CN110086374B - Inchworm type precise rotation micro-driver based on compliant mechanism - Google Patents
Inchworm type precise rotation micro-driver based on compliant mechanism Download PDFInfo
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- H—ELECTRICITY
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- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/023—Inchworm motors
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- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
- H02N2/046—Mechanical transmission means, e.g. for stroke amplification for conversion into rotary motion
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Abstract
The invention discloses an inchworm type precise rotation micro-driver based on a compliant mechanism, which comprises 2 driving mechanisms, 2 clamping mechanisms, a rotor and a bracket, wherein the rotor is arranged on the bracket; the 2 driving mechanisms have the same structure and are respectively a first driving mechanism and a second driving mechanism; the 2 clamping mechanisms have the same structure and are respectively a first clamping mechanism and a second clamping mechanism; the 2 driving mechanisms are positioned at two sides, and the 2 clamping mechanisms are positioned between the 2 driving mechanisms; the rotor is positioned on the bracket, is arranged at the symmetrical center of the rotary micro-driver and is mutually matched with each mechanism through an output hole; the clamping mechanism can clamp or release the rotor; when clamping, the rotor rotates along with the clamping mechanism; when released, the mover moves freely. The micro-driver provided by the invention has the advantages of large stroke, high resolution, large output load, capability of bidirectional motion and the like.
Description
Technical Field
The invention belongs to the technical field of precise micro-operation, and particularly relates to an inchworm type precise rotary micro-actuator based on a compliant mechanism, which is mainly applied to the high-tip scientific and technical fields of ultra-precision machining, precise engineering, Micro Electro Mechanical Systems (MEMS), microelectronic engineering, biological engineering, semiconductor manufacturing and the like.
Background
With the rapid development of the fields of micro-machining, ultra-precision machining and measurement, precision optical engineering, bioengineering, modern medicine, semiconductor manufacturing, aerospace and the like, the traditional driver is limited by the working principle and the mechanical structure thereof, so that the requirements of ultra-precision and high-precision positioning cannot be met, and the ultra-precision linear micro-driver with nano-scale and sub-nano-scale precision is urgently needed to realize the functions thereof.
The inchworm type linear driver simulates the motion law of biological inchworms in nature and can realize micro-displacement accumulation to obtain a large stroke. However, the inchworm-type linear driver at present has the problems of low running speed, small output load, poor motion stability and the like.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides an inchworm type precise rotation micro-driver based on a compliant mechanism, and the driver has the advantages of large stroke, high resolution, large output load, capability of bidirectional motion and the like.
Therefore, the invention adopts the following technical scheme:
an inchworm type precise rotation micro-driver based on a compliant mechanism comprises 2 driving mechanisms, 2 clamping mechanisms, a rotor and a bracket; the 2 driving mechanisms have the same structure and are respectively a first driving mechanism and a second driving mechanism; the 2 clamping mechanisms have the same structure and are respectively a first clamping mechanism and a second clamping mechanism; the 2 driving mechanisms are positioned at two sides, and the 2 clamping mechanisms are positioned between the 2 driving mechanisms; the rotor is positioned on the bracket, is arranged at the symmetrical center of the rotary micro-driver and is mutually matched with each mechanism through an output hole; the clamping mechanism can clamp or release the rotor; when clamping, the rotor rotates along with the clamping mechanism; when released, the mover moves freely.
Preferably, the clamping mechanism mainly comprises 2 displacement amplification lever structures which are symmetrically arranged left and right, a clamping mechanism stator and a clamping output end; the 2 displacement amplifying lever structures are a first displacement amplifying lever structure and a second displacement amplifying lever structure respectively; the first displacement amplification lever structure mainly comprises a clamping input end, a first right-circular flexible hinge, a second right-circular flexible hinge, a third right-circular flexible hinge and a first rod piece, wherein the second right-circular flexible hinge is a fulcrum of the first displacement amplification structure, and the third right-circular flexible hinge is an output end of the first displacement amplification structure; the second displacement amplification lever structure mainly comprises a fourth right-circular flexible hinge, a fifth right-angled flexible hinge and a third rod piece, wherein the fourth right-circular flexible hinge is the input end of the second displacement amplification structure, the fifth right-circular flexible hinge is the output end of the second displacement amplification structure, and the right-angled flexible hinge is a fulcrum of the second displacement amplification structure; the 2 displacement amplification structures are connected in series, and the output end of the first displacement amplification lever structure is connected with the input end of the second displacement amplification lever structure in series through a second rod piece; the output terminal of the second displacement amplifying structure is directly connected with the clamping output terminal.
