CN209522898U - A kind of electrode for high vacuum coating unit high pressure importing - Google Patents

Abstract

The utility model discloses a kind of electrodes for high vacuum coating unit high pressure importing, its structure includes protective cover, supporting element, screw rod, first insulating ceramics stick, second insulating ceramics stick, first electrode block, prevent plate, high voltage electrode bar, second electrode block and electrode tabletting, the protective cover inner right side and supporting element carry out vertical welding, it is welded on the inside of the supporting element with screw rod, a kind of electrode for high vacuum coating unit high pressure importing of the utility model, it is a kind of collection aluminum oxide insulating ceramics, copper electrode, stainless steel is in the special high-field electrode of one, it can be subjected to the continuous non-stop run of -10kv high pressure for a long time, it can achieve extremely low leak rate after the welding of 3 kinds of materials, leak rate is 1.0E-10Pa.m3/s, it restrained effectively by the design of this scheme because high pressure is persistently led The heat of fashionable generation is stablized, reliably, durable.

Description

A kind of electrode for high vacuum coating unit high pressure importing

Technical field

The utility model is a kind of electrode for high vacuum coating unit high pressure importing, belongs to high-field electrode field.

Background technique

Vacuum coating equipment refers mainly to a kind of plated film for needing to carry out under higher vacuum, specifically includes many types, wraps It includes vacuum ionic to evaporate, magnetron sputtering, MBE molecular beam epitaxy, many kinds such as PLD pulsed laser deposition, main thought is divided into Two kinds of evaporation and sputtering, the high-field electrode of vacuum coating equipment is used as in conducting medium (solid, gas, vacuum or electrolyte solution) Two ends of input or derived current, electrode structure complexity, intensity of the prior art for the importing of high vacuum coating unit high pressure Poor and service life is shorter.

Utility model content

It is led in view of the deficienciess of the prior art, the utility model aim is to provide one kind for high vacuum coating unit high pressure The electrode entered, to solve the problems, such as that prior art construction is complicated, intensity is poor and service life is shorter.

To achieve the goals above, the utility model is achieved through the following technical solutions: a kind of be used for high vacuum The electrode of coating machine high pressure importing, including protective cover, supporting element, screw rod, the first insulating ceramics stick, the second insulating ceramics stick, First electrode block prevents plate, high voltage electrode bar, second electrode block and electrode tabletting, the protective cover inner right side and supporting element Vertical welding is carried out, is welded on the inside of the supporting element with screw rod, carries out spiral shell with the first insulating ceramics stick on the inside of the screw rod Line connection, the first insulating ceramics stick right part outside carry out vertical welding, the first insulating ceramics stick left side with plate is prevented It is welded with the second insulating ceramics stick, is provided with first electrode block, and first electrode on the left of the second insulating ceramics stick Block right side central is welded with high voltage electrode bar, and the high voltage electrode bar is welded with the first insulating ceramics stick middle inside It connects, through the second insulating ceramics stick middle inside on the right side of the high voltage electrode bar, and with the on the outside of high voltage electrode bar right part Two electrode blocks are welded, and middle part is threadedly coupled with electrode tabletting on front side of the second electrode block.

Further, there are three the supporting element is arranged altogether, and three supporting elements are equally distributed on the first insulating ceramics On the outside of stick.

Further, the length of the high voltage electrode bar be 185mm, and high voltage electrode bar on the left of with the first insulating ceramics The span access location length of stick connection is 82mm, and the span access location length connecting with the second insulating ceramics stick is 62mm, right side central transition block Length is 8mm, and the span access location length that right side is connect with second electrode block is 31mm.

Further, the first insulating ceramics stick and the second insulating ceramics stick are aluminum oxide insulating ceramics.

Further, the material that the supporting element uses is stainless steel.

Further, the material that the high voltage electrode bar uses is red copper.

A kind of electrode for high vacuum coating unit high pressure importing of the utility model is that a kind of collection aluminum oxide is exhausted Edge ceramics, copper electrode, stainless steel can be subjected to the continuous uninterrupted work of -10kv high pressure in the special high-field electrode of one for a long time Make, can achieve extremely low leak rate after the welding of 3 kinds of materials, leak rate 1.0E-10Pa.m3/s has by the design of this scheme The heat because generating when high pressure persistently imports is inhibited to effect, is stablized, it is reliably, durable.

Detailed description of the invention

Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other spies of the utility model Sign, objects and advantages will become more apparent upon:

Fig. 1 is the structural schematic diagram of the utility model；

Fig. 2 is the structural schematic diagram on the right side of the utility model；

Fig. 3 is the structural schematic diagram of the utility model protective cover broken section；

Fig. 4 is the structural schematic diagram of the first insulating ceramics of the utility model stick broken section；

In figure: protective cover -1, supporting element -2, screw rod -3, the first insulating ceramics stick -4, the second insulating ceramics stick -5, first Electrode block -6 prevents plate -7, high voltage electrode bar -8, second electrode block -9, electrode tabletting -10.

Specific embodiment

To be easy to understand the technical means, creative features, achievement of purpose, and effectiveness of the utility model, below In conjunction with specific embodiment, the utility model is further described.

