CN209708938U - Plasma fluidizes bed powder treatment device - Google Patents
Plasma fluidizes bed powder treatment device Download PDFInfo
- Publication number
- CN209708938U CN209708938U CN201920566003.XU CN201920566003U CN209708938U CN 209708938 U CN209708938 U CN 209708938U CN 201920566003 U CN201920566003 U CN 201920566003U CN 209708938 U CN209708938 U CN 209708938U
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- China
- Prior art keywords
- bed body
- fluidized bed
- round tube
- variable diameter
- microwave
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Abstract
The utility model provides a kind of plasma fluidisation bed powder treatment device, comprising: the variable diameter fluidized bed body being uprightly arranged is made of the round tube of at least two sections different inner diameters;Microwave generator;Open the rectangular waveguide of circular hole;The microwave that microwave magnetron generates is coupled into variable diameter fluidized bed body by rectangular waveguide, and plasma is generated inside bed body;Gas system is presented, fills into single or mixed gas to variable diameter fluidized bed body mouth;Cyclone separator, to recycle powder and recirculate.Gas outlet at the top of variable diameter fluidized bed body is connect with the air inlet of vacuum meter, vent valve and cyclone separator respectively via a four-way pipe, and the gas outlet of cyclone separator is connected to vacuum pump by angle valve and accuracy controlling valve in parallel;The meal outlet of cyclone separator is connected to by circulation conduit with the side of variable diameter fluidized bed body.It is provided with gas distributor between the bottom circular tube and air inlet of variable diameter fluidized bed body, to make air flow method uniformly and carry powder.
Description
Technical field
The utility model relates to powder handling technical fields, fluidize bed powder handling in particular to a kind of plasma
Device.
Background technique
Inorganic powder materials are carried out with surface is modified, regulates and controls the electric conductivity on its surface, thermal conductivity, refractive index, wellability, hard
Degree, chemical activity etc. can obviously improve the performances such as dispersion, stabilization, enhancing, electricity, calorifics, optics, the catalysis of dusty material, open up
Open up its application range.
Since heat and mass is high-efficient, uniform feature is handled, the processing of powder has been obtained in fluidization
It is widely applied.And gas molecule free radical is generated by electric discharge, the reaction that plasma technique can greatly improve gas is living
Property, it is a kind of efficient process for treating surface.The characteristics of the two, is combined, one kind is developed and is provided simultaneously with powder fluidisation, gas
The powder processing of volume ionization and heating, can provide more controllabilities, which has broader for powder-processed
Processing capacity.
In the prior art to the powder handling device (Publication No. CN206595225U) that this is developed, propose a kind of microwave etc. from
Daughter powder handling device, including the tubular type microwave plasma source made of quartz, ceramics or heat resistant glass medium, tubular type microwave
Plasma source passes through the face H of microwave rectangular waveguide, and one end of rectangular waveguide connects microwave source, the other end connection of rectangular waveguide
Adjustable short board, the upper and lower ends across the medium tube in the face H of microwave rectangular waveguide are close by water-cooled metal flange and O shape cushion rubber
Envelope forms vacuum chamber, and the fluidized bed (fluidized bed cup) of cupuliform made of the quartz (or ceramics) of processing powder is placed increasing,
Constitute a kind of microwave plasma powder handling device.With this device, inorganic material powder is placed into fluidized bed cup, in tubular type
The high density plasma region (in plasma ball) of microwave plasma source carry out surface clean, purification, activation, hydrogenation,
The processing such as etching, grafting, deposition and other functionalization.
But practical in use, which needs mating independent heating device, and its fluidized bed uses bottom
Air inlet and outlet, pipe design is complicated, and gas enters after duct type fluidized bed from bottom to be needed to flow in the gap of bed body two sides
Getting off again from bottom outlet, the outlet setting cyclone separator in bottom carries out powder and gas separation, gas is discharged, but I
See that this design can not effectively capture the powder in escaping gas, effective recycling cannot be played, with
The powder of gas evolution is also easy to accumulate in pipe, causes inefficiency or blocking.