Preferably, the upper part of the clamping output end is connected with a parallelogram guide structure consisting of a first straight beam flexible hinge and a second straight beam flexible hinge; the clamping mechanism stator mainly comprises 1 bottom baffle for placing piezoelectric ceramics, 1 side baffle for the piezoelectric ceramics, 4 bolt holes for fixing the piezoelectric ceramics upper surface baffle, and 4 bolt holes for fixedly connecting the clamping mechanism and the driving mechanism.
Preferably, the clamping mechanism further comprises a clamping movable component, the height of the upper surface and the lower surface of the clamping movable component is 2-3mm lower than that of the surface of the clamping mechanism stator, the lower surface of a bottom baffle for placing the piezoelectric ceramics is flush with the lower surface of the clamping mechanism stator, and the side baffle of the piezoelectric ceramics is as high as the clamping mechanism stator.
Preferably, the driving mechanism mainly comprises 1 driving branch chain and 1 pair of driving mechanism stators which are oppositely arranged; the driving branched chain mainly comprises 1 rotating circular ring, 4 bolt holes for fixedly connecting the rotating circular ring of the driving mechanism with the clamping mechanism, and 2 angular displacement amplifying lever structures which are oppositely arranged; the angular displacement amplifying lever structure mainly comprises a third displacement amplifying lever structure and a displacement conversion structure; the third displacement amplification lever structure mainly comprises a driving mechanism driving end, a sixth right-circular flexible hinge, a fourth rod piece and a seventh right-circular flexible hinge, wherein the sixth right-circular flexible hinge is a fulcrum of the third displacement amplification lever structure; the displacement conversion mechanism mainly comprises a fifth rod piece, an eighth right-circular flexible hinge and a sixth rod piece which is directly connected with the rotary ring; the third displacement amplification lever structure is connected with the displacement conversion structure through a fifth rod piece; the driving mechanism stator mainly comprises a driving stator end block, a bolt hole fixedly connected with the driving mechanism stator and the support, a piezoelectric ceramic bottom baffle, a seventh rod piece, an eighth rod piece and a driving mechanism center hole, and the driving stator end block is directly and fixedly connected with the support.
Preferably, when the distance between the sixth straight-circular flexible hinge and the seventh straight-circular flexible hinge is greater than the distance between the sixth straight-circular flexible hinge and the driving end of the driving mechanism, the displacement of the driving end of the driving mechanism is amplified by the third displacement amplifying lever structure and is transmitted to the eighth straight-circular flexible hinge through the fifth rod piece, the eighth straight-circular flexible hinge converts the linear input displacement into the rotary motion of the rotary ring through the sixth rod piece, and the amplified linear displacement is converted into the rotary displacement of the rotary ring.
Preferably, the rotor is respectively matched with the support and the central hole of the driving mechanism and clamped or loosened by the clamping sheet of the clamping mechanism.
Preferably, the mover is an elongated cylindrical structure, and both ends of the mover are respectively provided with a section of thread for coupling a load.
Preferably, the support mainly comprises 2 vertically placed sheets and 1 horizontally placed sheet, the surface of the vertically placed sheet is provided with 6 bolt holes for fixing a driving mechanism stator and 1 vertical support center hole matched with the rotor, the side surface is provided with bolt holes fixedly connected with the horizontal support, and the bottom surface is provided with 3 bolt holes for fixing with other platforms; the horizontally placed thin plate is provided with a horizontal support positioning end and a bolt hole fixedly connected with the vertical support, and is used for horizontally positioning the two vertical supports to enable the whole structure to be in a stable state.
Preferably, the micro-driver adopts a driving mechanism to drive the clamping mechanism to do reciprocating rotation motion, and the clamping mechanism clamps the rotor through the clamping piece to drive the rotor to do reciprocating rotation motion in a motion mode simulating the motion law of the inchworm.
Compared with the prior art, the invention has the beneficial effects that:
(1) the micro-driver of the invention adopts the flexible hinge to transmit micro-displacement motion, and has the characteristic of high precision compared with the traditional micro-driver.
(2) According to the micro-driver, the clamping mechanism adopts a symmetrically-arranged two-stage displacement amplification lever structure with 2 flexible hinges to transmit clamping force and 1 clamping effect on the rotor is realized in a clamping sheet with a parallel guide structure and a double-side clamping mode, and the micro-driver has the characteristics of large clamping force, firm and stable clamping and strong bearing capacity.
(3) The micro-driver adopts an angular displacement amplification lever structure that the amplified linear displacement is converted into the rotary displacement of the rotary ring, and has the characteristics of large single-step output displacement and high motion resolution.
