CN208663085U - A kind of across scale freedom degree parallel connection motion platform of the big stroke of stator altogether - Google Patents
A kind of across scale freedom degree parallel connection motion platform of the big stroke of stator altogether Download PDFInfo
- Publication number
- CN208663085U CN208663085U CN201821123063.6U CN201821123063U CN208663085U CN 208663085 U CN208663085 U CN 208663085U CN 201821123063 U CN201821123063 U CN 201821123063U CN 208663085 U CN208663085 U CN 208663085U
- Authority
- CN
- China
- Prior art keywords
- macro
- follower member
- motion platform
- big stroke
- parallel connection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Machine Tool Units (AREA)
Abstract
The application provides a kind of across scale freedom degree parallel connection motion platform of the big stroke of stator altogether, which includes pedestal, workbench, Y-axis kinematic system, Z axis movement cantilever beam member；The workbench setting is on Z axis movement cantilever beam member；The Z axis movement cantilever beam member is arranged on the macro follower member in the centre；Entire macro/micromotion only needs the driving source coordinated movement of various economic factors of a motor stator, three electric movers, two piezoelectric ceramics, it can be achieved that any combination of Three Degree Of Freedom and its macro micro- switching；Each moving parts are all made of the form of macro micro- common rail, left macro follower member, intermediate macro follower member move on right macro follower member, unilateral driving structure is the design structure of single motor, total stator, big stroke motion may be implemented, have both high speed, high acceleration simultaneously, and motion platform is realized based on horizontal pitching movement.
Description
Technical field
The utility model relates to motion platform technical fields, and in particular to a kind of across scale Three Degree Of Freedom of the big stroke of stator altogether
Parallel motion platform.
Background technique
With the reach of science, many application fields such as semiconductor lithography, IC circuit is manufactured and encapsulation, biologic medical, essence
More stringent requirements are proposed to precision positioning technology for close numerical control processing, IC manufacturing etc., it is needed to have big stroke, high-precision
The features such as degree, quick response.And big stroke and high-precision are conflict always, it is most important to coordinate both sides relation, in reality
In border often sacrifice on the one hand and realize high-performance on the other hand.Reach essence while currently, realizing big stroke motion
Close positioning has become one of current front line science precondition urgently to be solved and key technology.
Domestic utility model patent CN20132009404.X discloses a kind of coaxial macro/micro combined linear motion platform device
And its precision compensation method, the device can be realized the high static accuracy and dynamic of real-time detection platform displacement information realization platform
Precision, however, being difficult to reach nanoscale in precision realization since it uses traditional compliant mechanism.
In the fields such as traditional Precision Machining and accurate measurement, motion platform is mostly the simple folded of several single axis stages
Add, there is more related link and moving parts, kinematic error serious accumulation, be largely difficult to meet simultaneously multiple degrees of freedom and
It is high-accuracy, in addition, realizing that the stroke of the platform of high-precision motion control is generally shorter, realize big stroke feeding platform precision nothing again
Method meets actual demand.
The utility model breaches traditional parallel institution form, and it is free across scale three to disclose a kind of big stroke of stator altogether
Parallel motion platform is spent, has many advantages, such as that high-precision, high thrust, low vibration can be widely applied to the large sizes such as some big aircraft blades
The detection and processing of part.
Utility model content
The utility model provides a kind of across scale freedom degree parallel connection motion platform of the big stroke of stator altogether, and workpiece can be improved
Suface processing quality and processing efficiency.
The utility model provides a kind of across scale freedom degree parallel connection motion platform of the big stroke of stator altogether, the motion platform
Cantilever beam member is moved including pedestal, workbench, Y-axis kinematic system, Z axis；
On the base, the Y-axis kinematic system includes left macro follower member, centre for the Y-axis kinematic system setting
Macro follower member, right macro follower member；
The workbench setting is on Z axis movement cantilever beam member；
The Z axis movement cantilever beam member is arranged on the macro follower member in the centre；
The workbench is connect with Z axis movement cantilever beam member by prismatic pair and swinging pair, the workbench
It is connect with left macro follower member, right macro follower member by prismatic pair and swinging pair.