Utility model content
The utility model aim is to provide a kind of plasma fluidisation bed powder treatment device, comprising: is uprightly arranged
Variable diameter fluidized bed body is made of the round tube of at least two sections different inner diameters, and the caliber of round tube is incremented by successively from the bottom to top;The variable diameter
Gas outlet is provided at the top of fluidized bed body, bottom is provided with air inlet;Microwave generator is generated micro- by microwave magnetron
Wave;Coupling device is configured to open the rectangular waveguide of circular hole up and down, and the variable diameter fluidized bed body passes through the circular hole;The microwave
The microwave that magnetron generates is coupled into variable diameter fluidized bed body by rectangular waveguide, and plasma is generated inside bed body;Present gas
System is provided through air delivering pipeline to the air inlet of the variable diameter fluidized bed body and fills into single or mixed gas;Whirlwind point
From device, it is arranged to recycling powder and is re-circulated into variable diameter fluidized bed body;Wherein, at the top of the variable diameter fluidized bed body
Gas outlet is connect with the air inlet of vacuum meter, vent valve and cyclone separator respectively via a four-way pipe, and cyclone separator goes out
Port is connected to vacuum pump by angle valve and accuracy controlling valve in parallel;The meal outlet of cyclone separator is by circulation conduit and becomes
The side of diameter fluidized bed body is connected to, and reenters fluidized bed body so that being recovered by the powder that cyclone separator is isolated;Institute
It states and is provided with gas distributor between the bottom circular tube and air inlet of variable diameter fluidized bed body, to make air flow method uniformly and carry
Powder;Wherein, the microwave generator is further configured to make the heating of reaction chamber in variable diameter fluidized bed body by microwave heating
Temperature reaches 500 DEG C or more.
In further embodiment, it is used to control the device of gas flow in the feedback gas system at least one, it should
Device is mass flow controller MFC, especially numeric type mass flow controller, for carrying out essence for gas mass flow
Close measurement and control.
In further embodiment, the variable diameter fluidized bed body have the first round tube and the second round tube, the first round tube it is straight
Diameter is greater than the diameter of the second round tube, and the junction of the first round tube and the second round tube is located at the circular hole on the rectangular waveguide top
Place.Preferably, the junction of first round tube and the second round tube includes a hollow round table, larger-diameter one end and first
The edge of round tube is fixed, and smaller direct one end and the edge of the second round tube are fixed, so that during the powder in the first round tube passes through
The sloped transition of empty rotary table is flowed into the second round tube.
It is designed in this way, ensures that on the one hand inspiring plasma in bed body is fluidized, it is on the other hand also logical
It crosses microwave to heat the intracorporal reaction chamber of bed, obtains larger, ideal temperature rise, traditional extra heavy pipe diameter bring is avoided to excite
Flame passes are undesirable and cannot effectively carry out the problem of being heated to predetermined temperature range, it is also necessary to heating device additionally be arranged
(the CN206595225U powder handling device of the prior art).
In conjunction with above technical scheme, the remarkable advantage of the utility model is:
1, the bed body provided with bottom inflow, top outlet, the gas flow for being is smooth, single, avoids accumulating, Er Qieding
After portion is connected to cyclone separator by four-way pipe, powder separation directly is carried out to gas, it is direct by inclined circulation line
It is input in bed body, then is recycled, increased operation rate;And cyclone separator, vacuum meter and vent valve are then passed through very
Empty set system, realizes vacuum environment;
2, gas generator is set in bed body bottom inflow section, makes air flow method uniformly and carries powder;
3, fluidized bed bed body is especially thinner in the part for entering rectangular waveguide using being made of the round tube of different-diameter
Round tube, it is ensured that the excitation of plasma and can to obtain ideal 500-800 by microwave heating Celsius under pressure action
The temperature-rise effect of degree, without heater is additionally arranged again.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the plasma fluidisation bed powder treatment device of the utility model embodiment.
The meaning of each appended drawing reference is as follows in diagram:
1- variable diameter fluidized bed body;2- microwave generator;3- cyclone separator;The first round tube of 4A-;The second round tube of 4B-;4C-
Third round tube;5- gas generator;6- rectangular waveguide;7- fluidized bed gas outlet;8- vacuum meter;9- vent valve;10- cyclonic separation
Device gas outlet;11- angle valve;12- controlling valve;13- vacuum pump;14- fluidizer air inlet;15- mass flow controller MFC;16-
Cyclone separator air inlet;18- meal outlet;19- circulation conduit;20- gas cylinder.
Specific embodiment
In order to know more about the technology contents of the utility model, spy lifts specific embodiment and institute's accompanying drawings is cooperated to be described as follows.
It is described with reference to the various aspects of the utility model in the disclosure, shown in the drawings of the implementation of many explanations
Example.It is not intended to cover all aspects of the utility model for embodiment of the disclosure.It should be appreciated that a variety of structures presented hereinbefore
Think and embodiment, and those of describe in more detail below design and embodiment can in many ways in any one
To implement.In addition, some aspects disclosed by the utility model can be used alone, or with its other party disclosed by the utility model
Any of face appropriately combined uses.
As shown in connection with fig. 1, the utility model proposes plasma fluidisation bed powder treatment device include uprightly being arranged
Variable diameter fluidized bed body 1, the bed body are made of the round tube (4A, 4B) of at least two sections different inner diameters, the caliber of round tube from the bottom to top according to
It is secondary to be incremented by.In Fig. 1, the top of variable diameter fluidized bed body 1 is provided with gas outlet 7, and bottom is provided with air inlet 14.
