CN209166372U - A kind of three freedom degree precision movement platform - Google Patents
A kind of three freedom degree precision movement platform Download PDFInfo
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- CN209166372U CN209166372U CN201822258880.9U CN201822258880U CN209166372U CN 209166372 U CN209166372 U CN 209166372U CN 201822258880 U CN201822258880 U CN 201822258880U CN 209166372 U CN209166372 U CN 209166372U
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- 230000033001 locomotion Effects 0.000 title claims abstract description 38
- 239000000919 ceramic Substances 0.000 claims description 52
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 abstract description 12
- 238000009825 accumulation Methods 0.000 abstract description 8
- 229910052573 porcelain Inorganic materials 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
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Abstract
This application discloses a kind of three freedom degree precision movement platforms, comprising: platform base, the first moving parts, the second moving parts, third moving parts and moving platform；First moving parts first end connecting platform pedestal, second end connect moving platform；Second moving parts first end connecting platform pedestal, second end connect moving platform；Third moving parts first end connecting platform pedestal, second end connect moving platform；First moving parts, the second moving parts, third moving parts and moving platform tie point not in same point, existing motion platform is solved because of more related link and moving parts, so that kinematic error accumulation is serious, it is difficult to while meeting multiple degrees of freedom and high-precision technical problem.
Description
Technical field
The application belongs to motion platform technical field more particularly to a kind of three freedom degree precision movement platform.
Background technique
With the development of scientific research and advanced manufacturing technology, product surface pattern is more and more diversified, by Traditional project
Surface develops to more and more scientific surfaces, develops to structured surface by smooth surface.Therefore for the surface topography of product
It is detected, becomes particularly important.
In the prior art, ultra-precision surface pattern is detected by white light interferometer, obtain it is more accurate as a result,
White light interferometer is to measure the difference of light path using principle of interference to measure the optical instrument in relation to physical quantity.But existing white light
Interferometer can beat platform be several single axis stage simple superposition, have more related link and moving parts so that fortune
The dynamic accumulation of error is serious, it is difficult to while meeting multiple degrees of freedom and high-precision.
Utility model content
In view of this, this application provides a kind of three freedom degree precision movement platform, solve existing motion platform because compared with
More related links and moving parts, so that kinematic error accumulation is serious, it is difficult to while meeting multiple degrees of freedom and high-precision skill
Art problem.
This application provides a kind of three freedom degree precision movement platforms, comprising: platform base, the first moving parts, second
Moving parts, third moving parts and moving platform；
The first moving parts first end connects the platform base, and second end connects the moving platform；
The second moving parts first end connects the platform base, and second end connects the moving platform；
The third moving parts first end connects the platform base, and second end connects the moving platform；
The connection of first moving parts, second moving parts, the third moving parts and the moving platform
Point is not in same point.
Preferably, first moving parts include: the first piezoelectric ceramic actuator, the first flexible hinge chain group, the first thick stick
Bar group and the first mounting rack for being used to support first moving parts；
First mounting rack is mounted on the platform base；
First piezoelectric ceramic actuator is assemblied on first mounting rack；
The first lever group includes the first lever and the second lever, and the first flexible hinge chain group includes First flexibility
Hinge, flexible hinge and the first tail flexible hinge in first, and the First flexible hinge, first lever, described
Flexible hinge, second lever, the first tail flexible hinge are stacked from the bottom to top in one makes pottery in first piezoelectricity
Between porcelain driver and the moving platform；
The First flexible hinge connects first piezoelectric ceramic actuator, and the first tail flexible hinge connects institute
State moving platform.
Preferably, first mounting rack is U-shaped structure, and first lever and second lever are respectively assembled at institute
Two protruding ends for stating the first mounting rack are lower than for installing the height of protruding end of first lever for installing described the
The height of two lever protruding ends；
First piezoelectric ceramic actuator is mounted in the groove of first mounting rack.
Preferably, the First flexible hinge is set at the center position on the length direction of first lever.
