CN209985708U - Vacuum glue homogenizing device of glue homogenizing machine - Google Patents
Vacuum glue homogenizing device of glue homogenizing machine Download PDFInfo
- Publication number
- CN209985708U CN209985708U CN201920689435.XU CN201920689435U CN209985708U CN 209985708 U CN209985708 U CN 209985708U CN 201920689435 U CN201920689435 U CN 201920689435U CN 209985708 U CN209985708 U CN 209985708U
- Authority
- CN
- China
- Prior art keywords
- vacuum
- tray
- channel
- shaft
- atmosphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Coating Apparatus (AREA)
Abstract
The utility model relates to an even mucilage binding is put, especially an even gluey device of even machine of gluing vacuum belongs to micro-nano technical field. According to the technical scheme provided by the utility model, the vacuum glue homogenizing device of the glue homogenizing machine comprises a tray and a plurality of vacuum channel areas arranged in the central area of the tray; the tray is characterized in that an atmosphere channel is further arranged in the tray, the atmosphere channel is located on the outer ring of the vacuum channel area and surrounds the vacuum channel area, a plurality of atmosphere channel holes are formed in the atmosphere channel, and the atmosphere channel holes penetrate through the tray corresponding to the atmosphere channel. The utility model discloses compact structure can prevent effectively that it leads to vacuum valve, vacuum pump jam to glue to get into the vacuum line, convenient to use, safe and reliable.
Description
Technical Field
The utility model relates to an even mucilage binding is put, especially an even gluey device of even machine of gluing vacuum belongs to micro-nano technical field.
Background
In the field of MEMS, photoresist leveling is one of the basic steps of a photolithography process. The current spin coater often has the problems that a vacuum pipeline enters glue, a vacuum valve or a vacuum pump is blocked and the like in the use process, and the solution is to replace new accessories, so that the use cost is increased, and the use efficiency is reduced.
Disclosure of Invention
The utility model aims at overcoming the not enough of existence among the prior art, providing an even mucilage binding of even machine vacuum is put, its compact structure can prevent effectively that it leads to vacuum valve, vacuum pump jam to glue getting into vacuum line, convenient to use, safe and reliable.
According to the technical scheme provided by the utility model, the vacuum glue homogenizing device of the glue homogenizing machine comprises a tray and a plurality of vacuum channel areas arranged in the central area of the tray; the tray is characterized in that an atmosphere channel is further arranged in the tray, the atmosphere channel is located on the outer ring of the vacuum channel area and surrounds the vacuum channel area, a plurality of atmosphere channel holes are formed in the atmosphere channel, and the atmosphere channel holes penetrate through the tray corresponding to the atmosphere channel.
The vacuum channel area comprises a plurality of annular vacuum channels which are communicated with each other through channel connecting grooves, a tray vacuum adsorption hole is arranged in the central area of the tray, and the tray vacuum adsorption hole is communicated with the vacuum channels and the channel connecting grooves.
The vacuum adapter shaft can be in adaptive connection with the tray, the vacuum adapter shaft can extend into the tray connecting sleeve of the tray, and the vacuum adapter shaft is tightly connected with the tray connecting sleeve of the tray; an inner rotary shaft adsorption channel which can be communicated with the vacuum adsorption hole of the tray is arranged in the vacuum adapter shaft.
A liquid storage tank is arranged in the end part of the vacuum adapter shaft entering the tray connecting sleeve, the liquid storage tank is positioned below the vacuum adsorption hole of the tray, and the adsorption channel in the rotating shaft is positioned on the outer ring of the liquid storage tank.
The vacuum adapter shaft is arranged at the end part of the tray connecting sleeve and is internally provided with a step which can be communicated with the liquid storage tank, the adsorption channel in the rotating shaft and the vacuum adsorption hole of the tray.