Preferably, the workbench left and right ends are equipped with the first circular shaft, the second circular shaft, and the Z axis moves cantilever beam member
The second prismatic pair equipped with the first movement pair and the cooperation of the second circular shaft that cooperate with the first circular shaft.
Preferably, the Z axis movement cantilever beam member includes two columns, passes through sliding rail connection sliding block, institute on the inside of the column
State the first circular shaft, the second circular shaft and the concentric cooperation of sliding block.
Preferably, left macro follower member is identical with the structure of right macro follower member, and the macro follower member in a left side includes left macro
Movement parts and left macro/micromotion part；The macro follower member in the right side includes right macro movement parts and right macro/micromotion part.
Preferably, the first extension is arranged in one end of the macro movement parts in a left side, is provided with first on first extension
Empty slot is provided with left piezoelectric ceramics and Zuo Gaogang spring in first empty slot；One end of the left macro/micromotion part is provided with
First cavity is provided with the first protrusion in first cavity, and first extension is contained in first cavity；It is described
First protrusion, left piezoelectric ceramics, Zuo Gaogang spring are arranged in first empty slot, the left piezoelectric ceramics, Zuo Gaogang spring
The both ends of first protrusion are set；
The first wedge block is provided on the left macro/micromotion part.
Preferably, the second extension is arranged in one end of the macro movement parts in the right side, is provided with second on second extension
Empty slot is provided with right piezoelectric ceramics and the right rigid spring of height in second empty slot；One end of the right macro/micromotion part is provided with
Second cavity is provided with the second protrusion in second cavity, and second extension is contained in second cavity；It is described
Second protrusion, right piezoelectric ceramics, right high just spring are arranged in second empty slot, the right piezoelectric ceramics, the right rigid spring of height
The both ends of second protrusion are set；
The second wedge block is provided on the left and right macro/micromotion part.
Preferably, the first sliding block is provided with by sliding rail on the inclined-plane of first wedge block；Second wedge block
The second sliding block is provided with by sliding rail on inclined-plane；The workbench rear and front end is equipped with the first overhanging circular shaft, the second overhanging circle
Axis, the first overhanging circular shaft and the concentric cooperation of the first sliding block；The second overhanging circular shaft and second sliding block are same
Axle center cooperation.
Preferably, the Y-axis rectilinear system includes the linear motor being set on the base, straight guide；The macro movement in a left side
Part, left macro/micromotion part, intermediate macro follower member, right macro movement parts, right macro/micromotion part are arranged on straight guide, the straight line
Motor drives the macro movement parts in the left side, left macro/micromotion part, intermediate macro follower member, right macro movement parts, the right side along the straight guide
Macro/micromotion part is mobile.
Preferably, the macro moving part in the centre is symmetricly set between the macro follower member in the left side and right macro follower member.
The utility model additionally provides a kind of lathe, and the lathe has used across the scale Three Degree Of Freedom of the big stroke of total stator simultaneously
Through transport moving platform.
Beneficial effect by adopting the above technical scheme is:
Across the scale freedom degree parallel connection motion platform of the big stroke of total stator of the application belongs to a kind of macro micro- two-stage of parallel connection
Three-degree-of-freedom motion platform, entire macro/micromotion only need the driving of a motor stator, three electric movers, two piezoelectric ceramics
The source coordinated movement of various economic factors is, it can be achieved that any combination of Three Degree Of Freedom and its macro micro- switching；Each moving parts are all made of macro micro- common rail
Form, left macro follower member, intermediate macro follower member move on right macro follower member, and unilateral driving structure is single motor, altogether
Big stroke motion may be implemented in the design structure of stator, while having both high speed, high acceleration, and motion platform is realized and is based on
Horizontal pitching movement；Using piezoelectric ceramics and high just spring as the kinematic system of micro-move device, there is preferable pretensioning effect,
Inhibit vibration, makes up error.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is the embodiments of the present invention, for those of ordinary skill in the art, without creative efforts, also
Other attached drawings can be obtained according to the attached drawing of offer.