Preferably, second moving parts include: the second piezoelectric ceramic actuator, the second flexible hinge chain group, the second thick stick
Bar group and the second mounting rack for being used to support second moving parts；
Second mounting rack is mounted on the platform base；
Second piezoelectric ceramic actuator is assemblied on second mounting rack；
The second lever group includes third lever and the 4th lever, and the second flexible hinge chain group includes second first flexible
Hinge, flexible hinge and the second tail flexible hinge in second, and the described second first flexible hinge, the third lever, described the
Flexible hinge, the 4th lever, the second tail flexible hinge are stacked from the bottom to top in two makes pottery in second piezoelectricity
Between porcelain driver and the moving platform；
Described second first flexible hinge connects second piezoelectric ceramic actuator, and the second tail flexible hinge connects institute
State moving platform.
Preferably, second mounting rack is U-shaped structure, and the third lever and the 4th lever are respectively assembled at institute
Two protruding ends for stating the second mounting rack are lower than for installing the height of protruding end of the third lever for installing described the
The height of four lever protruding ends；
Second piezoelectric ceramic actuator is mounted in the groove of second mounting rack.
Preferably, the third moving parts include: third piezoelectric ceramic actuator, third flexible hinge chain group, third thick stick
Bar group and the third mounting rack for being used to support the third moving parts；
The third mounting rack is mounted on the platform base；
The third piezoelectric ceramic actuator is assemblied on the third mounting rack；
The third lever group includes the 5th lever and the 6th lever, and the third flexible hinge chain group includes that third is first flexible
Flexible hinge and third tail flexible hinge in hinge, third, and the third head flexible hinge, the 5th lever, described
Flexible hinge, the 6th lever, the third tail flexible hinge are stacked from the bottom to top in three makes pottery in the third piezoelectricity
Between porcelain driver and the moving platform；
Piezoelectric ceramic actuator described in the third head flexible hinge connection third, the third tail flexible hinge connect institute
State moving platform.
Preferably, the third mounting rack is U-shaped structure, and the 5th lever and the 6th lever are respectively assembled at institute
Two protruding ends for stating third mounting rack are lower than for installing the height of protruding end of the 5th lever for installing described the
The height of six lever protruding ends；
The third piezoelectric ceramic actuator is mounted in the groove of the third mounting rack.
Preferably, first moving parts, second moving parts, the third moving parts are in the moving platform
Tie point distribution triangular in shape.
Preferably, first moving parts, second moving parts, the third moving parts are in the moving platform
Tie point in equilateral triangle be distributed.
As can be seen from the above technical solutions, the application has the following advantages:
The application provides a kind of three freedom degree precision movement platform, comprising: platform base, the first moving parts,
Two moving parts, third moving parts and moving platform；First moving parts first end connecting platform pedestal, second end connection are dynamic flat
Platform；Second moving parts first end connecting platform pedestal, second end connect moving platform；Third moving parts first end connecting platform
Pedestal, second end connect moving platform；First moving parts, the second moving parts, third moving parts and moving platform tie point
Not in same point.The first moving parts, the second moving parts and third moving parts are arranged in different location in the application, and first
Moving parts, the second moving parts, third moving parts are disconnected from each other and independent control so that each moving parts of moving platform it
Between independent operation be independent of each other, high-precision requirement has been reached while meeting multiple degrees of freedom, has solved existing motion platform
Because of more related link and moving parts, so that kinematic error accumulation is serious, it is difficult to while meeting multiple degrees of freedom and high-precision
The technical issues of.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of three freedom degree precision movement platform provided by the embodiments of the present application；
Fig. 2 is the schematic diagram of the first moving parts provided by the embodiments of the present application；
Fig. 3 is the motion process schematic diagram of the first moving parts provided by the embodiments of the present application；
Fig. 4 is a kind of top view of three freedom degree precision movement platform provided by the embodiments of the present application；
Fig. 5 provides the movement schematic diagram of moving platform for the embodiment of the present application；
Wherein, appended drawing reference is as follows:
1, platform base；2, the first moving parts；3, the second moving parts；4, third moving parts；5, moving platform；21,
First piezoelectric ceramic actuator；23, the first mounting rack；221, First flexible hinge；222, flexible hinge in first；223,
One tail flexible hinge；241, the first lever；242, the second lever.
Specific embodiment
The embodiment of the present application provides a kind of three freedom degree precision movement platform, solves existing motion platform because more
Related link and moving parts, so that kinematic error accumulation is serious, it is difficult to while meeting multiple degrees of freedom and high-precision technology is asked
Topic.
