CN209676143U - A kind of micromotion platform - Google Patents
A kind of micromotion platform Download PDFInfo
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- CN209676143U CN209676143U CN201920691616.6U CN201920691616U CN209676143U CN 209676143 U CN209676143 U CN 209676143U CN 201920691616 U CN201920691616 U CN 201920691616U CN 209676143 U CN209676143 U CN 209676143U
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- fixed
- flexible connecting
- micromotion
- displacement output
- push rod
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Abstract
This application discloses a kind of micromotion platforms, including moving platform, displacement output device, flexible connecting device and mounting seat；Wherein displacement output device includes: fixed bracket, piezoelectric ceramic actuator, high steel spring, push rod and pre-tightening apparatus.The application using piezoelectric ceramics and high steel spring composition can quick dynamic regulation driving structure, realize the accurate displacement output that accumulated error is small and complicated link is few.Pre-tightening apparatus is arranged simultaneously to be changed the pretightning force of piezoelectric ceramic actuator, be conducive to the movenent performance for improving micromotion platform and realizes motion control.
Description
Technical field
This application involves precision processing technology field more particularly to a kind of micromotion platforms.
Background technique
With the fast development of modern science and technology, precise jiggle platform is in MEMS, ultra precise measurement and machinery
The application of the micro & nano technologies fields such as manufacture, micro-nano processing, scanning probe microscopy, Optical element manufacturing and biomedical engineering
It is more and more extensive.Therefore, precise jiggle platform be developed into for people study microscopic fields important link.For example, litho machine
Typical case as precision surface plate is the key equipment of core the most in IC industry, and precise jiggle platform conduct
Multiple degrees of freedom positioning and correction compensation mechanism in Optical Coatings for Photolithography are to realize photoetching standard line width, obtain high quality litho pattern
The most important condition, determine the final photoetching resolution of litho machine, be realize Nano grade precision positioning core condition.
The driving method of existing motion platform is mostly driven with hydraulic-driven and air pressure, although thrust is big, precision is low
And hydraulic or air pressure the circulatory system is needed, it is not suitable for lesser micromotion platform structure.
Utility model content
The application's is designed to provide a kind of micromotion platform, solves the problems, such as that error is big, precision low technical.
In view of this, this application provides a kind of micromotion platform, including moving platform, displacement output device, flexible connection dress
It sets and mounting seat；
The displacement output device includes: fixed bracket, piezoelectric ceramic actuator, high steel spring, push rod and pre-tightens dress
It sets；
The fixed bracket is fixed in the mounting seat；
The push rod includes contact portion, shaft and interconnecting piece, and the cross-sectional area of the contact portion is greater than the cross of the shaft
Sectional area；
One end of the piezoelectric ceramic actuator is fixed on the fixed bracket, and the other end is contacted with the contact portion；
The pre-tightening apparatus includes the cylindric preload portion for offering axially extending bore, the outer surface in the preload portion with it is described
Fixed bracket is threadedly coupled, and the push rod is passed through from the axially extending bore；
The high steel spring is socketed on the shaft, and one end is against on the contact portion, and the other end and the preload fill
Set contact；
The interconnecting piece is connect by the flexible connecting device with the moving platform.
Preferably, the pre-tightening apparatus further includes pre-load nut, and the pre-load nut is fixedly connected with the preload portion.
Optionally, the fixed bracket is specially hollow cylindrical sleeve, and the piezoelectric ceramic actuator is fixed on institute
State inside cylindrical sleeve, and with the cylindrical sleeve coaxial cooperation.
Optionally, the flexible connecting device is threadedly coupled with the interconnecting piece of the push rod.
Optionally, the flexible connecting device is fixed on the moving platform surface by screw.
Preferably, the number of the displacement output device and the flexible connecting device is 3；
The moving platform surface shape is triangle；
3 displacement output devices pass through 3 vertex that 3 flexible connecting devices are fixed on the moving platform respectively；
Preferably, the moving platform surface is equilateral triangle.