(4) The micro-actuator adopts the driving mechanism to drive the clamping mechanism, the clamping mechanism drives the rotor to move to realize the motion law of the bionic inchworm, and the slender cylindrical shaft is used as the rotor of the actuator, so that the micro-actuator has the characteristic of high motion speed.
(5) According to the micro-driver, the first clamping mechanism, the first driving mechanism, the second clamping mechanism and the second driving mechanism are arranged in a bilateral symmetry mode, and the rotor has the characteristic of bidirectional rotation in a clockwise or counterclockwise mode.
(6) The micro-driver has wide application range, and can be applied to the fields of ultra-precision machining, precision engineering, micro-electro-mechanical systems, microelectronic engineering, bioengineering, semiconductor manufacturing and the like.
Drawings
FIG. 1 is a schematic structural diagram of an inchworm-type precision rotation micro-actuator based on a compliant mechanism according to the present invention.
FIG. 2 is a schematic cross-sectional view of an inchworm-type precision rotation micro-actuator based on a compliant mechanism according to the present invention.
FIG. 3 is a schematic structural diagram of a clamping mechanism in an inchworm-type precision rotation micro-actuator based on a compliant mechanism provided by the present invention.
FIG. 4 is a schematic diagram of a shaft side structure of a clamping mechanism in an inchworm-type precision rotation micro-actuator based on a compliant mechanism provided by the present invention.
FIG. 5 is a schematic structural diagram of a driving mechanism in an inchworm-type precision rotation micro-driver based on a compliant mechanism provided by the invention.
FIG. 6 is a schematic diagram of the side-axis structure of the driving mechanism in an inchworm-type precision rotation micro-driver based on a compliant mechanism provided by the present invention.
FIG. 7 is a schematic structural diagram of a mover in an inchworm-type precision rotation micro-driver based on a compliant mechanism provided by the present invention.
FIG. 8 is a schematic structural diagram of a support in an inchworm-type precision rotation micro-actuator based on a compliant mechanism provided by the invention.
FIG. 9 is a schematic diagram of the design principle of an inchworm-type precision rotation micro-driver based on a compliant mechanism provided by the invention.
Description of reference numerals: 1. a first drive unit; 2. a first clamping unit; 3. a second driving unit; 4. a second clamping unit; 5. an output unit; 6. a clamp input; 7. a first right circular flexible hinge; 8. a second right circular flexible hinge; 9. a first bar member; 10. a third right circular flexible hinge; 11. a second bar member; 12. a fourth right circular flexible hinge; 13. a third bar member; 14. a right angle type flexible hinge; 15. a fifth right-circular flexible hinge; 16. a first straight beam flexible hinge; 17. a second straight beam flexible hinge; 18. a clamping output terminal (i.e., clamping pad); 19. a second displacement amplifying lever structure; 20. a first displacement amplification lever structure; 21. a piezoelectric ceramic upper surface baffle bolt hole; 22. a piezoelectric ceramic bottom baffle; 23 piezoelectric ceramic side baffles; 24. the clamping mechanism is fixedly connected with the bolt hole of the driving mechanism; 25. a clamping movable member; 26. a clamping mechanism stator; 27. a sixth right-circular flexible hinge; 28. a fourth bar member; 29. a seventh right-circular flexible hinge; 30. a fifth bar member; 31. an eighth right-circular flexible hinge; 32. a sixth bar member; 33. the driving mechanism stator is fixedly connected with the bolt hole of the bracket; 34. a driving stator end block; 35. a piezoelectric ceramic bottom baffle; 36. rotating the circular ring; 37. a seventh bar member; 38. a drive mechanism drive end; 39. the driving mechanism rotates the bolt hole that the circular ring and clamping mechanism fixedly connect; 40. an eighth bar member; 41. a central hole of the driving mechanism; 42. a third displacement amplification lever structure; 43. a displacement conversion mechanism; 44. an angular displacement amplifying lever structure; 45. a thread; 46. the vertical bracket is fixedly connected with a bolt hole of the driving mechanism stator; 47. a central hole of the vertical bracket; 48. a positioning end of the horizontal support; 49. the vertical bracket is fixedly connected with the horizontal bracket through a bolt hole; 50. the vertical bracket is fixed with bolt holes of other platforms; 51. the bolt hole is fixedly connected with the horizontal bracket and the vertical bracket; 52. a first drive mechanism; 53. a first clamping mechanism; 54. a second clamping mechanism; 55. a second drive mechanism; 56. a mover; 57. and (4) a bracket.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings and specific embodiments, which are provided for illustration only and are not to be construed as limiting the invention.
As shown in fig. 1 and fig. 2, the present invention discloses an inchworm-type precise rotation micro-driver based on a compliant mechanism, which comprises 2 driving mechanisms, 2 clamping mechanisms, a mover 56 and a support 57; the 2 driving mechanisms have the same structure and are respectively a first driving mechanism 52 and a second driving mechanism 55; the 2 clamping mechanisms are the same in structure and are respectively a first clamping mechanism 53 and a second clamping mechanism 54; the 2 driving mechanisms are positioned at two sides, and the 2 clamping mechanisms are positioned between the 2 driving mechanisms; the rotor 56 is positioned on the bracket 57, is arranged at the symmetrical center of the rotary micro-driver, and is mutually matched with each mechanism through an output hole; the clamping mechanism may clamp or release the mover 56; when clamping, the mover 56 rotates along with the clamping mechanism; when released, the mover 56 is free to move.
Specifically, as shown in fig. 3 and 4, the clamping mechanism mainly comprises 2 displacement amplification lever structures which are arranged symmetrically left and right, a clamping mechanism stator 26 and a clamping output end 18; the 2 displacement amplification lever structures are a first displacement amplification lever structure 20 and a second displacement amplification lever structure 19, respectively; the first displacement amplification lever structure 20 mainly comprises a clamping input end 6, a first right-circular flexible hinge 7, a second right-circular flexible hinge 8, a third right-circular flexible hinge 10 and a first rod piece 9, wherein the second right-circular flexible hinge 8 is a fulcrum of the first displacement amplification structure 20, and the third right-circular flexible hinge 10 is an output end of the first displacement amplification structure 20; the second displacement amplifying lever structure 19 mainly comprises a fourth right-circular flexible hinge 12, a fifth right-circular flexible hinge 15, a right-angle flexible hinge 14 and a third rod 13, wherein the fourth right-circular flexible hinge 12 is an input end of the second displacement amplifying structure 19, the fifth right-circular flexible hinge 15 is an output end of the second displacement amplifying structure 19, and the right-angle flexible hinge 14 is a fulcrum of the second displacement amplifying structure 19; the 2 displacement amplifying structures are connected in series, and the output end of the first displacement amplifying lever structure 20 is connected in series with the input end of the second displacement amplifying lever structure 19 through the second rod piece 11; the output of the second displacement amplifying structure 19 is directly connected to the clamping output 18.
Specifically, the upper part of the clamping output end 18 is connected with a parallelogram guide structure consisting of a first straight beam flexible hinge 16 and a second straight beam flexible hinge 17; the clamping mechanism stator 26 mainly comprises 1 bottom baffle 22 for placing piezoelectric ceramics, 1 side baffle 23 for the piezoelectric ceramics, 4 bolt holes 21 for fixing the upper surface baffle of the piezoelectric ceramics, and 4 bolt holes 24 for fixedly connecting the clamping mechanism and the driving mechanism.
Specifically, the clamping mechanism further comprises a clamping movable member 25, the height of the upper surface and the lower surface of the clamping movable member 25 is 2-3mm lower than the surface of the clamping mechanism stator 26, the lower surface of the bottom baffle 22 for placing the piezoelectric ceramics is flush with the lower surface of the clamping mechanism stator 26, and the side baffle 23 of the piezoelectric ceramics is equal to the height of the clamping mechanism stator 26.
Specifically, as shown in fig. 5 and 6, the driving mechanism is mainly composed of 1 driving branch chain and 1 pair of driving mechanism stators arranged oppositely; the driving branched chain mainly comprises 1 rotating ring 36, 4 bolt holes 39 for fixedly connecting the rotating ring of the driving mechanism with the clamping mechanism, and 2 angular displacement amplifying lever structures 44 which are oppositely arranged; the angular displacement amplifying lever structure 44 mainly comprises a third displacement amplifying lever structure 42 and a displacement conversion structure 43; the third displacement amplification lever structure 42 mainly comprises a driving mechanism driving end 38, a sixth straight-circular flexible hinge 27, a fourth rod 28 and a seventh straight-circular flexible hinge 29, wherein the sixth straight-circular flexible hinge 27 is a fulcrum of the third displacement amplification lever structure 42; the displacement conversion mechanism 43 mainly comprises a fifth rod piece 30, an eighth right-circular flexible hinge 31 and a sixth rod piece 32 directly connected with the rotary ring 36; the third displacement amplifying lever structure 42 is connected with the displacement conversion structure 43 through a fifth rod piece 30; the driving mechanism stator mainly comprises a driving stator end block 34, a bolt hole 33 fixedly connected with the driving mechanism stator and the support, a piezoelectric ceramic bottom baffle 35, a seventh rod piece 37, an eighth rod piece 40 and a driving mechanism central hole 41, wherein the driving stator end block 34 is directly and fixedly connected with the support 57.
Specifically, when the distance between the sixth straight-circular flexible hinge 27 and the seventh straight-circular flexible hinge 29 is greater than the distance from the sixth straight-circular flexible hinge 27 to the driving mechanism driving end 38, the displacement of the driving mechanism driving end 38 is amplified by the third displacement amplification lever structure 42 and is transmitted to the eighth straight-circular flexible hinge 31 through the fifth rod 30, and the eighth straight-circular flexible hinge 31 converts the linear input displacement into the rotational movement of the rotary ring 36 through the sixth rod 32, so that the amplified linear displacement is converted into the rotational displacement of the rotary ring.
Specifically, the mover 56 is respectively engaged with the bracket 57 and the driving mechanism central hole 41 and clamped or released by the clamping piece of the clamping mechanism.
Specifically, as shown in fig. 7, the mover 56 is an elongated cylindrical structure, and both ends thereof are provided with a length of thread 45, respectively, for coupling a load.
Specifically, as shown in fig. 8, the bracket 57 mainly comprises 2 vertically placed sheets and 1 horizontally placed sheet, the surface of the vertically placed sheet is provided with 6 bolt holes 46 for fixing the driving mechanism stator, 1 vertical bracket central hole 47 matched with the mover 56, the side surface is provided with bolt holes 49 fixedly connected with the horizontal bracket, and the bottom surface is provided with 3 bolt holes 50 for fixing with other platforms; the horizontally placed sheet is provided with a horizontal bracket positioning end 48 and a bolt hole 51 fixedly connected with the vertical bracket for horizontal positioning of the two vertical brackets, so that the whole structure is in a stable state.
The micro-driver adopts a driving mechanism to drive the clamping mechanism to do reciprocating rotary motion, and the clamping mechanism clamps the rotor through the clamping sheet to drive the rotor to do reciprocating rotary motion in a motion mode simulating the motion law of inchworm.
Examples
The design principle of an inchworm type precise rotation micro-driver based on a compliant mechanism is shown in figure 9, wherein a driving unit comprises a first driving unit 1 and a second driving unit 3 which are respectively connected with a fixed bracket through bolts; the clamping unit comprises a first clamping unit 2 and a second clamping unit 4 which are fixedly connected to the first driving unit 1 and the second driving unit 3 respectively through bolts; the output unit 5 is matched with the clamping unit, the driving unit and the support through round holes.
The working process of the structure for simulating the motion law of the inchworm is as follows:
FIG. 9(a) shows the rotary microactuator in an inoperative state; fig. 9(b) shows the first clamp unit 2 in an operating state, which clamps the output unit 5; fig. 9(c) shows the first driving unit 1 in working state, the unit rotates counterclockwise by a slight angle, and drives the first clamping unit 2, the first clamping unit 2 and the output unit 5 to rotate by a slight angle; fig. 9(d) shows the second clamp unit 4 in an operating state, which clamps the output unit 5 in order to place the output unit 5 in a stable state without pivoting; fig. 9(e) shows the first clamping unit 2 in an inoperative state, the clamping unit releasing the output unit 5, the first driving unit 1 in an inoperative state, and the mechanism retracted, bringing the first clamping unit 1 back to the initial position; fig. 9(f) shows the second clamping unit 4 in the inactive state, releasing the output unit 5, and the micro-actuator returns to the initial position, where the output unit 5 has rotated a small angle, completing a motion cycle. By repeating this cycle, a continuous counter-rotating movement of the output unit 5 can be achieved. The driving sequence of the first clamping mechanism 53 and the second clamping mechanism 54, and the driving sequence of the first driving mechanism 52 and the second driving mechanism 55 are respectively exchanged, so that the clockwise rotation of the mover 56 can be realized.
According to the design principle diagram of the micro-actuator shown in fig. 9, the key of the design is that the driving mechanism can drive the clamping mechanism to realize reciprocating rotation, and the clamping mechanism can clamp and release the rotor. When the clamping mechanism clamps the rotor, the clamping mechanism can drive the rotor to move along with the clamping mechanism; when the clamping mechanism loosens the rotor, the rotor can rotate freely.
As shown in fig. 3, in order to enable the clamping mechanism to realize the clamping function, the clamping mechanism adopts a symmetrical double-side clamp-to-clamp manner to clamp and release the mover. Because the piezoelectric ceramic driver has the characteristic of large driving force, the driving end of the clamping mechanism can be driven by the piezoelectric ceramic driver. When the piezoelectric ceramic drives the clamping input end 6, the clamping mechanism clamps the rotor tightly; when the piezoelectric ceramic releases the clamping input end 6, the clamping mechanism releases the rotor due to the elastic recovery action of the flexible hinge. In order to achieve that the displacement of the clamping input terminal 6 can be amplified by the first displacement amplifying lever structure 20 and transferred to the second displacement amplifying lever structure 19 through the third right-angle type flexible hinge 10, the distance between the second right-angle type flexible hinge 8 and the third right-angle type flexible hinge 10 must be appropriately larger than the distance between the second right-angle type flexible hinge 8 and the first right-angle type flexible hinge 7. In order to ensure that the displacement of the clamping output end 18 is further amplified and the mover can be clamped more firmly, the distance between the fourth right circular flexible hinge 12 and the fifth right circular flexible hinge 15 must be properly larger than the distance between the fourth right circular flexible hinge 12 and the right angle type flexible hinge 14. In order to effectively reduce the offset of the displacement amplifying lever structure and ensure that the clamping output end 18 can do relatively ideal horizontal linear motion, a parallelogram guide structure consisting of a first straight beam flexible hinge 16 and a second straight beam flexible hinge 17 is designed at the upper part of the clamping output end 18.
As shown in FIG. 4, in order to avoid unnecessary interference between the clamping mechanism and the driving mechanism during the fixed connection, the height of the upper and lower surfaces of the clamping movable member 25 is 2-3mm lower than the surface of the clamping mechanism stator 26, the lower surface of the bottom surface stopper 22 on which the piezoelectric ceramics are placed is flush with the lower surface of the clamping mechanism stator 26, and the side surface stopper 23 of the piezoelectric ceramics is equal to the height of the clamping mechanism stator 26.
As shown in fig. 5, the designed driving branched chain realizes reciprocating motion by means of elastic deformation of the flexible hinge, the driving branched chain is connected to the stator by adopting a sixth right-circular flexible hinge 27, and the driving branched chain makes reciprocating micro-displacement motion relative to the stator. In order to realize the conversion of the amplified linear displacement into the angular displacement of the circular ring, the distance between the sixth right circular type flexible hinge 27 and the seventh right circular type flexible hinge 29 must be larger than the distance between the sixth right circular type flexible hinge 27 and the driving end 38 of the driving mechanism; the displacement of the driving end 38 of the driving mechanism is amplified by the third displacement amplifying lever structure 42 and is transmitted to the eighth right-circular flexible hinge 31 through the fifth rod member 30, and the eighth right-circular flexible hinge 31 converts the linear input displacement into the rotary displacement of the rotary ring 36 through the sixth rod member 32. In order to avoid unnecessary mutual interference between the driving mechanism and the clamping mechanism and between the driving mechanism and the bracket, the lower surface of the stator of the driving mechanism is designed to be 5-10mm more than the lower surface of the rotary branched chain, and the upper surface of the stator and the angular displacement amplifying lever structure 44 have the same height. As shown in fig. 6, the upper and lower surfaces of the rotary ring 36 in the rotary branch chain are 1-3mm lower than the upper and lower surfaces of the angular displacement amplification mechanism 44, and the sixth right-circular flexible hinge 27 is as high as the angular displacement amplification lever structure 44.
As shown in fig. 7, in order to facilitate the connection of the mover 56 to other loads, a section of thread 45 is designed at each of the two ends. In order to reduce the friction force during the process of the mover 56 and the respective center holes being fitted to each other, the precision of the machined surface of the mover 56 is required to be high, and lubricating oil may be added to the contact area as needed.
As shown in fig. 8, in order to keep the whole micro-rotation driver in a relatively stable state, two vertically disposed brackets and one horizontally disposed bracket are designed, the horizontally disposed brackets and the vertically disposed brackets are fixedly connected by bolts, and the bottom of the vertically disposed bracket is designed with bolt holes fixed with other platforms.
FIG. 1 shows an overall structure of the micro-actuator, 2 driving mechanisms are located on two sides, stators of a first driving mechanism 52 and a second driving mechanism 55 are fixedly connected with vertical supports on two sides through bolts, 2 clamping mechanisms are located between the 2 driving mechanisms, stators of a first clamping mechanism 53 and a second clamping mechanism 54 are respectively fixed on rotating circular rings of the first driving mechanism 52 and the second driving mechanism 55 through bolts, a rotor 56 is arranged at the symmetrical center of the micro-rotating actuator and is mutually matched with the mechanisms through an output hole, working states of the mechanisms when the micro-actuator simulates an inchworm motion law, a clamping sheet 18 of the first clamping mechanism 53 clamps the rotor 56 at ①, an angular displacement amplification lever structure 44 of the first driving mechanism 52 drives the rotating circular ring 36 to rotate anticlockwise, the rotating circular ring 36 drives the first clamping mechanism 53 fixedly connected with the rotating circular ring to rotate anticlockwise, the rotor 56 is driven by the first clamping mechanism 53 to rotate anticlockwise, the second clamping mechanism 54 clamps the rotor 56 at ④, the first clamping mechanism 53 releases the first clamping mechanism 56, the first clamping mechanism 52 drives the first clamping mechanism 53 to rotate anticlockwise, the rotor 53 to return to the first clamping mechanism 52, the rotor 53 and the first clamping mechanism 55 can realize continuous rotation, the rotor 53 and the rotor 53 can realize the initial rotation, the initial rotation of the rotor 52, the clamping mechanism, the rotor 54 and the rotor 55, the initial clamping mechanism.
The micro-driver is suitable for being processed by adopting an electric spark wire cutting processing technology, and the mover is processed by adopting a traditional processing method. The material of the microactuator determines the motion performance of the microactuator, and the material thereof is required to be flexible and strong. The flexibility determines the motion sensitivity and the motion stroke of the micro-driver; since the microactuator requires high frequency driving, it is necessary to ensure that the strength limit of the material is satisfactory in order to prevent its failure during operation. The soft and strong material is selected to meet the performance requirement of the micro-actuator, and spring steel, beryllium bronze and the like can be selected as the manufacturing material of the micro-actuator.
The micro-driver with high precision, high resolution and high motion speed can be better realized through the embodiment.
The above description is only exemplary of the present invention and should not be taken as limiting the invention, as any modification, equivalent replacement, or improvement made within the spirit and scope of the present invention should be included in the present invention.
Claims (9)
1. The utility model provides an inchworm formula precision rotation micro drive based on gentle and agreeable mechanism, includes 2 actuating mechanism, 2 clamping mechanism, active cell (56) and support (57), its characterized in that: the 2 driving mechanisms have the same structure and are respectively a first driving mechanism (52) and a second driving mechanism (55); the 2 clamping mechanisms have the same structure and are respectively a first clamping mechanism (53) and a second clamping mechanism (54); the 2 driving mechanisms are positioned at two sides, and the 2 clamping mechanisms are positioned between the 2 driving mechanisms; the rotor (56) is positioned on the bracket (57), is arranged at the symmetrical center of the rotary micro-driver and is mutually matched with each mechanism through an output hole; the clamping mechanism clamps or releases a mover (56); when clamping, the rotor (56) rotates along with the clamping mechanism; when released, the mover (56) moves freely; the clamping mechanism consists of 2 displacement amplification lever structures which are symmetrically arranged left and right, a clamping mechanism stator (26) and a clamping output end (18); the 2 displacement amplifying lever structures are a first displacement amplifying lever structure (20) and a second displacement amplifying lever structure (19) respectively; the first displacement amplification lever structure (20) mainly comprises a clamping input end (6), a first right-circular flexible hinge (7), a second right-circular flexible hinge (8), a third right-circular flexible hinge (10) and a first rod piece (9), wherein the second right-circular flexible hinge (8) is a fulcrum of the first displacement amplification structure (20), and the third right-circular flexible hinge (10) is an output end of the first displacement amplification structure (20); the second displacement amplification lever structure (19) mainly comprises a fourth right-circular flexible hinge (12), a fifth right-circular flexible hinge (15), a right-angle flexible hinge (14) and a third rod piece (13), wherein the fourth right-circular flexible hinge (12) is an input end of the second displacement amplification structure (19), the fifth right-circular flexible hinge (15) is an output end of the second displacement amplification structure (19), and the right-angle flexible hinge (14) is a fulcrum of the second displacement amplification structure (19); the 2 displacement amplification structures are connected in series, and the output end of the first displacement amplification lever structure (20) is connected with the input end of the second displacement amplification lever structure (19) in series through a second rod piece (11); the output of the second displacement amplifying structure (19) is directly connected to the clamping output (18).
2. The inchworm-type precision rotation micro-driver based on the compliant mechanism as claimed in claim 1, wherein: the upper part of the clamping output end (18) is connected with a parallelogram guide structure consisting of a first straight beam flexible hinge (16) and a second straight beam flexible hinge (17); the clamping mechanism stator (26) mainly comprises 1 bottom baffle (22) for placing piezoelectric ceramics, 1 side baffle (23) for the piezoelectric ceramics, 4 bolt holes (21) for fixing the piezoelectric ceramics upper surface baffle, and 4 bolt holes (24) for fixedly connecting the clamping mechanism and the driving mechanism.