It is clearly and completely described below in conjunction with technical solution of the attached drawing to the embodiment of the present application, it is clear that described
Embodiment be the embodiment of the present application a part of the embodiment, instead of all the embodiments.Based on the reality in the embodiment of the present application
Example is applied, every other embodiment obtained by those of ordinary skill in the art without making creative efforts all belongs to
In the range of the embodiment of the present application protection.
In the description of the embodiment of the present application, it should be noted that term " center ", "upper", "lower", "left", "right",
The orientation or positional relationship of the instructions such as "vertical", "horizontal", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings,
It is merely for convenience of description the embodiment of the present application and simplifies description, rather than the device or element of indication or suggestion meaning must have
There is specific orientation, be constructed and operated in a specific orientation, therefore should not be understood as the limitation to the embodiment of the present application.In addition,
Term " first ", " second ", " third " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance.
In the description of the embodiment of the present application, it should be noted that unless otherwise clearly defined and limited, term " peace
Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be mechanical connection, be also possible to be electrically connected；Can be directly connected, can also indirectly connected through an intermediary,
It can be the connection inside two elements.For the ordinary skill in the art, above-mentioned art can be understood with concrete condition
The concrete meaning of language in the embodiment of the present application.
The embodiment of the present application provides a kind of embodiment one of three freedom degree precision movement platform, referring specifically to Fig. 1, packet
It includes: platform base 1, the first moving parts 2, the second moving parts 3, third moving parts 4 and moving platform 5, the first moving parts 2
First end connecting platform pedestal 1, second end connect moving platform 5,3 first end connecting platform pedestal 1 of the second moving parts, second end
Connection moving platform 5,4 first end connecting platform pedestal 1 of third moving parts, second end connection moving platform 5, the first moving parts 2,
The tie point of second moving parts 3, third moving parts 4 and moving platform 5 is not in same point.
In the present embodiment, the first moving parts 2, the second moving parts 3 and third moving parts 4 are set in different location,
First moving parts 2, the second moving parts 3, third moving parts 4 are disconnected from each other and independent control, so that each fortune of moving platform 5
Independent operation is independent of each other between dynamic component, and high-precision requirement has been reached while meeting multiple degrees of freedom, has been solved existing
Motion platform is because of more related link and moving parts, so that kinematic error accumulation is serious, it is difficult to while meeting multiple degrees of freedom
With high-precision technical problem.
It is a kind of one embodiment of three freedom degree precision movement platform provided by the present application above, is that the application mentions below
Another embodiment of a kind of three freedom degree precision movement platform supplied, referring specifically to Fig. 1 and Fig. 2.
In the present embodiment, a kind of three freedom degree precision movement platform includes: platform base 1, the first moving parts 2, second
Moving parts 3, third moving parts 4 and moving platform 5,2 first end connecting platform pedestal 1 of the first moving parts, second end connection
Moving platform 5,3 first end connecting platform pedestal 1 of the second moving parts, second end connect moving platform 5, third moving parts 4 first
Hold connecting platform pedestal 1, second end connect moving platform 5, the first moving parts 2, the second moving parts 3, third moving parts 4 with
The tie point of moving platform 5 is not in same point.
It should be noted that by 3 moving parts in parallel of setting, so that the error free accumulation of moving platform 5, multiple degrees of freedom
High rigidity is taken into account simultaneously with high-precision, the characteristics of high bearing capacity.
It should be noted simultaneously that the tool of moving platform 5 in the present embodiment compares there are three moving parts in parallel and passes through list
The moving platform 5 of a moving parts driving, moving parts are shorter in length, are further reduced the occupied area of platform base 1.
The specific structure of first moving parts 2 described in the present embodiment, the second moving parts 3 and third moving parts 4 with
First moving parts 2 are similar, may refer to the description of the first moving parts 2, details are not described herein.
