CN209344055U - A kind of silicon wafer production sliding rail screw rod mobile base - Google Patents
A kind of silicon wafer production sliding rail screw rod mobile base Download PDFInfo
- Publication number
- CN209344055U CN209344055U CN201920449836.8U CN201920449836U CN209344055U CN 209344055 U CN209344055 U CN 209344055U CN 201920449836 U CN201920449836 U CN 201920449836U CN 209344055 U CN209344055 U CN 209344055U
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- China
- Prior art keywords
- silicon wafer
- type steel
- hole
- mounting blocks
- screw rod
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- Expired - Fee Related
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a kind of silicon wafer production sliding rail screw rod mobile bases, including C-type steel rail chair, rectangular shaped slider is slidably connected in the sliding slot of the C-type steel rail chair, and rectangular shaped slider is provided with mounting blocks far from a middle side part of slot bottom, the opening of the C-type steel rail chair is provided with the limit hole equidistantly distributed close to the lower surface of mounting blocks, and the side of mounting blocks has been bolted automatically controlled positioning pin above limit hole, screw hole is provided in the middle part of the rectangular shaped slider, and drive screw is bolted in screw hole, the slot bottom of the C-shaped rail seat is respectively arranged with L-shaped fixed plate and shaft bearing plate by two close end, and fixed plate and the opposite middle side part of shaft bearing plate are provided with bearing mounting hole.The utility model in time can lock mounting blocks when drive screw drives rectangular shaped slider and mounting blocks reach designated position, so that the position for allowing the silicon wafer being placed on mounting blocks to stop every time is all consistent, improve the quality of production of silicon wafer production.
Description
Technical field
The utility model relates to silicon wafer production technical field more particularly to a kind of silicon wafer production mobile bottoms of sliding rail screw rod
Seat.
Background technique
In the manufacturing process of silicon wafer, need to silicon wafer coat diffusion layer, need by multiple tracks technique, thus just need by
Silicon wafer is fixed on transportable pedestal to be produced, and present manually take out from conveyer belt is produced again,
Lead to that silicon wafer is at high cost, low efficiency.Therefore the mobile base for needing a kind of silicon wafer production, is able to ascend silicon wafer quality product rate, improves
Silicon wafer processing efficiency reduces cost of labor.
It is a kind of silicon wafer production line disclosed in CN201820881050.9 through retrieval China Patent No., including first applies
Component is dried in source and component is dried in the second painting source, and first painting source drying component includes the first painting source mechanism.But the silicon wafer
Production can not carry out accurate quickly positioning to mobile base automatically when being moved to next station with mobile base, past
It is past to need to manually locate, or make its latched position by screwing numerous fastening bolts, it is time-consuming and laborious.
Utility model content
Purpose of the utility model is to solve disadvantages existing in the prior art, and a kind of silicon wafer proposed is produced and used
Sliding rail screw rod mobile base.
To achieve the goals above, the utility model adopts the technical scheme that
A kind of silicon wafer production sliding rail screw rod mobile base, including C-type steel rail chair, it is sliding in the sliding slot of the C-type steel rail chair
It is dynamic to be connected with rectangular shaped slider, and rectangular shaped slider is provided with mounting blocks, the opening of the C-type steel rail chair far from a middle side part of slot bottom
Locate to be provided with the limit hole equidistantly distributed close to the lower surface of mounting blocks, and the side of mounting blocks passes through above limit hole
Bolt is fixed with automatically controlled positioning pin, screw hole is provided in the middle part of the rectangular shaped slider, and drive screw is bolted in screw hole.
Preferably, the slot bottom of the C-shaped rail seat is respectively arranged with L-shaped fixed plate and shaft bearing plate by two close end, and fixed
Plate and the opposite middle side part of shaft bearing plate are provided with bearing mounting hole, are connected with circular cone roller axle in two bearing mounting holes
It holds.
Preferably, screw thread is provided in the middle part of the drive screw and both ends are arranged to smooth shaft, one end circle of drive screw
All outer walls are equipped with and cut shoulder.
Preferably, the opposite two sides of the rectangular shaped slider are provided with spherical groove close to four corners, and in spherical groove
It is connected with ball, the inner wall of C-type steel rail chair is provided with half slot compatible with ball.
Preferably, the opposite two sides outer wall of the C-type steel rail chair is welded with gusset, and the upper table of gusset far from opening
Middle face is provided with ladder hole.
Preferably, the bottom interior wall of the C-type steel rail chair is provided with the chip-removal hole equidistantly distributed, and chip-removal hole is close to top
Aperture be greater than close to bottom end aperture, thus scrap fall when will not be by chip removal hole plug.
