CN209227049U - A kind of new vacuum coating equipment - Google Patents
A kind of new vacuum coating equipment Download PDFInfo
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- CN209227049U CN209227049U CN201821731916.4U CN201821731916U CN209227049U CN 209227049 U CN209227049 U CN 209227049U CN 201821731916 U CN201821731916 U CN 201821731916U CN 209227049 U CN209227049 U CN 209227049U
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- bearing support
- condenser coil
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Abstract
The utility model relates to a kind of new vacuum coating equipments, including vacuum cavity and cyropump, setting one is for carrying the bearing support of product, the electron gun of a plated film and a hollow dirtproof cover in vacuum cavity, one Coating Materials is set between bearing support and electron gun, perforative through-hole is offered in dirtproof cover, through-hole one end is towards electron gun, the other end of through-hole is towards bearing support, it is greater than the diameter of the through-hole other end towards the diameter of through-hole one end of bearing support, Coating Materials is arranged in through-hole；Cyropump includes the condenser coil for adsorbed gas and steam, and condenser coil is in multilayer coil structure, and condenser coil is mounted in the high valve chamber being connected to vacuum cavity by pipeline；Condenser coil includes heating defroster.The new vacuum coating equipment can save the time of cleaning liner plate；Improve the speed of evacuation and pumping quality of vacuum coating equipment extract system.
Description
Technical field
The utility model relates to coating machine technical fields, more particularly to a kind of new vacuum coating equipment.
Background technique
When vacuum coating equipment works: first vacuumizing, so that vacuum cavity is in vacuum state, then by electron gun line to true
Coating Materials (abbreviation coating materials) heating in cavity body bottom portion crucible；Coating materials is after being heated to certain temperature, coating materials molecule meeting
Volatilization is generated, product surface of the coating materials molecule deposition volatilized at the top of vacuum cavity forms film.In general, coating materials molecule point
Son is spread to crucible surrounding, and the liner plate on vacuum cavity inner wall and bottom plate can cover coating materials, this had both caused coating materials molecule
Waste, and increase cleaning crucible workload.Under normal circumstances, the liner plate for just needing that crucible internal walls are arranged for two days is produced
It is cleaned, primary cleaning needs time half a day and heavy workload, wastes time, and influences work production.
Utility model content
For overcome the deficiencies in the prior art, the utility model provides a kind of new vacuum coating equipment, and coating materials is to liner plate
Pollution is few, can reduce equipment cleaning maintenance time.
A kind of new vacuum coating equipment, including vacuum cavity and cyropump, the interior setting one of the vacuum cavity is for carrying
The bearing support of product, the electron gun of a plated film and a hollow dirtproof cover, set between the bearing support and electron gun
A Coating Materials is set, offers perforative through-hole in the dirtproof cover, described through-hole one end is towards the electron gun, the through-hole
The other end towards the bearing support, it is another to be greater than the through-hole towards the diameter of described through-hole one end of the bearing support
The diameter at end, the Coating Materials are arranged in the through-hole；
The cyropump includes the condenser coil for adsorbed gas and steam, and the condenser coil is in superimposed line loop knot
Structure, the condenser coil are mounted in the high valve chamber being connected to the vacuum cavity by pipeline；The condenser coil includes
Heat defroster.
Above-mentioned new vacuum coating equipment installs a dirtproof cover additional before electron gun, blocks the coating materials to volatilize around crucible
Molecule makes vacuum chamber liner plate keep cleaning, and one dirtproof cover of replacement continues to produce after dirtproof cover is dirty, saves cleaning liner plate
Time；Increase cyropump in vacuum coating equipment, the condenser coil in cyropump is mounted on and is connected with vacuum cavity
In high valve chamber, by the cryogenic condensation effect on its surface, the residual gas in vacuum cavity is trapped rapidly, to greatly shorten
Time for vacuumizing and clean vacuum environment can be obtained, improve the speed of evacuation and pumping of vacuum coating equipment extract system
Quality.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the vacuum coating equipment of one of embodiment.
Specific embodiment
To keep the above objects, features, and advantages of the utility model more obvious and easy to understand, with reference to the accompanying drawing to this
The specific embodiment of utility model is described in detail.Many details are explained in the following description in order to abundant
Understand the utility model.But the utility model can be implemented with being much different from other way described herein, this field
Technical staff can do similar improvement without prejudice to the utility model connotation, therefore the utility model is not by following public affairs
The limitation for the specific embodiment opened.
As shown in Figure 1, a kind of new vacuum coating equipment, including vacuum cavity 1 and cyropump 2, the interior setting one of vacuum cavity 1
For carrying the bearing support 11 of product, the electron gun 12 and a hollow dirtproof cover 13 of a plated film, 11 He of bearing support
It is arranged between electron gun 12 Coating Materials (not shown), perforative through-hole 131,131 one end of through-hole is offered in dirtproof cover 13
Towards electron gun 12, the other end of through-hole 131 is towards bearing support 11, towards the diameter of 131 one end of through-hole of bearing support 11
Greater than the diameter of 131 other end of through-hole, Coating Materials is arranged in through-hole 131.Multiple pass through is set on the umbrella cover of bearing support 11
The circular hole 14 worn, product is (not shown) to be arranged in circular hole 14.