In the present embodiment, as shown in Figures 2 and 3, the first moving parts 2 include: the first piezoelectric ceramic actuator 21, first
Flexible hinge chain group, the first lever group and the first mounting rack 23 for being used to support the first moving parts, the first mounting rack 23 are mounted on
On platform base 1, and the first piezoelectric ceramic actuator 21 is assemblied on the first mounting rack 21, and the first lever group includes the first lever
241 and second lever 242, the first flexible hinge chain group includes flexible hinge 222 and first in First flexible hinge 221, first
Tail flexible hinge 223, and flexible hinge 222 in First flexible hinge 221, the first lever 241, first, the second lever 242,
First tail flexible hinge 223 is stacked from the bottom to top between the first piezoelectric ceramic actuator 21 and moving platform 5, and First is soft
Property hinge 221 connect the first piezoelectric ceramic actuator 21, the first tail flexible hinge 223 connect moving platform 5.
It should be noted that the first flexible hinge chain group of setting and the first lever group, so that when the first piezoelectric ceramic actuator
After 21 movements, the motion transmission of the first piezoelectric ceramic actuator 21 is put down to dynamic by the first flexible hinge chain group and the first lever group
Platform 5, while without gearing friction in transmission process.
Further, the first mounting rack 23 is U-shaped structure, and the first lever 241 and the second lever 242 are respectively assembled at first
Two protruding ends of mounting rack 23 are lower than for installing the height of protruding end of the first lever 241 for installing the second lever 242
The height of protruding end, the first piezoelectric ceramic actuator 21 are mounted in the groove of the first mounting rack 23.
It should be noted that the first lever 241 and the second lever 23 mounting means on the first mounting rack can use
A variety of connection types, preferably, in order to the first flexible hinge chain group transmission without influence, equally installed using flexible hinge.
Simultaneously, it should be noted that the first mounting rack 23 of U-shaped structure is set, so that the first moving parts 2 install letter
It is single.It is to be appreciated that in order to enable installation simplification, can design the first mounting rack 23, the first lever group, the first flexible hinge
Group is integrally formed structures.
Further, First flexible hinge 221 is set at the center position on the length direction of the first lever 241.
Simultaneously, it should be noted that as shown in figure 3, after the first piezoelectric ceramic actuator 21 is electrified, the first piezoelectricity pottery
Deformation occurs for porcelain driver 21, so that First flexible hinge 221 is subjected to displacement, further drives to the first tail flexible hinge
222, so that moving platform 5 moves.Whole process amplifies the displacement of the first piezoelectric ceramic actuator 21 according to a certain percentage,
In the present embodiment, displacement equations ratio is 4.5:1, i.e. 21 shape of the first piezoelectric ceramic actuator becomes U1=10 μm, and moving platform 5 is right
U2=45 μm should be moved.
In the present embodiment, the second moving parts 3 include: the second piezoelectric ceramic actuator, the second flexible hinge chain group, the second thick stick
Bar group and the second mounting rack for being used to support the second moving parts, the second mounting rack is mounted on platform base 1, and the second piezoelectricity
Ceramic driver is assemblied on the second mounting rack, and the second lever group includes third lever and the 4th lever, the second flexible hinge chain group
Including flexible hinge and the second tail flexible hinge in the second first flexible hinge, second, and the second first flexible hinge, third lever,
In second flexible hinge, the 4th lever, the second tail flexible hinge be stacked from the bottom to top in the second piezoelectric ceramic actuator and
Between moving platform 5, the second first flexible hinge connects piezoelectric ceramic actuator, and the second tail flexible hinge connects moving platform 5.
Further, the second mounting rack is U-shaped structure, and third lever and the 4th lever are respectively assembled at the second mounting rack
Two protruding ends are lower than the height for being used for installing the 4th lever protruding end for installing the height of protruding end of third lever, the
Two piezoelectric ceramic actuators are mounted in the groove of the second mounting rack.
Further, the second first flexible hinge is set at the center position on the length direction of third lever.
In the present embodiment, third moving parts 4 include: third piezoelectric ceramic actuator, third flexible hinge chain group, third thick stick
Bar group and the third mounting rack for being used to support third moving parts, third mounting rack is mounted on platform base 1, and third piezoelectricity
Ceramic driver is assemblied on third mounting rack, and third lever group includes the 5th lever and the 6th lever, third flexible hinge chain group
Including flexible hinge in third head flexible hinge, third and third tail flexible hinge, and third head flexible hinge, the 5th lever,
In third flexible hinge, the 6th lever, third tail flexible hinge be stacked from the bottom to top in third piezoelectric ceramic actuator and
Between moving platform 5, third head flexible hinge connects piezoelectric ceramic actuator, and third tail flexible hinge connects moving platform 5.