Present gas system and air inlet 14 be linked by air delivering pipeline, to the air inlet of variable diameter fluidized bed body 1 fill into it is single or
Reaction chamber inside person's mixed gas to variable diameter fluidized bed body 1.
As shown in Figure 1, feedback gas system has multiple gas cylinders 20, for providing gas supply.Between gas cylinder and air inlet also
It is mass flow controller MFC that at least one, which is provided with, for controlling the device of gas flow, the device, is especially preferably counted
Font mass flow controller, for carrying out accurate measurement and control for gas mass flow.
In conjunction with Fig. 1, microwave generator 2, as microwave source, for generating microwave by microwave magnetron.Preferably, micro-
The side of variable diameter fluidized bed body 1 is arranged in wave producer.
Microwave Power Transmission and distribution are realized in one coupling device and the cooperation of microwave generator 2.In embodiment shown in FIG. 1,
The side of variable diameter fluidized bed body 1 is arranged in coupling device, and with microwave generator the same side, the rectangular wave of circular hole is opened for about one
4 are led, variable diameter fluidized bed body 1 passes through upper and lower two circular holes.The microwave that microwave magnetron 2 generates is coupled by rectangular waveguide 4
Variable diameter fluidized bed body, generates plasma inside bed body, fluidizes to powder.
In example shown in FIG. 1, the power of microwave magnetron is 1KW.Microwave generator is also arranged for variable diameter stream
Change bed body and carry out microwave heating, so that the intracorporal temperature of bed increases.
One cyclone separator 3, is arranged in the top of the other side of variable diameter fluidized bed body 1, to recycle powder and follow again
Ring enters variable diameter fluidized bed body 1.
In conjunction with Fig. 1, the gas outlet 7 at 1 top of variable diameter fluidized bed body via a four-way pipe respectively with vacuum meter 8, vent valve 9 and
The air inlet 16 of cyclone separator 3 connects, and the gas outlet 10 of cyclone separator passes through angle valve 11 and accuracy controlling valve 12 in parallel
It is connected to vacuum pump 13, to realize that holding and the vacuum degree of vacuum environment are adjusted.Accuracy controlling valve 12 is needle valve or metering valve.
The meal outlet 18 of cyclone separator 3 is connected to by circulation conduit 19 with the side of variable diameter fluidized bed body 1, so that passing through
The powder that cyclone separator 3 is isolated, which is recovered, reenters fluidized bed body, so that from the gas outlet at 1 top of variable diameter fluidized bed body
The powder being mingled in 7 escaping gas is recycled in recycling.
Such as Fig. 1, it is provided with gas distributor 5 between the bottom circular tube 4B and air inlet 14 of variable diameter fluidized bed body, to make
Air flow method is uniform and carries powder.
During the realization of the utility model, by the cooperation of the two-part round tube, and the round tube of bottom is (relatively thin round
Pipe) it is located at the space that rectangular waveguide is surrounded, microwave generator also passes through microwave heating and makes reaction chamber in variable diameter fluidized bed body
Heating temperature reach 500 DEG C or more, realize stably and controllable temperature-rise effect.Certainly, in an alternate embodiment of the invention, tune can be passed through
The power for saving microwave generator realizes that temperature rise and plasma occur.
In conjunction with Fig. 1, it is preferable that variable diameter fluidized bed body 1 has the first round tube 4A and the second round tube 4B, and the first round tube 4A's is straight
Diameter D is greater than the diameter d of the second round tube 4B, and the junction of the first round tube 4A and the second round tube 4B are located at 6 top of rectangular waveguide
At circular hole.
The junction of first round tube 4A and the second round tube 4B include a hollow round table 4C, larger-diameter one end and first
The edge of round tube 4A is fixed, and smaller direct one end and the edge of the second round tube 4B are fixed, so that the powder in the first round tube is logical
The sloped transition for crossing hollow round table is flowed into the second round tube.
In some preferred embodiments, the diameter d of the second round tube and the diameter D of the first round tube meet: D/3≤d≤D/
2.In example shown in FIG. 1, the diameter d of the second round tube 4B is 20-30mm.
As shown in connection with fig. 1, the powder handling dress of the utility model is introduced by taking graphene coated silicon nanoparticle as an example below
The processing set.
