CN209860347U - 一种vcsel激光器 - Google Patents
一种vcsel激光器 Download PDFInfo
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- CN209860347U CN209860347U CN201921119037.0U CN201921119037U CN209860347U CN 209860347 U CN209860347 U CN 209860347U CN 201921119037 U CN201921119037 U CN 201921119037U CN 209860347 U CN209860347 U CN 209860347U
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- 239000010410 layer Substances 0.000 claims description 321
- 239000011241 protective layer Substances 0.000 claims description 24
- 239000000758 substrate Substances 0.000 claims description 22
- 239000002184 metal Substances 0.000 claims description 18
- 230000003647 oxidation Effects 0.000 claims description 11
- 238000007254 oxidation reaction Methods 0.000 claims description 11
- 238000005530 etching Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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CN201921119037.0U CN209860347U (zh) | 2019-07-17 | 2019-07-17 | 一种vcsel激光器 |
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CN201921119037.0U CN209860347U (zh) | 2019-07-17 | 2019-07-17 | 一种vcsel激光器 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110233425A (zh) * | 2019-07-17 | 2019-09-13 | 厦门乾照半导体科技有限公司 | 一种vcsel激光器及其制作方法 |
CN112615256A (zh) * | 2020-12-23 | 2021-04-06 | 厦门市三安集成电路有限公司 | 一种垂直腔面发射激光器 |
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2019
- 2019-07-17 CN CN201921119037.0U patent/CN209860347U/zh not_active Withdrawn - After Issue
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110233425A (zh) * | 2019-07-17 | 2019-09-13 | 厦门乾照半导体科技有限公司 | 一种vcsel激光器及其制作方法 |
CN110233425B (zh) * | 2019-07-17 | 2023-12-15 | 厦门乾照光电股份有限公司 | 一种vcsel激光器及其制作方法 |
CN112615256A (zh) * | 2020-12-23 | 2021-04-06 | 厦门市三安集成电路有限公司 | 一种垂直腔面发射激光器 |
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Effective date of registration: 20200123 Address after: 361101 Xiangtian Road 259-269, Xiamen Torch High-tech Zone (Xiangan) Industrial Zone, Xiamen City, Fujian Province Patentee after: Xiamen Changelight Co.,Ltd. Address before: 361001 Xiangtian Road 267, Xiangtan Industrial Zone, Xiamen Torch High-tech Zone, Fujian Province Patentee before: XIAMEN QIANZHAO SEMICONDUCTOR TECHNOLOGY Co.,Ltd. |
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AV01 | Patent right actively abandoned |
Granted publication date: 20191227 Effective date of abandoning: 20231215 |
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AV01 | Patent right actively abandoned |
Granted publication date: 20191227 Effective date of abandoning: 20231215 |
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AV01 | Patent right actively abandoned | ||
AV01 | Patent right actively abandoned |