Cyropump 2 includes the condenser coil 21 for adsorbed gas and steam, and condenser coil 21 is in multilayer coil structure, cold
Solidifying coil pipe 21 is mounted in the high valve chamber 22 being connected to vacuum cavity 1 by pipeline；Condenser coil 21 includes heating defrosting dress
It sets.Condenser coil 21 needs heating defroster, so that condenser coil 21 is restored to room temperature before each open the door, avoids low temperature
Condenser coil 21 a large amount of steam is absorbed from atmosphere and frosting, influence to vacuumize next time.
Vacuum coating equipment in the present embodiment further includes oil diffusion pump 3, and one end and the vacuum cavity 1 of high valve chamber 22 pass through
Pipeline is connected, and the other end is connect with by high threshold 31 with oil diffusion pump 3.
Above-mentioned new vacuum coating equipment installs dirtproof cover 13 additional before electron gun 12, blocks and volatilizees around crucible
Coating materials molecule makes vacuum chamber liner plate keep cleaning, and one dirtproof cover 13 of replacement continues to produce after dirtproof cover 13 is dirty, saves
Clean the time of liner plate；Increase cyropump 2 in vacuum coating equipment, the condenser coil 21 in cyropump 2 is mounted on and vacuum
In the high valve chamber 22 that cavity 1 is connected, by the cryogenic condensation effect on its surface, the remnants in vacuum cavity 1 are trapped rapidly
Gas improves vacuum coating equipment pumping system to greatly shorten the time vacuumized and can obtain clean vacuum environment
The speed of evacuation and pumping quality of system.
Each technical characteristic of above embodiments can be combined arbitrarily, for simplicity of description, not to above-described embodiment
In each technical characteristic it is all possible combination be all described, as long as however, the combination of these technical characteristics be not present lance
Shield all should be considered as described in this specification.
Above embodiments only express the several embodiments of the utility model, and the description thereof is more specific and detailed, but simultaneously
The limitation to utility model patent range therefore cannot be interpreted as.It should be pointed out that for the ordinary skill people of this field
For member, without departing from the concept of the premise utility, various modifications and improvements can be made, these belong to this reality
With novel protection scope.Therefore, the scope of protection shall be subject to the appended claims for the utility model patent.
Claims (1)
1. a kind of new vacuum coating equipment, which is characterized in that including vacuum cavity and cyropump, setting one in the vacuum cavity
For carrying the bearing support of product, the electron gun and a hollow dirtproof cover, the bearing support and electronics of a plated film
One Coating Materials is set between rifle, offers perforative through-hole in the dirtproof cover, described through-hole one end towards the electron gun,
The other end of the through-hole is greater than described towards the bearing support towards the diameter of described through-hole one end of the bearing support
The diameter of the through-hole other end, the Coating Materials are arranged in the through-hole；
The cyropump includes the condenser coil for adsorbed gas and steam, and the condenser coil is in multilayer coil structure, institute
Condenser coil is stated to be mounted in the high valve chamber being connected to the vacuum cavity by pipeline；The condenser coil includes that heating removes
White device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821731916.4U CN209227049U (en) | 2018-10-24 | 2018-10-24 | A kind of new vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821731916.4U CN209227049U (en) | 2018-10-24 | 2018-10-24 | A kind of new vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209227049U true CN209227049U (en) | 2019-08-09 |
Family
ID=67500780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821731916.4U Active CN209227049U (en) | 2018-10-24 | 2018-10-24 | A kind of new vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209227049U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113621920A (en) * | 2021-10-12 | 2021-11-09 | 江苏晋誉达半导体股份有限公司 | Vacuum coating method of vacuum coating machine |
| CN113913756A (en) * | 2021-10-12 | 2022-01-11 | 江苏晋誉达半导体股份有限公司 | Vacuum coating machine |
| CN115584475A (en) * | 2022-10-28 | 2023-01-10 | 富联科技(兰考)有限公司 | Cleaning method of coating equipment and coating equipment |
| CN113913756B (en) * | 2021-10-12 | 2024-04-30 | 江苏晋誉达半导体股份有限公司 | Vacuum coating machine |
-
2018
- 2018-10-24 CN CN201821731916.4U patent/CN209227049U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113621920A (en) * | 2021-10-12 | 2021-11-09 | 江苏晋誉达半导体股份有限公司 | Vacuum coating method of vacuum coating machine |
| CN113913756A (en) * | 2021-10-12 | 2022-01-11 | 江苏晋誉达半导体股份有限公司 | Vacuum coating machine |
| CN113621920B (en) * | 2021-10-12 | 2022-02-08 | 江苏晋誉达半导体股份有限公司 | Vacuum coating method of vacuum coating machine |
| CN113913756B (en) * | 2021-10-12 | 2024-04-30 | 江苏晋誉达半导体股份有限公司 | Vacuum coating machine |
| CN115584475A (en) * | 2022-10-28 | 2023-01-10 | 富联科技(兰考)有限公司 | Cleaning method of coating equipment and coating equipment |
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