CN209544289U - 一种晶圆类产品的识别及搬运一体化装置 - Google Patents
一种晶圆类产品的识别及搬运一体化装置 Download PDFInfo
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113555304A (zh) * | 2021-08-06 | 2021-10-26 | 深圳优艾智合机器人科技有限公司 | 晶圆盒搬运装置、设备、***及其搬运方法 |
CN116045827A (zh) * | 2023-02-22 | 2023-05-02 | 无锡星微科技有限公司 | 一种用于大尺寸晶圆的厚度和弯曲度的检测***和方法 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113555304A (zh) * | 2021-08-06 | 2021-10-26 | 深圳优艾智合机器人科技有限公司 | 晶圆盒搬运装置、设备、***及其搬运方法 |
CN116045827A (zh) * | 2023-02-22 | 2023-05-02 | 无锡星微科技有限公司 | 一种用于大尺寸晶圆的厚度和弯曲度的检测***和方法 |
CN116045827B (zh) * | 2023-02-22 | 2023-11-10 | 无锡星微科技有限公司 | 一种用于大尺寸晶圆的厚度和弯曲度的检测***和方法 |
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Address after: 201702 Building 2, No. 338, Jiuye Road, Qingpu District, Shanghai Patentee after: Shanghai Forsyte Robot Co.,Ltd. Address before: Room 305-308, Kaike International Building, Area A, 1801 Hongmei Road, Xuhui District, Shanghai, 2003 Patentee before: SHANGHAI FORESIGHT ROBOTICS Co.,Ltd. |
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Address after: 201712 Building 2, No. 338, Jiuye Road, Qingpu District, Shanghai Patentee after: Shanghai Fosaite Technology Co.,Ltd. Country or region after: China Address before: 201702 Building 2, No. 338, Jiuye Road, Qingpu District, Shanghai Patentee before: Shanghai Forsyte Robot Co.,Ltd. Country or region before: China |
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