1. the silicon powder for weighing 2g partial size 50nm is put into from bed body top to gas distributor, vacuum line system is connected
Vacuum flange;
2. starting vacuum pump, adjusting angle valve and needle valve makes pressure in fluidized bed body be slowly dropped to 10Pa or less.At this point,
100sccm methane, 100sccm hydrogen and 100sccm argon gas are passed through fluidized bed body through MFC control respectively, and silicon powder is made to form fluidisation;
3. starting microwave generator, microwave plasma is inspired in fluidized bed body;It is adjusting gas flow, pressure, micro-
The parameters such as wave power reach technique requirement.After sixty minutes, microwave power supply and methane, the air intake valve of hydrogen, in argon are sequentially switched off
The protection decline of gas warms to room temperature.
4. finally opening deflation valve, makes to reach atmospheric pressure in reaction chamber, dismantle vacuum flange, the silicon powder handled well is taken
Out.
Although the utility model has been disclosed with preferred embodiment as above, so it is not intended to limit the utility model.This reality
It is without departing from the spirit and scope of the utility model, each when that can make with novel those of ordinary skill in the art
Kind changes and retouches.Therefore, the protection scope of the utility model is subject to view those as defined in claim.
Claims (9)
1. a kind of plasma fluidizes bed powder treatment device characterized by comprising
The variable diameter fluidized bed body being uprightly arranged, is made of the round tube of at least two sections different inner diameters, the caliber of round tube from the bottom to top according to
It is secondary to be incremented by;It is provided with gas outlet at the top of the variable diameter fluidized bed body, bottom is provided with air inlet;
Microwave generator generates microwave by microwave magnetron;
Coupling device is configured to open the rectangular waveguide of circular hole up and down, and the variable diameter fluidized bed body passes through the circular hole;The microwave
The microwave that magnetron generates is coupled into variable diameter fluidized bed body by rectangular waveguide, and plasma is generated inside bed body;
Gas system is presented, air delivering pipeline is provided through to the air inlet of the variable diameter fluidized bed body and fills into single or gaseous mixture
Body;
Cyclone separator is arranged to recycling powder and is re-circulated into variable diameter fluidized bed body;
Wherein, the gas outlet at the top of the variable diameter fluidized bed body is divided with vacuum meter, vent valve and whirlwind respectively via a four-way pipe
The gas outlet of air inlet connection from device, cyclone separator is connected to vacuum pump by angle valve and accuracy controlling valve in parallel;Rotation
The meal outlet of wind separator is connected to by circulation conduit with the side of variable diameter fluidized bed body, so that being isolated by cyclone separator
Powder be recovered and reenter fluidized bed body;
It is provided with gas distributor between the bottom circular tube and air inlet of the variable diameter fluidized bed body, to keep air flow method uniform
And carry powder;
Wherein, the microwave generator is also arranged for carrying out microwave heating to variable diameter fluidized bed body, is made by microwave heating
The heating temperature for obtaining reaction chamber in variable diameter fluidized bed body reaches 500 DEG C or more.
2. plasma according to claim 1 fluidizes bed powder treatment device, which is characterized in that in the feedback gas system
It is used to control the device of gas flow at least one, which is mass flow controller MFC.
3. plasma according to claim 1 fluidizes bed powder treatment device, which is characterized in that the accuracy controlling valve
For needle valve or metering valve.
4. plasma described in any one of -3 fluidizes bed powder treatment device according to claim 1, which is characterized in that institute
Variable diameter fluidized bed body is stated with the first round tube and the second round tube, the diameter of the first round tube is greater than the diameter of the second round tube, and first
The junction of round tube and the second round tube is located at the circular hole on the rectangular waveguide top.
5. plasma according to claim 4 fluidizes bed powder treatment device, which is characterized in that first round tube with
The junction of second round tube includes a hollow round table, and larger-diameter one end and the edge of the first round tube are fixed, smaller directly
One end and the edge of the second round tube fix so that the powder in the first round tube is flowed by the sloped transition of hollow round table
In two round tubes.
6. plasma according to claim 4 fluidizes bed powder treatment device, which is characterized in that second round tube position
In in the space that the rectangular waveguide is surrounded.
7. plasma according to claim 4 fluidizes bed powder treatment device, which is characterized in that second round tube
The diameter D of diameter d and the first round tube meets: D/3≤d≤D/2.
8. plasma according to claim 4 fluidizes bed powder treatment device, which is characterized in that second round tube
Diameter d is 20-30mm.
9. plasma according to claim 8 fluidizes bed powder treatment device, which is characterized in that the microwave magnetron
Power be 1KW.
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CN110010436A (en) * | 2019-04-24 | 2019-07-12 | 南京奥依菲光电科技有限公司 | Plasma fluidizes bed powder treatment device |
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CN110010436A (en) * | 2019-04-24 | 2019-07-12 | 南京奥依菲光电科技有限公司 | Plasma fluidizes bed powder treatment device |
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Granted publication date: 20191129 |