CN208140907U - A kind of Ke Er microscope for complicated magnetic domain research - Google Patents
A kind of Ke Er microscope for complicated magnetic domain research Download PDFInfo
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- CN208140907U CN208140907U CN201820674658.4U CN201820674658U CN208140907U CN 208140907 U CN208140907 U CN 208140907U CN 201820674658 U CN201820674658 U CN 201820674658U CN 208140907 U CN208140907 U CN 208140907U
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Abstract
The utility model relates to material surface Magnetic Measurement fields, a kind of Ke Er microscope for complicated magnetic domain research, including light source, polarizer, dichroscope I, aspherical mirror I, field stop, aspherical mirror II, half-mirror, object lens, sample, sample stage, magnet, compensator, analyzer, dichroscope II, aspherical mirror III, photodetector I, aspherical mirror IV, photodetector II, by adjusting dichroscope I, aspherical mirror I, the position of field stop and aspherical mirror II, light source output end is enabled to image in the back focussing plane of object lens；Polarizer is made of polarizer I, polarizer II, polarizer III and the polarizer IV of four independent across arrangements；Using double-colored LED light array as light source, and using the imaging optical path of two different wave lengths, the domain pattern of different magnetization vector ingredients can be obtained simultaneously, can be used in studying the complicated Magnetization Transitions in magnetic film structure, without complicated calibration process.
Description
Technical field
The utility model relates to material surface Magnetic Measurement field, a kind of especially a kind of use using special light sources structure
In the Ke Er microscope of complicated magnetic domain research.
Background technique
Kerr magnetooptical effect measuring device is one of material surface magnetism research important means, its working principle is that base
Kerr magnetooptical effect caused by interaction, can not only carry out monoatomic layer thickness material between Yu Youguang and magnetized medium
Magnetic detection, and can realize non-contact measurement, the magnetic order of magnetic ultrathin film, magnetic anisotropy, layer coupling and
There is important application in the research of the transformation behavior of magnetic ultrathin film etc..Ke Er microscope is a kind of common device,
Working principle is：After linearly polarized light and the interaction of nontransparent magnetic media surface, is produced from the plane of polarization of reflected light
Rotation clockwise or counterclockwise is given birth to, direction of rotation is related with the direction of magnetization of medium, and the ellipse in usual reflected light is partially
Vibration is superposition, and for reflected light after the analyzer in reflected light path, kerr rotation is changed into magnetic domain contrast, to obtain sample
The magnetization characteristic of the magnetic domain of product surface different zones.Prior art defect one：The prior art can only obtain statistics magnetizing pattern, i.e.,
Identical distribution of magnetization must obtain under different image-forming conditions, and the list of individually stable domain structure can only be obtained with this
A polar plot, in addition, vector magnetic domain imaging method in the prior art needs longer time of measuring；Prior art defect two：
Single wavelength light source is used in the prior art, needs complicated calibration process before testing, and described one kind is ground for complicated magnetic domain
The Ke Er microscopes studied carefully solve the problems, such as.
Utility model content
To solve the above-mentioned problems, the utility model is come using double-colored LED light array as light source without diaphragm slit
Change the illuminated area on sample, and use two imaging optical paths, difference can be obtained on the basis of not changing apparatus structure
The domain pattern of magnetization vector ingredient can directly obtain the image of magnetization vector in real time, magnetic particularly suitable for research
Complicated Magnetization Transitions in membrane structure.In addition, utility model device is without complicated calibration process.
Technical solution used by the utility model is：
A kind of Ke Er microscope for complicated magnetic domain research mainly includes light source, polarizer, dichroscope I, non-
Spherical mirror I, field stop, aspherical mirror II, half-mirror, object lens, sample, sample stage, magnet, compensator, analyzer,
Dichroscope II, aspherical mirror III, photodetector I, aspherical mirror IV, photodetector II, the light source, polarizer, two
Illumination path is successively formed to Look mirror I, aspherical mirror I, field stop, aspherical mirror II, half-mirror, object lens, it is described
Object lens, half-mirror, compensator, analyzer, dichroscope II, aspherical mirror III and aspherical mirror IV form imaging
Road, sample are located on sample stage, and the sample, sample stage are located at below object lens, and the magnet is made of anode and cathode, sample
Platform has central axis, and sample stage can rotate in the horizontal plane around central axis, and the anode and cathode of the magnet are relative to sample
Platform is substantially symmetrical about its central axis, and the light that light source issues successively passes through polarizer, dichroscope I, aspherical mirror I, field stop, aspherical mirror
II is changed into linear polarization by half-mirror and retrodeviates to object lens are entered, and converges to sample surfaces, reflected by sample surfaces,
The light source is made of the rectangle LED light that four across arrange, and four LED light are lamp I, lamp II, lamp III and lamp
The light that IV, lamp I are issued is light beam I, and the light that lamp II is issued is light beam II, and the light that lamp III is issued is light beam III, what lamp IV was issued
Light is light beam IV, and light beam I and light beam IV wavelength are 500 nanometers, and light beam II and light beam III wavelength are 650 nanometers, each
LED light is located at the output end of light source, and each LED light output power is 200 milliwatts, by adjusting dichroscope I, aspherical mirror
I, the position of field stop and aspherical mirror II enables to the output end of light source to image in the back focussing plane of object lens；It is described
Polarizer is made of polarizer I, polarizer II, polarizer III and the polarizer IV of four independent across arrangements；Sample
The reflected light on surface after object lens collect successively through half-mirror, compensator, analyzer, dichroscope II, it is described
Dichroscope II is divided into the two-beam that wavelength is respectively 500 nanometers and 650 nanometers again, a branch of laggard by aspherical mirror III
Enter photodetector I, another beam enters photodetector II, photodetector I and photodetector after passing through aspherical mirror IV
Optical signal can be detected in II.
Technical principle is as follows：Pole in sample is to the corresponding sample direction of magnetization of Kerr effect for outside face, longitudinal Ke Er is imitated
Answering the corresponding sample direction of magnetization is in face and along the plane of incidence of light, and the corresponding sample direction of magnetization of transverse Kerr effect is face
It is interior and vertical with light plane of incidence.By the magnetization for changing the direction, sample in the direction of incident light polarization plane, the incidence angle of light
Direction can distinguish the pole in sample to Kerr effect and longitudinal Kerr effect, and transverse Kerr effect can cause to reflect
The amplitude of light changes.According to the refraction of Kerr effect rule, a simple rule can be derived that：Detect obtained sample surfaces
Ke Er contrast with along being magnetized into for the reflected beams direction of propagation be divided into direct ratio.If incident light impinges perpendicularly on sample surfaces,
Reflected light vertically reflects, and magnetizes magnetic domain in the face in sample not along the component in reflected light travels direction, i.e., does not show
Contrast.On the contrary, there are maximum vector components, that is, show pole to Kerr effect outside face in sample in magnetized magnetic domain
Maximum-contrast.Therefore, magnetize the contrast difference between magnetic domain in face in order to obtain, that is, distinguish magnetization magnetic in different faces
Farmland needs oblique incident ray：According to the direction of incident optical plane and incident light, the magnetic domain of the sample surfaces difference direction of magnetization is reflected
Light different Ke Er contrasts can be shown in detector, therefore the magnetic domain of the different direction of magnetizations can be distinguished.
It is using a kind of method that the Ke Er microscope for complicated magnetic domain research measures：
The method for measuring longitudinal direction Ke Er sensitivity：
One, opens lamp I and lamp II, adjusts polarizer, so that light beam I is S-polarization, light beam II is P polarization, light beam I and light
Beam II is merged into light beam after dichroscope I, and successively passes through aspherical mirror I, field stop, aspherical mirror II, by half
Transparent reflector is changed into linear polarization and retrodeviates to object lens are entered, and converges to sample surfaces, the reflected light reflected by sample surfaces
After object lens collect, successively through half-mirror, compensator, two beams are divided by dichroscope II, it is a branch of to pass through aspheric
After the mirror III of face enter photodetector I, another beam pass through aspherical mirror IV after enter photodetector II, photodetector I and
Optical signal can be detected in photodetector II；
Two, open lamp III and lamp IV, adjust polarizer, so that light beam III is S-polarization, light beam IV is P polarization, light beam
III and light beam IV are merged into light beam after dichroscope I, and successively pass through aspherical mirror I, field stop, aspherical mirror
II is changed into linear polarization by half-mirror and retrodeviates to object lens are entered, and converges to sample surfaces, reflected by sample surfaces
Reflected light is after object lens collect, and successively through half-mirror, compensator, is divided into two beams, Yi Shutong by dichroscope II
Enter photodetector I after crossing aspherical mirror III, another beam enters photodetector II after passing through aspherical mirror IV, and photoelectricity is visited
Optical signal can be detected by surveying in device I and photodetector II；
Three, are carried out to optical signal is detected in photodetector I and photodetector II in above-mentioned steps one and step 2
Average treatment obtains the domain pattern of the different longitudinal direction Ke Er sensitivity of sample surfaces.
Measure method of the pure pole to Ke Er sensitivity：
One, opens lamp I, lamp II, lamp III and lamp IV simultaneously, adjusts polarizer so that light beam I, light beam II, light beam III with
Light beam IV is S-polarization, and light beam is merged into after dichroscope I, then successively passes through aspherical mirror I, field stop, aspheric
Face mirror II, is changed into linear polarization by half-mirror and retrodeviates and object lens and converge to sample surfaces to entering, anti-by sample surfaces
The reflected light penetrated is after object lens collect, and successively through half-mirror, compensator, is divided into two beams by dichroscope II, and one
Beam enters photodetector I after passing through aspherical mirror III, and another beam enters photodetector II, light after passing through aspherical mirror IV
Optical signal can be detected in electric explorer I and photodetector II；
Two, are averaging processing to detecting optical signal in photodetector I and photodetector II, obtain sample surfaces
Not domain pattern of the homopolarity to Ke Er sensitivity.
The utility model has the beneficial effects that：
The utility model uses double-colored LED light array as light source, and using the imaging optical path of two different wave lengths, energy
Enough domain patterns that different magnetization vector ingredients are obtained on the basis of not changing apparatus structure, can directly obtain magnetic in real time
Change the image of vector, time of measuring is shorter, can be used in studying the complicated Magnetization Transitions in magnetic film structure.In addition, this reality
With new device without complicated calibration process.
Detailed description of the invention
It is further illustrated below with reference to the figure of the utility model：
Fig. 1 is utility model diagram；
Fig. 2 is the side view of light source；
Fig. 3 is the side view of polarizer.
In figure, 1. light sources, 1-1. lamp I, 1-2. lamp II, 1-3. lamp III, 1-4. lamp IV, 2. polarizers, 2-1. polarizer I,
2-2. polarizer II, 2-3. polarizer III, 2-4. polarizer IV, 3. dichroscope I, 4. aspherical mirror I, 5. field stops, 6.
Aspherical mirror II, 7. half-mirrors, 8. object lens, 9. samples, 10. sample stages, 11. magnet, 12. compensators, 13. analyzings
Device, 14. dichroscope II, 15. aspherical mirror III, 16. photodetector I, 17. aspherical mirror IV, 18. photodetector II.
Specific embodiment
It is described a kind of for complexity if Fig. 2 is the side enlarged diagram of light source if Fig. 1 is utility model diagram
The Ke Er microscope of magnetic domain research mainly include light source 1, polarizer 2, dichroscope I 3, aspherical mirror I 4, field stop 5,
Aspherical mirror II6, half-mirror 7, object lens 8, sample 9, sample stage 10, magnet 11, compensator 12, analyzer 13, two to
Look mirror II 14, aspherical mirror III15, photodetector I 16, aspherical mirror IV17, photodetector II 18, the light source
1, polarizer 2, dichroscope I 3, aspherical mirror I 4, field stop 5, aspherical mirror II6, half-mirror 7, object lens 8 according to
Secondary composition illumination path, it is the object lens 8, half-mirror 7, compensator 12, analyzer 13, dichroscope II 14, aspherical
Mirror III15 and aspherical mirror IV17 forms imaging optical path, and sample 9 is located on sample stage 10, and the sample 9, sample stage 10 are located at
8 lower section of object lens, the magnet 11 are made of anode and cathode, and sample stage 10 has central axis, and sample stage 10 can be around central axis
It rotates in the horizontal plane, the anode and cathode of the magnet 11 are substantially symmetrical about its central axis relative to sample stage, and the light that light source 1 issues is successively
By polarizer 2, dichroscope I 3, aspherical mirror I 4, field stop 5, aspherical mirror II 6, by 7 turns of half-mirror
Become linear polarization to retrodeviate to object lens 8 are entered, and converge to 9 surface of sample, by 9 surface reflection of sample, the light source 1 by four at
The rectangle LED light of cross-shaped arrangement forms, and four LED light are lamp I 1-1, lamp II 1-2, lamp III1-3 and lamp IV1-
The light that 4, lamp I1-1 are issued is light beam I, and the light that lamp IV1-4 is issued is light beam IV, and light beam I and light beam IV wavelength are 500 nanometers,
The light that lamp I 1-1 is issued is light beam I, and the light that lamp II 1-2 is issued is light beam II, and the light that lamp III1-3 is issued is light beam III, lamp
The light that IV1-4 is issued is light beam IV, and light beam I and light beam IV wavelength are 500 nanometers, and light beam II and light beam III wavelength are 650
Nanometer, each LED light are located at the output end of light source 1, and each LED light output power is 200 milliwatts, by adjusting dichroscope
I 3, aspherical mirror I 4, field stop 5 and aspherical mirror II6 position, enable to the output end of light source to image in object lens 8
Back focussing plane；The polarizer 2 is by polarizer I 2-1 of four independent across arrangements, polarizer II 2-2, partially
Shake device III2-3 and polarizer IV2-4 composition；The reflected light on 9 surface of sample successively passes through semitransparent reflector after object lens 8 collect
Mirror 7, compensator 12, analyzer 13, dichroscope II 14, being divided into wavelength again by the dichroscope II 14 is respectively 500
Nanometer and 650 nanometers of two-beam enter photodetector I 16 after a branch of III15 by aspherical mirror, and another beam passes through non-
Entering in photodetector II 18, photodetector I 16 and photodetector II 18 after spherical mirror IV17 can detect
Optical signal.
Technical principle is as follows：Pole in sample is to the corresponding sample direction of magnetization of Kerr effect for outside face, longitudinal Ke Er is imitated
Answering the corresponding sample direction of magnetization is in face and along the plane of incidence of light, and the corresponding sample direction of magnetization of transverse Kerr effect is face
It is interior and vertical with light plane of incidence.By the magnetization for changing the direction, sample in the direction of incident light polarization plane, the incidence angle of light
Direction can distinguish the pole in sample to Kerr effect and longitudinal Kerr effect, and transverse Kerr effect can cause to reflect
The amplitude of light changes.According to the refraction of Kerr effect rule, a simple rule can be derived that：Detect obtained sample surfaces
Ke Er contrast with along being magnetized into for the reflected beams direction of propagation be divided into direct ratio.If incident light impinges perpendicularly on sample surfaces,
Reflected light vertically reflects, and magnetizes magnetic domain in the face in sample not along the component in reflected light travels direction, i.e., does not show
Contrast.On the contrary, there are maximum vector components, that is, show pole to Kerr effect outside face in sample in magnetized magnetic domain
Maximum-contrast.Therefore, magnetize the contrast difference between magnetic domain in face in order to obtain, that is, distinguish magnetization magnetic in different faces
Farmland needs oblique incident ray：According to the direction of incident optical plane and incident light, the magnetic domain of the sample surfaces difference direction of magnetization is reflected
Light different Ke Er contrasts can be shown in detector, therefore the magnetic domain of the different direction of magnetizations can be distinguished.
The utility model uses the LED light array of different wave length as light source, can be on the basis for not changing apparatus structure
On obtain the domain pattern of different magnetization vector ingredients, can directly obtain the image of magnetization vector in real time, time of measuring compared with
It is short, and have compared with high image resolution.In addition, utility model device, without complicated calibration process, operating process is simple.
Claims (1)
1. a kind of Ke Er microscope for complicated magnetic domain research mainly includes light source, polarizer, dichroscope I, aspherical mirror
I, field stop, aspherical mirror II, half-mirror, object lens, sample, sample stage, magnet, compensator, analyzer, dichroic
Mirror II, aspherical mirror III, photodetector I, aspherical mirror IV, photodetector II, the light source, polarizer, dichroscope
I, aspherical mirror I, field stop, aspherical mirror II, half-mirror, object lens successively form illumination path, the object lens, half
Transparent reflector, compensator, analyzer, dichroscope II, aspherical mirror III and aspherical mirror IV form imaging optical path, sample
On sample stage, the sample, sample stage are located at below object lens, and the magnet is made of anode and cathode, and sample stage has
Central axis, sample stage can rotate in the horizontal plane around central axis, and the anode and cathode of the magnet are relative to sample stage center
Axial symmetry, the light that light source issues successively pass through polarizer, dichroscope I, aspherical mirror I, field stop, aspherical mirror II, quilt
Half-mirror is changed into linear polarization and retrodeviates to object lens are entered, and converges to sample surfaces, is reflected by sample surfaces, the light
Source is made of the rectangle LED light that four across arrange, and four LED light are lamp I, lamp II, lamp III and lamp IV, lamp I
The light of sending is light beam I, and the light that lamp II is issued is light beam II, and the light that lamp III is issued is light beam III, and the light that lamp IV is issued is light
Beam IV,
It is characterized in that：Light beam I and light beam IV wavelength are 500 nanometers, and light beam II and light beam III wavelength are 650 nanometers, each
LED light is located at the output end of light source, and each LED light output power is 200 milliwatts, by adjusting dichroscope I, aspherical mirror
I, the position of field stop and aspherical mirror II enables to the output end of light source to image in the back focussing plane of object lens；It is described
Polarizer is made of polarizer I, polarizer II, polarizer III and the polarizer IV of four independent across arrangements；Sample
The reflected light on surface after object lens collect successively through half-mirror, compensator, analyzer, dichroscope II, it is described
Dichroscope II is divided into the two-beam that wavelength is respectively 500 nanometers and 650 nanometers again, a branch of laggard by aspherical mirror III
Enter photodetector I, another beam enters photodetector II, photodetector I and photodetector after passing through aspherical mirror IV
Optical signal can be detected in II.
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| CN201820674658.4U CN208140907U (en) | 2018-04-24 | 2018-04-24 | A kind of Ke Er microscope for complicated magnetic domain research |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115453434A (en) * | 2022-08-09 | 2022-12-09 | 云南大学 | Multifunctional micro-nano focusing polar direction longitudinal integrated magneto-optical Kerr effect device |
-
2018
- 2018-04-24 CN CN201820674658.4U patent/CN208140907U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115453434A (en) * | 2022-08-09 | 2022-12-09 | 云南大学 | Multifunctional micro-nano focusing polar direction longitudinal integrated magneto-optical Kerr effect device |
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Granted publication date: 20181123 Termination date: 20210424 |