13d by soldering to be derived. The connection of the electrodes is electrically, but the electrode on the piezoelectric element 13d needs to be fixed by using a jig, and different alignments are required according to different processes, which greatly causes assembly complexity, and to solve this problem, In the present invention, a conductive inner lead 151b is provided as one of the electrodes for driving the two electrodes of the piezoelectric element 13d, and the conductive inner lead 151b is integrally stamped by the conductive sheet 15 in a manner to prevent the electrode from being led out. The conductive inner lead 151b can extend in a conductive position on either side of the outer frame of the conductive sheet 15 and can be any shape for external connection electrodes. The conductive inner lead 151b is in the outer frame of the conductive sheet 15. An extension portion 1511b is bent inwardly on either side. In this embodiment, the conductive inner lead 151b has a length of 2.0 mm to 6.5 mm and a width of 0.1 mm to 1 mm, and the extension portion 1511b has an inward bending angle θ of 15 Degree The height H is 1 mm, and the extending portion 1511b has a branching portion 1512b, and the branching portion 1512b is maintained at a bending height H with the outer frame of the conductive sheet 15, and the optimum height of the bending height H is maintained with the thickness of the piezoelectric element 13d. In the embodiment, the bending height H is 1 mm, so that the branching portion 1512b can be attached to the surface of the piezoelectric element 13d, and the intermediate spacing distance P of the branching portion 1512b is 0.1 mm to 0.5 mm, the intermediate spacing distance P of the branching portion 1512b is fixed to the surface bonding medium of the piezoelectric element 13d by means of alloy melting, conductive paste, conductive ink and conductive resin to achieve a better bonding effect.
請繼續參閱第5A圖至第5C圖為第3A圖所示之微型氣體輸送裝置1的作動示意圖，請先參閱第5A圖，壓電致動器13的壓電元件13d被施加驅動電壓後，以產生形變帶動懸浮板13a向下位移，同時共振片12受到共振原理影響而被同步向下位移，此時連帶增加了腔室空間16的容積提升，於是腔室空間16內形成了負壓，微型氣體輸送裝置1外部氣體便經由進氣孔11a汲取，經過匯流排孔11b而進入匯流腔室11c內，再經過中空孔12a進入腔室空間16內；請再參閱第5B圖，當壓電元件13d帶動懸浮板13a向上位移，壓縮腔室空間16，迫使腔室空間16內的氣體通過間隙13e向下傳輸，達到傳輸氣體的效果，同時共振片12同樣被懸浮板13a因共振而向上位移，同步推擠匯流腔室11c內的氣體往腔室空間16移動，使共振片12的可動部12b向上位移，讓氣體暫時無法經由進氣孔11a汲取；最後請參閱第5C圖，當懸浮板13a再被向下帶動，而懸浮板13a恢復不作動保持水平位置時，此時共振片12的可動部12b也同時被帶動而向下位移，共振片12將使壓縮腔室空間16內的氣體向間隙13e移動，並且提升匯流腔室11c內的容積，讓氣體能夠持續地通過進氣孔11a、匯流排孔11b再匯聚於匯流腔室11c內；如此透過不斷地重複上述第5A圖至第5C圖之作動，使微型氣體輸送裝置1能夠連續將氣體自進氣孔11a進入，再由間隙13e向下傳輸，以不斷地汲取氣體，即構成實施本案之微型氣體輸送裝置1之傳輸氣體之運作。Please refer to FIG. 5A to FIG. 5C for the operation diagram of the micro gas delivery device 1 shown in FIG. 3A. Referring to FIG. 5A, after the piezoelectric element 13d of the piezoelectric actuator 13 is applied with a driving voltage, The displacement of the suspension plate 13a is downwardly displaced by the deformation, and the resonance piece 12 is synchronously displaced downward by the resonance principle. At this time, the volume increase of the chamber space 16 is increased, and a negative pressure is formed in the chamber space 16, The external gas of the micro gas delivery device 1 is drawn through the air inlet hole 11a, enters the confluence chamber 11c through the bus bar hole 11b, and enters the chamber space 16 through the hollow hole 12a; please refer to FIG. 5B, when the piezoelectric The element 13d drives the suspension plate 13a upwardly to compress the chamber space 16, forcing the gas in the chamber space 16 to pass downward through the gap 13e to achieve the effect of transmitting gas, and the resonator piece 12 is also displaced upward by the suspension plate 13a due to resonance. The gas in the confluence chamber 11c is synchronously pushed to move into the chamber space 16, so that the movable portion 12b of the resonator piece 12 is displaced upward, so that the gas is temporarily unable to be drawn through the air inlet hole 11a; finally, refer to FIG. 5C, when The suspension plate 13a is further driven downward, and when the suspension plate 13a returns to the non-actuated horizontal position, the movable portion 12b of the resonator piece 12 is also simultaneously driven to be displaced downward, and the resonance piece 12 will be in the compression chamber space 16. The gas moves toward the gap 13e, and raises the volume in the confluence chamber 11c, so that the gas can continuously converge in the confluence chamber 11c through the intake hole 11a and the bus bar hole 11b; thus repeating the above FIG. 5A Actuating to Fig. 5C, the micro gas delivery device 1 can continuously enter the gas from the air inlet hole 11a, and then be transported downward by the gap 13e to continuously extract the gas, thereby constituting the transmission of the micro gas delivery device 1 of the present invention. The operation of the gas.
綜上所述，本案所提供之微型氣體輸送裝置，主要藉由氣體自微型氣體輸送裝置上之進氣孔進入，並利用壓電致動器之作動，使氣體於設計後之流道及匯流腔室中產生壓力梯度，進而使氣體高速流動，如此構成微型氣體輸送裝置可達到靜音之功效，更可使微型氣體動力裝置之整體體積減小及薄型化，進而使微型氣體動力裝置達成輕便舒適之可攜式目的，並可廣泛地應用於醫療器材及相關設備之中。In summary, the micro gas delivery device provided in the present invention mainly enters through the air inlet hole of the micro gas conveying device, and uses the action of the piezoelectric actuator to make the gas flow channel and the confluence after design. A pressure gradient is generated in the chamber, so that the gas flows at a high speed, so that the micro gas conveying device can achieve the effect of mute, and the overall volume of the micro gas power device can be reduced and thinned, thereby making the micro gas power device light and comfortable. It is portable and can be widely used in medical equipment and related equipment.
縱使本案已由上述實施例詳細敘述而可由熟悉本技藝人士任施匠思而為諸般修飾，然皆不脫如附申請專利範圍所欲保護者。Even though the present invention has been described in detail by the above-described embodiments, it can be modified by those skilled in the art, and it is intended to be protected as intended by the appended claims.
1‧‧‧微型氣體輸送裝置1‧‧‧Micro gas delivery device
11‧‧‧進氣板 11‧‧‧Air intake plate
11a‧‧‧進氣孔 11a‧‧‧Air intake
11b‧‧‧匯流排孔 11b‧‧‧ bus bar hole
11c‧‧‧匯流腔室 11c‧‧‧ confluence chamber
12‧‧‧共振片 12‧‧‧Resonance film
12a‧‧‧中空孔 12a‧‧‧ hollow hole
12b‧‧‧可動部 12b‧‧‧movable department
12c‧‧‧固定部 12c‧‧‧Fixed Department
13‧‧‧壓電致動器 13‧‧‧ Piezoelectric Actuator
13a‧‧‧懸浮板 13a‧‧‧suspension plate
131a‧‧‧第一表面 131a‧‧‧ first surface
132a‧‧‧第二表面 132a‧‧‧ second surface
13b‧‧‧外框 13b‧‧‧Front frame
131b‧‧‧組配表面 131b‧‧‧ matching surface
132b‧‧‧下表面 132b‧‧‧ lower surface
133b‧‧‧導電接腳 133b‧‧‧Electrical pins
13c‧‧‧連接部 13c‧‧‧Connecting Department
13d‧‧‧壓電元件 13d‧‧‧Piezoelectric components
13e‧‧‧間隙 13e‧‧‧ gap
13f‧‧‧凸部 13f‧‧‧ convex
131f‧‧‧凸部表面 131f‧‧‧ convex surface
14‧‧‧絕緣片 14‧‧‧Insulation sheet
15‧‧‧導電片 15‧‧‧Conductor
151a‧‧‧導電接腳 151a‧‧‧Electrical pins
151b‧‧‧導電內引腳 151b‧‧‧conductive inner lead
1511b‧‧‧延伸部 1511b‧‧‧Extension
1512b‧‧‧分岔部 1512b‧‧‧Ministerial Department
16‧‧‧腔室空間 16‧‧‧Case space
g‧‧‧填充材 g‧‧‧Filling materials
h‧‧‧間距 H‧‧‧ spacing
θ‧‧‧彎折角度 θ‧‧‧Bending angle
H‧‧‧彎折高度 H‧‧‧Bend height
P‧‧‧中間間隔距離 P‧‧‧interval distance
第1圖為本案微型氣體輸送裝置之立體外觀示意圖。 第2A圖為本案微型氣體輸送裝置之正面方向視得分解示意圖。 第2B圖為本案微型氣體輸送裝置之背面方向視得分解示意圖。 第3A圖為本案微型氣體輸送裝置之剖面示意圖。 第3B圖為本案微型氣體輸送裝置另一較佳實施例之剖面示意圖。 第4圖為本案微型氣體輸送裝置之導電內引腳放大局部示意圖。 第5A圖至第5C圖為第3A圖中微型氣體輸送裝置之實施作動示意圖。Fig. 1 is a schematic perspective view of the micro gas conveying device of the present invention. Fig. 2A is a schematic exploded view showing the front side of the micro gas conveying device of the present invention. 2B is a schematic exploded view of the back side of the micro gas delivery device of the present invention. Figure 3A is a schematic cross-sectional view of the micro gas delivery device of the present invention. FIG. 3B is a schematic cross-sectional view showing another preferred embodiment of the micro gas delivery device of the present invention. Fig. 4 is an enlarged partial schematic view showing the inner conductive pin of the micro gas conveying device of the present invention. 5A to 5C are schematic views showing the operation of the micro gas delivery device in Fig. 3A.
Claims (17)
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW108202279U TWM581636U (en) | 2019-02-22 | 2019-02-22 | Micro gas delivery device |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TWM581636U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI696756B (en) * | 2019-02-22 | 2020-06-21 | 研能科技股份有限公司 | Miniature gas transportation device |
| TWI720877B (en) * | 2020-04-24 | 2021-03-01 | 研能科技股份有限公司 | Actuating and sensing module |
-
2019
- 2019-02-22 TW TW108202279U patent/TWM581636U/en unknown
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI696756B (en) * | 2019-02-22 | 2020-06-21 | 研能科技股份有限公司 | Miniature gas transportation device |
| TWI720877B (en) * | 2020-04-24 | 2021-03-01 | 研能科技股份有限公司 | Actuating and sensing module |
| US11946569B2 (en) | 2020-04-24 | 2024-04-02 | Microjet Technology Co., Ltd. | Actuating and sensing module |
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