Compared with prior art, the utility model provides a kind of silicon wafer production sliding rail screw rod mobile base, have with
It is lower the utility model has the advantages that
1. by the way that the limit hole immediately below the automatically controlled positioning pin of mounting blocks side and the pin shaft of automatically controlled positioning pin is arranged in, from
And in time can lock mounting blocks when drive screw drives rectangular shaped slider and mounting blocks reach designated position, thus
The position for allowing the silicon wafer being placed on mounting blocks to stop every time is all consistent, improves the quality of production of silicon wafer production.
2. by the way that the opposite two sides of rectangular shaped slider are arranged in close to the ball of four corners and are provided with C-type steel rail chair inner wall
On half slot, so as to become traditional rectangular shaped slider and C-type steel rail chair inner wall between sliding friction into rolling friction, into
And drive screw is allowed to be easier that rectangular shaped slider and mounting blocks is driven to move in rail chair.
3. by the circular cone roller bearing that mutually symmetrical with distribution in two bearing mounting holes is arranged in, so as to carrying axle
Upward power can also carry power radially, so that it is guaranteed that drive screw can be with normal rotation.
It is not directed to part in the device to be the same as those in the prior art or can be realized by using the prior art, the utility model
Structure is simple, cleaning convenient for safeguarding and accurate and efficient positioning.
Detailed description of the invention
Fig. 1 be the utility model proposes a kind of silicon wafer production sliding rail screw rod mobile base overall structure diagram；
Fig. 2 be the utility model proposes a kind of silicon wafer production sliding rail screw rod mobile base schematic cross-sectional view；
Fig. 3 be the utility model proposes a kind of silicon wafer production sliding rail screw rod mobile base rectangular shaped slider and mounting blocks
Combine schematic perspective view.
In figure: 1-C fashioned iron rail chair, 2- ladder hole, 3- arc groove, 4-L shape fixed plate, 5- bearing mounting hole, 6- transmission
The automatically controlled positioning pin of screw rod, 7-, 8- mounting blocks, 9- limit hole, 10- shaft bearing plate, 11- gusset, 12- rectangular shaped slider, 13- circular cone roller
Bearing, 14- cut shoulder, 15- ball, 16- chip-removal hole, 17- screw thread, 18- spherical groove, 19- screw hole.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.
In the description of the present invention, it should be understood that term " on ", "lower", "front", "rear", "left", "right",
The orientation or positional relationship of the instructions such as "top", "bottom", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings, and is only
For ease of description the utility model and simplify description, rather than the device or element of indication or suggestion meaning must have it is specific
Orientation, be constructed and operated in a specific orientation, therefore should not be understood as limiting the present invention.
Referring to Fig.1-3, a kind of silicon wafer production sliding rail screw rod mobile base, including C-type steel rail chair 1, C-type steel rail chair 1
Rectangular shaped slider 12 is slidably connected in sliding slot, and rectangular shaped slider 12 is welded with mounting blocks 8, C-type steel far from a middle side part of slot bottom
The opening of rail chair 1 is provided with the limit hole 9 equidistantly distributed close to the lower surface of mounting blocks 8, and the side of mounting blocks 8 is close to limit
The top in position hole 9 has been bolted automatically controlled positioning pin 7, and the pin diameter of automatically controlled positioning pin 7 is mutually fitted with the internal diameter of limit hole 9
Match, the middle part of rectangular shaped slider 12 is provided with screw hole 19, and drive screw 6 is bolted in screw hole 19.
In the utility model, the slot bottom of C-shaped rail seat 1 is respectively arranged with L-shaped fixed plate 4 and shaft bearing plate 10 by two close end,
And fixed plate 4 and the opposite middle side part of shaft bearing plate 10 are provided with bearing mounting hole 5, are connected in two bearing mounting holes 5
Circular cone roller bearing 13.
Wherein, the middle part of drive screw 6 is provided with screw thread 17 and both ends are arranged to smooth shaft, outer diameter and circular cone at smooth shaft
The internal diameter of 13 inner ring of roller bearing is adapted, and one end outer circumferential walls of drive screw 6 are equipped with and cut shoulder 14, to be clamped and the company of installation
Axis device is connected with the servo motor at driving end.
Wherein, the opposite two sides of rectangular shaped slider 12 are provided with spherical groove 18 close to four corners, and in spherical groove 18
It is connected with ball 15, the inner wall of C-type steel rail chair 1 is provided with half slot 3 compatible with ball 15.
Wherein, the opposite two sides outer wall of C-type steel rail chair 1 is welded with gusset 11 far from opening, and four gussets 11
Upper surface middle part is provided with ladder hole 2.
Wherein, the bottom interior wall of C-type steel rail chair 1 is provided with the chip-removal hole 16 equidistantly distributed, and chip-removal hole 16 is close to top
Aperture be greater than close to bottom end aperture, thus scrap fall when chip-removal hole 16 will not be blocked.