The motor shaft can be embedded in the vacuum adapter shaft and is in close contact with the vacuum adapter shaft; the lower part of the vacuum adapter shaft is sleeved with a vacuum flange, a sealing ring is arranged in the vacuum flange, and the joint part between the vacuum flange and the vacuum adapter shaft can be sealed through the sealing ring.
The vacuum flange is internally provided with a flange adsorption channel which can be communicated with the adsorption channel in the rotating shaft, and the vacuum flange is also internally provided with a sealing gasket which can be sleeved on the motor shaft.
The motor shaft, the vacuum adapter shaft and the tray are coaxially distributed.
The sealing gasket and the sealing ring are both made of Teflon materials.
The utility model has the advantages that: an atmosphere channel is arranged on the outer ring of the vacuum channel area, an atmosphere channel hole is arranged in the atmosphere channel, the atmosphere pressure in the atmosphere channel can be the same as the atmospheric pressure by utilizing the atmosphere channel hole, namely, the pressure at the edge position where the silicon wafer is contacted with the tray is the same as the pressure in the atmosphere channel, and no pressure difference exists between the two positions, so that the photoresist cannot enter the vacuum channel area of the tray 1, and the photoresist is prevented from passing through the vacuum channel area to further cause the blockage in a vacuum valve and a vacuum pump; the photoresist can be stored by utilizing the liquid storage tank, so that the blockage of a vacuum valve and a vacuum pump caused by the fact that the photoresist enters a vacuum pipeline can be effectively prevented, and the photoresist storage tank is convenient to use, safe and reliable.
Drawings
Fig. 1 is a perspective view of the present invention.
Fig. 2 is a cross-sectional view of the present invention.
Fig. 3 is an enlarged view of a in fig. 2.
Description of reference numerals: 1-tray, 2-vacuum idle connecting shaft, 3-sealing ring, 4-vacuum flange, 5-sealing gasket, 6-liquid storage tank, 7-silicon chip, 8-motor shaft, 9-atmosphere channel, 10-atmosphere channel hole, 11-vacuum channel, 12-channel connecting groove, 13-tray vacuum adsorption hole, 14-flange adsorption channel, 15-tray connecting sleeve, 16-step, 17-rotary shaft adsorption channel and 18-rotary shaft limiting plate.
Detailed Description
The invention is further described with reference to the following specific drawings and examples.
As shown in fig. 1, 2 and 3: in order to effectively prevent the glue from entering a vacuum pipeline to cause the blockage of a vacuum valve and a vacuum pump, the utility model comprises a tray 1 and a plurality of vacuum channel areas arranged in the central area of the tray 1; still set up atmosphere channel 9 in the tray 1, atmosphere channel 9 is located the outer lane of vacuum channel district, and atmosphere channel 9 encircles and surrounds the vacuum channel district sets up a plurality of atmosphere channel holes 10 in atmosphere channel 9, atmosphere channel hole 10 link up the tray 1 that corresponds with atmosphere channel 9.
Specifically, tray 1 is discoid, and the vacuum channel district is located the center district of tray 1, can realize the absorption to silicon chip 7 on the tray 1 through the vacuum channel district, and atmosphere channel 9 is located the outer lane of vacuum channel district in tray 1, and atmosphere channel 9 encircles and surrounds the vacuum channel district, sets up atmosphere channel hole 10 in atmosphere channel 9, and atmosphere channel hole 10 link up tray 1. When the silicon wafer 7 is adsorbed on the tray 1, the edge of the outer ring of the silicon wafer 7 is positioned on the outer ring of the atmosphere channel 9, at the moment, the pressure at the edge position where the silicon wafer 7 is contacted with the tray 1 is the same as the pressure in the atmosphere channel 9, and no pressure difference exists between the two positions, so that the photoresist cannot enter a vacuum channel area of the tray 1, and the photoresist is prevented from passing through the vacuum channel area and further causing the blockage in a vacuum valve and a vacuum pump. In addition, the area of the atmospheric channel 9 is much smaller than the area of the vacuum channel area, and therefore, the adsorption of the silicon wafer 7 on the tray 1 is not affected, i.e., the silicon wafer 7 can rotate at a high speed following the tray 1.
Further, the vacuum channel section includes a plurality of annular vacuum channels 11, the vacuum channels 11 are communicated with each other through channel connecting grooves 12, a tray vacuum suction hole 13 is provided in a central area of the tray 1, and the tray vacuum suction hole 13 is communicated with the vacuum channels 11 and the channel connecting grooves 12.
The embodiment of the utility model provides an in, vacuum channel 11 is the annular, and through being the mutual intercommunication of cross channel spread groove 12 between vacuum channel 11, vacuum adsorption hole 13 and vacuum channel 11 and channel spread groove 12 intercommunication to can produce through vacuum adsorption hole 13 and can carry out absorbent negative pressure to silicon chip 7 in vacuum channel 11 and channel spread groove 12.
Further, the tray device also comprises a vacuum adapter shaft 2 which can be in adaptive connection with the tray 1, wherein the vacuum adapter shaft 2 can extend into a tray connecting sleeve 15 of the tray 1, and the vacuum adapter shaft 2 is tightly connected with the tray connecting sleeve 15 of the tray 1; an in-shaft suction passage 17 capable of communicating with the tray vacuum suction hole 13 is provided in the vacuum adapter shaft 2.
The embodiment of the utility model provides an in, set up tray adapter sleeve 15 at the back of tray 1, vacuum switching shaft 2 can get into in the tray adapter sleeve 15, through the zonulae occludens of true idle spiale 2 and tray adapter sleeve 15, can realize the fastening connection between true idle spiale 2 and whole tray 1. The vacuum suction shaft 2 is internally provided with a rotating shaft inner suction channel 17, namely the vacuum suction shaft inner suction channel 17 can be conveniently connected with an external vacuum system, namely a vacuum state is generated in the rotating shaft inner suction channel 17, and then the vacuum state is generated in the tray vacuum suction hole 13.
Further, a liquid storage tank 6 is arranged at the end part of the vacuum adapter shaft 2 entering the tray connecting sleeve 15, the liquid storage tank 6 is positioned below the tray vacuum adsorption hole 13, and the adsorption channel 17 in the rotating shaft is positioned at the outer ring of the liquid storage tank 6.
The embodiment of the utility model provides an in, reservoir 6 is located true idle spiale 2, reservoir 6 is located the below in tray vacuum adsorption hole 13, reservoir 6 and pivot in adsorption channel 17 and tray vacuum adsorption hole 13 intercommunication, when photoresist gets into in the vacuum channel 11 and then get into tray vacuum adsorption hole 13 in, the photoresist that gets into in the tray vacuum adsorption hole 13 can fall into reservoir 6 in, avoid the photoresist to get into in the pivot in the adsorption channel 17, further can avoid the jam of photoresist to vacuum valve and vacuum pump.
In specific implementation, the vacuum rotary connecting shaft 2 is provided with a step 16 in the end part of the tray connecting sleeve 15, and the step 16 can be communicated with the liquid storage tank 6, the adsorption channel 17 in the rotary shaft and the tray vacuum adsorption hole 13. The embodiment of the utility model provides an in, can realize reservoir 6 and pivot in through step 16 and adsorb 17's intercommunication, utilize step 16 also to improve reservoir 6 to the storage capacity of photoresist, the abnormal operation leads to having a small amount of glues to get into tray 1 promptly, the glue that gets into tray 1 so can fall into reservoir 6 and can not get into the vacuum gas circuit.
Further, the vacuum transfer device also comprises a motor shaft 8 which can be matched with the vacuum transfer shaft 2, wherein the motor shaft 8 can be embedded in the vacuum transfer shaft 2, and the motor shaft 8 is tightly contacted with the vacuum transfer shaft 2; a vacuum flange 4 is sleeved on the lower part of the vacuum adapter shaft 2, a sealing ring 3 is arranged in the vacuum flange 4, and the joint part between the vacuum flange 4 and the vacuum adapter shaft 2 can be sealed through the sealing ring 3.
