CN105891744A - Spatially resolved magneto-optic Kerr effect measurement device - Google Patents
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- 238000005259 measurement Methods 0.000 title claims abstract description 31
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- G—PHYSICS
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- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/12—Measuring magnetic properties of articles or specimens of solids or fluids
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
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Abstract
A spatially resolved magneto-optic Kerr effect measurement device comprises an optical path system, a three-dimensional piezoelectric sample stage, and a current source control unit. The system can carry out poloidal or longitudinal Kerr signal scanning measurement of a single point quickly under a changing magnetic field, and can carry out Kerr signal measurement of the points in a region in a mode of matrix scanning under a fixed magnetic field. With the spatially resolved magneto-optic Kerr effect measurement device, the static magnetic domain and dynamic magnetic domain of a region can be measured precisely. Moreover, the magnetic domain structure of a whole region to be measured can be observed under a fixed magnetic field.
Description
Technical field:
The invention belongs to optical technology fields of measurement, be specifically related to a kind of spatial discrimination Kerr magnetooptical effect measurement apparatus, its main uses is to measure
Hysteresis curve so obtain sample surfaces magnetic domain distribution, simultaneously this system have observe domain structure function.
Background technology:
The magnetic of the multilayer film of material surface magnetic and the ultrathin membrane being made up of several atomic layers and different atomic building, is current magnetic storage neck
The most important study hotspot in territory, Kerr magnetooptical effect measurement apparatus is a kind of important means in surface magnetism research, and it is at magnetic ultrathin film
The aspect such as the transformation behavior of magnetic order, magnetic anisotropy, layer coupling and magnetic ultrathin film research in have important application.
At present, Kerr magnetooptical effect measurement apparatus all uses fixing sample stage, the region that material is fixing can only be carried out magnetic order, magnetic anisotropy and
The Study on Problems such as magnetic domain, it is impossible to realize under fixed magnetic field in the way of matrix-scanning each point in region and carry out the measurement of Ke Er signal, it is impossible to realize
To region static state magnetic domain, the accurate measurement of dynamic magnetic domain.Existing experimental provision significantly limit the range of Kerr magnetooptical effect and measures effect
Rate.
Summary of the invention:
The object of the invention: for the deficiency in prior art and design, propose one be possible not only under variation magnetic field single-point is quickly carried out pole to or
Longitudinal Ke Er signal scanning is measured；Can also under fixed magnetic field in the way of matrix-scanning to region in each point carry out Ke Er signal measurement, can realize
To region static state magnetic domain, a kind of spatial discrimination Kerr magnetooptical effect measurement apparatus accurately measured of dynamic magnetic domain；Simultaneously under fixed magnetic field, can be real
The now observation to the domain structure in whole region to be measured
Technical solution of the present invention: a kind of spatial discrimination Kerr magnetooptical effect measurement apparatus, this device includes light path system, three-dimensional piezoelectric sample stage and electricity
Stream source control unit；
Light path system mainly includes laser instrument, attenuator, beam expander, chopper, Glan-Taylor prism, 1/2nd wave plates, microcobjective, convex
The optics such as lens and CCD.
Three-dimensional piezoelectric sample stage and current source control unit are controlled by three-dimensional piezoelectric sample stage, electric magnet, three-dimensional piezoelectric sample stage controller, current source
Device and computer composition；Being gathered by computer control signal, field scan and sample stage move；Computer is by controlling three-dimensional piezoelectric sample stage
Scanning survey, it is possible to obtain the hysteresis curve that space relies on, and the magnetic domain distribution of direct reaction magnetic sample local.
Described three-dimensional piezoelectric sample stage displacement accuracy can reach 20nm.
Laser resolution after microcobjective focuses on can reach 550nm.
The present invention measures the theoretical basis of system: when line polarized light is beaten in magnetic sample, and the plane of polarization of its reflection light can rotate, the anglec of rotation
Degree size is directly proportional with the intensity of magnetization of material, referred to as Kerr magnetooptical effect.Kerr magnetooptical effect originates from left-handed and right-circularly polarized light at magnetic material
Material has different refractive indexs.