The gusset 11 of 1 four corners of C-type steel rail chair: when installation, being fixed on the base by working principle by bolt, it
The output shaft top for being socketed with the servo motor of shaft joint drive screw 6 is socketed in again afterwards to be provided on the one end for cutting shoulder 14；It
Afterwards in use, starting servo motor can drive drive screw 6 to rotate, it just will drive be screwed on drive screw 6 at the same time
Rectangular shaped slider 12 and mounting blocks 8 moved in parallel along the sliding slot of C-type steel rail chair 1, when being moved to one of station,
Signal can be delivered to control terminal by the sensor being previously installed on C-type steel rail chair 1, the servo motor electricity of control terminal cutting at this time
Source, while controlling automatically controlled positioning pin 7 and starting, then rapid grafting is into being locked in limit hole 9 for the pin shaft of automatically controlled positioning pin 7, i.e.,
Tooling can be carried out to the silicon wafer being installed on mounting blocks 8.
The preferable specific embodiment of the above, only the utility model, but the protection scope of the utility model is not
It is confined to this, anyone skilled in the art is within the technical scope disclosed by the utility model, practical according to this
Novel technical solution and its utility model design are subject to equivalent substitution or change, should all cover the protection model in the utility model
Within enclosing.
Claims (6)
1. a kind of silicon wafer production sliding rail screw rod mobile base, including C-type steel rail chair (1), which is characterized in that the C-type steel rail
It is slidably connected rectangular shaped slider (12) in the sliding slot of seat (1), and rectangular shaped slider (12) is provided with peace far from a middle side part of slot bottom
It fills block (8), the opening of the C-type steel rail chair (1) is provided with the limit hole equidistantly distributed close to the lower surface of mounting blocks (8)
(9), and the side of mounting blocks (8) has been bolted automatically controlled positioning pin (7), the rectangle above limit hole (9)
It is provided in the middle part of sliding block (12) screw hole (19), and is bolted with drive screw (6) in screw hole (19).
2. a kind of silicon wafer production sliding rail screw rod mobile base according to claim 1, which is characterized in that the C-shaped steel
The slot bottom of rail chair (1) is respectively arranged with L-shaped fixed plate (4) and shaft bearing plate (10), and fixed plate (4) and shaft bearing plate by two close end
(10) an opposite middle side part is provided with bearing mounting hole (5), is connected with circular cone roller bearing in two bearing mounting holes (5)
(13)。
3. a kind of silicon wafer production sliding rail screw rod mobile base according to claim 2, which is characterized in that the transmission spiral shell
It is provided with screw thread (17) in the middle part of bar (6) and both ends are arranged to smooth shaft, one end outer circumferential walls of drive screw (6), which are equipped with, cuts shoulder
(14)。
4. a kind of silicon wafer production sliding rail screw rod mobile base according to claim 2, which is characterized in that the rectangle is sliding
The opposite two sides of block (12) are provided with spherical groove (18) close to four corners, and are connected with ball in spherical groove (18)
(15), the inner wall of C-type steel rail chair (1) is provided with and ball (15) compatible half slot (3).
5. a kind of silicon wafer production sliding rail screw rod mobile base according to claim 1, which is characterized in that the C-type steel
The opposite two sides outer wall of rail chair (1) is welded with gusset (11) far from opening, and the upper surface middle part of gusset (11) is provided with
Ladder hole (2).
6. a kind of silicon wafer production sliding rail screw rod mobile base according to claim 1, which is characterized in that the C-type steel
The bottom interior wall of rail chair (1) is provided with the chip-removal hole (16) equidistantly distributed, and chip-removal hole (16) is greater than close to the aperture on top and leans on
The aperture of nearly bottom end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920449836.8U CN209344055U (en) | 2019-04-04 | 2019-04-04 | A kind of silicon wafer production sliding rail screw rod mobile base |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920449836.8U CN209344055U (en) | 2019-04-04 | 2019-04-04 | A kind of silicon wafer production sliding rail screw rod mobile base |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209344055U true CN209344055U (en) | 2019-09-03 |
Family
ID=67763416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920449836.8U Expired - Fee Related CN209344055U (en) | 2019-04-04 | 2019-04-04 | A kind of silicon wafer production sliding rail screw rod mobile base |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209344055U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110537793A (en) * | 2019-09-19 | 2019-12-06 | 安徽银雷直线导轨制造有限公司 | slide rail easy to assemble dismantlement |
-
2019
- 2019-04-04 CN CN201920449836.8U patent/CN209344055U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110537793A (en) * | 2019-09-19 | 2019-12-06 | 安徽银雷直线导轨制造有限公司 | slide rail easy to assemble dismantlement |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190903 |