In the embodiment of the utility model provides an in, be coaxial distribution between motor shaft 8, vacuum transfer shaft 2 and tray 1. The length of the adsorption channel 17 in the rotating shaft on the vacuum adapter shaft 2 is less than that of the vacuum adapter shaft 2, the adapter shaft 2 is provided with an adapter limiting plate 18, and the adapter limiting plate 18 can be matched with the vacuum flange 4. The vacuum adapter shaft 2 is used for connecting the tray 1 and the motor shaft 8, and the vacuum adapter shaft 2 and the tray 1 can rotate at a high speed under the drive of the motor shaft 8.
A flange adsorption channel 14 which can be communicated with an adsorption channel 17 in the rotating shaft is arranged in the vacuum flange 4, a sealing gasket 5 is also arranged in the vacuum flange 4, and the sealing gasket 5 can be sleeved on the motor shaft 8. The embodiment of the utility model provides an in, sealing ring 3, sealed 5 adoption teflon materials of filling up are made, install in vacuum flange 4, play sealed effect.
Claims (9)
1. A vacuum glue homogenizing device of a glue homogenizing machine comprises a tray (1) and a plurality of vacuum channel areas arranged in the central area of the tray (1); the method is characterized in that: still set up atmosphere channel (9) in tray (1), atmosphere channel (9) are located the outer lane of vacuum channel district, and surround in atmosphere channel (9) the vacuum channel district sets up a plurality of atmosphere channel holes (10) in atmosphere channel (9), tray (1) that correspond with atmosphere channel (9) are link up in atmosphere channel hole (10).
2. The vacuum spin coater of claim 1, wherein: the vacuum channel zone comprises a plurality of annular vacuum channels (11), the vacuum channels (11) are communicated with each other through channel connecting grooves (12), a tray vacuum adsorption hole (13) is arranged in the central area of the tray (1), and the tray vacuum adsorption hole (13) is communicated with the vacuum channels (11) and the channel connecting grooves (12).
3. The vacuum spin coater of claim 2, wherein: the tray connecting device is characterized by further comprising a true idle connecting shaft (2) which can be in adaptive connection with the tray (1), wherein the true idle connecting shaft (2) can extend into a tray connecting sleeve (15) of the tray (1), and the true idle connecting shaft (2) is tightly connected with the tray connecting sleeve (15) of the tray (1); an inner rotary shaft adsorption channel (17) which can be communicated with the tray vacuum adsorption hole (13) is arranged in the vacuum adapter shaft (2).
4. The vacuum spin coater of claim 3, wherein: a liquid storage tank (6) is arranged in the end part of the vacuum adapter shaft (2) entering the tray connecting sleeve (15), the liquid storage tank (6) is positioned below the vacuum adsorption hole (13) of the tray, and an adsorption channel (17) in the rotating shaft is positioned on the outer ring of the liquid storage tank (6).
5. The vacuum spin coater of claim 4, wherein: the vacuum idle connecting shaft (2) is arranged in the end part of the tray connecting sleeve (15), and a step (16) is arranged in the end part, and the step (16) can be communicated with the liquid storage tank (6), the adsorption channel (17) in the rotating shaft and the vacuum adsorption hole (13) of the tray.
6. The vacuum spin coater of claim 3, wherein: the vacuum transfer shaft is characterized by also comprising a motor shaft (8) which can be matched with the true idle connecting shaft (2), wherein the motor shaft (8) can be embedded in the vacuum transfer shaft (2) and the motor shaft (8) is tightly contacted with the true idle connecting shaft (2); the lower part of the vacuum adapter shaft (2) is sleeved with a vacuum flange (4), a sealing ring (3) is arranged in the vacuum flange (4), and the joint between the vacuum flange (4) and the vacuum adapter shaft (2) can be sealed through the sealing ring (3).
7. The vacuum spin coater of claim 6, wherein: a flange adsorption channel (14) which can be communicated with the adsorption channel (17) in the rotating shaft is arranged in the vacuum flange (4), a sealing gasket (5) is further arranged in the vacuum flange (4), and the sealing gasket (5) can be sleeved on the motor shaft (8).
8. The vacuum spin coater of claim 6, wherein: the motor shaft (8), the vacuum transfer shaft (2) and the tray (1) are coaxially distributed.
9. The vacuum spin coater of claim 7, wherein: the sealing gasket (5) and the sealing ring (3) are both made of Teflon materials.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920689435.XU CN209985708U (en) | 2019-05-15 | 2019-05-15 | Vacuum glue homogenizing device of glue homogenizing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920689435.XU CN209985708U (en) | 2019-05-15 | 2019-05-15 | Vacuum glue homogenizing device of glue homogenizing machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209985708U true CN209985708U (en) | 2020-01-24 |
Family
ID=69294119
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920689435.XU Active CN209985708U (en) | 2019-05-15 | 2019-05-15 | Vacuum glue homogenizing device of glue homogenizing machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209985708U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110052370A (en) * | 2019-05-15 | 2019-07-26 | 苏州美图半导体技术有限公司 | Sol evenning machine vacuum spin coating device |
-
2019
- 2019-05-15 CN CN201920689435.XU patent/CN209985708U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110052370A (en) * | 2019-05-15 | 2019-07-26 | 苏州美图半导体技术有限公司 | Sol evenning machine vacuum spin coating device |
| CN110052370B (en) * | 2019-05-15 | 2024-04-02 | 苏州美图半导体技术有限公司 | Vacuum glue homogenizing device of glue homogenizing machine |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110052370B (en) | Vacuum glue homogenizing device of glue homogenizing machine | |
| CN201896027U (en) | Vacuum sucking disc | |
| CN209985708U (en) | Vacuum glue homogenizing device of glue homogenizing machine | |
| CN208482742U (en) | A kind of multi-functional photoetching vacuum chuck | |
| CN113611653B (en) | Multi-gas-path adsorption device | |
| WO2013097301A1 (en) | Online automatic balancer for air pressure liquid-type rotor | |
| CN105332992A (en) | Vacuum sucker | |
| AU2003238711B2 (en) | Method and apparatus for filling a dye sensitized solar cell with electrolyte | |
| CN102259083A (en) | Spin-coating method of thick film used in semiconductor packaging | |
| WO2022213806A1 (en) | Coal mine roadway crawling apparatus based on wheel-type negative pressure suction mechanism | |
| CN104970920A (en) | Waist-surrounding straight transposition wheel adsorbing air chamber structure | |
| CN102151643B (en) | Centrifugal machine with lifting type centring device | |
| CN211629051U (en) | Even tray of gluing suitable for multiple size wafer | |
| CN110560282B (en) | Spin coating device | |
| CN214812275U (en) | Automatic rubber coating developing unit | |
| CN211099938U (en) | Microscope carrier turnover mechanism, dispensing device and display screen production line | |
| JP2003257909A (en) | Processing device of semiconductor wafer | |
| CN114220762A (en) | Semiconductor process equipment and wafer transmission device thereof | |
| CN107061833B (en) | Uniformly distributed ring pressure type sealing valve and encapsulating method | |
| CN116078625B (en) | Ultra-thin substrate adsorption structure and even machine of gluing | |
| CN106382380B (en) | Pump for inflating tire switching valve and external module with the switching valve | |
| CN218631981U (en) | Carrier for wafer double-side glue homogenizing and wafer glue homogenizing device | |
| CN210746939U (en) | Automatic bread slicing device | |
| CN218057447U (en) | Rotary self-sealing negative pressure adsorption mechanism | |
| CN219822884U (en) | Annular suction nozzle mechanism |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |