CN208218947U - A kind of super thick non-hydrogen diamond membrane - Google Patents
A kind of super thick non-hydrogen diamond membrane Download PDFInfo
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- CN208218947U CN208218947U CN201820808503.5U CN201820808503U CN208218947U CN 208218947 U CN208218947 U CN 208218947U CN 201820808503 U CN201820808503 U CN 201820808503U CN 208218947 U CN208218947 U CN 208218947U
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Abstract
A kind of super thick non-hydrogen diamond membrane, metallic matrix top coat Cr adhesive layer, and Cr adhesive layer top is C/C multilayer complex films, and C/C multilayer complex films are made of soft C film and hard C film alternating deposit.The utility model is prepared for soft or hard alternate C/C multilayer film by controlling substrate bias with vacuum ionic coating technology, and each bed boundary is mutually matched, and film tool is well bonded and toughness, and the inductive effect that ion bombardment generates under high bias leads to the SP in film2Key is to sp3Key transformation, enhances the wear-resisting property of DLC film.This homogeneous multilayer structure makes the hardness of film be up to 40GPa, and coefficient of friction is lower than 0.15, and has good durability, therefore expands DLC film engineering application range.
Description
Technical field
The present invention relates to material surface modifying technology fields.
Background technique
In order to reduce the fuel consumption of engine, the friction for mitigating engine sliding position is extremely important, especially piston,
The critical components such as piston ring, such as Piston volume tube are up to 25% to the contribution for reducing overall mechanical friction.Consider optimization piston ring and
When the measure of the friction system of cylinder surface, piston ring coating plays very important effect.DLC film is as a kind of
High rigidity antifriction antiwear surface protective film material has excellent wear-resisting property, low-friction coefficient and and engine lubrication
The good collaboration of oil compounds characteristic, is an important research direction of engine energy-saving consumption reduction process for treating surface.
The slide unit of automobile engine and transmission system uses fuel oil or machine oil generally to be realization lubricating function, however
Combination containing hydrogen diamond membrane and machine oil is not ideal enough in terms of the duration of friction reduction effect, mainly due to eka-gold
C h bond in hard rock film because sliding friction heat and it is mechanical be cut off after, carbon can be reacted with lubricating oil, to accelerate film
Abrasion.In addition, DLC film generates higher internal stress during the deposition process, keep it poor with the binding force of metallic matrix,
Film layer is easy peeling, falls off, and limits the deposition thickness of film.
Summary of the invention
It is an object of the invention to overcome the deficiencies of the prior art and provide a kind of super thick non-hydrogen diamond membrane, tools
There are good film-film-substrate binding strength, higher hardness and superior wear-resisting property.
Present invention technical solution used for the above purpose is: a kind of super thick non-hydrogen diamond membrane, metal
1 top of matrix coats Cr adhesive layer 2, and 2 top of Cr adhesive layer is C/C multilayer complex films 3, and C/C multilayer complex films 3 are by soft C film
It is constituted with hard C film alternating deposit.
The metallic matrix 1 is cast iron or steel alloy.
The Cr adhesive layer 2 with a thickness of 0.2~0.5 μm.
The C/C multilayer complex films 3 are at least alternating deposit 30 times soft C films and hard C film, the soft C film thickness of single layer is 80 ~
110 nm, the hard C film thickness of single layer are 170 ~ 200nm.
The present invention has the advantage that the present invention passes through control substrate bias with vacuum ionic coating technology compared with prior art
It is prepared for soft or hard alternate C/C multilayer film, each bed boundary is mutually matched, and film tool is well bonded and toughness, high bias
The inductive effect that lower ion bombardment generates leads to the SP in film2Key is to sp3Key transformation, enhances the wear-resisting of DLC film
Performance.This homogeneous multilayer structure makes the hardness of film be up to 40GPa, and coefficient of friction is lower than 0.15, and has good durable
Property, therefore DLC film engineering application range is expanded, it is provided newly to develop novel super thick non-hydrogen diamond membrane
Thinking, and had a good application prospect on automobile engine critical component.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of a kind of super thick non-hydrogen diamond membrane of the present invention and its metallic matrix.
In figure, 1. metallic matrixes, 2. Cr adhesive layers, 3. C/C multilayer complex films.
Specific embodiment
A kind of super thick non-hydrogen diamond membrane of the invention of the invention, is successively glued including Cr by metallic matrix to surface
Layer, C/C multilayer complex films are tied, the Cr adhesive layer is coated on metallic matrix, and the C/C multilayer complex films are by soft C film
It is formed with hard C film alternating deposit.The DLC film is the microcosmic knot for changing carbon film by adjusting matrix pulsed bias
Structure, by mantle and dura mater mutually accumulate superposition in the way of reduce stress in thin films, to prepare thicker diamond-like
Film.
Using the Magnetic filter vacuum ionic coating technology of independent development, Cr adhesive layer with a thickness of 0.2~0.5 μm.Pure Cr is viscous
Tying layer has very strong interface fusion performance, can preferably link metallic matrix and C film, realizes that C film and metallic matrix are very high
Bond strength.C/C multilayer complex films are that at least alternating deposit 30 times soft C films and hard C film, the soft C film thickness of single layer are 80 ~ 110
Nm, the hard C film thickness of single layer are 170 ~ 200nm.The overall thickness of super thick non-hydrogen diamond membrane is 5 ~ 8 microns, and hardness reaches
40GPa or more, coefficient of friction are lower than 0.15.
Preparation method, comprising the following steps:
(1) workpiece pre-processes.Processing is polished directly to workpiece, the workpiece surface roughness Ra < after grinding and polishing
0.1 μm, then workpiece is carried out respectively to pure water and alcohol ultrasonic cleaning, finally dried workpiece, and be put into vacuum ion plating furnace
On chamber pivoted frame；
(2) Ion Cleaning.After vacuumizing, gas pressure in vacuum is lower than 8 × 10-4After Pa, start matrix pivoted frame, speed control exists
2 ~ 4rpm is passed through argon gas, carries out the cleaning of argon ion aura, then reduces argon flow, opens Cr metallic target, carries out gold to workpiece
Belong to ion etching cleaning, argon ion Glow Discharge Cleaning condition are as follows: air pressure is 2 ~ 4 Pa, and 300 ~ 400 DEG C of substrate temperature, matrix is inclined
Pressure is -800~-1000 V, and duty ratio 40%, scavenging period is 30 minutes；Metal ion etch cleaner condition are as follows: air pressure is
0.2 ~ 0.5Pa, 300 ~ 400 DEG C of substrate temperature, substrate bias be -800~-1000 V, duty ratio 40%, Cr target current be 70 ~
90A, ion etching time are 10 ~ 20 minutes；
(3) preparation of Cr adhesive layer.Cr metallic target is opened, setting substrate bias, target current and depositing temperature deposit pure
Cr adhesive layer, sedimentation time are 20 ~ 30 minutes, and after metal ion etching, vacuum conditions are 0.5~0.8 Pa, substrate temperature 300
~ 400 DEG C, substrate bias is -100 ~ -300 V, and duty ratio 40%, Cr target current is 70 ~ 90A, and sedimentation time is about 20~30
Min obtains pure Cr interface transition layer；
(4) preparation of C/C multilayer complex films.The Cr target in step (3) is closed, keeps air pressure constant, is then turned on two column
Depositing temperature and graphite target current is arranged in graphite target, passes through the control soft C film of matrix pulsed bias alternating deposit and hard C film, preparation
C/C multilayer complex films after pure Cr interface transition layer deposits, close metal Cr target, open graphite target, and target current is 60 ~ 80
A, depositing temperature are controlled at 120 ~ 150 DEG C, and substrate bias is set as -100 ~ -300V, and duty ratio 20% prepares the soft C film of single layer,
Sedimentation time is 5 ~ 8 minutes；Then substrate bias is adjusted to -400 ~ -600V, duty ratio 40% prepares the hard C film of single layer, sinks
The product time is 10 ~ 15 minutes；Soft C film and hard C film alternating deposit at least 30 times or more.
Pure Cr layers has very strong interface fusion performance, can preferably connect metallic matrix and carbon film, realizes coating and gold
Belong to the very high bond strength of matrix；The design of C/C multi-layer compound structure is effectively reduced the internal stress of carbon film, improves the cause of coating
Density and toughness realize the preparation of super thick DLC film.
The present invention is described by embodiment, and those skilled in the art know, is not departing from spirit of the invention
In the case where range, various changes or equivalence replacement can be carried out to these features and embodiment.In addition, in religion of the invention
It leads down, can modify to these features and embodiment to adapt to particular situation and material without departing from essence of the invention
Mind and range.Therefore, the present invention is not limited to the particular embodiment disclosed, fallen with claims hereof
Embodiment in range belongs to protection scope of the present invention.
Claims (4)
1. a kind of super thick non-hydrogen diamond membrane, it is characterised in that: metallic matrix (1) top coats Cr adhesive layer (2), and Cr is viscous
Tying layer (2) top is C/C multilayer complex films (3), and C/C multilayer complex films (3) are made of soft C film and hard C film alternating deposit.
2. a kind of super thick non-hydrogen diamond membrane according to claim 1, it is characterised in that: the metallic matrix (1)
For cast iron or steel alloy.
3. a kind of super thick non-hydrogen diamond membrane according to claim 1, it is characterised in that: the Cr adhesive layer (2)
With a thickness of 0.2~0.5 μm.
4. a kind of super thick non-hydrogen diamond membrane according to claim 1, it is characterised in that: the C/C MULTILAYER COMPOSITE
Film (3) is that at least alternating deposit 30 times soft C films and hard C film, the soft C film thickness of single layer are 80 ~ 110 nm, the hard C film thickness of single layer
For 170 ~ 200nm.
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| CN201820808503.5U CN208218947U (en) | 2018-05-29 | 2018-05-29 | A kind of super thick non-hydrogen diamond membrane |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108411258A (en) * | 2018-05-29 | 2018-08-17 | 大连维钛克科技股份有限公司 | A kind of super thick non-hydrogen diamond membrane and preparation method thereof |
| CN111304591A (en) * | 2018-12-12 | 2020-06-19 | 北京首量科技股份有限公司 | Diamond-like carbon film with multilayer structure and preparation method thereof |
-
2018
- 2018-05-29 CN CN201820808503.5U patent/CN208218947U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108411258A (en) * | 2018-05-29 | 2018-08-17 | 大连维钛克科技股份有限公司 | A kind of super thick non-hydrogen diamond membrane and preparation method thereof |
| CN111304591A (en) * | 2018-12-12 | 2020-06-19 | 北京首量科技股份有限公司 | Diamond-like carbon film with multilayer structure and preparation method thereof |
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Effective date of registration: 20201014 Address after: 116600, No. seven, 13 street, Northeast Economic and Technological Development Zone, Liaoning, Dalian Patentee after: Dalian weitike nanotechnology Co., Ltd Address before: 116600 -A, B, 3-1 West Tieshan Road, Dalian economic and Technological Development Zone, Liaoning, China Patentee before: DALIAN VACUUM TECHNOLOGIES Inc. |