CN209162188U - 一种具有双腔体结构的原子层沉积装置 - Google Patents
一种具有双腔体结构的原子层沉积装置 Download PDFInfo
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CN112359346A (zh) * | 2020-12-03 | 2021-02-12 | 无锡市邑晶半导体科技有限公司 | 一种ald加热组件 |
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CN112359346A (zh) * | 2020-12-03 | 2021-02-12 | 无锡市邑晶半导体科技有限公司 | 一种ald加热组件 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
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Denomination of utility model: An atomic layer deposition device with double cavity structure Effective date of registration: 20210520 Granted publication date: 20190726 Pledgee: Agricultural Bank of China Limited by Share Ltd. Wuxi science and Technology Branch Pledgor: JIANGSU MNT MICRO AND NANOTECH Co.,Ltd. Registration number: Y2021320010179 |
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Date of cancellation: 20230601 Granted publication date: 20190726 Pledgee: Agricultural Bank of China Limited by Share Ltd. Wuxi science and Technology Branch Pledgor: JIANGSU MNT MICRO AND NANOTECH CO.,LTD. Registration number: Y2021320010179 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A Atomic layer deposition device with double cavity structure Effective date of registration: 20230610 Granted publication date: 20190726 Pledgee: Agricultural Bank of China Limited by Share Ltd. Wuxi science and Technology Branch Pledgor: JIANGSU MNT MICRO AND NANOTECH CO.,LTD. Registration number: Y2023980043564 |