CN209412313U - A kind of spray unit and spray module - Google Patents
A kind of spray unit and spray module Download PDFInfo
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- CN209412313U CN209412313U CN201822258357.6U CN201822258357U CN209412313U CN 209412313 U CN209412313 U CN 209412313U CN 201822258357 U CN201822258357 U CN 201822258357U CN 209412313 U CN209412313 U CN 209412313U
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Abstract
The utility model relates to technical field of manufacturing semiconductors, a kind of spray unit and spray module are disclosed, the spray unit includes the spray channels being arranged independently of each other and temperature control channel, spray channels are for being passed through process gas and spraying, temperature control channel is used to carry out heat exchange to process gas and sprays it uniformly, is provided with attachment device on spray unit side wall.The spray module includes multiple above-mentioned spray units, multiple spray units are divided into the first spray unit and the second spray unit, the attachment device of first spray unit is connecting groove, the attachment device of second spray unit is connection boss, connection boss is caught in connecting groove, and the temperature control channel of multiple above-mentioned spray units is interconnected.The utility model improves film layer quality, reduces the difficulty of processing of spray assemblies, at low cost, it is convenient to assemble, convenient for meeting the process requirements of various sizes spray assemblies, when spray assemblies local damage, the replacement for accordingly damaging module can be carried out, maintenance cost is reduced.
Description
Technical field
The utility model relates to technical field of manufacturing semiconductors more particularly to a kind of spray unit and spray modules.
Background technique
Metal-organic chemical vapor deposition equipment, English name are Metal-organic Chemical Vapor
Deposition is abbreviated as MOCVD, is a kind of chemical vapor deposition work to grow up on the basis of vapor phase epitaxial growth
Skill, for growing epitaxial wafer.In Thinfilm solar cell assembly, film layer plays the role of photoelectric conversion, and performance exists
It has been largely fixed the photoelectric conversion efficiency of cell piece, the i.e. critical performance parameters of cell piece.Film layer is a variety of sources MO
Gas and other process gas grow generation in MOCVD device.Wherein MO source gas and other process gas air inflows
Uniformity directly affects the quality quality of the film layer of solar cell module.So gas can be designed in MOCVD device
Body flows spray assemblies, to guarantee the intake uniformity of MO source gas.
Gas flow equalization spray assemblies in existing MOCVD device are temperature control channel, inlet channel and common group of general frame
At monolithic construction.However, this monolithic construction has the following problems: being limited to machine tooling ability at this stage, gas
Body, which flows spray assemblies volume, arbitrarily to be increased, and can directly limit the promotion of MOCVD device production capacity in this way；Monoblock type gas is equal
Spray assemblies are flowed, cost is high, cannot achieve production domesticization processing at present, increases the manufacturing cost of MOCVD device；Integrated gas
Body flows spray assemblies, if Local Damaged, will lead to entire module and is not all available, thus maintenance cost is high.
Utility model content
Based on problem above, the purpose of this utility model is to provide a kind of spray units and spray module, processing to hold
Easily, at low cost, assembling it is convenient, can reduce the manufacturing cost of MOCVD device.
In order to achieve the above object, the utility model uses following technical scheme:
A kind of spray unit, the spray unit include the spray channels being arranged independently of each other and temperature control channel, the spray
For being passed through process gas and spraying, the temperature control channel is used to carry out heat exchange to the process gas and makes it in leaching channel
Even ejection is provided with the attachment device for connecting other spray units on the spray unit side wall.
The preferred embodiment of spray unit as the utility model, the spray channels include the air inlet master being sequentially communicated
Road, accommodating cavity and spray branch.
The preferred embodiment of spray unit as the utility model, the top surface of the spray unit are provided with ventilation boss,
The accommodating cavity is set in the ventilation boss, and ventilation open tubular column is provided on the ventilation boss, and the air inlet main road is set
It is placed in the ventilation open tubular column.
The preferred embodiment of spray unit as the utility model, the spray branch are equidistantly arranged at intervals with multiple.
The preferred embodiment of spray unit as the utility model, the temperature control channel include that the water inlet being sequentially communicated is led to
Road, heat exchanger channels and drainage channel, the spray branch are arranged in the heat exchanger channels.
The cross section of the preferred embodiment of spray unit as the utility model, the spray unit is square.
A kind of spray module, including multiple spray units as described above, multiple spray units are divided into the first spray
Unit and the second spray unit, the attachment device on first spray unit are connecting groove, and second spray is single
The attachment device in member is connection boss, and first spray unit and second spray unit interval are arranged, described
The connection boss of second spray unit is caught in the connecting groove of adjacent first spray unit, multiple described
The temperature control channel of spray unit is interconnected.