Fig. 1 is a kind of shaft side figure of across scale freedom degree parallel connection motion platform of the big stroke of stator altogether；
Fig. 2 is that a kind of across the scale freedom degree parallel connection motion platform of big stroke of stator altogether removes workbench, contract type block
Top view；
Fig. 3 is a kind of explosive view of across scale freedom degree parallel connection motion platform of the big stroke of stator altogether.
Pedestal 1000；Workbench 2000, the first overhanging circular shaft 2100, the second overhanging circular shaft 2200, the first circular shaft 2300,
Second circular shaft 2400；Y-axis kinematic system 3000, linear motor 3100, straight guide 3200；Left macro follower member 3300, Zuo Hongyun
Moving part 3310, the first extension 3311, the first empty slot 3312, the first cavity 3313, the first protrusion 3314, left macro/micromotion part
3320, the first contract type block 3330, left piezoelectric ceramics 3350, the first sliding block 3600, Zuo Gaogang spring 3800；Intermediate macro follower member
3400；Right macro follower member 3500, right macro movement parts 3510, the second extension 3511, the second empty slot 3512, the second cavity
3513, the second protrusion 3514, right macro/micromotion part 3520, the second contract type block 3530, right piezoelectric ceramics 3550, the second sliding block
3700, right high just spring 3900；Z axis moves cantilever beam member 4000, first movement pair 4100, the second prismatic pair 4200.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
It should be noted that being to "front", "rear", "left", "right" has been used in the term definition of structure in the application
It indicates a relative positional relationship between structure, restriction is not constituted to structure itself.
As shown in Figure 1-3, a kind of specific embodiment of the utility model provide it is a kind of altogether the big stroke of stator across scale
Freedom degree parallel connection motion platform, the motion platform include pedestal 1000, workbench 2000, Y-axis kinematic system 3000, Z axis
Move cantilever beam member 4000；The Y-axis kinematic system 3000 is arranged on the pedestal 1000, the Y-axis kinematic system 3000
Including left macro 3310 component of movement parts, intermediate macro follower member 3400, right macro 3510 component of movement parts；The workbench 2000
Setting is on Z axis movement cantilever beam member 4000；The Z axis movement cantilever beam member 4000 is arranged in the macro moving part group in the centre
On part 3400；The workbench 2000 is connect with Z axis movement cantilever beam member 4000 by prismatic pair and swinging pair, described
Workbench 2000 is connect with left macro 3310 component of movement parts, right macro 3510 component of movement parts by prismatic pair and swinging pair.
2000 left and right ends of workbench are equipped with the first circular shaft 2300, the second circular shaft 2400, the Z axis movement overarm
Component 4000 is equipped with the first movement pair 4100 cooperated with the first circular shaft 2300, the second prismatic pair with the cooperation of the second circular shaft 2400
4200；Z axis movement cantilever beam member 4000 includes two columns, by sliding rail connection sliding block on the inside of the column, described first
Circular shaft 2300, the second circular shaft 2400 and the concentric cooperation of sliding block, first circular shaft 2300, the second circular shaft 2400 and workbench
It is connected between 2000 by bearing.
Left macro follower member 3300 is identical with the structure of right macro follower member 3500, and the macro follower member 3300 in a left side includes
Left macro movement parts 3310 and left macro/micromotion part 3320；The macro follower member 3500 in the right side includes that right macro movement parts 3510 and the right side are macro
Micromotion part 3520.
The first extension 3311 is arranged in one end of the macro movement parts 3310 in a left side, is provided on first extension 3311
First empty slot 3312 is provided with left piezoelectric ceramics 3350 and Zuo Gaogang spring 3800 in first empty slot 3312；The left side is macro
One end of micromotion part 3320 is provided with the first cavity 3313, and the first protrusion 3314, institute are provided in first cavity 3313
The first extension 3311 is stated to be contained in first cavity 3313；First protrusion 3314, left piezoelectric ceramics 3350, Zuo Gao
Rigid spring 3800 is arranged in first empty slot 3312, and the left piezoelectric ceramics 3350, Zuo Gaogang spring 3800 are arranged in institute
State the both ends of the first protrusion 3314；
The first wedge block is provided on the left macro/micromotion part 3320.
The second extension 3511 is arranged in one end of the macro movement parts 3510 in the right side, is provided on second extension 3511
Second empty slot 3512 is provided with right piezoelectric ceramics 3550 and right high just spring 3900 in second empty slot 3512；The right side is macro
One end of micromotion part 3520 is provided with the second cavity 3513, and the second protrusion 3514, institute are provided in second cavity 3513
The second extension 3511 is stated to be contained in second cavity 3513；Second protrusion 3514, right piezoelectric ceramics 3550, right height
Rigid spring 3900 is arranged in second empty slot 3512, and the right piezoelectric ceramics 3550, right high just spring 3900 are arranged in institute
State the both ends of the second protrusion 3514；
The second wedge block is provided on the left and right macro/micromotion part 3520.
The first sliding block 3600 is provided with by sliding rail on the inclined-plane of first wedge block；The inclined-plane of second wedge block
It is upper that second sliding block 3700 is provided with by sliding rail；2000 rear and front end of workbench is equipped with the first overhanging circular shaft 2100, the
Two overhanging circular shafts 2200, the first overhanging circular shaft 2100 and the concentric cooperation of first sliding block 3600；Described second is overhanging
Circular shaft 2200 and the concentric cooperation of second sliding block 3700；First overhanging circular shaft 2100, the second overhanging circular shaft 2200 and work
2000 rear and front end of platform is connected by bearing；The workbench 2000 is by the first overhanging circular shaft 2100, the second overhanging circle
Swing, first sliding block 3600 and second sliding block 3700 of the axis 2200 in the first sliding block 3600 and the second sliding block 3700 are in first wedge
Shape block 3330, the movement on 3530 inclined-plane of the second wedge block and realization pitching movement；The Z axis moves cantilever beam member 4000
Two columns, by sliding rail connection sliding block, first circular shaft 2300, the second circular shaft 2400 and sliding block are concentric for the column inside
Cooperation is connected between first circular shaft 2300, the second circular shaft 2400 and workbench 2000 by bearing, flat in the work
When 2000 pitching movement of platform, the first circular shaft 2300, the second circular shaft 2400 provide revolute pair, sliding rail and sliding block on the inside of the column
Prismatic pair is provided.
The Y-axis rectilinear system includes the linear motor 3100 being arranged on pedestal 1000, straight guide 3200；The left side is macro
Movement parts 3310, left macro/micromotion part 3320, intermediate macro follower member 3400, right macro movement parts 3510, right macro/micromotion part
3520 are arranged on straight guide 3200, and the linear motor 3100 drives the macro movement parts in a left side along the straight guide 3200
3310, left macro/micromotion part 3320, intermediate macro follower member 3400, right macro movement parts 3510, right macro/micromotion part 3520 are mobile,
Only need a motor stator, three electric movers (left macro 3310 component of movement parts, intermediate macro follower member 3400, right macro movements
3510 component of part), the driving source coordinated movements of various economic factors of two piezoelectric ceramics is, it can be achieved that any combination of Three Degree Of Freedom and its macro micro- cut
It changes, each moving parts are all made of the form of macro micro- common rail, and left macro follower member 3300, intermediate macro follower member 3400, the right side are macro
It is moved on follower member 3500, unilateral driving structure is the design structure of single motor, total stator, and big stroke fortune may be implemented
It is dynamic, while having both high speed, high acceleration.
The macro moving part in centre is symmetricly set between the macro follower member 3300 in the left side and right macro follower member 3500.
The utility model additionally provides a kind of lathe, and the lathe has used across the scale Three Degree Of Freedom of the big stroke of total stator simultaneously
Through transport moving platform.
Across the scale freedom degree parallel connection motion platform of the big stroke of total stator of the application, entire macro/micromotion only need an electricity
Machine stator, three electric movers, two piezoelectric ceramics the driving source coordinated movement of various economic factors, it can be achieved that any combination of Three Degree Of Freedom and its
Macro micro- switching, and belong to a kind of macro micro- two-stage Three-degree-of-freedom motion platform of parallel connection；Each moving parts are all made of macro micro- common rail
Form, left macro follower member, intermediate macro follower member move on right macro follower member, unilateral driving structure be single motor,
The design structure of stator altogether, may be implemented big stroke motion, while have both high speed, high acceleration, and motion platform realizes base
In horizontal pitching movement；Using piezoelectric ceramics and high just spring as the kinematic system of micro-move device, has and preferably pre-tighten effect
Fruit inhibits vibration, makes up error.