Please refer to Fig. 1, Fig. 2, Fig. 3 and Fig. 4, the utility model provides a kind of for high vacuum coating unit high pressure importing Electrode: including protective cover 1, supporting element 2, screw rod 3, the first insulating ceramics stick 4, the second insulating ceramics stick 5, first electrode block 6, prevent Plate 7, high voltage electrode bar 8, second electrode block 9 and electrode tabletting 10,1 inner right side of protective cover and supporting element 2 carry out vertical welding It connects, 2 inside of supporting element is welded with screw rod 3, and 3 inside of screw rod is threadedly coupled with the first insulating ceramics stick 4, the first insulation Vertical welding is carried out with plate 7 is prevented on the outside of 4 right part of ceramic rod, 4 left side of the first insulating ceramics stick is carried out with the second insulating ceramics stick 5 It welds, is provided with first electrode block 6, and 6 right side central of first electrode block and high voltage electrode bar on the left of the second insulating ceramics stick 5 8 are welded, and high voltage electrode bar 8 is welded with 4 middle inside of the first insulating ceramics stick, the right side of high voltage electrode bar 8 through Second insulating ceramics stick, 5 middle inside, and welded on the outside of 8 right part of high voltage electrode bar with second electrode block 9, second electrode 9 front side middle part of block is threadedly coupled with electrode tabletting 10.

Wherein, there are three the supporting element 2 is arranged altogether, and three supporting elements 2 are equally distributed on the first insulating ceramics stick 4 Outside is conducive to install the design.

Wherein, the length of the high voltage electrode bar 8 is 185mm, and the left side of high voltage electrode bar 8 and the first insulating ceramics stick The span access location length of 4 connections is 82mm, and the span access location length connecting with the second insulating ceramics stick 5 is 62mm, right side central transition block Length is 8mm, and the span access location length that right side is connect with second electrode block 9 is 31mm.

Wherein, the first insulating ceramics stick 4 and the second insulating ceramics stick 5 are aluminum oxide insulating ceramics.

Wherein, the material that the supporting element 2 uses is stainless steel.

Wherein, the material that the high voltage electrode bar 8 uses is red copper.

When user wants using this patent, second electrode block 9 is passed through to the electricity of copper wire and vacuum coating equipment first Sub- rifle pipette tips are attached, then to the design carry out using；Present design uses metal to ceramic sealing structure, specific high-strength The features such as degree, highly reliable, durable, high airtight, high insulation, high current, it is reason that structure is simple, install convenient, easy to maintain The New-generation vacuum coating machine high-field electrode thought；A kind of electricity for high vacuum coating unit high pressure importing of the utility model Pole, is a kind of collection aluminum oxide insulating ceramics, copper electrode, stainless steel in the special high-field electrode of one, can be subjected to for a long time- The continuous non-stop run of 10kv high pressure can achieve extremely low leak rate, leak rate 1.0E- after the welding of 3 kinds of materials 10Pa.m3/s, by the design of this scheme restrained effectively because high pressure persistently imports when the heat that generates, stablize, reliably, warp It is durable long.

The basic principles and main features of the present invention and the advantages of the present invention have been shown and described above, for For those skilled in the art, it is clear that the present invention is not limited to the details of the above exemplary embodiments, and without departing substantially from this In the case where the spirit or essential attributes of utility model, the utility model can be realized in other specific forms.Therefore, no matter From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the utility model is by institute Attached claim rather than above description limit, it is intended that will fall within the meaning and scope of the equivalent elements of the claims All changes are embraced therein.It should not treat any reference in the claims as limiting related right It is required that.

In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art The other embodiments being understood that.

Claims (3)

1. a kind of electrode for high vacuum coating unit high pressure importing, it is characterised in that: including protective cover (1), supporting element (2), screw rod (3), the first insulating ceramics stick (4), the second insulating ceramics stick (5), first electrode block (6), prevent plate (7), high pressure Electrode bar (8), second electrode block (9) and electrode tabletting (10), protective cover (1) inner right side are hung down with supporting element (2) Straight welding, supporting element (2) inside are welded with screw rod (3), screw rod (3) inside and the first insulating ceramics stick (4) It is threadedly coupled, carries out vertical welding with plate (7) are prevented on the outside of the first insulating ceramics stick (4) right part, described first absolutely It is welded with the second insulating ceramics stick (5) on the left of edge ceramic rod (4), the second insulating ceramics stick (5) left side is provided with the One electrode block (6), and first electrode block (6) right side central is welded with high voltage electrode bar (8), the high voltage electrode bar (8) it is welded with first insulating ceramics stick (4) middle inside, through the second insulation pottery on the right side of the high voltage electrode bar (8) Porcelain stick (5) middle inside, and welded on the outside of high voltage electrode bar (8) right part with second electrode block (9), the second electrode Middle part is threadedly coupled with electrode tabletting (10) on front side of block (9).

2. a kind of electrode for high vacuum coating unit high pressure importing according to claim 1, it is characterised in that: described There are three supporting element (2) is arranged altogether, and three supporting elements (2) are equally distributed on the outside of the first insulating ceramics stick (4).

3. a kind of electrode for high vacuum coating unit high pressure importing according to claim 1, it is characterised in that: described The length of high voltage electrode bar (8) is 185mm, and the position that connect with the first insulating ceramics stick (4) on the left of high voltage electrode bar (8) Length is 82mm, and the span access location length connecting with the second insulating ceramics stick (5) is 62mm, and the length of right side central transition block is 8mm, The span access location length that right side is connect with second electrode block (9) is 31mm.