3. The inchworm-type precision rotation micro-driver based on the compliant mechanism as claimed in claim 2, wherein: the clamping mechanism further comprises a clamping movable component (25), the height of the upper surface and the lower surface of the clamping movable component (25) is 2-3mm lower than that of the surface of the clamping mechanism stator (26), the lower surface of a bottom baffle (22) for placing the piezoelectric ceramics is flush with the lower surface of the clamping mechanism stator (26), and the side baffle (23) of the piezoelectric ceramics is as high as the clamping mechanism stator (26).
4. The inchworm-type precision rotation micro-driver based on the compliant mechanism as claimed in claim 1, wherein: the driving mechanism consists of 1 driving branched chain and 1 pair of driving mechanism stators which are oppositely arranged; the driving branched chain consists of 1 rotating circular ring (36), 4 bolt holes (39) for fixedly connecting the rotating circular ring of the driving mechanism with the clamping mechanism, and 2 angular displacement amplifying lever structures (44) which are oppositely arranged; the angular displacement amplifying lever structure (44) consists of a third displacement amplifying lever structure (42) and a displacement conversion mechanism (43); the third displacement amplification lever structure (42) consists of a driving mechanism driving end (38), a sixth straight-circular flexible hinge (27), a fourth rod piece (28) and a seventh straight-circular flexible hinge (29), and the sixth straight-circular flexible hinge (27) is a fulcrum of the third displacement amplification lever structure (42); the displacement conversion mechanism (43) consists of a fifth rod piece (30), an eighth right-circular flexible hinge (31) and a sixth rod piece (32) which is directly connected with the rotary ring (36); the third displacement amplification lever structure (42) is connected with the displacement conversion mechanism (43) through a fifth rod piece (30); the driving mechanism stator is composed of a driving stator end block (34), a bolt hole (33) fixedly connected with the driving mechanism stator and the support, a piezoelectric ceramic bottom baffle (35), a seventh rod piece (37), an eighth rod piece (40) and a driving mechanism center hole (41), and the driving stator end block (34) is directly and fixedly connected with the support (57).
5. The inchworm-type precision rotation micro-driver based on the compliant mechanism of claim 4, characterized in that: when the distance between the sixth straight-circular flexible hinge (27) and the seventh straight-circular flexible hinge (29) is larger than the distance between the sixth straight-circular flexible hinge (27) and the driving end (38) of the driving mechanism, the displacement of the driving end (38) of the driving mechanism is amplified by the third displacement amplification lever structure (42) and is transmitted to the eighth straight-circular flexible hinge (31) through the fifth rod piece (30), the eighth straight-circular flexible hinge (31) converts the linear input displacement into the rotary motion of the rotary ring (36) through the sixth rod piece (32), and the amplified linear displacement is converted into the rotary displacement of the rotary ring.
6. The inchworm-type precision rotation micro-driver based on the compliant mechanism of claim 4, characterized in that: the rotor (56) is respectively matched with the support (57) and the driving mechanism central hole (41) and clamped or loosened by the clamping piece of the clamping mechanism.
7. The inchworm-type precision rotation micro-driver based on the compliant mechanism as claimed in claim 1, wherein: the rotor (56) is of a slender cylindrical structure, and two ends of the rotor are respectively provided with a section of thread (45) for connecting loads.
8. The inchworm-type precision rotation micro-driver based on the compliant mechanism as claimed in claim 1, wherein: the support (57) mainly comprises 2 vertically placed sheets and 1 horizontally placed sheet, the surface of each vertically placed sheet is provided with 6 bolt holes (46) for fixing a stator of the driving mechanism and 1 vertical support center hole (47) matched with the rotor (56), the side surface of each vertically placed sheet is provided with a bolt hole (49) fixedly connected with the horizontal support, and the bottom surface of each vertically placed sheet is provided with 3 bolt holes (50) for fixing other platforms; the horizontally placed thin plate is provided with a horizontal support positioning end (48) and a bolt hole (51) fixedly connected with the vertical support, and is used for horizontally positioning the two vertical supports to enable the whole structure to be in a stable state.
9. The inchworm-type precision rotation micro-driver based on compliant mechanism according to any of claims 1 to 8, characterized in that: the micro-driver adopts a driving mechanism to drive the clamping mechanism to do reciprocating rotary motion, and the clamping mechanism clamps the rotor through the clamping sheet to drive the rotor to do reciprocating rotary motion in a motion mode simulating the motion law of inchworm.
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| CN103973159B (en) * | 2014-04-26 | 2016-03-30 | 合肥工业大学 | Miniature Inchworm type Piezoelectric Driving rotary joint mechanism |
| CN204316376U (en) * | 2014-12-09 | 2015-05-06 | 燕山大学 | Rotate looper piezoelectric micromotion motor |
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