Optionally, the flexible connecting device includes straight circular flexible hinge.
Compared with prior art, it is the advantages of the embodiment of the present application:
In the embodiment of the present application, a kind of micromotion platform, including moving platform, displacement output device, flexible connection dress are provided
It sets and mounting seat；Wherein displacement output device includes: fixed bracket, piezoelectric ceramic actuator, high steel spring, push rod and pre-
Tight device.The application using piezoelectric ceramics and high steel spring composition can quickly dynamic regulation driving structure, realize accumulated error
The few accurate displacement output of small and complicated link.Pre-tightening apparatus is arranged simultaneously to change the pretightning force of piezoelectric ceramic actuator
Become, be conducive to the movenent performance for improving micromotion platform and realize motion control.
Detailed description of the invention
It, below will be to specific in order to illustrate more clearly of the application specific embodiment or technical solution in the prior art
Embodiment or attached drawing needed to be used in the description of the prior art be briefly described, it should be apparent that, it is described below
Attached drawing is some embodiments of the application, for those of ordinary skill in the art, before not making the creative labor
It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is the structural schematic diagram of micromotion platform provided by the embodiment of the present application；
Fig. 2 is the explosive view of micromotion platform provided by the embodiment of the present application；
Fig. 3 is the partial schematic diagram of micromotion platform provided by the embodiment of the present application.
Specific embodiment
It is clearly and completely described below in conjunction with technical solution of the attached drawing to the application, it is clear that described implementation
Example is some embodiments of the present application, instead of all the embodiments.Based on the embodiment in the application, ordinary skill
Personnel's every other embodiment obtained without making creative work, shall fall in the protection scope of this application.
In the description of the present application, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" be based on the orientation or positional relationship shown in the drawings, merely to
Convenient for describe the application and simplify description, rather than the device or element of indication or suggestion meaning must have a particular orientation,
It is constructed and operated in a specific orientation, therefore should not be understood as the limitation to the application.In addition, term " first ", " second ",
" third " is used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance.
Unless otherwise clearly defined and limited, term " installation ", " connected ", " connection " shall be understood in a broad sense, for example, can
To be to be fixedly connected, may be a detachable connection, or be integrally connected；It can be mechanical connection, be also possible to be electrically connected；It can
To be to be connected directly, the connection inside two elements can also be can be indirectly connected through an intermediary.For this field
For those of ordinary skill, the concrete meaning of above-mentioned term in this application can be understood with concrete condition.
It please refers to Fig.1 to Fig.3, Fig. 1 is the structural schematic diagram of micromotion platform provided by the embodiment of the present application, and Fig. 2 is this
Apply for that the explosive view of micromotion platform provided by embodiment, Fig. 3 are the part of micromotion platform provided by the embodiment of the present application
Schematic diagram.
The application devises a kind of micromotion platform, including moving platform 1, displacement output device, flexible connecting device 2 and installation
Pedestal 7.
Being displaced output device includes fixed bracket 5, piezoelectric ceramic actuator 6, high steel spring 9, push rod 4 and pre-tightening apparatus 3.
Fixed bracket 5 is fixed in mounting seat 7, for being supported to entire displacement output device.Optionally, fixed
Bracket is fixed in mounting seat by 4 screws.
Push rod 4 includes contact portion, shaft and interconnecting piece, and the cross-sectional area of contact portion is greater than the cross-sectional area of shaft.One
The bigger cross-sectional area of aspect is conducive to conduct the power of piezoelectric ceramic actuator transmitting, on the other hand can support high steel spring 9.
One end of piezoelectric ceramic actuator 6 is fixed on fixed bracket 5, fixed by fixed bracket 5 and mounting seat 7.
The other end of piezoelectric ceramic actuator 6 is contacted with the contact portion of push rod, transmits driving force.
Pre-tightening apparatus 3 includes the columned preload portion for offering axially extending bore, the outer surface in preload portion and fixed bracket 5
It is threadedly coupled, push rod 4 is passed through from the axially extending bore in preload portion.
High steel spring 9 is socketed on the shaft of push rod 4, and one end is against on contact portion, and the other end is contacted with pre-tightening apparatus.It is logical
High steel spring 9 can be pushed by crossing rotation pre-tightening apparatus 3, so that thrust is provided to push rod 4, so that 6 both ends of piezoelectric ceramic actuator
Pretightning force change correspondingly, be conducive to seek piezoelectric ceramic actuator 6 in difference by most suitable output displacement is depressed, to mention
The movenent performance of high micromotion platform, is conducive to motion control.
The interconnecting piece of push rod 4 is connect by flexible connecting device 2 with moving platform 1, and power is successively led to from piezoelectric ceramic actuator
Cross push rod 4, flexible connecting device 2 is transmitted to moving platform so that moving platform generate displacement, realize fine motion.
Micromotion platform provided by the embodiment of the present application quickly can be adjusted dynamically using piezoelectric ceramics and the composition of high steel spring 9
The driving structure of section realizes the accurate displacement output that accumulated error is small and complicated link is few.Pre-tightening apparatus is set to piezoelectricity simultaneously
The pretightning force of ceramic driver 6 is changed, and is conducive to the movenent performance for improving micromotion platform and is realized motion control.
Optionally, using flexible hinge as enlarger and guiding mechanism, displacement output is obtained by electromagnetic drive, can be disappeared
Except between hinge friction and backhaul gap, precision is high, stroke is big, preferably using straight circular flexible hinge arrangement as it is flexible even
The transmission mechanism of connection device 2.
Preferably, pre-tightening apparatus 3 includes pre-load nut, and pre-load nut is fixedly connected with preload portion.It is understood that pre-
The side of tight portion cylinder is not easy to adjust, it is thus possible to increase the pre-load nut of a hexagon, by clamping pre-load nut
Two opposite sides, it may be convenient to which pretightning force is adjusted.
Preferably, in order to guarantee that the airtightness of precision instrument, fixed bracket 5 are specially hollow cylindrical sleeve, piezoelectricity
Ceramic driver 6 is fixed on inside cylindrical sleeve, and with cylindrical sleeve coaxial cooperation.
Optionally, internal screw thread is machined in flexible connecting device 2, the interconnecting piece of push rod 4 is machined with external screw thread, flexible connection
Device 2 and the interconnecting piece of push rod 4 are connected through a screw thread.
Optionally, flexible connecting device 2 is fixed by screws in the surface of the moving platform 1, specifically, the quantity of screw
It is 4, square arrangement.
Preferably, being displaced output device and the number of flexible connecting device 2 is 3, and 1 surface shape of moving platform is triangle
Shape, preferably equilateral triangle.3 displacement output devices pass through 3 that 3 flexible connecting devices 2 are fixed on moving platform 1 respectively
On vertex.When the synchronous driving of three groups of piezoelectric ceramic actuators 6, three 4 synchronous linears of push rod rise, and moving platform 1 is driven to rise
To realize Z axis freedom degree；When only one or two piezoelectric ceramic actuators 6 drive, turn moving platform 1 in space
It is dynamic, realize two rotary freedoms.Design breaches traditional one-dimensional or the limited lattice of two-dimensional translation micromotion platform freedom degree herein
Office improves the number of degrees of freedom, of platform, and double luffing structures are more advantageous to the leveling and displacement correction compensation of processing platform.Pass through
The cooperation of three driving mechanisms and the deformation of overturning joint flexible structure are turned over come the lifting moving and angle for realizing platform
Turn, driving process dynamics are flexibly adjustable.Compared with other multiple degrees of freedom micromotion platforms, structure is simple, and manufacture craft is simplified, and saves
Cost.