The preferred embodiment of spray module as the utility model, the temperature control channel of first spray unit are connected with
One right angle cutting ferrule, the temperature control channel of second spray unit are connected with the second right angle cutting ferrule, and first right angle cutting ferrule passes through
Straight-through cutting ferrule is connect with second right angle cutting ferrule.
Four sides of the preferred embodiment of the spray module as the utility model, first spray unit are respectively set
There is the connecting groove, four sides of second spray unit are respectively arranged with the connection boss.
It is set respectively on the preferred embodiment of spray module as the utility model, the connecting groove and the connection boss
It is equipped with connection through-hole, connecting pin is equipped in the connection through-hole, the connecting groove and the connection boss pass through the company
Outbound connection.
The utility model has the following beneficial effects:
A kind of spray unit provided by the utility model by the way that process gas is passed through spray channels, by temperature control channel with
Process gas in spray channels carries out heat exchange, sprays the process gas in spray channels uniformly, improves film layer matter
Amount.
A kind of spray module provided by the utility model is by being provided with the first spray unit of connecting groove and being provided with
The second spray unit for connecting boss is cooperatively connected, and multiple first spray units and multiple second spray units removably form
Novel spray assemblies reduce the difficulty of processing of spray assemblies, at low cost, and it is convenient to assemble, convenient for meeting various sizes spray group
The process requirements of part, the promotion for metal-organic chemical vapor deposition equipment production capacity provide necessary condition, work as spray assemblies
When local damage, the replacement for accordingly damaging module can be carried out, maintenance cost is reduced.
Detailed description of the invention
It, below will be to the utility model embodiment in order to illustrate more clearly of the technical scheme in the embodiment of the utility model
Attached drawing needed in description is briefly described, it should be apparent that, the accompanying drawings in the following description is only that this is practical new
Some embodiments of type for those of ordinary skill in the art without creative efforts, can be with root
Other attached drawings are obtained according to the content of the utility model embodiment and these attached drawings.
Fig. 1 is the structural schematic diagram for the spray unit that specific embodiment of the present invention provides；
Fig. 2 is the structural schematic diagram for the spray module that specific embodiment of the present invention provides；
Fig. 3 is the structural schematic diagram of the first spray unit in Fig. 2；
Fig. 4 is the structural schematic diagram of the second spray unit in Fig. 2.
In figure:
The first spray unit of 1-；11- connecting groove；The second spray unit of 2-；21- connection boss；
31- air inlet main road；32- accommodating cavity；33- sprays branch；
41- intake tunnel；42- heat exchanger channels；43- drainage channel；
The first right angle 51- cutting ferrule；The second right angle 52- cutting ferrule；53- leads directly to cutting ferrule.
Specific embodiment
The technical issues of to solve the utility model, the technical solution of use and the technical effect that reaches are clearer,
It is described in further detail below in conjunction with technical solution of the attached drawing to the utility model embodiment, it is clear that described reality
Applying example is only the utility model a part of the embodiment, instead of all the embodiments.Based on the embodiments of the present invention,
It is practical new to belong to this for those skilled in the art's every other embodiment obtained without creative efforts
The range of type protection.
As shown in Figure 1, present embodiment provides a kind of spray unit, which includes the spray being arranged independently of each other
Channel and temperature control channel, for being passed through process gas and spraying, temperature control channel is used to carry out hot friendship to process gas spray channels
It changes and sprays it uniformly, the attachment device for connecting other spray units is provided on spray unit side wall.By by work
Skill gas is passed through spray channels, carries out heat exchange by the process gas in temperature control channel and spray channels, makes in spray channels
Process gas uniformly spray, improve film layer quality.
Spray channels include the air inlet main road 31 being sequentially communicated, accommodating cavity 32 and spray branch 33.The top surface of spray unit
It is provided with ventilation boss, accommodating cavity 32 is set in ventilation boss, is provided with ventilation open tubular column, air inlet main road 31 on boss of ventilating
It is set in ventilation open tubular column.Spray branch 33 is equidistantly arranged at intervals with multiple.Spray branch 33 is equidistantly arranged at intervals with
It is multiple, convenient for improving the uniform flow of process gas sufficiently with temperature control channel for heat exchange.
Temperature control channel includes the intake tunnel 41, heat exchanger channels 42 and drainage channel 43 being sequentially communicated, and spray branch 33 is worn
In heat exchanger channels 42.
The cross section of spray unit is square, manufacture easy to process, and batch production reduces cost, interchangeability is good.
As shown in Fig. 2, present embodiment also provides a kind of spray module, including multiple above-mentioned spray units, multiple sprays
Leaching unit is divided into the first spray unit 1 and the second spray unit 2, and the temperature control channel of multiple spray units is interconnected.
