CN209567526U - A kind of silica crucible conveying robot device - Google Patents
A kind of silica crucible conveying robot device Download PDFInfo
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- CN209567526U CN209567526U CN201822232800.2U CN201822232800U CN209567526U CN 209567526 U CN209567526 U CN 209567526U CN 201822232800 U CN201822232800 U CN 201822232800U CN 209567526 U CN209567526 U CN 209567526U
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Abstract
The utility model discloses a kind of silica crucible conveying robot device, including rack, transmission mechanism, elevating mechanism, clamping device and the sensor and the controller that are set in rack；Transmission mechanism includes sequentially connected X-axis transmission mechanism, Z axis transmission mechanism and Y-axis transmission mechanism；Clamping device is slidably connected with Y-axis transmission mechanism and is driven by cylinder one, the roll wheel assembly being oppositely arranged including two and the rotary cylinder being set on the outside of roll wheel assembly, roll wheel assembly includes at least a pair of of idler wheel, and the roll wheel assembly in pair of rollers rotates in the plane perpendicular to Z axis transmission mechanism along central shaft under the driving of rotary cylinder；Transmission mechanism, elevating mechanism, clamping device and sensor are electrically connected with controller；The utility model has which has a compact structure and a reasonable design, saves space, and manipulation is simple, and machining accuracy is high, and low energy consumption, and high production efficiency has a safety feature, time saving and energy saving, realizes to be fully automated and carries Crucible equipment.
Description
Technical field
The utility model belongs to semiconductor fabrication techniques field more particularly to a kind of silica crucible conveying robot device.
Background technique
Silica crucible can be used below at 1450 degree, is divided to transparent and two kinds opaque.With high-purity, temperature tolerance is strong, ruler
The advantages that very little big precision height, good heat preservation performance, energy saving, quality are stablized.It is to draw with the translucent silica crucible of electric arc legal system
Large-diameter monocrystalline silicon develops the essential basic material of large scale integrated circuit.Due to being constantly progressive for technology, crucible application
Range it is more and more wider, the size of crucible is increasing, now, world semiconductor industrially developed country large scale earthenware
Crucible is instead of small size suprasil crucible.
In the use process of silica crucible, it usually needs carried to silica crucible.Currently, in the prior art,
Manual handling is more universal, but manual handling not only takes time and effort, and is easy to appear rubber sleeve and falls off and crucible is caused to break or even pound
Wounded's work causes inconvenience to orderly and safety in production, and handling efficiency is very low, can not meet throughput requirements.In addition to
Manual handling generally also picks and places silica crucible using rigid hanging apparatus, although rigid hanging apparatus overall structure is more solid
It is fixed, but still there are the following problems: if 1. workpiece surfaces exist, state that is concave-convex or placing injustice is not concordant, and hanging apparatus exists
Clamp and be easy poor contact in workpiece fabrication, Hoisting Position is not easy to adjust, and stationarity is poor, and control precision is poor, operation less than
Position, is easy to cause workpiece damage in fetching process or make dirty；2. in the process that decentralization workpiece is contacted with rest area due to punching
The influence of power easily causes workpiece damage.
In view of this, special propose the utility model.
Utility model content
Aiming at the problems existing in the prior art, the purpose of the utility model is to provide a kind of silica crucible transfer robots
Device, which has a compact structure and a reasonable design save space, and manipulation is simple, and machining accuracy is high, and carrying stationarity is fabulous, and low energy consumption, raw
It produces high-efficient, has a safety feature, it is time saving and energy saving, it realizes to be fully automated and carries Crucible equipment.
To achieve the goals above, a kind of silica crucible conveying robot device provided by the utility model, including rack,
Transmission mechanism, elevating mechanism, clamping device and sensor and the controller being set in rack；The transmission mechanism includes
Sequentially connected X-axis transmission mechanism, Z axis transmission mechanism and Y-axis transmission mechanism；The clamping device and Y-axis transmission mechanism slide
It connects and is driven by cylinder one, the roll wheel assembly being oppositely arranged including two and the revolution gas being set on the outside of roll wheel assembly
Cylinder, the roll wheel assembly include at least a pair of of idler wheel, and the roll wheel assembly in the pair of rollers is hanging down under the driving of rotary cylinder
Directly in the plane of Z axis transmission mechanism along central shaft rotate；The transmission mechanism, elevating mechanism, clamping device and sensor
It is electrically connected with controller.
Preferably, the X-axis transmission mechanism is horizontally placed in rack, the conveyer belt one including several synchronous drivings, institute
It states and is parallel to each other and is spaced apart between conveyer belt one, for realizing horizontal conveyor；
Preferably, the Y-axis transmission mechanism includes fixing with Z axis transmission mechanism Y-axis fixed station connected vertically and with Y-axis
The Y-axis slide unit that platform is slidably matched, the Y-axis slide unit are driven by cylinder two, for driving clamping device along perpendicular to X-axis conveyer
Side-to-side movement in the track of the Y-axis fixed station of structure transmission direction；
Preferably, Y-axis slide unit two sides are equipped with the sliding rail for being mutually not connected to and matching with roll wheel assembly；
Preferably, the Z axis transmission mechanism is set to X-axis transmission mechanism two sides, including the chain being set in chain track
Item and sprocket wheel for setting up chain, the sprocket wheel are driven by motor, for driving chain to make Y axis transmission mechanism along perpendicular to X
The chain track of axis transmission mechanism transmission direction moves up and down；
Preferably, clamping device further includes being set on Y-axis slide unit along the conveyer belt two of clamping device direction of motion arrangement,
The roll wheel assembly is connected with the upper lower belt surface of conveyer belt two respectively, for realizing that two roll wheel assemblies are passing by the driving of cylinder one
The dynamic lower movement of the rotation of band two synchronizes；
Preferably, the elevating mechanism is located in the transmission mechanism bottom interval, for holding up crucible to clamping machine
Structure；
Preferably, the elevating mechanism includes the carrying roller being set on roller rack and the linear bearing for guiding, institute
It states roller rack and carrying roller is driven by the cylinder.
It is provided by the utility model, it has the following beneficial effects:
1. the utility model passes through X-axis transmission mechanism, Y-axis transmission mechanism, Z axis transmission mechanism, elevating mechanism and clamping machine
Structure cooperates, and after crucible is transferred to above elevating mechanism by X-axis transmission mechanism, elevating mechanism jacks up crucible to clamping device
Then place, Z axis transmission mechanism utilize clamping machine by driving Y-axis transmission mechanism to adjust the relative position of clamping device and crucible
Structure overturns the crucible of clamping, and clamping device is precisely moved to the crucible trimming chamfered edge of setting by Y-axis transmission mechanism
At mechanism, after the trimming chamfered edge processing for realizing crucible, device automatically resets, and whole process is not necessarily to artificial participation, and realization is whole certainly
Dynamicization management, manipulation is simple, and the labor intensity of operator is effectively reduced, and carrying stationarity is fabulous, and machining accuracy is high, energy consumption
Low, high production efficiency has a safety feature.It is completed moreover, aforementioned activities determine in range in rack, it is compact-sized, it saves empty
Between.
2. clamping device is implemented in combination with two roll wheel assemblies using the fine-tuning conveyer belt of positioning accuracy high-stroke and cylinder and moves
It synchronizes, runs smoothly, precision is high, variable diameter clamping can be realized to various sizes of crucible, and roll wheel assembly is using at least
A pair of idler wheel flexible, ensure that clamping force, does not damage to crucible, while effectively prevent rigidity lifting in the prior art
Device poor contact in clamping workpiece fabrication, position are not easy to adjust, and stationarity is poor, the poor technical problem of control precision,
Crucible breakage rate is reduced, production efficiency is improved.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of silica crucible conveying robot device provided by the utility model.
Fig. 2 is the cross-sectional view of Y-axis transmission mechanism and clamping device.
Fig. 3 is the structural schematic diagram of elevating mechanism.
In figure:
1. 21. conveyer belt of rack 2.X axis transmission mechanism, one 22. motor 3.Y axis transmission mechanism 31.Y axis fixed station
33. cylinder of 32.Y axis slide unit, two 43. chain track of 4.Z axis transmission mechanism 41. sprocket wheel, 42. motor, 5. elevating mechanism 51.
The rolling of 61. roll wheel assembly of cylinder 52. linear bearing, 53. roller rack, 54. carrying roller, 6. clamping device, 611. idler wheel 612.
65. connection frame of wheel carrier 62. rotary cylinder, 63. cylinder, one 64. motor, 7. conveyer belt two
Specific embodiment
The utility model is described further with attached drawing combined with specific embodiments below, to help the utility model is understood
Content.
As shown in Figure 1-3, for a kind of silica crucible conveying robot device provided by the utility model, including rack 1, if
Transmission mechanism, elevating mechanism 5, clamping device 6 and sensor and the controller being placed in rack 1；Transmission mechanism includes successively
X-axis transmission mechanism 2, Z axis transmission mechanism 4 and the Y-axis transmission mechanism 3 of connection；Clamping device 6 is slidably connected with Y-axis transmission mechanism 3
And driven by cylinder 1, including two roll wheel assemblies being oppositely arranged 61, rotary cylinder 62 and connection frame 65, roll wheel assembly
61 include at least a pair of idler wheel 611 being set on turning rolls 612, and rotary cylinder 62 passes through outside connection frame 65 and roll wheel assembly 61
Side is connected, and connection frame 65 is slidably connected with Y-axis transmission mechanism 3, driving of the roll wheel assembly 61 in pair of rollers in rotary cylinder 62
Under in the plane perpendicular to Z axis transmission mechanism 4 along central shaft rotate.Transmission mechanism, elevating mechanism 5, clamping device 6 and biography
Sensor is electrically connected with controller.Sensor may be disposed at the position that crucible is detected in rack 1 or on Z axis transmission mechanism 4 and
Highly, it realizes crucible handling process Automatic Control, does not need manual operation.X-axis transmission mechanism 2 is horizontally placed in rack 1,
Conveyer belt 1 including several synchronous drivings is parallel to each other and is spaced apart between conveyer belt 1, and transmission belt 1 is by motor
22 drivings, for realizing horizontal conveyor.Z axis transmission mechanism 4 is set to 2 two sides of X-axis transmission mechanism, including is set to chain track
Chain in 43 and the sprocket wheel 41 for setting up chain, sprocket wheel 41 are driven by motor 42, and then chain is driven to make Y-axis transmission mechanism
3 move up and down along the chain track 43 perpendicular to 2 transmission direction of X-axis transmission mechanism, the crucible for being detected according to sensor
Height adjusts the height of clamping device.
As shown in Fig. 2, Y-axis transmission mechanism 3 includes consolidating with the Y-axis fixed station 31 connected vertically of Z axis conveyer 4 and with Y-axis
Determine the Y-axis slide unit 32 of platform 31 being slidably matched, Y-axis slide unit 32 is driven by cylinder 2 33, and then drive clamping device 6 along perpendicular to
Side-to-side movement in the track of the Y-axis fixed station 31 of 2 transmission direction of X-axis transmission mechanism is equipped with for 32 two sides of Y-axis slide unit and does not connect mutually
The sliding rail for connecing and being matched with the connection frame of clamping device 6 65.Clamping device 6 further includes being set on Y-axis slide unit 32 along clamping
The conveyer belt 27 of 6 direction of motion of mechanism arrangement, roll wheel assembly 61 pass through the upper lower belt surface of connection frame 65 and conveyer belt 27 respectively
It is connected, wherein a roll wheel assembly 61 is driven by the cylinder 1 that can carry out expanding-contracting action, roll wheel assembly 61 drives transmission belt 27 to pass
It is dynamic, it two roll wheel assemblies, 61 separated in synchronization and draws close, realizes that clamping device 6 is clamped and opened.