Further, third mounting rack is U-shaped structure, and the 5th lever and the 6th lever are respectively assembled at third mounting rack
Two protruding ends are lower than the height for being used for installing the 6th lever protruding end for installing the height of protruding end of the 5th lever, the
Three piezoelectric ceramic actuators are mounted in the groove of third mounting rack.
Further, in order to be driven faster and save conduction efficiency, third head flexible hinge is set to the length of the 5th lever
It spends at the center position on direction.
In the present embodiment, as shown in Figure 1 and Figure 4, the first moving parts 2, the second moving parts 3, third moving parts 4 exist
The distribution triangular in shape of the tie point of moving platform 5.
Further, the first moving parts 2, the second moving parts 3, third moving parts 4 are in the tie point of moving platform 5
Equilateral triangle distribution.
The motion process of three freedom degree precision movement platform provided by the embodiments of the present application are as follows: by three piezoelectric ceramics
Driver applies voltage, if three voltage values are equal, by the back voltage effect of piezoelectric ceramic actuator it is found that three piezoelectricity potteries
The stroke of porcelain driver is equal, causes three fulcrum adjustable heights of moving platform 5 identical, and then realizes that One-dimensional Vertical lifting is high-precision
Degree operation, if three voltage values are unequal, by the back voltage effect of piezoelectric ceramic actuator it is found that three Piezoelectric Ceramics
The stroke of device differs, and three fulcrum adjustable heights of platform are different, has relative height differential between each fulcrum, can be found out by kinematics
Corresponding three-dimensional perspective, as shown in figure 5, platform is flat in angle α, β in cartesian coordinate system between platform plane and horizontal plane
Angle γ between face and vertical plane, the final precision positioning that can be achieved in the accurate leveling of two parallactic angle degree and Z-direction.
In the present embodiment, the first moving parts 2, the second moving parts 3 and third moving parts 4 are set in different location,
First moving parts 2, the second moving parts 3, third moving parts 4 are disconnected from each other and independent control, so that each fortune of moving platform 5
Independent operation is independent of each other between dynamic component, and high-precision requirement has been reached while meeting multiple degrees of freedom, has been solved existing
Motion platform is because of more related link and moving parts, so that kinematic error accumulation is serious, it is difficult to while meeting multiple degrees of freedom
With high-precision technical problem.
The above, above embodiments are only to illustrate the technical solution of the application, rather than its limitations, although referring to before
Embodiment is stated the application is described in detail, those skilled in the art should understand that: it still can be to preceding
Technical solution documented by each embodiment is stated to modify or equivalent replacement of some of the technical features, and these
It modifies or replaces, the spirit and scope of each embodiment technical solution of the application that it does not separate the essence of the corresponding technical solution.
Claims (10)
1. a kind of three freedom degree precision movement platform characterized by comprising platform base, the first moving parts, the second movement
Component, third moving parts and moving platform；
The first moving parts first end connects the platform base, and second end connects the moving platform；
The second moving parts first end connects the platform base, and second end connects the moving platform；
The third moving parts first end connects the platform base, and second end connects the moving platform；
First moving parts, second moving parts, the third moving parts and the moving platform tie point not
In same point.
2. three freedom degree precision movement platform according to claim 1, which is characterized in that the first moving parts packet
It includes: the first piezoelectric ceramic actuator, the first flexible hinge chain group, the first lever group and being used to support the of first moving parts
One mounting rack；
First mounting rack is mounted on the platform base；
First piezoelectric ceramic actuator is assemblied on first mounting rack；
The first lever group includes the first lever and the second lever, and the first flexible hinge chain group includes First flexible hinge
Chain, flexible hinge and the first tail flexible hinge in first, and the First flexible hinge, first lever, described first
Middle flexible hinge, second lever, the first tail flexible hinge are stacked from the bottom to top in first piezoelectric ceramics
Between driver and the moving platform；
The First flexible hinge connects first piezoelectric ceramic actuator, and the first tail flexible hinge connection is described dynamic
Platform.
3. three freedom degree precision movement platform according to claim 2, which is characterized in that first mounting rack is U-shaped
Structure, first lever and second lever are respectively assembled at two protruding ends of first mounting rack, for installing
The height of the protruding end of first lever is lower than the height for installing the second lever protruding end；
First piezoelectric ceramic actuator is mounted in the groove of first mounting rack.
4. three freedom degree precision movement platform according to claim 2, which is characterized in that the First flexible hinge is set
It is placed at the center position on the length direction of first lever.
5. three freedom degree precision movement platform according to claim 1, which is characterized in that the second moving parts packet
It includes: the second piezoelectric ceramic actuator, the second flexible hinge chain group, the second lever group and being used to support the of second moving parts
Two mounting racks；
Second mounting rack is mounted on the platform base；
Second piezoelectric ceramic actuator is assemblied on second mounting rack；
The second lever group includes third lever and the 4th lever, and the second flexible hinge chain group includes the second first flexible hinge
Chain, flexible hinge and the second tail flexible hinge in second, and the described second first flexible hinge, the third lever, described second
Middle flexible hinge, the 4th lever, the second tail flexible hinge are stacked from the bottom to top in second piezoelectric ceramics
Between driver and the moving platform；
Described second first flexible hinge connects second piezoelectric ceramic actuator, and the second tail flexible hinge connection is described dynamic
Platform.
6. three freedom degree precision movement platform according to claim 5, which is characterized in that second mounting rack is U-shaped
Structure, the third lever and the 4th lever are respectively assembled at two protruding ends of second mounting rack, for installing
The height of the protruding end of the third lever is lower than the height for installing the 4th lever protruding end；
Second piezoelectric ceramic actuator is mounted in the groove of second mounting rack.
7. three freedom degree precision movement platform according to claim 1, which is characterized in that the third moving parts packet
It includes: third piezoelectric ceramic actuator, third flexible hinge chain group, third lever group and being used to support the of the third moving parts
Three mounting racks；
The third mounting rack is mounted on the platform base；
The third piezoelectric ceramic actuator is assemblied on the third mounting rack；
The third lever group includes the 5th lever and the 6th lever, and the third flexible hinge chain group includes third head flexible hinge
Flexible hinge and third tail flexible hinge in chain, third, and the third head flexible hinge, the 5th lever, the third
Middle flexible hinge, the 6th lever, the third tail flexible hinge are stacked from the bottom to top in the third piezoelectric ceramics
Between driver and the moving platform；
The third head flexible hinge connects the third piezoelectric ceramic actuator, and the third tail flexible hinge connection is described dynamic
Platform.
8. three freedom degree precision movement platform according to claim 7, which is characterized in that the third mounting rack is U-shaped
Structure, the 5th lever and the 6th lever are respectively assembled at two protruding ends of the third mounting rack, for installing
The height of the protruding end of 5th lever is lower than the height for installing the 6th lever protruding end；
The third piezoelectric ceramic actuator is mounted in the groove of the third mounting rack.
9. three freedom degree precision movement platform according to claim 1, which is characterized in that first moving parts, institute
State the second moving parts, the third moving parts the moving platform tie point distribution triangular in shape.
10. three freedom degree precision movement platform according to claim 9, which is characterized in that first moving parts, institute
State the second moving parts, the third moving parts are distributed in the tie point of the moving platform in equilateral triangle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201822258880.9U CN209166372U (en) | 2018-12-29 | 2018-12-29 | A kind of three freedom degree precision movement platform |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201822258880.9U CN209166372U (en) | 2018-12-29 | 2018-12-29 | A kind of three freedom degree precision movement platform |
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| CN209166372U true CN209166372U (en) | 2019-07-26 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109489582A (en) * | 2018-12-29 | 2019-03-19 | 广东工业大学 | A kind of three freedom degree precision movement platform |
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2018
- 2018-12-29 CN CN201822258880.9U patent/CN209166372U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109489582A (en) * | 2018-12-29 | 2019-03-19 | 广东工业大学 | A kind of three freedom degree precision movement platform |
| CN109489582B (en) * | 2018-12-29 | 2024-03-26 | 广东工业大学 | Three-degree-of-freedom precision motion platform |
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Granted publication date: 20190726 Effective date of abandoning: 20240326 |
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| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |