CN208883586U - A kind of recycle device of development waste liquid - Google Patents
A kind of recycle device of development waste liquid Download PDFInfo
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- CN208883586U CN208883586U CN201820896103.4U CN201820896103U CN208883586U CN 208883586 U CN208883586 U CN 208883586U CN 201820896103 U CN201820896103 U CN 201820896103U CN 208883586 U CN208883586 U CN 208883586U
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Abstract
The utility model relates to a kind of recycle devices of development waste liquid, comprising: homogeneous tank (1), for carrying out homogenization to development waste liquid；Aeration tube (2) is connected to homogeneous tank (1), for being aerated in homogeneous tank (1)；Ceramic micro filter film or ceramic super-filtering film (3), are connected to homogeneous tank (1), for being filtered processing to the development waste liquid after homogeneous；Nanofiltration membrane (4) is connected to the per-meate side of ceramic micro filter film or ceramic super-filtering film (3), for carrying out nanofiltration processing to penetrating fluid；Nanofiltration penetrating fluid storage tank (8) is connected to nanofiltration membrane (4), for storing the penetrating fluid containing sodium carbonate.Using the device of the utility model, 50% or more the rate of recovery of sodium carbonate liquor improves the sodium carbonate service efficiency in development demoulding technical process, reduces the waste liquid discharging amount in development demoulding technique, has very big social and economic benefit.
Description
Technical field
The utility model belongs to technical field of membrane, is related to a kind of recycle device of development waste liquid, is more particularly to one
The sodium carbonate recyclable device of development Waste Stripping Liquid Using in kind PCB production.
Background technique
On the fields such as liquid crystal display (LCD), printed circuit board (PCB), integrated circuit (IC), development is manufacturing process
In one of very important process, developing procedure is to be removed the unexposed part of light-sensitive surface by the method for chemical reaction, dew
Need to etch the copper face figure route of removal out.Wherein, development waste liquid is usually a kind of alkaline waste liquor of high concentration, such as any row
It puts, not only pollutes environment, but also will cause the very big wasting of resources.Currently, processing developer solution waste liquid main stream approach has both at home and abroad
Oxidizing process, biological treatment, filtering absorption method etc..However, the above method is thrown simultaneously there is no the recycling for realizing developer solution
Money and operating cost are also larger.Therefore, recycling the sodium carbonate effective component in developer solution and reducing wastewater discharge is extremely to have
It is necessary.
Utility model content
The purpose of the utility model is to provide a kind of liquid crystal displays (LCD), printed circuit board (PCB), integrated circuit
(IC) etc. develop in the production of fields the sodium carbonate recovery process of Waste Stripping Liquid Using, which reaches carbon
The purpose of acid sodium solution recycling and reusing reduces the discharge of waste liquid.
Technical solution is:
A kind of recoverying and utilizing method of development waste liquid, includes the following steps:
Step 1 carries out pre-filtering processing to development waste liquid；
Step 2 is filtered processing, the per-meate side of nanofiltration membrane using nanofiltration membrane to the filtrate that pre-filtering obtains
Obtain the penetrating fluid containing sodium carbonate.
In one embodiment, the sodium carbonate in development waste liquid containing 0.1~1wt%, 1000~50000ppm of COD.
In one embodiment, the pre-filtering in the step 1 was carried out using Ceramic excessive filtration or microfiltration membranes
Filter processing.
In one embodiment, the average pore size scope of the Ceramic excessive filtration or microfiltration membranes is 50~500 μm.
In one embodiment, it before the step 1, needs to carry out homogenization to development waste liquid.
In one embodiment, in the step 2 nanofiltration membrane 800~6000Da of molecular cut off.
In one embodiment, 0.1~1.5MPa of nanofiltration membrane operating pressure, using cross-flow filtration mode, film surface
2~6m/s of flow velocity.
In one embodiment, the cycles of concentration of nanofiltration membrane is 2~10 times.
In one embodiment, it before the step 1, needs to carry out ozone oxidation pretreatment to development waste liquid；It is smelly
The additional amount of oxygen is 500~1000ppm, and reaction temperature is 40~70 DEG C.