As shown in figure 3, elevating mechanism 5 is located in 2 bottom interval of X-axis transmission mechanism, crucible can be held up to clamping machine
At structure.Elevating mechanism 5 includes the carrying roller 54 being set on roller rack 53 and the linear bearing 52 for guiding, roller rack 53
It is driven with carrying roller 54 by cylinder 51.
Working principle of the utility model is: in use, crucible is placed on the feeding end of X-axis transmission mechanism 2 (in Fig. 1
Right end), the crucible that Open Side Down is forwarded by conveyer belt 1 after starting motor 22, when crucible passes through sensor,
Sensor is transferred to controller after generating signal intensity, automatically controls X-axis transmission mechanism 2 and crucible is transferred on elevating mechanism 5
Stop behind side.The cylinder 51 that carrying roller 54 on elevating mechanism 5 is distributed in 53 bottom four corners of roller rack by four jacks up, carrying roller
54, which stretch out X-axis transmission mechanism 2, jacks up at crucible to clamping device 6.Then sensor detection crucible height transfers signals to control
Device processed, controller control the rotation of 42 drive sprocket 41 of motor, are moved by chain-driving Y-axis transmission mechanism 3 along chain track 43,
The height of clamping device 6 is adjusted to crucible medium position.Controller controls motor 64 and cylinder 1 is driven to drive and cylinder 1
A connected roll wheel assembly 61 moves in a straight line, and transmission belt 27 is driven to be driven, and then another roll wheel assembly 61 is driven to do synchronizing direct
Line movement, two roll wheel assemblies are realized separated in synchronization and are drawn close, and adjust its position until roll wheel assembly 61 clamps crucible, then
Controller controls rotary cylinder 62 and drives roll wheel assembly 61 that crucible is driven to overturn 90 °.Controller controls cylinder 2 33 and drives Y-axis sliding
Platform 32 drives clamping device 6 to be moved at the crucible trimming chamfering mechanism of setting.After the completion of the trimming chamfering process of crucible, Y-axis
Slide unit 32 is retracted into original position, and clamping device 6 is flipped back to completion expansion action in situ, and Open Side Down for crucible by elevating mechanism 5
It returns on X-axis transmission mechanism 2 and moves forward.
The clamping device of the utility model is implemented in combination with two using the fine-tuning conveyer belt of positioning accuracy high-stroke and cylinder
Roll wheel assembly movement synchronizes, and runs smoothly, and precision is high, and variable diameter clamping, and roller group can be realized to various sizes of crucible
Part uses at least a pair of idler wheel flexible, ensure that clamping force, does not damage to crucible, while effectively preventing the prior art
The poor contact in clamping workpiece fabrication of middle rigidity hanging apparatus, position are not easy to adjust, and stationarity is poor, and control precision is poor
Technical problem reduces crucible breakage rate, improves production efficiency.Realize whole-course automation management, manipulation is simple, is effectively reduced
The labor intensity of operator, carrying stationarity is fabulous, and machining accuracy is high, and low energy consumption, and high production efficiency has a safety feature.And
And aforementioned activities are determined in range in rack and are completed, and it is compact-sized, save space.
Specific case used herein elaborates utility model design, and the explanation of above embodiments is
It is used to help understand the core concept of the utility model.It should be pointed out that for those skilled in the art, In
Under the premise of not departing from utility model design, any obvious modification, equivalent replacement or the other improvements made should all
It is included within the scope of protection of this utility model.
Claims (8)
1. a kind of silica crucible conveying robot device, which is characterized in that including rack, be set to transmission mechanism in rack,
Elevating mechanism, clamping device and sensor and controller；The transmission mechanism includes sequentially connected X-axis transmission mechanism, Z
Axis transmission mechanism and Y-axis transmission mechanism；The clamping device is slidably connected with Y-axis transmission mechanism and is driven by cylinder one, wraps
The roll wheel assembly and the rotary cylinder being set on the outside of roll wheel assembly that two are oppositely arranged are included, the roll wheel assembly includes at least one
To idler wheel, roll wheel assembly in the pair of rollers edge in the plane perpendicular to Z axis transmission mechanism under the driving of rotary cylinder
Central shaft rotation；The transmission mechanism, elevating mechanism, clamping device and sensor are electrically connected with controller.
2. a kind of silica crucible conveying robot device according to claim 1, which is characterized in that the X-axis conveyer
Structure is horizontally placed in rack, the conveyer belt one including several synchronous drivings, is parallel to each other and is spaced between the conveyer belt one
It opens, for realizing horizontal conveyor.
3. a kind of silica crucible conveying robot device according to claim 2, which is characterized in that the Y-axis conveyer
Structure includes and Y-axis slide unit Z axis transmission mechanism Y-axis fixed station connected vertically and be slidably matched with Y-axis fixed station, the Y-axis
Slide unit is driven by cylinder two, for driving clamping device along the track of the Y-axis fixed station perpendicular to X-axis transmission mechanism transmission direction
Interior side-to-side movement.
4. a kind of silica crucible conveying robot device according to claim 3, which is characterized in that the Y-axis slide unit two
Side is equipped with the sliding rail for being mutually not connected to and matching with roll wheel assembly.
5. a kind of silica crucible conveying robot device according to claim 4, which is characterized in that the Z axis conveyer
Structure is set to X-axis transmission mechanism two sides, the chain including being set in chain track and the sprocket wheel for setting up chain, the chain
Wheel is driven by motor, for driving chain to make Y-axis transmission mechanism along the chain track perpendicular to X-axis transmission mechanism transmission direction
Lower movement.
6. a kind of silica crucible conveying robot device according to claim 4, which is characterized in that clamping device further includes
Be set in Y-axis slide unit along the conveyer belt two of clamping device direction of motion arrangement, the roll wheel assembly respectively with conveyer belt two
Upper lower belt surface is connected, and synchronizes for realizing that two roll wheel assemblies act under the rotation of transmission belt two by the driving of cylinder one.
7. a kind of silica crucible conveying robot device according to claim 1, which is characterized in that the elevating mechanism is set
In the transmission mechanism bottom interval, for holding up crucible to clamping device.
8. a kind of silica crucible conveying robot device according to claim 7, which is characterized in that the elevating mechanism packet
The carrying roller being set on roller rack and the linear bearing for guiding are included, the roller rack and carrying roller are driven by the cylinder.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2018220512167 | 2018-12-07 | ||
| CN201822051216 | 2018-12-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209567526U true CN209567526U (en) | 2019-11-01 |
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ID=68331128
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| Application Number | Title | Priority Date | Filing Date |
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| CN201822232800.2U Active CN209567526U (en) | 2018-12-07 | 2018-12-28 | A kind of silica crucible conveying robot device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112125228A (en) * | 2020-09-23 | 2020-12-25 | 南京众控电子科技有限公司 | Special vehicle moving platform controlled by radio |
| CN112208005A (en) * | 2020-09-03 | 2021-01-12 | 上海汉虹精密机械有限公司 | Quartz crucible clamping, rotating, lifting and horizontal moving device |
| CN115308428A (en) * | 2022-08-08 | 2022-11-08 | 钢研纳克江苏检测技术研究院有限公司 | Automatic sample feeding device for vertical tube furnace |
| CN117484695A (en) * | 2023-12-28 | 2024-02-02 | 华耀光电科技股份有限公司 | Monocrystalline crucible stripper |
-
2018
- 2018-12-28 CN CN201822232800.2U patent/CN209567526U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112208005A (en) * | 2020-09-03 | 2021-01-12 | 上海汉虹精密机械有限公司 | Quartz crucible clamping, rotating, lifting and horizontal moving device |
| CN112125228A (en) * | 2020-09-23 | 2020-12-25 | 南京众控电子科技有限公司 | Special vehicle moving platform controlled by radio |
| CN115308428A (en) * | 2022-08-08 | 2022-11-08 | 钢研纳克江苏检测技术研究院有限公司 | Automatic sample feeding device for vertical tube furnace |
| CN117484695A (en) * | 2023-12-28 | 2024-02-02 | 华耀光电科技股份有限公司 | Monocrystalline crucible stripper |
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