Above embodiments are only to illustrate the technical solution of the utility model, rather than its limitations；Although referring to aforementioned reality
Example is applied the utility model is described in detail, those skilled in the art should understand that: it still can be to preceding
Technical solution documented by each embodiment is stated to modify or equivalent replacement of some of the technical features；And these
It modifies or replaces, the spirit and model of various embodiments of the utility model technical solution that it does not separate the essence of the corresponding technical solution
It encloses.
Claims (9)
1. a kind of across scale freedom degree parallel connection motion platform of the big stroke of stator altogether, which is characterized in that the motion platform includes bottom
Seat, workbench, Y-axis kinematic system, Z axis move cantilever beam member；
On the base, the Y-axis kinematic system is macro dynamic including left macro follower member, centre for the Y-axis kinematic system setting
Part component, right macro follower member；
The workbench setting is on Z axis movement cantilever beam member；
The Z axis movement cantilever beam member is arranged on the macro follower member in the centre；
The workbench is connect with Z axis movement cantilever beam member by prismatic pair and swinging pair, the workbench and a left side
Macro follower member, right macro follower member are connected by prismatic pair with swinging pair.
2. across the scale freedom degree parallel connection motion platform of the big stroke of stator altogether according to claim 1, it is characterised in that: institute
Workbench left and right ends are stated equipped with the first circular shaft, the second circular shaft, the Z axis movement cantilever beam member is equipped with to be cooperated with the first circular shaft
First movement is secondary, the second prismatic pair with the cooperation of the second circular shaft.
3. across the scale freedom degree parallel connection motion platform of the big stroke of stator altogether according to claim 2, it is characterised in that: institute
Stating Z axis movement cantilever beam member includes two columns, passes through sliding rail connection sliding block, first circular shaft, the second circle on the inside of the column
Axis and the concentric cooperation of sliding block.
4. across the scale freedom degree parallel connection motion platform of the big stroke of stator altogether according to claim 3, it is characterised in that: left
Macro follower member is identical with the structure of right macro follower member, and the macro follower member in a left side includes left macro movement parts and left macro/micromotion
Part；The macro follower member in the right side includes right macro movement parts and right macro/micromotion part.
5. across the scale freedom degree parallel connection motion platform of the big stroke of stator altogether according to claim 4, it is characterised in that:
The first extension is arranged in one end of the macro movement parts in a left side, is provided with the first empty slot on first extension, and described the
Left piezoelectric ceramics and Zuo Gaogang spring are provided in one empty slot；One end of the left macro/micromotion part is provided with the first cavity, institute
It states and is provided with the first protrusion in the first cavity, first extension is contained in first cavity；First protrusion, a left side
Piezoelectric ceramics, Zuo Gaogang spring are arranged in first empty slot, and the left piezoelectric ceramics, the setting of Zuo Gaogang spring are described the
The both ends of one protrusion；
The first wedge block is provided on the left macro/micromotion part.
6. across the scale freedom degree parallel connection motion platform of the big stroke of stator altogether according to claim 5, it is characterised in that:
The second extension is arranged in one end of the macro movement parts in the right side, is provided with the second empty slot on second extension, and described the
Right piezoelectric ceramics and the right rigid spring of height are provided in two empty slots；One end of the right macro/micromotion part is provided with the second cavity, institute
It states and is provided with the second protrusion in the second cavity, second extension is contained in second cavity；Second protrusion, the right side
Piezoelectric ceramics, right high just spring are arranged in second empty slot, and the right piezoelectric ceramics, right high just spring setting are described the
The both ends of two protrusions；
The second wedge block is provided on the left and right macro/micromotion part.