Wherein, as shown in figure 3, the attachment device on the first spray unit 1 is connecting groove 11, the first spray unit 1 packet
The spray channels being arranged independently of each other and temperature control channel are included, spray channels for being passed through process gas and spraying, use by temperature control channel
In carrying out heat exchange and spraying it uniformly to process gas.By the way that process gas is passed through spray channels, pass through temperature control channel
Heat exchange is carried out with the process gas in spray channels, the process gas in spray channels is sprayed uniformly, improves film layer
Quality.
As shown in figure 4, the attachment device on the second spray unit 2 is connection boss 21, it is recessed that connection boss 21 is caught in connection
In slot 11, the internal structure of the second spray unit 2 is identical as the first spray unit 1, the temperature control channel of the second spray unit 2 and the
The temperature control channel of one spray unit 1 is connected to.
By be provided with the first spray unit 1 of connecting groove 11 be provided with the second spray unit 2 for connecting boss 21
It is cooperatively connected, multiple first spray units 1 and multiple second spray units 2 removably form novel spray assemblies, reduce
The difficulty of processing of spray assemblies, at low cost, it is convenient to assemble, and is metal convenient for meeting the process requirements of various sizes spray assemblies
The promotion of organic chemical vapor deposition equipment production capacity provides necessary condition, when spray assemblies local damage, can carry out
The replacement of corresponding damage module, reduces maintenance cost.
Specifically, as shown in Figure 1, spray channels include the air inlet main road 31 being sequentially communicated, accommodating cavity 32 and spray branch
33。
Spray branch 33 is equidistantly arranged at intervals with multiple, convenient for sufficiently with temperature control channel for heat exchange, improves process gas
Uniform flow.
Temperature control channel includes the intake tunnel 41, heat exchanger channels 42 and drainage channel 43 being sequentially communicated, and spray branch 33 is worn
In heat exchanger channels 42, the intake tunnel 41 of the second spray unit 2 is connected to the drainage channel 43 of the first spray unit 1.It is logical
The temperature in external adjusting cooling water is crossed to realize the cooling water temperature control to temperature control channel.Cooling water passes heat by heat
It leads, is transmitted in spray branch 33, and then realize and the temperature of process gas is controlled.
As shown in Fig. 2, the draining open tubular column of the first spray unit 1 is connected with the first right angle cutting ferrule 51, the second spray unit 2
Water inlet open tubular column be connected with the second right angle cutting ferrule 52, the first right angle cutting ferrule 51 passes through straight-through cutting ferrule 53 and the second right angle cutting ferrule 52
Connection.It should be noted that water inlet open tubular column and draining open tubular column can also connect by other means, such as the pipe of integral type
The cooperation on road and ring flange.
First spray unit 1 and 2 top surface of the second spray unit are provided with ventilation boss, and it is convex that accommodating cavity 32 is set to ventilation
In platform, ventilation open tubular column is provided on boss of ventilating, air inlet main road 31 is set in ventilation open tubular column.
First spray unit 1 and 2 top surface of the second spray unit are provided with into water open tubular column and draining open tubular column, and water inlet is logical
Road 41 is set into water open tubular column, and drainage channel 43 is set in draining open tubular column.
More specifically, the cross section of the first spray unit 1 and the second spray unit 2 is square, system easy to process
It makes, produces in batches, reduce cost, interchangeability is good.
Four sides of the first spray unit 1 are respectively arranged with connecting groove 11, four sides point of the second spray unit 2
It is not provided with connection boss 21, one in four connection boss 21 is caught in a connecting groove 11.
It should be noted that since four sides of the first spray unit 1 are respectively arranged with connecting groove 11, one first
Spray unit 1 can be connect with four the second spray units 2 simultaneously.Demand according to user to equipment size size and production capacity, choosing
The first spray unit 1 and the second spray unit 2 for selecting respective numbers, are assembled into the spray module of suitable size.
Connecting groove 11 is respectively arranged with connection through-hole with connecting on boss 21, connects in through-hole and is equipped with connecting pin, even
It connects groove 11 and passes through connection pin connection with boss 21 is connect, it is simple in construction, easy to disassemble and assemble.
A kind of spray unit provided by the utility model by the way that process gas is passed through spray channels, by temperature control channel with
Process gas in spray channels carries out heat exchange, sprays the process gas in spray channels uniformly, improves film layer matter
Amount.
A kind of spray module provided by the utility model is by being provided with the first spray unit of connecting groove and being provided with
The second spray unit for connecting boss is cooperatively connected, and multiple first spray units and multiple second spray units removably form
Novel spray assemblies reduce the difficulty of processing of spray assemblies, at low cost, and it is convenient to assemble, convenient for meeting various sizes spray group
The process requirements of part, the promotion for metal-organic chemical vapor deposition equipment production capacity provide necessary condition, work as spray assemblies
When local damage, the replacement for accordingly damaging module can be carried out, maintenance cost is reduced.