It should be appreciated that in this application, " at least one (item) " refers to one or more, and " multiple " refer to two or two
More than a."and/or" indicates may exist three kinds of relationships, for example, " A and/or B " for describing the incidence relation of affiliated partner
It can indicate: only exist A, only exist B and exist simultaneously tri- kinds of situations of A and B, wherein A, B can be odd number or plural number.Word
Symbol "/" typicallys represent the relationship that forward-backward correlation object is a kind of "or"." at least one of following (a) " or its similar expression, refers to
Any combination in these, any combination including individual event (a) or complex item (a).At least one of for example, in a, b or c
(a) can indicate: a, b, c, " a and b ", " a and c ", " b and c ", or " a and b and c ", and wherein a, b, c can be individually, can also
To be multiple.
Finally, it should be noted that the above various embodiments is only to illustrate the technical solution of the application, rather than its limitations；To the greatest extent
Pipe is described in detail the application referring to foregoing embodiments, those skilled in the art should understand that: its according to
So be possible to modify the technical solutions described in the foregoing embodiments, or to some or all of the technical features into
Row equivalent replacement；And these are modified or replaceed, each embodiment technology of the application that it does not separate the essence of the corresponding technical solution
The range of scheme.
Claims (8)
1. a kind of micromotion platform, which is characterized in that including moving platform, displacement output device, flexible connecting device and mounting seat；
The displacement output device includes: fixed bracket, piezoelectric ceramic actuator, high steel spring, push rod and pre-tightening apparatus；
The fixed bracket is fixed in the mounting seat；
The push rod includes contact portion, shaft and interconnecting piece, and the cross-sectional area of the contact portion is greater than the cross section of the shaft
Product；
One end of the piezoelectric ceramic actuator is fixed on the fixed bracket, and the other end is contacted with the contact portion；
The pre-tightening apparatus includes the cylindric preload portion for offering axially extending bore, the outer surface in the preload portion and the fixation
Bracket is threadedly coupled, and the push rod is passed through from the axially extending bore；
The high steel spring is socketed on the shaft, and one end is against on the contact portion, and the other end connects with the pre-tightening apparatus
Touching；
The interconnecting piece is connect by the flexible connecting device with the moving platform.
2. micromotion platform according to claim 1, which is characterized in that the pre-tightening apparatus further includes pre-load nut, described
Pre-load nut is fixedly connected with the preload portion.
3. micromotion platform according to claim 1, which is characterized in that the fixed bracket is specially hollow cylindrical shroud
Cylinder, the piezoelectric ceramic actuator is fixed on inside the cylindrical sleeve, and with the cylindrical sleeve coaxial cooperation.
4. micromotion platform according to claim 1, which is characterized in that the connection of the flexible connecting device and the push rod
Portion is threadedly coupled.
5. micromotion platform according to claim 1, which is characterized in that the flexible connecting device is fixed on institute by screw
State moving platform surface.
6. micromotion platform according to claim 1, which is characterized in that the displacement output device and flexible connection dress
The number set is 3；
The moving platform surface shape is triangle；
3 displacement output devices pass through 3 vertex that 3 flexible connecting devices are fixed on the moving platform respectively.
7. micromotion platform according to claim 6, which is characterized in that the moving platform surface is equilateral triangle.
8. micromotion platform according to claim 1, which is characterized in that the flexible connecting device includes straight circular flexible hinge
Chain.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920691616.6U CN209676143U (en) | 2019-05-13 | 2019-05-13 | A kind of micromotion platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920691616.6U CN209676143U (en) | 2019-05-13 | 2019-05-13 | A kind of micromotion platform |
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| Publication Number | Publication Date |
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| CN209676143U true CN209676143U (en) | 2019-11-22 |
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| CN201920691616.6U Active CN209676143U (en) | 2019-05-13 | 2019-05-13 | A kind of micromotion platform |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110048634A (en) * | 2019-05-13 | 2019-07-23 | 广东工业大学 | A kind of micromotion platform |
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2019
- 2019-05-13 CN CN201920691616.6U patent/CN209676143U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110048634A (en) * | 2019-05-13 | 2019-07-23 | 广东工业大学 | A kind of micromotion platform |
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