CN107604312B - A kind of surface is the piston and its preparation method and application of the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation - Google Patents
A kind of surface is the piston and its preparation method and application of the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation Download PDFInfo
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Abstract
The present invention relates to the piston that a kind of surface is the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation and its technology of preparing and applications.The structure of the piston includes two schemes, and scheme one: the piston includes substrate, TiAl transition zone, TiAlN coating, and the TiAl transition zone is uniformly wrapped in substrate；The TiAlN coating is uniformly wrapped on TiAl transition zone.Scheme two: the piston includes substrate, the first TiAl transition zone, the first TiAlN coating, and the 2nd TiAl transition zone, the 2nd TiAlN coating, structure is substrate/the first TiAl transition zone/the first TiAlN coating/the 2nd TiAl transition zone/the 2nd TiAlN coating.Its application includes being used for internal combustion engine.Thermal insulation, wearability, inoxidizability and the thermal-shock resistance of piston face designed by the present invention, and effectively extend piston service life.
Description
Technical field
The present invention relates to a kind of surface be the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation piston and its technology of preparing and
Using belonging to plunger designs preparation technical field.
Background technique
In recent years, with the rapid raising of manufacturing technology, increasingly serious environmental pollution, engine must to high power,
Low emission direction is developed.This allows for the power density of engine and explosion pressure is continuously improved, and directly results in the machinery of piston
Load and thermic load significantly improve.Aluminum and aluminum alloy mateial has the characteristics that high intensity, low-density, easy processing, in internal combustion engine
Piston field is widely used.Alusil alloy is industrially mostly used to manufacture engine piston at present, aluminium piston of IC engine is adopted mostly
Produced with casting and forming mode, cooling velocity is slower in casting process, piston tissue there are biggish blocky primary silicon tissue and
The Eutectic Silicon in Al-Si Cast Alloys tissue of distribution in the shape of a rod.Piston during the work time, since silicon is different with the thermal expansion coefficient of aluminium, bears alternation heat
Load generates microfissure, eventually leads to piston heat fatigue failure.In order to improve the service performance of piston, except through improving base
Outside the performance of body material, the stability and service life of piston can also be improved by way of surface peening.With aluminium and aluminium
Alloyapplication gos deep into, to the anti-corrosion capability of piston face coating, wear-resisting type, surface uniformity, impact resistance, adhesion property etc.
More stringent requirements are proposed.
At work, top land is directly contacted with high-temperature fuel gas piston, and top subjects the baking of thermal-flame,
Therefore the thermic load that piston crown is born sharply increases, and the strength of materials can be remarkably decreased at high temperature, lead to high strengthening bavin
Oil machine piston frequently occurs issue of ASIC thermal failure.Therefore, in order to improve the high temperature oxidation resistance, anti-corrosion of traditional all-aluminium piston top surface
Property, the performances such as wearability improve outside piston overall performance in addition to improving piston basis material, be exactly to pass through pair there are also an approach
Piston face processing, improves piston resistance to high temperature oxidation, anticorrosive and wear-resisting property.Traditional surface treatment mode has local weight
Molten, anodic oxidation, differential arc oxidation, the various coating of coating include tin plating, lead plating, spray molybdenum disulfide, tetrafluoroethene etc..But due to
By the limitation of material itself and coating process, the performance raising of piston is limited, these technologies can no longer meet current automobile
The increasingly higher demands that engine is proposed.
Summary of the invention
It is an object of the present invention to overcome above-mentioned the deficiencies in the prior art, solves the problems, such as the easy ablation of piston, destructible, prolong
The service life of long piston promotes the use reliability of piston, meets the requirement of high power consumption low emission, and the present invention is living from aluminium alloy
Plug sets out, and provides piston and its technology of preparing and application that a kind of surface is the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation.
A kind of surface of the present invention is the piston of the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation；The surface is (Ti, Al) N
The piston of the wear-resisting ultra high build coating of multilayer insulation includes following two schemes；
Scheme one
The piston includes piston base, TiAl transition zone, TiAlN coating, and the TiAl transition zone is uniformly wrapped on work
It fills in substrate；The TiAlN coating is uniformly wrapped on TiAl transition zone,
Scheme two
The piston includes piston base, the first TiAl transition zone, the first TiAlN coating, the 2nd TiAl transition zone, second
TiAlN coating；The first TiAl transition zone is evenly coated in piston base, and the first TiAlN coating is uniformly wrapped on
On first TiAl transition zone, the 2nd TiAl transition zone is uniformly wrapped on the first TiAlN coating, the 2nd TiAlN plating
Layer is uniformly wrapped on the 2nd TiAl transition zone.
A kind of surface of the present invention is the piston of the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation；The piston base is aluminium conjunction
Golden piston base.
A kind of surface of the present invention is the piston of the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation；As a preferred option one；
The content of N is in gradient or linear change in the TiAlN coating；Along TiAlN thickness of coating direction, define TiAlN coating with
It is 2-TiAlN layers that the direct contact layer of TiAl transition zone, which is 1-TiAlN layers and 1-TiAlN layers direct TiAlN layers, such as
This analogizes, and defining the TiAlN layer in TiAlN coating from TiAl transition zone maximum distance apart is the i-th-TiAlN layers, and the i is greater than
Equal to 2；The atomic percentage content of the 1-TiAlN layers of N less than 2-TiAlN layers in N atomic percentage content；When i is greater than 2
When, the atomic percentage content of N is greater than the atomic percentage content of N in TiAlN layers of (i-1) in the i-th-TiAlN layers.
A kind of surface of the present invention is the piston of the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation；In scheme one, TiAl transition
Layer with a thickness of 0.001~10 μm, preferably 1~8 μm；The overall thickness of TiAlN coating is 1.0~20 μm, preferably 2~18 μ
m.Total coating thickness is 3~30 μm.The overall thickness of coating refers to the sum of coated thickness of institute in the present invention.
A kind of surface of the present invention is the piston of the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation；In scheme one, TiAl transition
In layer, the atomic percentage content of Ti is 10-50%, preferably 20-40%.
A kind of surface of the present invention is the piston of the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation；1- described in scheme one
In TiAlN layers, the atomic percentage content of N is 0.0001-20%, preferably 0-10%.In 1-TiAlN layers, the atom hundred of Ti
Dividing content is 20-40%.
A kind of surface of the present invention is the piston of the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation；I-th-described in scheme one
In TiAlN layers, the atomic percentage content of N is up to 30%.In i-th-TiAlN layers, the atomic percentage content of Ti is up to 40%.
A kind of surface of the present invention is the piston of the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation；First described in scheme two
In TiAl transition zone, the atomic percentage content of Ti is 10-50%, preferably 20-40%.Preferably, described first
TiAl transition zone with a thickness of 0.001~5 μm.
A kind of surface of the present invention is the piston of the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation；First described in scheme two
In TiAlN coating, the atomic percentage content of N is 10-40%, preferably 10-30%；The atomic percentage content of Ti be 10-50%,
Preferably 20-40%；Preferably, the first TiAlN coating with a thickness of 1-5 μm.
A kind of surface of the present invention is the piston of the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation；Second described in scheme two
In TiAl transition zone, the atomic percentage content of Ti is 10-50%, preferably 20-40%.Preferably, described second
TiAl transition zone with a thickness of 0.001~5 μm.
A kind of surface of the present invention is the piston of the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation；Second described in scheme two
In TiAlN coating, the atomic percentage content of N is 10-40%, preferably 10-30%；The atomic percentage content of Ti be 10-50%,
Preferably 20-40%；.Preferably, the 2nd TiAlN coating with a thickness of 1-5 μm.
Preferably, in the present invention program two, n is recycled in the way of one layer of TiAl transition zone/mono- layer TiAlN coating
The wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation described in secondary composition.The n is more than or equal to 2.
Preferably, in the present invention program two, when the n is more than or equal to 2, the thickness of any one layer of TiAl transition zone
Degree is 0.001~5 μm；Any one layer of TiAlN coating with a thickness of 1-5 μm；The overall thickness of coating is 3~50 μm.
As a further preferred solution, in any one TiAlN transition zone of the present invention program two, N is in first to increase
The Long-term change trend of reduction again.This variation can be realized by the control of preparation process or subsequent heat treatment.
The present invention, a kind of surface involved in scheme one are the piston of the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation,
Preparation method includes the following steps:
Step 1
The dry piston base of surface cleaning is placed in Magnetically filtered vacuum arc deposition equipment, titanium-aluminium alloy is electric arc
Source is deposited using Magnetically filtered vacuum arc deposition；Vacuum in control Magnetically filtered vacuum arc deposition equipment before deposition
The pressure of room is 1.0~4.5 × 10-3Pa；When Magnetically filtered vacuum arc deposition, control striking current is 90~110A, bend pipe
Magnetic field is 1.5~3.0A, straight tube magnetic field is 2.0~5.0A, beam intensity is 350~400mA, duty ratio is 65~95%；-
1000V~-100V carries out 10~30min of deposition, and one layer of TiAl transition zone is deposited on the surface of the dry piston base of cleaning；
Step 2
Reaction gas switch is opened, the titanium-aluminium alloy using purity more than or equal to 99% is more than or equal to as arc source with purity
99% nitrogen is reaction gas, and when Magnetically filtered vacuum arc deposition, control beam intensity is 100~150mA, duty ratio is
10~20%, nitrogen flow sequence uses A1sccm、A2sccm、……AiSccm deposition, each flow spot deposition 20~40s, In
Nitrogen flow is Ai-1It is then A in nitrogen flow after the completion of sccm depositioniSccm deposits 10~100min；Ai-Ai-1=B, B are
It 0~12, is preferably 2~12, further preferably 2~8 arbitrary integers；Obtain the surface be TiAl/ (Ti, Al) N multilayer every
The piston of the wear-resisting ultra high build coating of heat；The AiValue be 16~35, preferably 16~30.
Preferably, a kind of surface involved in scheme one is the piston of the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation
In the step of preparation method one, the dry piston base of surface cleaning is placed in Magnetically filtered vacuum arc deposition equipment, titanium
Aluminium alloy is arc source, is deposited using Magnetically filtered vacuum arc deposition；Control filtered cathodic vacuum arc is heavy before deposition
The pressure of vacuum chamber is 1.0~4.5 × 10 in product equipment-3Pa；When Magnetically filtered vacuum arc deposition, control striking current is 90
~110A, bend pipe magnetic field are 1.5~3.0A, straight tube magnetic field is 2.0~5.0A, beam intensity is 350~400mA, duty ratio is
65~95%；Sequence use -1000V, -900V, -800V, -700V, -600V, -500V, -400V, -300V, -200V are sunk
Product, 20~40s of each negative pressure spot deposition, in negative pressure -100V, deposit 10~30min, are cleaning after the completion of -200V deposition
One layer of TiAl transition zone is deposited on the surface of dry piston base；Or sequence use -1000V, -900V, -800V, -700V, -
600V, -500V, -400V, -300V are deposited, 20~40s of each negative pressure spot deposition, -300V deposition after the completion of, using
When negative pressure is -200V, 10~30minmin is deposited, one layer of TiAl transition is deposited on the surface of the dry piston base of cleaning
Layer.
In preferred embodiment, the obtained consistency of TiAl transition zone and the binding force of substrate is very outstanding.While its
And TiAlN layers of combination is also more outstanding.
The present invention, a kind of surface involved in scheme two are the piston of the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation,
Preparation method includes the following steps:
Step A
The dry piston base of surface cleaning is placed in Magnetically filtered vacuum arc deposition equipment, titanium-aluminium alloy is electric arc
Source is deposited using Magnetically filtered vacuum arc deposition；Vacuum in control Magnetically filtered vacuum arc deposition equipment before deposition
The pressure of room is 1.0~4.5 × 10-3Pa；When Magnetically filtered vacuum arc deposition, control striking current is 90~110A, bend pipe
Magnetic field is 1.5~3.0A, straight tube magnetic field is 2.0~5.0A, beam intensity is 350~400mA, duty ratio is 65~95%；-
1000V~-100V carries out 10~30min of deposition, and one layer of TiAl transition zone is deposited on the surface of the dry piston base of cleaning；
Step B
Reaction gas switch is opened, the titanium-aluminium alloy using purity more than or equal to 99% is more than or equal to as arc source with purity
99% nitrogen is reaction gas, and when Magnetically filtered vacuum arc deposition, control beam intensity is 100~150mA, duty ratio is
10~20%, nitrogen flow sequence uses A1sccm、A2sccm、……AiSccm deposition, each flow spot deposition 20~40s, In
Nitrogen flow is Ai-1It is then A in nitrogen flow after the completion of sccm depositioniSccm deposits 30~200min；Ai-Ai-1=B, B are
It 0~12, is preferably 2~12, further preferably 2~8 arbitrary integers；It obtains applying with TiAl/Ti-Al-N heat insulation and wear resistance super thick
The piston of layer；The AiValue be 16~35, preferably 16~30；
Step C
It is a circulation to complete step A, step B, to be applied obtained by step B with TiAl/Ti-Al-N heat insulation and wear resistance super thick
The piston of layer is deposition object, obtains the work with TiAl/ (Ti, Al) N heat insulation and wear resistance ultra high build coating for repetitive cycling p time
Plug；The p is more than or equal to 1, and p+1=n.The n is more than or equal to 2.
Preferably, a kind of surface involved in scheme two is the piston of the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation
In the step A of preparation method, the dry piston base of surface cleaning is placed in Magnetically filtered vacuum arc deposition equipment, titanium aluminium
Alloy is arc source, is deposited using Magnetically filtered vacuum arc deposition；Magnetically filtered vacuum arc deposition is controlled before deposition
The pressure of vacuum chamber is 1.0~4.5 × 10 in equipment-3Pa；When Magnetically filtered vacuum arc deposition, control striking current be 90~
110A, bend pipe magnetic field are 1.5~3.0A, straight tube magnetic field is 2.0~5.0A, beam intensity is 350~400mA, duty ratio 65
~95%；Sequence use -1000V, -900V, -800V, -700V, -600V, -500V, -400V, -300V, -200V are sunk
Product, 20~40s of each negative pressure spot deposition, in negative pressure -100V, deposit 10~30min, are cleaning after the completion of -200V deposition
One layer of TiAl transition zone is deposited on the surface of dry piston base；Or sequence use -1000V, -900V, -800V, -700V, -
600V, -500V, -400V, -300V are deposited, 20~40s of each negative pressure spot deposition, -300V deposition after the completion of, using
When negative pressure is -200V, 10~30min is deposited, one layer of TiAl transition zone is deposited on the surface of the dry piston base of cleaning.
In preferred embodiment, the obtained consistency of TiAl transition zone and the binding force of substrate is very outstanding.While its
And TiAlN layers of combination is also more outstanding.
In the present invention, the dry piston base of the surface cleaning is mechanically polished to have carried out surface, sand paper is polished,
Acetone, alcohol ultrasonic cleaning, drying and processing obtain the dry piston base surface of cleaning.Its surface roughness is 0.1-0.4 μm.
Preferably, a kind of surface is the preparation method of the piston of the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation,
Using Magnetically filtered vacuum arc deposition, being all made of FCVA, (Filtered Cathodic Vacuum Arc magnetic filtering cathode is true
Empty electric arc) system progress.The FCVA system includes FCVA vacuum coating system, certainly also includes that FCVA vacuum coating is continuously given birth to
Producing line.
A kind of surface of the present invention is the application of the piston of the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation, including is used for
Internal combustion engine.
Principle and advantage
The present invention obtains function admirable by the design of coating structure and the design of the preparation process to match with coating
Product.
All-aluminium piston surface designed by the present invention is the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation with following excellent
Point:
1, the present invention obtains a kind of novel work by depositing the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation in piston face
Plug promotes piston abrasion-proof, inoxidizability and thermal-shock resistance, effectively extends service life, can satisfy Modern Engine
At a high speed, the requirement of high effect and low emission.
2, inventive piston surface is the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation, by the side for introducing multilayer transition
Coating internal stress can be effectively relieved in method, effectively promote the binding force of coating and substrate, coating layer thickness is up to 3~50 μm.
3, the preparation process designed by the present invention compares other physical depositions and chemical deposition, magnetic filtering cathode vacuum
Arc deposition technique ionization level is high, up to 95% or more, greatly increases plasma density, by using magnetic filter, effectively
Reduce coating deposition when bulky grain attachment, the performances such as the compactness, uniformity, binding force of coating can be effectively improved.
4, the present invention designed by preparation process (the FCVA technology of use) have deposition speed come it is high, film adhesion is good,
The features such as film layer is fine and close, depositing temperature is low, can to plate material extensive, diffracted ray is good, pollution-free.Meanwhile using designed by the present invention
Technology, have Product Process parameter it is easy to control, the advantages such as piston performance stabilization, preparation efficiency height, make its engine aluminum conjunction
There is boundless application value in golden piston.
In conclusion a kind of surface designed by the present invention be the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation piston and
Preparation method can significantly improve the wearability, thermal-shock resistance and inoxidizability of piston, and effective percentage extends piston
Service life can satisfy, the requirement of Modern Engine high effect and low emission.
Its product is in use, have the advantage that
(1) piston-top surface is directly contacted with combustion chamber, by circulation high wind-warm syndrome in the course of work.If piston face
It is not acted on by surface peening, top land is easy to produce ablative degradation.Therefore, the present invention is using FCVA method in piston face
The wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation is deposited, piston face is strengthened, improves piston face hardness, wearability and heat resistanceheat resistant
Impact capacity.
(2) present invention deposits the wear-resisting super thick of (Ti, Al) N multilayer insulation on piston face (especially all-aluminium piston surface)
Coating, using FCVA deposition technique, compared with conventional deposition mode, the characteristics of such technology be equipment is simple, ionization level is high,
Coating uniformity is good, the binding force of coating and substrate is strong etc., and FCVA technology deposition rate is high, and it is heavy to can be realized large area
Product, is conducive to industrialized production.
(3) light alloy piston material (especially all-aluminium piston) and hard (Ti, Al) N coating are compared to thermal expansion system
Number, hardness and elasticity modulus differ greatly, thus the interface bond strength of two kinds of materials during the deposition process is lower, influences to apply
The combination of layer and piston base, while limiting the thickness of coating.The present invention changes in all-aluminium piston surface depositing Ti Al transition zone
It is apt to their adaptability, alleviates the difference of the performances such as internal stress and thermal expansion coefficient, enhance the bond strength between them.
(4) piston face deposits the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation, under high temperature environment (800 DEG C or less) work
Plug is inwardly formed one layer of densification Al from outmost surface2O3Oxide layer, the surface reforming layer of construction can dramatically increase the hardness of piston
And high-temperature oxidation resistance.
Detailed description of the invention
Fig. 1 is that all-aluminium piston surface designed by the present invention program two is the wear-resisting ultra high build coating knot of (Ti, Al) N multilayer insulation
Structure schematic diagram
Fig. 2 is (Ti, Al) N multilayer insulation that 2TiAl/TiAlN of embodiment of the present invention combination coating plated film time is 60min
Wear-resisting ultra high build coating section SEM figure；
Fig. 3 is (Ti, Al) N multilayer insulation that 2TiAl/TiAlN of embodiment of the present invention combination coating plated film time is 60min
Wear-resisting ultra high build coating section energy spectrum diagram；
Fig. 4 is (Ti, Al) N multilayer insulation that 2TiAl/TiAlN of embodiment of the present invention combination coating plated film time is 60min
Wear-resisting ultra high build coating friction and wear test figure；
Fig. 5 is (Ti, Al) N multilayer insulation that 2TiAl/TiAlN of embodiment of the present invention combination coating plated film time is 60min
Wear-resisting ultra high build coating fretting wear polishing scratch figure；
Fig. 6 is the wear-resisting ultra high build coating section SEM figure of the embodiment of the present invention 2 (Ti, Al) N multilayer insulation；
Fig. 7 is 3Ti of the embodiment of the present invention, Al) the wear-resisting ultra high build coating section energy spectrum diagram of N multilayer insulation；
Fig. 8 is the wear-resisting ultra high build coating rockwell indentation test chart of the embodiment of the present invention 3 (Ti, Al) N multilayer insulation；
The wear-resisting ultra high build coating rockwell indentation of (Ti, Al) N multilayer insulation that Fig. 9 is sample E in series embodiment 4 of the present invention is surveyed
Attempt；
Figure 10 is the wear-resisting ultra high build coating surface topography map of (Ti, Al) N multilayer insulation of 6 sample 3 of series embodiment of the present invention.
Specific embodiment:
It is described with reference to the drawings, the present invention is described in detail implements technical solution, it is clear that described embodiment is only portion of the present invention
Point embodiment, rather than whole embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art are not making wound
The property made labour premise every other embodiment obtained, shall fall within the protection scope of the present invention.
A kind of surface provided by the present invention is the preparation method of the piston of the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation,
Specific implementation step includes piston base processing and the plated film pre-treatment of FCVA system.
Piston base processing includes piston: surface is mechanically polished, sand paper is polished, the ultrasonic cleaning of acetone, alcohol, drying
Processing obtains the dry piston base surface of cleaning；
FCVA system plated film pre-treatment: vacuum chamber dust exhaust apparatus exhausts attachment remaining in vacuum chamber, and uses nothing
The dry piston base of the cleaning handled well is fixed on sample stage by water-ethanol and cotton wipe samples platform.Open FCVA system
Keeping chamber vacuum degree is 1.0~4.5 × 10-3Pa；
According to specific embodiment, preparation process and piston performance are further illustrated in conjunction with attached drawing
Series embodiment 1
Handling sample is 5；In the processing of each sample, in addition to step 2 nitrogen flow is different, other are completely the same.
Step 1:
Titanium-aluminium alloy using titanium alloy as arc source, preferably using purity more than or equal to 99% is arc source, using Magnetic filter
Cathode vacuum arc deposition technology before Magnetically filtered vacuum arc deposition, controls vacuum in Magnetically filtered vacuum arc deposition equipment
The pressure of room is 1.0~4.5 × 10-3Pa；When Magnetically filtered vacuum arc deposition, control striking current is 100A, bend pipe magnetic field
For 1.5A, straight tube magnetic field be 3.5A, adjusting duty ratio is 90%；Sequence use -1000V, -900V, -800V, -700V, -
600V, -500V, -400V, -300V, -200V are deposited, each negative pressure spot deposition 30s, after the completion of -200V deposition, negative
When pressure -100V, 20min is deposited；One layer of fine and close TiAl transition zone is obtained on the surface of the dry piston base of cleaning；
Step 2
Reaction gas switch is opened, the titanium-aluminium alloy using purity more than or equal to 99% is arc source, with purity for 99.99%
Nitrogen be reaction gas, when Magnetically filtered vacuum arc deposition, adjust duty ratio and be 20%, nitrogen flow is respectively adopted is
5sccm, 10sccm, 15sccm, 20sccm, 25sccm, 30sccm deposit 40min, and the surface for obtaining different ventilatory capacities is TiAl/
The piston of the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation.
(1) coating layer thickness is tested
By embodiment 1, it is the wear-resisting ultra high build coating of TiAl/ (Ti, Al) N multilayer insulation that surface, which is prepared, is used
Taylor Hobson precision roughness contourgraph testing coating thickness, control nitrogen flow are 5sccm (sample 1), 10sccm
(sample 2), 15sccm (sample 3), 20sccm (sample 4), 25sccm (sample 5) coating layer thickness be respectively 11.167 μm,
9.333μm、10.267μm、10.741μm、10.463μm。
(2) frictional property is tested
Using MS-T3000 friction and wear tester, PVvalue testing, load 50g, friction are carried out to coating surface
Radius is 3mm, and experiment revolving speed is 200r/m, testing time 60min.The result shows that nitrogen flow be 5sccm, 10sccm,
The average friction coefficient of TiAl/ (Ti, Al) N multilayer insulation wear-resistant coating of 15sccm, 20sccm, 25sccm is respectively 0.695,
0.4695,0.5198,0.4721,0.5331.The attainable value of average friction coefficient institute of sample 2,4 in series embodiment 1, greatly
At that time estimated is had exceeded greatly.
Embodiment 2
Step 1: the titanium-aluminium alloy using titanium alloy as arc source, preferably using purity more than or equal to 99% is used as arc source
Magnetically filtered vacuum arc deposition technology before Magnetically filtered vacuum arc deposition, controls Magnetically filtered vacuum arc deposition equipment
The pressure of middle vacuum chamber is 1.0~4.5 × 10-3Pa；When Magnetically filtered vacuum arc deposition, control striking current is 100A, curved
It is 90% that pipe magnetic field, which is 1.5A, straight tube magnetic field is 3.5A, adjusts duty ratio；Sequence use -1000V, -900V, -800V, -
700V, -600V, -500V, -400V, -300V, -200V are deposited, each negative pressure spot deposition 30s, are deposited and are completed in -200V
Afterwards, in negative pressure -100V, 20min is deposited；One layer of fine and close TiAl transition is obtained on the surface of the dry piston base of cleaning
Layer；
Step 2: opening reaction gas switch, using titanium alloy as arc source, the titanium-aluminium alloy with purity more than or equal to 99%
For arc source, the nitrogen for being 99.99% using purity is reaction gas, and when Magnetically filtered vacuum arc deposition, adjusting duty ratio is
20%, nitrogen flow sequence uses 4sccm, 8sccm, 12sccm, 16sccm to deposit, each flow spot deposition 30s, then in nitrogen
Throughput is that 20sccm deposits 40min；Obtain the piston that surface is the wear-resisting ultra high build coating of TiAl/ (Ti, Al) N multilayer insulation.
(1) coating layer thickness is tested
By embodiment 2, it is the wear-resisting ultra high build coating of TiAl/ (Ti, Al) N multilayer insulation that surface, which is prepared, is used
It is 10.521 μm that Taylor Hobson precision roughness contourgraph, which tests film thickness,.Made using magnetic filtering cathode vacuum arc technology
The thickness for obtaining coating reaches 10.521 μm, so that piston base and high-temperature fuel gas completely cut off, can effectively improve the clothes of piston face
Use as a servant the performance of improvement of terms piston face.
(2) tissue topography is observed
The Cross Section Morphology (as shown in Figure 2) of coating is observed by scanning electron microscope and energy disperse spectroscopy carries out energy spectrum analysis
(as shown in Figure 3) finds the structure base that coating dense uniform of the invention is well combined with substrate, with design for Cross Section Morphology
Originally it is consistent.For tri- kinds of elements of Ti, Al, N known to energy spectrum analysis as the increase constituent content of the thickness of film layer increases, Al element
Fine and close Al is generated because that can react with the oxygen in high-temperature fuel gas2O3Ingredient prevents oxygen inner layer substrate from spreading while gathering around
There is good heat-proof quality, hence it is evident that promote the performance of piston.
(3) frictional property is tested
Using MS-T3000 friction and wear tester, PVvalue testing, load 50g, friction are carried out to coating surface
Radius is 3mm, and experiment revolving speed is 200r/m, testing time 60min.The result shows that TiAl/ (Ti, Al) N multilayer insulation is wear-resisting
The average friction coefficient of ultra high build coating is 0.4734.(as shown in Figure 4) shows through Zeiss microscope and energy disperse spectroscopy, (such as Fig. 5 institute
Show) by the way that the polishing scratch analysis after fretting wear, it is found that coating of the present invention is changed with adhesive wear to abrasive wear, coating is with height
Based on hardness TiAlN phase, higher coefficient of friction and good antiwear property are shown.
(4) coating binding force is tested
Surface of the present invention is the wear-resisting ultra high build coating of TiAl/ (Ti, Al) N multilayer insulation, by Rockwell apparatus in coating table
Face generates Luo Keng, (as shown in Figure 6).According to the situation analysis of the periphery Luo Keng.As a result surface, the less binding force of coating shedding meet
HF2 grade, meets industrial requirements.
Embodiment 3
Step 1: the titanium-aluminium alloy using purity more than or equal to 99% is arc source, using Magnetically filtered vacuum arc deposition
Technology, before Magnetically filtered vacuum arc deposition, the pressure for controlling vacuum chamber in Magnetically filtered vacuum arc deposition equipment is 1.0~
4.5×10-3Pa；When Magnetically filtered vacuum arc deposition, control striking current is 100A, bend pipe magnetic field is 1.5A, straight tube magnetic field
It is 90% for 3.5A, adjusting duty ratio；Sequence use -1000V, -900V, -800V, -700V, -600V, -500V, -400V, -
300V, -200V are deposited, each negative pressure spot deposition 30s, after the completion of -200V deposition, in negative pressure -100V, and deposition
15min；One layer of fine and close TiAl transition zone is obtained on the surface of the dry piston base of cleaning；
Step 2: opening reaction gas switch, using titanium alloy as arc source, the titanium-aluminium alloy with purity more than or equal to 99%
For arc source, the nitrogen for being 99.99% using purity is reaction gas, and when Magnetically filtered vacuum arc deposition, adjusting duty ratio is
20%, nitrogen flow sequence uses each flow spot deposition 15min of 5sccm, 10sccm, 15sccm, is then in nitrogen flow
20sccm deposits 100min；Obtain the piston that surface is the wear-resisting ultra high build coating of TiAl/ (Ti, Al) N multilayer insulation.
(1) coating layer thickness is tested
It is the wear-resisting ultra high build coating of TiAl/ (Ti, Al) N multilayer insulation that surface, which is prepared, by embodiment one, is used
It is 21.523 μm that Taylor Hobson precision roughness contourgraph, which tests film thickness,.Thickness is single TiAl/ (Ti, Al) N composite structure
1.9 times of coating, greatly improve the interval of piston base and high-temperature fuel gas, so that piston base and high-temperature fuel gas completely cut off, have
The service condition of the improvement piston face of effect improves the performance of piston face.
(2) tissue topography is observed
The Cross Section Morphology (as shown in Figure 7) of coating is observed by scanning electron microscope and energy disperse spectroscopy carries out energy spectrum analysis
(as shown in Figure 8) finds the structure base that coating dense uniform of the invention is well combined with substrate, with design for Cross Section Morphology
Originally it is consistent.For tri- kinds of elements of Ti, Al, N known to energy spectrum analysis as the increase constituent content of the thickness of film layer increases, Al element
Fine and close Al is generated because that can react with the oxygen in high-temperature fuel gas2O3Ingredient prevents oxygen inner layer substrate from spreading while gathering around
There is good heat-proof quality, hence it is evident that promote the performance of piston.Compared with Example 1, the thickness of coating promotes nearly 2 times, in coating
It reacts after being contacted with high-temperature fuel gas and generates fine and close Al2O3The thickness of ingredient promotes nearly 2 times, greatly promotes the surface of piston
Heat-proof quality.
(3) frictional property is tested
Using MS-T3000 friction and wear tester, PVvalue testing, load 50g, friction are carried out to coating surface
Radius is 3mm, and experiment revolving speed is 200r/m, testing time 60min.The result shows that TiAl/ (Ti, Al) N multilayer insulation is wear-resisting
The average friction coefficient of ultra high build coating is 0.4903.
Series embodiment 4
Handling sample is 5；In the processing of each sample, in addition to the pressure of reaction chamber is different, other are completely the same.
Step 1:
Titanium-aluminium alloy using titanium alloy as arc source, preferably using purity more than or equal to 99% is arc source, using Magnetic filter
Cathode vacuum arc deposition technology before Magnetically filtered vacuum arc deposition, controls vacuum in Magnetically filtered vacuum arc deposition equipment
The pressure of room is 1.0~4.5 × 10-3Pa；When Magnetically filtered vacuum arc deposition, control striking current is 100A, bend pipe magnetic field
For 1.5A, straight tube magnetic field be 3.5A, adjusting duty ratio is 90%；Sequence use -1000V, -900V, -800V, -700V, -
600V, -500V, -400V, -300V, -200V are deposited, each negative pressure spot deposition 30s, after the completion of -200V deposition, negative
When pressure -100V, 10min is deposited；The first fine and close TiAl transition zone is obtained on the surface of the dry piston base of cleaning；
Step 2
Reaction gas switch is opened, the titanium-aluminium alloy using purity more than or equal to 99% is arc source, with purity for 99.99%
Nitrogen be reaction gas, when Magnetically filtered vacuum arc deposition, adjusting duty ratio is 20%, by adjusting the ventilatory capacity of nitrogen
The pressure for controlling reaction chamber is respectively 4.0 × 10-2Pa (sample A), 5.0 × 10-2Pa (sample B), 6.0 × 10-2Pa (sample
C)、7.0×10-2Pa (sample D), 8.0 × 10-2Pa (sample E) deposition 20min obtains the first TiAlN coating；
Step 3
Reaction gas switch is closed, arc power switch is closed, to chamber inner pressure good general to 1.0~4.5 × 10-3Pa, control
It is 90% that striking current, which is 100A, bend pipe magnetic field is 1.5A, straight tube magnetic field is 3.5A, adjusts duty ratio；Sequence use -600V, -
500V, -400V, -300V, -200V are deposited, each negative pressure spot deposition 30s, after the completion of -200V deposition, in negative pressure -
When 100V, 10min is deposited；The 2nd fine and close TiAl transition zone is obtained on the surface of the dry piston base of cleaning；
Step 4
Reaction gas switch is opened, the titanium-aluminium alloy using purity more than or equal to 99% is arc source, with purity for 99.99%
Nitrogen be reaction gas, when Magnetically filtered vacuum arc deposition, adjusting duty ratio is 20%, by adjusting the ventilatory capacity of nitrogen
The pressure for controlling reaction chamber is respectively 4.0 × 10-2Pa (sample A), 5.0 × 10-2Pa (sample B), 6.0 × 10-2Pa (sample
C)、7.0×10-2Pa (sample D), 8.0 × 10-2Pa (sample E) deposition 20min obtains the 2nd TiAlN coating；It obtains different logical
The surface of tolerance is the piston of the wear-resisting ultra high build coating of TiAl/ (Ti, Al) N multilayer insulation.
(1) coating layer thickness is tested
By embodiment 4, it is the wear-resisting ultra high build coating of TiAl/ (Ti, Al) N multilayer insulation that surface, which is prepared, is used
Taylor Hobson precision roughness contourgraph tests film thickness, and it is respectively 4.0 that control nitrogen flow, which keeps the pressure of reaction chamber,
×10-2Pa (sample A), 5.0 × 10-2Pa (sample B), 6.0 × 10-2Pa (sample C), 7.0 × 10-2Pa (sample D), 8.0 ×
10-2The coating layer thickness of Pa (sample E) is respectively 5.446 μm, 5.221 μm, 5.574 μm, 4.975 μm, 5.031 μm.
(2) Coating Surface Roughness is tested
It is the wear-resisting ultra high build coating of TiAl/ (Ti, Al) N multilayer insulation that surface, which is prepared, by embodiment two, is used
Taylor Hobson precision roughness contourgraph tests film thickness, and it is respectively 4.0 that control nitrogen flow, which keeps the pressure of reaction chamber,
×10-2Pa (sample A), 5.0 × 10-2Pa (sample B), 6.0 × 10-2Pa (sample C), 7.0 × 10-2Pa (sample D), 8.0 ×
10-2The Coating Surface Roughness of Pa (sample E) is respectively 0.7752 μm, 0.6499 μm, 0.5351 μm, 0.4533 μm, 0.3862 μ
m。
(3) coating binding force is tested
Surface of the present invention is the wear-resisting ultra high build coating of TiAl/ (Ti, Al) N multilayer insulation, by Rockwell apparatus in coating table
Face generates Luo Keng, (sample E) as shown in Figure 9.According to the situation analysis of the periphery Luo Keng, the results showed that, Lip river pit edge coating is basic
The binding force that do not fall off meets HF1 grade, meets industrial requirements.
Series embodiment 5
The sample used in series embodiment 5 has 3, other operations are completely the same, the difference is that being respectively adopted
When negative pressure is -50V, -75V, -100V, 20min is deposited, TiAl/ (Ti, Al) N coating under different biass is prepared.
Step 1:
Titanium-aluminium alloy using titanium alloy as arc source, preferably using purity more than or equal to 99% is arc source, using Magnetic filter
Cathode vacuum arc deposition technology before Magnetically filtered vacuum arc deposition, controls vacuum in Magnetically filtered vacuum arc deposition equipment
The pressure of room is 1.0~4.5 × 10-3Pa；When Magnetically filtered vacuum arc deposition, control striking current is 100A, bend pipe magnetic field
For 1.5A, straight tube magnetic field be 3.5A, adjusting duty ratio is 90%；Sequence use -1000V, -900V, -800V, -700V, -
600V, -500V, -400V, -300V, -200V are deposited, each negative pressure spot deposition 30s, after the completion of -200V deposition, respectively
It uses and deposits 10min in negative pressure for -50V (sample A), -75V (sample B), -100V (sample C)；In the piston base that cleaning is dry
The surface at bottom obtains the first TiAl transition zone of densification of three kinds of different biass；
Step 2
Reaction gas switch is opened, the titanium-aluminium alloy using purity more than or equal to 99% is arc source, with purity for 99.99%
Nitrogen be reaction gas, when Magnetically filtered vacuum arc deposition, adjusting duty ratio is 20%, and being respectively adopted in negative pressure is -50V
(sample A), -75V (sample B), -100V (sample C), the pressure by adjusting the ventilatory capacity control reaction chamber of nitrogen is 7.0
×10-2Pa deposition 20min obtains the first TiAlN coating；
Step 3
Reaction gas switch is closed, arc power switch is closed, to chamber inner pressure good general to 1.0~4.5 × 10-3Pa, control
It is 90% that striking current, which is 100A, bend pipe magnetic field is 1.5A, straight tube magnetic field is 3.5A, adjusts duty ratio；Sequence use -600V, -
500V, -400V, -300V, -200V are deposited, each negative pressure spot deposition 30s, after the completion of -200V deposition, are respectively adopted
When negative pressure is -50V (sample A), -75V (sample B), -100V (sample C), 10min is deposited；In the dry piston base of cleaning
Surface obtains the 2nd fine and close TiAl transition zone；
Step 4
Reaction gas switch is opened, the titanium-aluminium alloy using purity more than or equal to 99% is arc source, with purity for 99.99%
Nitrogen be reaction gas, when Magnetically filtered vacuum arc deposition, adjusting duty ratio is 20%, and being respectively adopted in negative pressure is -50V
(sample A), -75V (sample B), -100V (sample C), by adjusting nitrogen ventilatory capacity control reaction chamber pressure 7.0 ×
10-2Pa (sample D) deposition 20min obtains the 2nd TiAlN coating；The surface for obtaining different bias conditions is TiAl/ (Ti, Al) N
The piston of the wear-resisting ultra high build coating of multilayer insulation.
(1) coating layer thickness is tested
By embodiment 5, it is the wear-resisting ultra high build coating of TiAl/ (Ti, Al) N multilayer insulation that surface, which is prepared, is used
Taylor Hobson precision roughness contourgraph test film thickness, control nitrogen flow keep reaction chamber pressure be 7.0 ×
10-2Pa, back bias voltage is -50V (sample A), the coating layer thickness of -75V (sample B), -100V (sample C) are respectively, 5.101 μm,
4.896μm、4.960μm。
(2) Coating Surface Roughness is tested
Film thickness is tested using Taylor Hobson precision roughness contourgraph, back bias voltage is -50V (sample A), -75V (sample
Product B), the Coating Surface Roughness of -100V (sample C) be respectively 0.4941 μm, 0.4106 μm, 0.4533 μm.
Series embodiment 6
The sample used in series embodiment 6 has 3, other operations are completely the same, the difference is that the first TiAl mistake
Crossing a layer preparation time is respectively 10min (sample 1), 20min (sample 2), 30min (sample 3).Obtain different first TiAl transition
TiAl/ (Ti, Al) N coating of thickness degree.
Step 1:
Titanium-aluminium alloy using titanium alloy as arc source, preferably using purity more than or equal to 99% is arc source, using Magnetic filter
Cathode vacuum arc deposition technology before Magnetically filtered vacuum arc deposition, controls vacuum in Magnetically filtered vacuum arc deposition equipment
The pressure of room is 1.0~4.5 × 10-3Pa；When Magnetically filtered vacuum arc deposition, control striking current is 100A, bend pipe magnetic field
For 1.5A, straight tube magnetic field be 3.5A, adjusting duty ratio is 90%；Sequence use -1000V, -900V, -800V, -700V, -
600V, -500V, -400V, -300V, -200V, -100V are deposited, each negative pressure spot deposition 30s, are deposited and are completed in -100V
Afterwards, in negative pressure -50V, 10min (sample 1), 20min (sample 2), 30min (sample 3) are deposited；In the piston base that cleaning is dry
The surface at bottom obtains the first TiAl transition zone of three kinds of different-thickness densifications；
Step 2
Reaction gas switch is opened, the titanium-aluminium alloy using purity more than or equal to 99% is arc source, with purity for 99.99%
Nitrogen be reaction gas, when Magnetically filtered vacuum arc deposition, adjusting duty ratio is 20%, negative pressure -50V.By adjusting nitrogen
The pressure of the ventilatory capacity control reaction chamber of gas is 7.0 × 10-2Pa deposition 20min obtains the first TiAlN coating；
Step 3
Reaction gas switch is closed, arc source switch is closed, to chamber inner pressure good general to 1.0~4.5 × 10-3Pa is controlled
It is 90% that arc current, which is 100A, bend pipe magnetic field is 1.5A, straight tube magnetic field is 3.5A, adjusts duty ratio；Sequence use -600V, -
500V, -400V, -300V, -200V, -100V are deposited, each negative pressure spot deposition 30s, after the completion of -100V deposition, are born
10min is deposited when pressure -50V, obtains the 2nd fine and close TiAl transition zone；
Step 4
Reaction gas switch is opened, the titanium-aluminium alloy using purity more than or equal to 99% is arc source, with purity for 99.99%
Nitrogen be reaction gas, when Magnetically filtered vacuum arc deposition, adjusting duty ratio is 20%, negative pressure -50V, by adjusting nitrogen
The pressure 7.0 × 10 of the ventilatory capacity control reaction chamber of gas-2Pa (sample D) deposition 20min obtains the 2nd TiAlN coating；It obtains
The surface of different bias conditions is the piston of the wear-resisting ultra high build coating of TiAl/ (Ti, Al) N multilayer insulation.
(1) coating layer thickness is tested
By embodiment 6, it is the wear-resisting ultra high build coating of TiAl/ (Ti, Al) N multilayer insulation that surface, which is prepared, is used
Taylor Hobson precision roughness contourgraph test film thickness, control nitrogen flow keep reaction chamber pressure be 7.0 ×
10-2Pa, the first TiAl coating preparation time are the coating layer thickness of 10min (sample 1), 20min (sample 2), 30min (sample 3)
Respectively, 4.711 μm, 4.696 μm, 4.806 μm.
(2) Coating Surface Roughness is tested
By embodiment 6, it is the wear-resisting ultra high build coating of TiAl/ (Ti, Al) N multilayer insulation that surface, which is prepared, and surface is smooth
Smooth (sample 3 is as shown in Figure 10) tests film thickness, the first TiAl coating system using Taylor Hobson precision roughness contourgraph
The standby time is 10min (sample 1), the Coating Surface Roughness of 20min (sample 2), 30min (sample 3) are respectively 0.1676 μm,
0.1651μm、0.1643μm。
Claims (6)
1. a kind of surface be the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation piston, it is characterised in that: the surface be (Ti,
Al) piston of the wear-resisting ultra high build coating of N multilayer insulation includes following two schemes:
Scheme one
The piston includes piston base, TiAl transition zone, TiAlN coating, and the TiAl transition zone is uniformly wrapped on piston base
On bottom；The TiAlN coating is uniformly wrapped on TiAl transition zone；In scheme one, the content of N is in ladder in the TiAlN coating
Degree or linear change；Along TiAlN thickness of coating direction, defines TiAlN coating and the direct contact layer of TiAl transition zone is 1-
TiAlN layers, with 1-TiAlN layer direct TiAlN layers be 2-TiAlN layers, so analogize, definition TiAlN coating in from
The TiAlN layer of TiAl transition zone maximum distance apart is the i-th-TiAlN layers, and the i is more than or equal to 2；The 1-TiAlN layers of N's
Atomic percentage content less than 2-TiAlN layers in N atomic percentage content；When i is greater than 2, the atom of N in the i-th-TiAlN layers
Percentage composition is greater than the atomic percentage content of N in TiAlN layers of (i-1)；
In scheme one, TiAl transition zone with a thickness of 0.001~10 μm；The overall thickness of TiAlN coating is 1.0~20 μm；Coating
Overall thickness is 3~30 μm；
In scheme one, in TiAl transition zone, the atomic percentage content of Ti is 10-50%；
Described in scheme one in 1-TiAlN layers, the atomic percentage content of N is 0.0001-20%；In 1-TiAlN layers, Ti's
Atomic percentage content is 20-40%；
Described in scheme one in i-th-TiAlN layers, the atomic percentage content of N is up to 50%；In i-th-TiAlN layers, the original of Ti
Sub- percentage composition is up to 40%；
Scheme two
The piston includes piston base, the first TiAl transition zone, the first TiAlN coating, the 2nd TiAl transition zone, second
TiAlN coating；The first TiAl transition zone is evenly coated in piston base, and the first TiAlN coating is uniformly wrapped on
On first TiAl transition zone, the 2nd TiAl transition zone is uniformly wrapped on the first TiAlN coating, the 2nd TiAlN plating
Layer is uniformly wrapped on the 2nd TiAl transition zone；
In first TiAl transition zone described in scheme two, the atomic percentage content of Ti is 10-50%, the first TiAl transition
Layer with a thickness of 0.001~5 μm；
In first TiAlN coating described in scheme two, the atomic percentage content of N is 10-40%；The atomic percentage content of Ti is
10-50%；First TiAlN coating with a thickness of 1-5 μm；
In 2nd TiAl transition zone described in scheme two, the atomic percentage content of Ti is 10-50%；The 2nd TiAl transition
Layer with a thickness of 0.001~5 μm；
In 2nd TiAlN coating described in scheme two, the atomic percentage content of N is 10-40%；The atomic percentage content of Ti is
10-50%；2nd TiAlN coating with a thickness of 1-5 μm；
The piston base is all-aluminium piston substrate.
2. a kind of surface according to claim 1 is the piston of the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation, feature
It is: in scheme two, (Ti, Al) N multilayer described in n times composition is recycled in the way of one layer of TiAl transition zone/mono- layer TiAlN coating
Heat insulation and wear resistance ultra high build coating；The n is more than or equal to 2；
When the n is more than or equal to 2, any one layer of TiAl transition zone with a thickness of 0.001~5 μm；Any one layer of TiAlN coating
With a thickness of 1-5 μm；The overall thickness of coating is 3~50 μm.
3. a kind of surface prepared as described in claim 1-2 any one is that the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation is living
The method of plug, it is characterised in that:
Surface designed by scheme one is the wear-resisting ultra high build coating piston of (Ti, Al) N multilayer insulation, and preparation method includes following steps
It is rapid:
Step 1
The dry piston base of surface cleaning is placed in Magnetically filtered vacuum arc deposition equipment, titanium-aluminium alloy is arc source,
It is deposited using Magnetically filtered vacuum arc deposition；Vacuum chamber in control Magnetically filtered vacuum arc deposition equipment before deposition
Pressure is 1.0~4.5 × 10-3Pa；When Magnetically filtered vacuum arc deposition, control striking current is 90~110A, bend pipe magnetic field
For 1.5~3.0A, straight tube magnetic field be 2.0~5.0A, beam intensity is 350~400mA, duty ratio is 65~95%；-
1000V~-100V is deposited, and one layer of TiAl transition zone is deposited on the surface of the dry piston base of cleaning；
Step 2
Reaction gas switch is opened, the titanium-aluminium alloy using purity more than or equal to 99% is more than or equal to 99% as arc source, with purity
Nitrogen be reaction gas, when Magnetically filtered vacuum arc deposition, control beam intensity is 100~150mA, duty ratio be 10~
20%, nitrogen flow sequence uses A1sccm、A2sccm、……AiSccm deposition, 20~40s of each flow spot deposition, in nitrogen
Flow is Ai-1It is then A in nitrogen flow after the completion of sccm depositioniSccm deposits 30~200min；Ai-Ai-1=B, B be 0~
12；Obtain the piston that the surface is the wear-resisting ultra high build coating of TiAl/ (Ti, Al) N multilayer insulation；The AiValue be 16~
35；
Surface designed by scheme two is the wear-resisting ultra high build coating piston of (Ti, Al) N multilayer insulation, and preparation method includes following steps
It is rapid:
Step A
The dry piston base of surface cleaning is placed in Magnetically filtered vacuum arc deposition equipment, titanium-aluminium alloy is arc source,
It is deposited using Magnetically filtered vacuum arc deposition；Vacuum chamber in control Magnetically filtered vacuum arc deposition equipment before deposition
Pressure is 1.0~4.5 × 10-3Pa；When Magnetically filtered vacuum arc deposition, control striking current is 90~110A, bend pipe magnetic field
For 1.5~3.0A, straight tube magnetic field be 2.0~5.0A, beam intensity is 350~400mA, duty ratio is 65~95%；-
1000V~-100V is deposited, and one layer of TiAl transition zone is deposited on the surface of the dry piston base of cleaning；
Step B
Reaction gas switch is opened, the titanium-aluminium alloy using purity more than or equal to 99% is more than or equal to 99% as arc source, with purity
Nitrogen be reaction gas, when Magnetically filtered vacuum arc deposition, control beam intensity is 100~150mA, duty ratio be 10~
20%, nitrogen flow sequence uses A1sccm、A2sccm、……AiSccm deposition, 20~40s of each flow spot deposition, in nitrogen
Flow is Ai-1It is then A in nitrogen flow after the completion of sccm depositioniSccm deposits 10~100min；Ai-Ai-1=B, B be 0~
12；Obtain the piston with TiAl/Ti-Al-N heat insulation and wear resistance ultra high build coating；The AiValue be 16~35；
Step C
It is a circulation to complete step A, step B, to have TiAl/Ti-Al-N heat insulation and wear resistance ultra high build coating obtained by step B
Piston is deposition object, obtains the piston for having TiAl/ (Ti, Al) N heat insulation and wear resistance ultra high build coating repetitive cycling p times；Institute
P is stated more than or equal to 1, and p+1=n；The n is more than or equal to 2.
4. its preparation that a kind of surface according to claim 3 is the piston of the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation
Method, it is characterised in that:
In step 1, the dry piston base of surface cleaning is placed in Magnetically filtered vacuum arc deposition equipment, titanium-aluminium alloy
For arc source, deposited using Magnetically filtered vacuum arc deposition；Magnetically filtered vacuum arc deposition equipment is controlled before deposition
The pressure of middle vacuum chamber is 1.0~4.5 × 10-3Pa；When Magnetically filtered vacuum arc deposition, control striking current be 90~
110A, bend pipe magnetic field are 1.5~3.0A, straight tube magnetic field is 2.0~5.0A, beam intensity is 350~400mA, duty ratio 65
~95%；Sequence use -1000V, -900V, -800V, -700V, -600V, -500V, -400V, -300V, -200V are sunk
Product, 20~40s of each negative pressure spot deposition, in negative pressure -100V, deposit 10~30min, are cleaning after the completion of -200V deposition
One layer of TiAl transition zone is deposited on the surface of dry piston base；Or；Sequence use -1000V, -900V, -800V, -
700V, -600V, -500V, -400V, -300V are deposited, 20~40s of each negative pressure spot deposition, after the completion of -300V deposition,
It uses when negative pressure is -200V, deposits 10~30min, one layer of TiAl mistake is deposited on the surface of the dry piston base of cleaning
Cross layer；
In step A, the dry piston base of surface cleaning is placed in Magnetically filtered vacuum arc deposition equipment, titanium-aluminium alloy is
Arc source is deposited using Magnetically filtered vacuum arc deposition；Before deposition in control Magnetically filtered vacuum arc deposition equipment
The pressure of vacuum chamber is 1.0~4.5 × 10-3Pa；When Magnetically filtered vacuum arc deposition, control striking current be 90~110A,
Bend pipe magnetic field is 1.5~3.0A, straight tube magnetic field is 2.0~5.0A, beam intensity is 350~400mA, duty ratio be 65~
95%；Sequence use -1000V, -900V, -800V, -700V, -600V, -500V, -400V, -300V, -200V are deposited,
20~40s of each negative pressure spot deposition, in negative pressure -100V, deposits 10~30min after the completion of -200V deposition, dry in cleaning
One layer of TiAl transition zone is deposited on the surface of dry piston base；Or sequence use -1000V, -900V, -800V, -700V, -
600V, -500V, -400V, -300V are deposited, 20~40s of each negative pressure spot deposition, -300V deposition after the completion of, using
When negative pressure is -200V, 10~30min is deposited, one layer of TiAl transition zone is deposited on the surface of the dry piston base of cleaning.
5. its preparation that a kind of surface according to claim 4 is the piston of the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation
Method, it is characterised in that: the surface roughness of the dry piston base of surface cleaning is 0.1~0.4 μm.
6. the piston that a kind of surface as described in claim 1-2 any one is the wear-resisting ultra high build coating of (Ti, Al) N multilayer insulation
Using, including it is used for internal combustion engine.
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| CN108877975B (en) * | 2018-07-11 | 2022-03-22 | 湘潭大学 | Neutron shielding protective material |
| CN108728804B (en) * | 2018-09-11 | 2020-06-02 | 湘潭大学 | CrAlN thermal insulation coating for aluminum alloy piston combustion chamber surface and preparation method thereof |
| CN110117773B (en) * | 2019-04-09 | 2021-04-02 | 河南科技学院 | High-temperature cyclic oxidation resistant thick Ti/TiAlYN multilayer coating and preparation method thereof |
| CN113250848B (en) * | 2021-06-29 | 2022-08-23 | 潍柴动力股份有限公司 | Piston and method for manufacturing same |
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| JP2000169951A (en) * | 1998-12-02 | 2000-06-20 | Nippon Piston Ring Co Ltd | Formation of double layer thermally sprayed coating on sliding member |
| KR20130095390A (en) * | 2012-02-20 | 2013-08-28 | 현대자동차주식회사 | Piston ring having multilayer |
| CN103225064A (en) * | 2012-10-22 | 2013-07-31 | 安庆帝伯格茨活塞环有限公司 | Preparation method of diamond-like coating piston ring |
| CN104838182B (en) * | 2012-12-07 | 2017-08-11 | 株式会社理研 | Piston ring |
| CN103469154B (en) * | 2013-09-05 | 2016-01-20 | 江西稀有稀土金属钨业集团有限公司 | A kind of TiAlN compound coating and be provided with the preparation method of cutter of this coating |
| CN105779941B (en) * | 2015-12-23 | 2018-10-26 | 北京师范大学 | A kind of method and apparatus depositing superhard super thick DLC film layer on aircraft blade based on ion beam technology |
| CN106978593B (en) * | 2017-03-31 | 2019-03-22 | 湘潭大学 | A kind of top surface is the piston and its preparation method and application of titanium doped diamond-like multilayer insulation thick film |
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