Note that above are only the preferred embodiment and institute's application technology principle of the utility model.Those skilled in the art's meeting
Understand, the utility model is not limited to specific embodiment here, is able to carry out for a person skilled in the art various apparent
Variation is readjusted and is substituted without departing from the protection scope of the utility model.Therefore, although by above embodiments to this
Utility model is described in further detail, but the utility model is not limited only to above embodiments, is not departing from this reality
It can also include more other equivalent embodiments in the case where with novel design, and the scope of the utility model is by appended power
Sharp claimed range determines.
Claims (10)
1. a kind of spray unit, which is characterized in that the spray unit includes that the spray channels being arranged independently of each other and temperature control are logical
Road, for being passed through process gas and spraying, the temperature control channel is used to carry out hot friendship to the process gas spray channels
It changes and sprays it uniformly, the attachment device for connecting other spray units is provided on the spray unit side wall.
2. spray unit according to claim 1, which is characterized in that the spray channels include the air inlet master being sequentially communicated
Road (31), accommodating cavity (32) and spray branch (33).
3. spray unit according to claim 2, which is characterized in that it is convex that the top surface of the spray unit is provided with ventilation
Platform, the accommodating cavity (32) are set in the ventilation boss, are provided with ventilation open tubular column, the air inlet on the ventilation boss
Main road (31) is set in the ventilation open tubular column.
4. spray unit according to claim 2, which is characterized in that the spray branch (33) is equidistantly arranged at intervals with
It is multiple.
5. spray unit according to claim 2, which is characterized in that the temperature control channel includes that the water inlet being sequentially communicated is led to
Road (41), heat exchanger channels (42) and drainage channel (43), the spray branch (33) are arranged in the heat exchanger channels (42).
6. spray unit according to claim 1, which is characterized in that the cross section of the spray unit is square.
7. a kind of spray module, which is characterized in that including multiple spray units as claimed in any one of claims 1 to 6, wherein
Multiple spray units are divided into the first spray unit (1) and the second spray unit (2), first spray unit (1)
On the attachment device be connecting groove (11), the attachment device on second spray unit (2) is connection boss
(21), first spray unit (1) and the setting of second spray unit (2) interval, the institute of second spray unit (2)
It states connection boss (21) to be caught in the connecting groove (11) of adjacent first spray unit (1), multiple sprays
The temperature control channel of unit is interconnected.
8. spray module according to claim 7, which is characterized in that the temperature control channel of first spray unit (1) connects
It is connected to the first right angle cutting ferrule (51), the temperature control channel of second spray unit (2) is connected with the second right angle cutting ferrule (52), described
First right angle cutting ferrule (51) is connect by straight-through cutting ferrule (53) with second right angle cutting ferrule (52).
9. spray module according to claim 7, which is characterized in that four sides of first spray unit (1) point
It is not provided with the connecting groove (11), four sides of second spray unit (2) are respectively arranged with the connection boss
(21)。
10. spray module according to claim 9, which is characterized in that the connecting groove (11) and the connection boss
(21) it is respectively arranged with connection through-hole on, connecting pin, the connecting groove (11) and the company are equipped in the connection through-hole
It connects boss (21) and passes through the connection pin connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822258357.6U CN209412313U (en) | 2018-12-30 | 2018-12-30 | A kind of spray unit and spray module |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822258357.6U CN209412313U (en) | 2018-12-30 | 2018-12-30 | A kind of spray unit and spray module |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209412313U true CN209412313U (en) | 2019-09-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822258357.6U Active CN209412313U (en) | 2018-12-30 | 2018-12-30 | A kind of spray unit and spray module |
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| Country | Link |
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| CN (1) | CN209412313U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116695098A (en) * | 2023-08-07 | 2023-09-05 | 江苏微导纳米科技股份有限公司 | Spray plate, spray method and treatment device |
-
2018
- 2018-12-30 CN CN201822258357.6U patent/CN209412313U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116695098A (en) * | 2023-08-07 | 2023-09-05 | 江苏微导纳米科技股份有限公司 | Spray plate, spray method and treatment device |
| CN116695098B (en) * | 2023-08-07 | 2023-11-17 | 江苏微导纳米科技股份有限公司 | Spray plate, spray method and treatment device |
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| TR01 | Transfer of patent right |
Effective date of registration: 20210119 Address after: Unit 611, unit 3, 6 / F, building 1, yard 30, Yuzhi East Road, Changping District, Beijing 102208 Patentee after: Zishi Energy Co.,Ltd. Address before: Room a129-1, No. 10, Zhongxing Road, science and Technology Park, Changping District, Beijing Patentee before: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY Co.,Ltd. |