A kind of recycle device of development waste liquid, comprising:
Homogeneous tank, for carrying out homogenization to development waste liquid；
Aeration tube is connected to homogeneous tank, for being aerated into homogeneous tank；
Ceramic micro filter film or ceramic super-filtering film are connected to homogeneous tank, for being filtered to the development waste liquid after homogeneous
Processing；
Nanofiltration membrane is connected to the per-meate side of ceramic micro filter film or ceramic super-filtering film, for receiving to penetrating fluid
Filter processing；
Nanofiltration penetrating fluid storage tank, is connected to nanofiltration membrane, for storing the penetrating fluid containing sodium carbonate.
In one embodiment, the average pore size scope of ceramic micro filter film or ceramic super-filtering film is 50~500 μm.
In one embodiment, in the step 2 nanofiltration membrane 800~6000Da of molecular cut off.
In one embodiment, further includes: flocculation tank is connected to the concentration of ceramic micro filter film or ceramic super-filtering film
Side carries out flocculating setting processing for the concentrate to ceramic micro filter film or ceramic super-filtering film；Flocculation is connected on flocculation tank
Tank 7 is added in agent, for flocculant to be added into flocculation tank；The water outlet of flocculation tank is connected to biochemical reaction unit.
In one embodiment, the biochemical reaction unit is A2O biochemical reaction unit.
In one embodiment, further include ozone reactor, be connected to the useless of ceramic micro filter film or ceramic super-filtering film
Water water inlet, for carrying out ozone Oxidation Treatment to the development waste-water for entering ceramic micro filter film or ceramic super-filtering film.
Beneficial effect
In the utility model, nanofiltration membrane is easy to operate, only physical separating process, has certain retention energy to ink
Power, nanofiltration membrane clear liquid can be used for developing demoulding process, by adjusting the reuse ratio of the adjustable useless sodium carbonate of cycles of concentration,
Reduce the outer discharge capacity of waste liquid, economic benefit and obvious environment benefit.
Detailed description of the invention
Fig. 1 is the processing method flow chart of the utility model；
Fig. 2 is the device figure used.
Wherein, 1, homogeneous tank；2, aeration tube；3, ceramic micro filter film or ceramic super-filtering film；4, nanofiltration membrane；5, it flocculates
Slot；6, biochemical reaction unit；7, tank is added in flocculant；8, nanofiltration penetrating fluid storage tank.
Specific embodiment
The utility model development waste liquid to be dealt with mainly liquid crystal display (LCD), printed circuit board (PCB),
The waste liquid that developing procedure on the fields such as integrated circuit (IC) in developing process obtains, developer solution therein is mainly by inorganic
The formulas such as alkali (sodium carbonate), surfactant, water are made, and conventional formula may refer to existing technical literature
CN102063024A, CN103207544A, CN107340693A etc..Development waste liquid can mainly contain inorganic base (sodium carbonate), table
Face activating agent, by a large amount of high molecular polymers, resin, ink for being brought into photoresist etc., water quality shows as high carbon acid sodium and contains
Amount and high COD.In one embodiment, the sodium carbonate in development waste liquid containing 0.1~1wt%, COD 1000~
50000ppm。
The utility model provides the method for carrying out Treatment for Reuse to development waste liquid, has main steps that A. send development waste liquid
Enter homogeneous tank, water quality is allowed to homogenize；B. the waste liquid after homogenizing carries out coarse filtration, and removing suspended matter C. therein will be after coarse filtration
Development waste liquid is sent into nanofiltration film separation system, and ink is trapped to form ceramic membrane concentrate, and ceramic membrane clear liquid is purifying
Sodium carbonate liquor, can direct reuse in developing procedure.Using the utility model technique, the rate of recovery 50% of sodium carbonate liquor with
On, the sodium carbonate service efficiency in development demoulding technical process is improved, the waste liquid discharging amount in development demoulding technique is reduced,
With very big social and economic benefit.
In above-mentioned technique, development waste liquid after have passed through homogenization by ceramic micro filter or ultrafiltration membrane at
Resin, colloid, ink of bulky grain in waste liquid etc. can be removed effectively, can reduce most COD ingredient by reason,
It can be shown than organic film used herein of the filter membrane of ceramic material to the higher filtration flux of development waste liquid and stain resistance.