7. across the scale freedom degree parallel connection motion platform of the big stroke of stator altogether according to claim 6, it is characterised in that:
The first sliding block is provided with by sliding rail on the inclined-plane of first wedge block；Pass through cunning on the inclined-plane of second wedge block
Rail is provided with the second sliding block；The workbench rear and front end is equipped with the first overhanging circular shaft, the second overhanging circular shaft, outside described first
Stretch circular shaft and the concentric cooperation of the first sliding block；The second overhanging circular shaft and the concentric cooperation of the second sliding block.
8. across the scale freedom degree parallel connection motion platform of the big stroke of stator altogether according to claim 7, it is characterised in that:
The Y-axis rectilinear system includes the linear motor being set on the base, straight guide；The macro movement parts in the left side, left macro micro- fortune
Moving part, intermediate macro follower member, right macro movement parts, right macro/micromotion part are arranged on straight guide, and the linear motor is described in
Straight guide drives the macro movement parts in the left side, left macro/micromotion part, intermediate macro follower member, right macro movement parts, right macro/micromotion part
It is mobile.
9. across the scale freedom degree parallel connection motion platform of the big stroke of stator altogether according to claim 8, it is characterised in that: institute
Intermediate macro moving part is stated to be symmetricly set between the macro follower member in the left side and right macro follower member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821123063.6U CN208663085U (en) | 2018-07-16 | 2018-07-16 | A kind of across scale freedom degree parallel connection motion platform of the big stroke of stator altogether |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821123063.6U CN208663085U (en) | 2018-07-16 | 2018-07-16 | A kind of across scale freedom degree parallel connection motion platform of the big stroke of stator altogether |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208663085U true CN208663085U (en) | 2019-03-29 |
Family
ID=65828861
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821123063.6U Active CN208663085U (en) | 2018-07-16 | 2018-07-16 | A kind of across scale freedom degree parallel connection motion platform of the big stroke of stator altogether |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208663085U (en) |
-
2018
- 2018-07-16 CN CN201821123063.6U patent/CN208663085U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108747426A (en) | A kind of across scale freedom degree parallel connection motion platform of the big stroke of stator altogether | |
| CN103104793B (en) | Integrated type six degrees of freedom precision positioning platform | |
| CN103225728B (en) | Two-dimensional parallel micromotion platform driven by piezoceramic | |
| CN101142051B (en) | Laser machine tool | |
| CN205291608U (en) | A triaxial telecontrol equipment for 3D prints | |
| CN108206155B (en) | Layered-type decoupling XY high-speed motion platform | |
| CN101487989B (en) | Six-freedom precise positioning platform | |
| JP5575802B2 (en) | Integrated stage positioning system and method | |
| CN102152133A (en) | Five-coordinate locating mechanism | |
| CN106002342A (en) | Five-axis linkage series-parallel machine tool | |
| CN102615514B (en) | Two-degree-of-plane-freedom redundant drive parallel mechanism and machine tool with same | |
| CN103021473A (en) | Direct drive type motion decoupling high-accuracy servo platform | |
| CN201555577U (en) | Horizontal cross member of coordinate measuring device and coordinate measuring device provided with same | |
| CN203817400U (en) | Paired double-spindle double-tool-holder numerically-controlled lathe | |
| CN209774584U (en) | Planar three-degree-of-freedom fully-flexible parallel positioning platform | |
| CN106826781A (en) | Coordinates robot | |
| CN106965133B (en) | A kind of Three Degree Of Freedom locating platform of stiffness variable | |
| CN109940589B (en) | Symmetrical two-rotation one-movement complete decoupling parallel mechanism | |
| CN103350351B (en) | Desktop three axle planer-type microfabrication lathe | |
| CN208663085U (en) | A kind of across scale freedom degree parallel connection motion platform of the big stroke of stator altogether | |
| CN208713385U (en) | A kind of macro micro- composite motion platform of big stroke five degree of freedom | |
| CN103219049A (en) | Precise positioning one-dimensional platform | |
| CN105081852A (en) | Portal vertical machining center | |
| CN203179557U (en) | Precise positioning one-dimensional platform | |
| CN110497363B (en) | Modularized macro-micro combined three-degree-of-freedom micro-clamping platform and using method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |