CN1588556A - Five-degree-of-freedom precision positioning platform - Google Patents
Five-degree-of-freedom precision positioning platform Download PDFInfo
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- CN1588556A CN1588556A CN 200410053300 CN200410053300A CN1588556A CN 1588556 A CN1588556 A CN 1588556A CN 200410053300 CN200410053300 CN 200410053300 CN 200410053300 A CN200410053300 A CN 200410053300A CN 1588556 A CN1588556 A CN 1588556A
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Abstract
A five-degree-of-freedom precision positioning platform is driven by a piezoelectric driver and is characterized in that the platform is composed of a base body, a first support and a second support at the bottom of the base body, the base body comprises a first movable platform, a second movable platform and a third movable platform, the first movable platform achieves x-direction translation, the second movable platform achieves y-direction translation, the third movable platform achieves z-axis rotation, the first support and the second support are independently extended, the base body is driven to achieve z-direction translation and one-dimensional rotation through the same extension amount and the different extension amounts, and the third movable platform is connected with the first support and the second support at the bottom through a first revolute pair flexible hinge and a second revolute pair flexible hinge respectively. The five-degree-of-freedom precision positioning platform can realize the nano-scale positioning precision and has the characteristics of easy processing, compact structure, small volume, high displacement resolution, fast frequency response and simple control.
Description
Technical field
The present invention relates to nanoscale control and location technology, particularly a kind of five degree of freedom precisely locating platform of integral structure form can be realized nano level bearing accuracy.
Background technology
In the research work of nanometer technology, nanoscale control and location technology are considered to one of core of nanometer technology, for nanometer technology provides technical foundation in the application of every field.Nanoscale microposition technology all has a wide range of applications at aspects such as optical engineering, bioengineering, engineering in medicine, Micro Electro Mechanical System, ultraprecise processing and measurements.Domestic existing nanometer positioning mechanism mostly is below the three degree of freedom, when a plurality of degree of freedom of needs, adopts the mode of module combinations to realize that texture ratio is bigger more, and has cumulative errors, and bearing accuracy is not high, and dynamic property is relatively poor.Adopt the parallel structure of flexible hinge form, not only process and assemble inconvenience, be difficult to realize the thought of the integrated processing of compliant mechanism, and the control procedure complexity.Parallel institution adopts the method for driver inbuilt displacement sensor with the basis of measured value as input quantity usually in addition, because processing and factors such as rigging error and distortion, separating the theoretic output quantity and the actual amount that draw according to this input quantity has bigger error, has influence on bearing accuracy equally.
Summary of the invention
The purpose of this invention is to provide a kind of five degree of freedom precisely locating platform, its characteristics should be to be easy to processing, compact conformation, and volume is little, the displacement resolution height, frequency response is fast, and control is simple.
Technical solution of the present invention is as follows:
A kind of five degree of freedom precisely locating platform, the employing piezoelectric actuator drives, it is characterized in that this platform is made of first bearing and second bearing of matrix and bottom thereof, this matrix comprises first moving platform, second moving platform and the 3rd moving platform, wherein first moving platform is realized the x direction translational, second moving platform is realized the y direction translational, the 3rd moving platform realizes that the z axle rotates, first bearing and second bearing extend separately, realize that by the same different drive matrix of elongation z direction translation and one dimension rotate, described the 3rd moving platform is connected with second bearing with first bearing of bottom with the second revolute pair flexible hinge by the first revolute pair flexible hinge respectively.
Described the 3rd moving platform is connected by four L shaped elastic plates with matrix, lays the 3rd, the 4th piezoelectric ceramic actuator between the 3rd moving platform and the matrix, and these two driver two ends contact with the end face of the 3rd moving platform and matrix respectively.
Described second moving platform is connected by four elastic plates with the 3rd moving platform, this elastic plate and the 3rd moving platform and second moving platform constitute one group of bilayer elasticity parallel plate type mobile guide mechanism, lay second piezoelectric ceramic actuator between the 3rd moving platform and second moving platform, these driver two ends contact with the end face of the 3rd moving platform with second moving platform respectively.
Described second moving platform is connected by four elastic plates with first moving platform, this elastic plate and second moving platform and first moving platform constitute one group of bilayer elasticity parallel plate type mobile guide mechanism, lay first piezoelectric ceramic actuator between second moving platform and first moving platform, these driver two ends contact with the end face of second moving platform with first moving platform respectively.
Described first bearing is identical with the structure of second bearing, and it forms parallelogram double link guiding mechanism by the revolute pair flexible hinge of four limits, eight bars and junction thereof.
Described first bearing is identical with the structure of second bearing, is that the revolute pair flexible hinge of four limits, four bars and junction thereof is formed parallelogram list connecting rod guiding mechanism.
Described first bearing and second bearing can be realized output input amplification ratio by changing connecting rod angle a and length l.
Described first bearing and second bearing place on first moving platform, place support platform on first bearing and second bearing, and this support platform has the five degree of freedom motion.
Technique effect of the present invention, show through experiment test: five degree of freedom precisely locating platform of the present invention, can realize nano level bearing accuracy, and have the processing of being easy to, compact conformation, volume is little, displacement resolution is high, frequency response is fast and controls characteristic of simple.
Description of drawings
Fig. 1 is an one-piece construction synoptic diagram of the present invention
Fig. 2 is a basal body structure synoptic diagram of the present invention
Fig. 3 is a seat structure synoptic diagram of the present invention
Fig. 4 is single connecting rod guiding mechanism synoptic diagram that bearing of the present invention can adopt
Fig. 5 is that bearing of the present invention places the structural representation on the moving platform
Fig. 6 is flexible eight bars, four limit parallelogram guiding mechanism principle schematic
Embodiment
See also Fig. 1 and Fig. 2 earlier, Fig. 1 is a first embodiment of the invention one-piece construction synoptic diagram, Fig. 2 is a basal body structure synoptic diagram of the present invention, as seen from the figure, five degree of freedom precisely locating platform of the present invention, the employing piezoelectric actuator drives, this platform is made of first bearing 5 and second bearing 6 of matrix 4 and bottom thereof, this matrix 4 comprises first moving platform 1, second moving platform 2 and the 3rd moving platform 3, wherein first moving platform 1 is realized the x direction translational, second moving platform 2 is realized the y direction translational, the 3rd moving platform 3 realizes that the z axle rotates, first bearing 5 and second bearing 6 extend separately, realize that by the same different drive matrix 4 of elongation z direction translation and one dimension rotate, and described the 3rd moving platform 3 is connected with second bearing 6 with first bearing 5 of bottom with the second revolute pair flexible hinge 8 by the first revolute pair flexible hinge 7 respectively.
Described the 3rd moving platform 3 is connected by four L shaped elastic plate 3-1,3-2,3-3,3-4 with matrix 4, lay the 3rd, the 4th piezoelectric ceramic actuator 9-3,9-4 between the 3rd moving platform 3 and the matrix 4, these two driver 9-3,9-4 two ends contact with the end face of the 3rd moving platform 3 and matrix 4 respectively.
Described second moving platform 2 is connected by four elastic plate 2-1,2-2,2-3,2-4 with the 3rd moving platform 3, elastic plate 2-1,2-2,2-3,2-4 and the 3rd moving platform 3 and second moving platform 2 constitute one group of bilayer elasticity parallel plate type mobile guide mechanism, lay the second piezoelectric ceramic actuator 9-2 between the 3rd moving platform 3 and second moving platform 2, this driver 9-2 two ends contact with the end face of the 3rd moving platform 3 and second moving platform 2 respectively.
Described second moving platform 2 is connected by four elastic plate 1-1,1-2,1-3,1-4 with first moving platform 1, elastic plate 1-1,1-2,1-3,1-4 and second moving platform 2 and first moving platform 1 constitute one group of bilayer elasticity parallel plate type mobile guide mechanism, lay the first piezoelectric ceramic actuator 9-1 between second moving platform 2 and first moving platform 1, this driver 9-1 two ends contact with the end face of second moving platform 2 and first moving platform 1 respectively.
Described first bearing 5 is identical with the structure of second bearing 6, as shown in Figure 3, it forms parallelogram double link guiding mechanism by the revolute pair flexible hinge of four limit 5-1,5-2,5-3,5-4 eight bar 5-5,5-6,5-7,5-8,5-9,5-10,5-11,5-12 and junction thereof.
Described first bearing 5 is identical with the structure of second bearing 6, can have structure as shown in Figure 4, promptly form parallelogram list connecting rod guiding mechanism by the revolute pair flexible hinge of four limit 5-1,5-2,5-3,5-4 four bar 5-5,5-6,5-7,5-8 and junction thereof.
Described first bearing 5 and second bearing 6 can be realized output input amplification ratio by changing connecting rod angle a and length l.
Second embodiment of the invention as shown in Figure 5, described first bearing 5 and second bearing 6 place on first moving platform 1, place support platform 10 on first bearing 5 and second bearing 6, this support platform 10 has the five degree of freedom motion.
As shown in Figure 3, described first bearing 5 is identical with the structure of second bearing 6, as shown in Figure 3, it forms parallelogram double link guiding mechanism by the revolute pair flexible hinge of four limit 5-1,5-2,5-3,5-4 eight bar 5-5,5-6,5-7,5-8,5-9,5-10,5-11,5-12 and junction thereof.
Fig. 6 is the sketch of parallelogram double link guiding mechanism shown in Figure 3, connecting rod 5-2 maintains static, to two lateral movements, the parallelogram guide frame drivening rod 5-1 that constitutes by 5-4,5-5,5-6,5-7,5-8,5-9,5-10,5-11,5-12 does translation up and down under the effect of the inner piezoelectric actuator of 5-13 for side rod 5-3,5-4.When side supports 5,6 moving displacement amounts are identical, drive upper strata matrix 4 and do translation, when displacement does not wait, rotate around revolute pair flexible hinge 7,8.As shown in Figure 6, by selecting diagram connecting rod angle a and length of connecting rod l, can amplify output input displacement ratio, in addition, as shown in Figure 4, the eight-linkage mechanism of bearing 5,6 constitutes the form that also can adopt single connecting rod guiding.As shown in Figure 5, bearing 5,6 also can place on first moving platform, and this moment, support platform 10 was connected on the bearing 5,6, by five dimension motions of each guiding mechanism motion implementation platform 10.
Show through experiment test: five degree of freedom precisely locating platform of the present invention, can realize nano level bearing accuracy, and have the processing of being easy to, compact conformation, volume is little, displacement resolution is high, frequency response is fast and controls characteristic of simple.
Claims (8)
1, a kind of five degree of freedom precisely locating platform, the employing piezoelectric actuator drives, it is characterized in that this platform is made of first bearing (5) and second bearing (6) of matrix (4) and bottom thereof, this matrix (4) comprises first moving platform (1), second moving platform (2) and the 3rd moving platform (3), wherein first moving platform (1) is realized the x direction translational, second moving platform (2) is realized the y direction translational, the 3rd moving platform (3) realizes that the z axle rotates, first bearing (5) and second bearing (6) be elongation separately, realize that by the same different drive matrix (4) of elongation z direction translation and one dimension rotate, described the 3rd moving platform (3) is connected with second bearing (6) with first bearing (5) of bottom with the second revolute pair flexible hinge (8) by the first revolute pair flexible hinge (7) respectively.
2, five degree of freedom precisely locating platform according to claim 1, it is characterized in that the 3rd moving platform (3) is connected by four L shaped elastic plates (3-1,3-2,3-3,3-4) with matrix (4), lay the 3rd, the 4th piezoelectric ceramic actuator (9-3,9-4) between the 3rd moving platform (3) and the matrix (4), these two drivers (9-3,9-4) two ends contact with the end face of the 3rd moving platform (3) with matrix (4) respectively.
3, five degree of freedom precisely locating platform according to claim 1, it is characterized in that second moving platform (2) and the 3rd moving platform (3) pass through four elastic plate (2-1,2-2,2-3,2-4) connect, elastic plate (2-1,2-2,2-3,2-4) constitute one group of bilayer elasticity parallel plate type mobile guide mechanism with the 3rd moving platform (3) and second moving platform (2), lay second piezoelectric ceramic actuator (9-2) between the 3rd moving platform (3) and second moving platform (2), this driver (9-2) two ends contact with the end face of the 3rd moving platform (3) with second moving platform (2) respectively.
4, five degree of freedom precisely locating platform according to claim 1, it is characterized in that second moving platform (2) and first moving platform (1) pass through four elastic plate (1-1,1-2,1-3,1-4) connect, elastic plate (1-1,1-2,1-3,1-4) constitute one group of bilayer elasticity parallel plate type mobile guide mechanism with second moving platform (2) and first moving platform (1), lay first piezoelectric ceramic actuator (9-1) between second moving platform (2) and first moving platform (1), this driver (9-1) two ends contact with the end face of second moving platform (2) with first moving platform (1) respectively.
5, five degree of freedom precisely locating platform according to claim 1, it is characterized in that described first bearing (5) is identical with the structure of second bearing (6), it forms parallelogram double link guiding mechanism by the revolute pair flexible hinge of four limits (5-1,5-2,5-3,5-4), eight bars (5-5,5-6,5-7,5-8,5-9,5-10,5-11,5-12) and junction thereof.
6, five degree of freedom precisely locating platform according to claim 1, it is characterized in that described first bearing (5) is identical with the structure of second bearing (6), is that the revolute pair flexible hinge of four limits (5-1,5-2,5-3,5-4), four bars (5-5,5-6,5-7,5-8) and junction thereof is formed parallelogram list connecting rod guiding mechanism.
7,, it is characterized in that described first bearing (5) and second bearing (6) can be by changing connecting rod angle a and length l realization output input amplification ratio according to claim 5 or 6 described five degree of freedom precisely locating platforms.
8, according to each described five degree of freedom precisely locating platform of claim 1 to 7, it is characterized in that described first bearing (5) and second bearing (6) place on first moving platform (1), place support platform (10) on first bearing (5) and second bearing (6), this support platform (10) has the five degree of freedom motion.
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| CN 200410053300 CN1588556A (en) | 2004-07-30 | 2004-07-30 | Five-degree-of-freedom precision positioning platform |
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| CN 200410053300 CN1588556A (en) | 2004-07-30 | 2004-07-30 | Five-degree-of-freedom precision positioning platform |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100340378C (en) * | 2005-03-10 | 2007-10-03 | 中国科学院上海光学精密机械研究所 | Six-freedom-degree precision positioning workbench |
| CN101194214B (en) * | 2005-07-21 | 2010-09-29 | 住友重机械工业株式会社 | Stage apparatus |
| CN103104793A (en) * | 2013-01-25 | 2013-05-15 | 重庆大学 | Integrated type six degrees of freedom precision positioning platform |
| CN104297883A (en) * | 2014-09-24 | 2015-01-21 | 中国科学院长春光学精密机械与物理研究所 | Four-degree-of-freedom fine adjustment support |
| CN104999457A (en) * | 2015-06-26 | 2015-10-28 | 中国矿业大学 | Large-stroke three-freedom-degree micro-operation robot |
| CN109530737A (en) * | 2018-11-27 | 2019-03-29 | 深圳大学 | The presetting cutter method of ultra-precision machine tool intelligence knife rest, intelligent machine tool and intelligent knife rest |
| CN114477070A (en) * | 2022-02-11 | 2022-05-13 | 宁波大学 | Double-four-rod piezoelectric micromotion platform with rotation output characteristic |
| CN117348230A (en) * | 2023-10-25 | 2024-01-05 | 深圳市汉诺精密科技有限公司 | Multi-freedom-degree nanoscale precise positioning platform |
-
2004
- 2004-07-30 CN CN 200410053300 patent/CN1588556A/en active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100340378C (en) * | 2005-03-10 | 2007-10-03 | 中国科学院上海光学精密机械研究所 | Six-freedom-degree precision positioning workbench |
| CN101194214B (en) * | 2005-07-21 | 2010-09-29 | 住友重机械工业株式会社 | Stage apparatus |
| CN103104793A (en) * | 2013-01-25 | 2013-05-15 | 重庆大学 | Integrated type six degrees of freedom precision positioning platform |
| CN103104793B (en) * | 2013-01-25 | 2015-03-11 | 重庆大学 | Integrated type six degrees of freedom precision positioning platform |
| CN104297883A (en) * | 2014-09-24 | 2015-01-21 | 中国科学院长春光学精密机械与物理研究所 | Four-degree-of-freedom fine adjustment support |
| CN104297883B (en) * | 2014-09-24 | 2016-07-27 | 中国科学院长春光学精密机械与物理研究所 | Four-degree-of-freedom trimming rack |
| CN104999457A (en) * | 2015-06-26 | 2015-10-28 | 中国矿业大学 | Large-stroke three-freedom-degree micro-operation robot |
| CN109530737A (en) * | 2018-11-27 | 2019-03-29 | 深圳大学 | The presetting cutter method of ultra-precision machine tool intelligence knife rest, intelligent machine tool and intelligent knife rest |
| CN114477070A (en) * | 2022-02-11 | 2022-05-13 | 宁波大学 | Double-four-rod piezoelectric micromotion platform with rotation output characteristic |
| CN117348230A (en) * | 2023-10-25 | 2024-01-05 | 深圳市汉诺精密科技有限公司 | Multi-freedom-degree nanoscale precise positioning platform |
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