After eliminating the big suspended matter in waste liquid, resin, colloid, pre-filtered filtrate is carried out at nanofiltration by nanofiltration membrane
Reason, can be effectively removed small molecular weight impurity therein, makes sodium carbonate through nanofiltration membrane, sodium carbonate is made to obtain reuse.
In the utility model, ceramic micro filter film, ultrafiltration membrane or the nanofiltration membrane of use, material are ceramic material, for example,
Aluminium oxide, zirconium oxide, magnesia, silica, titanium oxide, cerium oxide, yttrium oxide, the oxide-based material such as barium titanate can be used
Material；The combined oxidations species material such as cordierite, mullite, forsterite, steatite, sialon, zircon, ferrite
Material；Silicon nitride, aluminum nitride and other nitride class material；The carbon compounds material such as silicon carbide；The hydroxides species material such as hydroxyapatite
Material；The elements class material such as carbon, silicon；Or the two or more inorganic composite materials etc. containing them.Natural mine can also be used
Object (clay, clay mineral, cry loudly slag, silica sand, pottery stone, feldspar, white sand) or blast-furnace slag, flying dust etc..Wherein, it is preferably selected from oxidation
It is aluminium, zirconium dioxide, titanium oxide, magnesia, one kind or two or more in silica, more preferably with aluminium oxide, zirconium dioxide or
The ceramic powders that titanium oxide is constituted as main body.Micro-filtration, ultrafiltration and the nanofiltration membrane of ceramic material employed in the utility model
When being applied to development waste liquid processing, good resistance tocrocking can be shown to impurity such as resin, ink in waste liquid, in mistake
Flux during filter is substantially better than the filter membrane of organic material.
As micro-filtration or ultrafiltration membrane, average pore size scope is 50~5000nm.
As nanofiltration membrane, it is difficult to be measured the aperture of film surface with electron microscope etc. since aperture is too small, so with
Referred to as the value of molecular cut off replaces average pore size as the index of pore size.About molecular cut off, art technology
Known personnel " will be the longitudinal axis by horizontal axis, prevention rate of molecular weight solute, curve made of drawing to data is known as retaining and divide
Son amount curve.And the molecular weight that prevention rate is 90% is known as to the molecular cut off of film ", molecular cut off is as expression nanofiltration
The index of the film properties of film, is well known to those skilled in the art.The molecular cut off of nanofiltration membrane in the step 2
800~6000Da.In one embodiment, 0.1~1.5MPa of nanofiltration membrane operating pressure, using cross-flow filtration mode,
2~6m/s of crossflow velocity.In one embodiment, the cycles of concentration of nanofiltration membrane is 2~10 times.
In one embodiment, due in the concentrate of ceramic micro filter or ultrafiltration membrane, the polymerization containing high concentration
Object, ink etc., therefore, the utility model are carried out at flocculation by flocculant will be added in the concentrate of ceramic micro filter or ultrafiltration
Reason, the COD and colloidal content that can be effectively reduced in concentrate, flocculant used herein can be organic or inorganic wadding
Solidifying agent, such as aluminium polychloride, polyacrylamide etc..The COD of waste water after have passed through flocculation, settlement treatment has been obtained significantly
Decline can be sent into progress concentration processing in biochemical treatment unit.
In one embodiment, it before the step 1, needs to carry out ozone oxidation pretreatment to development waste liquid；It is smelly
The additional amount of oxygen is 500~1000ppm, and reaction temperature is 40~70 DEG C.It, can be by development waste liquid due to during oxidation
In macromolecular and polymer chain rupture become small molecule, reduce the viscosity of waste liquid, can be effectively avoided in Ceramic excessive filtration
Or the pollution of micro-filtration film surface, the flux of Ceramic excessive filtration or microfiltration membranes can be effectively improved.In one embodiment, pass through
Development waste liquid after ozone treatment may also pass through three-phase cyclone separating treatment, due to containing more surface-active in waste liquid
Agent and resin, therefore it can be effectively reduced viscosity after ozone Oxidation Treatment containing certain foam in developer solution, so that
The resin and colloid of small molecule can be attached in foam, after separating by three-phase cyclone, ink, small molecule colloid can be made to exist
It is separated in oily phase, in three-phase cyclone separation, mainly containing small molecule colloid, foam, ink etc., side in the oily phase at top
Solid-phase outlet isolate be bulky grain suspended matter, and the water phase of bottom outlet predominantly separate after waste liquid, through excessive
From rear, small molecule colloid and resin would not be carried out during micro-filtration or ultrafiltration with other particles adherency formed it is fine and close
Cake layer.3~8m/s of feed flow rate, solid phase outlet and the pressure difference of charging are 0.10~0.30MPa, and grease consolidates three-phase and goes out Material
Product ratio 0.2~0.25:6.0~10.0:0.8~1.5.
Based on above method concept, the device of use can be as shown in Figure 2:
Include:
Homogeneous tank 1, for carrying out homogenization to development waste liquid；
Aeration tube 2 is connected to homogeneous tank 1, for being aerated into homogeneous tank 1；
Ceramic micro filter film or ceramic super-filtering film 3, are connected to homogeneous tank 1, for carrying out to the development waste liquid after homogeneous
Filter processing；
Nanofiltration membrane 4 is connected to the per-meate side of ceramic micro filter film or ceramic super-filtering film 3, for carrying out to penetrating fluid
Nanofiltration processing；
Nanofiltration penetrating fluid storage tank 8, is connected to nanofiltration membrane 4, for storing the penetrating fluid containing sodium carbonate.
In one embodiment, the average pore size scope of ceramic micro filter film or ceramic super-filtering film 3 is 50~500 μm.
In one embodiment, in the step 2 nanofiltration membrane 800~6000Da of molecular cut off.
In one embodiment, further includes: flocculation tank 5 is connected to the concentration of ceramic micro filter film or ceramic super-filtering film 3
Side carries out flocculating setting processing for the concentrate to ceramic micro filter film or ceramic super-filtering film 3；Wadding is connected on flocculation tank 5
Tank 7 is added in solidifying agent, for flocculant to be added into flocculation tank 5；The water outlet of flocculation tank 5 is connected to biochemical reaction unit 6.
In one embodiment, the biochemical reaction unit 6 is A2O biochemical reaction unit.
In one embodiment, further include ozone reactor, be connected to the useless of ceramic micro filter film or ceramic super-filtering film 3
Water water inlet, for carrying out ozone Oxidation Treatment to the development waste-water for entering ceramic micro filter film or ceramic super-filtering film 3.
Percentage described in the utility model all refers to mass percent in the absence of special instructions.
Embodiment 1
Treatment for reuse is carried out to development Waste Stripping Liquid Using in PCB production.Single batch processing amount is 2000L waste liquid, concentration of sodium carbonate
0.8%, COD6290ppm.Waste liquid is homogenized in homogeneous pond first and passes through Air Exposure, the waste liquid after homogenizing is using average
Aperture 50nm, 200nm, 500nm, 2000nm ceramic super-filtering film is pre-processed, and ceramic super-filtering film cycles of concentration is 50 times, is used for
Suspended matter, colloid etc. are filtered, then molecular cut off is used to carry out small molecular weight impurity and carbonic acid for the nanofiltration membrane of 5000Da
The separation of sodium, nanofiltration membrane cycles of concentration are 4 times, nanofiltration process operating pressure 0.1MPa, using cross-flow filtration mode, film surface
Flow velocity 3m/s.Ultrafiltration membrane clear liquid is 1960L, and nanofiltration membrane clear liquid is 1470L, i.e., recycling sodium carbonate amount is 1470L, overall recovery
73.5%.Cleaner liquid concentration of sodium carbonate 0.8% after treatment, COD1500ppm.The sodium carbonate liquor can cover de- for developing
Membrane process realizes sodium carbonate reuse.
Embodiment 2
Treatment for reuse is carried out to development Waste Stripping Liquid Using in PCB production.Single batch processing amount is 1000L waste liquid, concentration of sodium carbonate
0.2%, COD46200ppm.Waste liquid is homogenized in homogeneous pond first, by the waste liquid after homogenizing using 200nm ceramic super-filtering film into
Row pretreatment, ceramic super-filtering film cycles of concentration is 50 times, for suspended matter to be filtered, then use molecular cut off for 1000,
2000, the nanofiltration membrane of 4800Da carries out the separation of ink and sodium carbonate, and nanofiltration membrane cycles of concentration is 6 times, nanofiltration
Journey operating pressure 0.6MPa, using cross-flow filtration mode, crossflow velocity 3.5m/s.Ultrafiltration membrane clear liquid is 980L, nanofiltration membrane clear liquid
For 815L, i.e. recycling sodium carbonate amount is 815L, overall recovery 81.5%.Cleaner liquid concentration of sodium carbonate 0.2% after treatment, should
Sodium carbonate liquor can be covered for demoulding process of developing, and realize sodium carbonate reuse.
Embodiment 3
Treatment for reuse is carried out to development Waste Stripping Liquid Using in PCB production.Single batch processing amount is 3500L waste liquid, concentration of sodium carbonate
0.35%, COD8200ppm.Waste liquid is homogenized in homogeneous pond first, the waste liquid after homogenizing is used to the Ceramic excessive filtration of 200nm
Film, PVDF ultrafiltration membrane, PES ultrafiltration membrane, PS ultrafiltration membrane are pre-processed, and ceramic super-filtering film cycles of concentration is 50 times, for that will hang
Floating object filtering, then the separation for using molecular cut off to carry out ink and sodium carbonate for the nanofiltration membrane of 2000Da, nanofiltration
Film cycles of concentration is 12 times, nanofiltration process operating pressure 0.8MPa, using cross-flow filtration mode, crossflow velocity 3m/s.Ultrafiltration membrane
Clear liquid is 3430L, and nanofiltration membrane clear liquid is 3145L, i.e., recycling sodium carbonate amount is 3145L, overall recovery 89.8%.Ultrafiltration membrane is average
Flux 150LMH, nanofiltration membrane average flux 12LMH.Cleaner liquid concentration of sodium carbonate 0.35% after treatment, COD850ppm.It should
Sodium carbonate liquor can be covered for demoulding process of developing, and realize sodium carbonate reuse.
Embodiment 4
Treatment for reuse is carried out to development Waste Stripping Liquid Using in PCB production.Single batch processing amount is 2000L waste liquid, concentration of sodium carbonate
0.8%, COD6290ppm.Waste liquid is homogenized in homogeneous pond first and is used at ozone oxidation by Air Exposure, then to waste liquid
Reason, the additional amount of ozone is 800ppm, and reaction temperature is 45 DEG C, and waste liquid COD is down to 4520ppm after processing, after ozone oxidation
Waste liquid pre-processed using average pore size 50nm, 200nm, 500nm, 2000nm ceramic super-filtering film, ceramic super-filtering film concentration
Multiple is 50 times, is used to filter in suspended matter, colloid etc., then uses molecular cut off small for the progress of the nanofiltration membrane of 5000Da
The separation of molecular impurity and sodium carbonate, nanofiltration membrane cycles of concentration are 4 times, nanofiltration process operating pressure 0.1MPa, using mistake
Flow filtered model, crossflow velocity 3m/s.Ultrafiltration membrane clear liquid is 1960L, and nanofiltration membrane clear liquid is 1470L, i.e. recycling sodium carbonate amount is
1470L, overall recovery 73.5%.Cleaner liquid concentration of sodium carbonate 0.8% after treatment, COD1500ppm.The sodium carbonate liquor
It can cover for demoulding process of developing, realize sodium carbonate reuse.
Embodiment 5
Treatment for reuse is carried out to development Waste Stripping Liquid Using in PCB production.Single batch processing amount is 2000L waste liquid, concentration of sodium carbonate
0.8%, COD6290ppm.Waste liquid is homogenized in homogeneous pond first and is sent into three-phase cyclone point by Air Exposure, then by waste liquid
From separating in device, side charging, top is mutually discharged oily, and what the solid-phase outlet of side was isolated is the suspended matter of bulky grain, and
Waste liquid after the water phase outlet predominantly separation of bottom, feed flow rate 4m/s, solid phase outlet and the pressure difference fed are
0.20MPa, grease consolidate three-phase discharging volume ratio 0.22:8.0:1.5, by the bottom waste stream after separation using average pore size 50nm,
200nm, 500nm, 2000nm ceramic super-filtering film are pre-processed, ceramic super-filtering film cycles of concentration be 50 times, for by suspended matter,
The filtering such as colloid, then the separation for using molecular cut off to carry out small molecular weight impurity and sodium carbonate for the nanofiltration membrane of 5000Da,
Nanofiltration membrane cycles of concentration is 4 times, nanofiltration process operating pressure 0.1MPa, using cross-flow filtration mode, crossflow velocity 3m/s.
Ultrafiltration membrane clear liquid is 1960L, and nanofiltration membrane clear liquid is 1470L, i.e., recycling sodium carbonate amount is 1470L, overall recovery 73.5%.By
Treated cleaner liquid concentration of sodium carbonate 0.8%, COD1500ppm.The sodium carbonate liquor can be covered for demoulding process of developing, and be realized
Sodium carbonate reuse.
The description of above embodiments does not constitute limitations of the present invention.
Claims (6)
1. a kind of recycle device of development waste liquid characterized by comprising
Homogeneous tank (1), for carrying out homogenization to development waste liquid；
Aeration tube (2) is connected to homogeneous tank (1), for being aerated in homogeneous tank (1)；
Ceramic micro filter film or ceramic super-filtering film (3), are connected to homogeneous tank (1), for carrying out to the development waste liquid after homogeneous
Filter processing；
Nanofiltration membrane (4) is connected to the per-meate side of ceramic micro filter film or ceramic super-filtering film (3), for carrying out to penetrating fluid
Nanofiltration processing；
Nanofiltration penetrating fluid storage tank (8) is connected to nanofiltration membrane (4), for storing the penetrating fluid containing sodium carbonate.
2. the recycle device of development waste liquid according to claim 1, which is characterized in that ceramic micro filter film or ceramics
The average pore size scope of ultrafiltration membrane (3) is 50~500 μm.
3. the recycle device of development waste liquid according to claim 1, which is characterized in that the retention of nanofiltration membrane point
800~6000Da of son amount.
4. the recycle device of development waste liquid according to claim 1, which is characterized in that further include: flocculation tank (5),
The concentration side for being connected to ceramic micro filter film perhaps ceramic super-filtering film (3) is used for ceramic micro filter film or ceramic super-filtering film (3)
Concentrate carries out flocculating setting processing；It is connected with flocculant on flocculation tank (5), tank (7) are added, for being added into flocculation tank (5)
Flocculant；The water outlet of flocculation tank (5) is connected to biochemical reaction unit (6).
5. the recycle device of development waste liquid according to claim 4, which is characterized in that the biochemical reaction unit
It (6) is A2O biochemical reaction unit.
6. the recycle device of development waste liquid according to claim 1, which is characterized in that it further include ozone reactor,
Being connected to ceramic micro filter film, perhaps the water intake of ceramic super-filtering film (3) is used to surpass into ceramic micro filter film or ceramics
The development waste-water of filter membrane (3) carries out ozone Oxidation Treatment.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201820896103.4U CN208883586U (en) | 2018-06-11 | 2018-06-11 | A kind of recycle device of development waste liquid |
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| CN201820896103.4U CN208883586U (en) | 2018-06-11 | 2018-06-11 | A kind of recycle device of development waste liquid |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110577290A (en) * | 2018-06-11 | 2019-12-17 | 江苏久吾高科技股份有限公司 | method and device for recycling development waste liquid |
| CN113058433A (en) * | 2021-03-19 | 2021-07-02 | 苏州晶洲装备科技有限公司 | Useless developer solution filtration system |
-
2018
- 2018-06-11 CN CN201820896103.4U patent/CN208883586U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110577290A (en) * | 2018-06-11 | 2019-12-17 | 江苏久吾高科技股份有限公司 | method and device for recycling development waste liquid |
| CN113058433A (en) * | 2021-03-19 | 2021-07-02 | 苏州晶洲装备科技有限公司 | Useless developer solution filtration system |
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