The explanation of Kerr magnetooptical effect phenomenological: line polarized light is the superposition of left circle and right-hand circularly polarized light.
In magnetic medium, left circle, right-hand circularly polarized light drive electronics in the middle of medium to do left-handed and dextrorotation circular motion, due to the action of a magnetic field, Lorenz power pair
Electronic action difference causes left-handed, dextrorotation response of medium when propagating, and namely dielectric constant is different, thus results in Kerr magnetooptical effect.Due to
This left circle is different with the refractive index of right-hand circularly polarized light, propagates in media as well and has different phase shifts, thus causes the rotation in reflection light polarization face；Simultaneously
Owing to medium is the most different to the absorbance of both patterns, thus change the ellipse inclined rate of reflection light.Generally, the while that both effects being in magnetic medium
Exist, therefore, it can be studied by the polarization situation after measuring polarized light reflection or refraction the magnetic property of magnetic material.Due to most
Magnetic material has the strongest absorbance, experimentally reacts magnetic by the deflection angle of measurement reflection light and seems more convenient.
Operation principle is: assuming that the p light of a linear polarization reflects from the surface of sample, if sample is complete non-magnetic, the light reflected depends on
It is so p light purely；If sample is with ferromagnetism, then the composition of the s light that will necessarily adulterate in the middle of the light reflected, Es/Ep is exactly so-called
Kerr rotation, then measure s light just become experiment main purpose.Experimentally we are placed on before photodiode with a polaroid,
And make polaroid become with the plane of polarization of p light a little angle (d) to place, then have:Wherein I0=| Ep | 2d2, represents kerr rotation
It is light intensity when zero,It is kerr corner,It is ellipse inclined rate, due toWithIt is all line along with the change of the intensity of magnetization
The change of property, the change in the light intensity magnetic field measured and change, show as the form of a hysteresis curve.
Kerr magnetooptical effect observes the domain structure of sample, and different magnetic domains has different spontaneous manetization directions, causes the different rotations in reflection light vibration face
Turn, when observing reflection light by the CCD after Glan-Taylor prism, it will be observed that the region that the light and shade corresponding from each magnetic domain is different, area pellucida and dark space
The most anti-farmland.Utilize the advantage that Kerr magnetooptical effect observes domain structure: do not limited by temperature, domain structure can be observed at various temperatures.
2. the domain wall of some material is thicker, and the boundary between farmland and domain wall is inconspicuous, and it is the least that surface dissipates magnetic field, and powder pattern is difficult to concentrate.For this situation, magnetic
Photo effect method is a kind of effective method.3. magneto-optic effect method can be used for observing the dynamic change of magnetic domain.
Beneficial effect: the present invention uses three-dimensional piezoelectric sample stage scanning survey, it is possible to obtain the hysteresis curve that space relies on, and direct reaction magnetic sample
The magnetic domain distribution of product local, can realize hysteresis curve and the measurement of magnetic domain information.Single-point loop function: under variation magnetic field, single-point is quickly entered
Row pole to or longitudinal Ke Er signal scanning magnetic-field measurement, can determine whether easily/hard axis, coercivity, magnetic property.Magnetic domain imaging function: fixing
In the way of matrix-scanning, each point in region is carried out Ke Er signal measurement under magnetic field, can realize region static state magnetic domain, the accurate measurement of dynamic magnetic domain；
Under fixed magnetic field, the observation to whole region to be measured domain structure can be realized
Accompanying drawing explanation
Fig. 1 is the measurement apparatus structure chart of the present invention；
The balance light bridge of Fig. 2 position present invention amplifies light path.
Detailed description of the invention
Label in Fig. 1: 1 is semiconductor laser, 2 is attenuator, and 3 is beam expander, and 4 is chopper, and 5 is Glan-Taylor prism, and 6 for dividing
Shu Jing, 7 is cube beam splitter, and 8 is beam splitter, and 9 is microcobjective, and 10 is film sample, and 11 is electric magnet, and 12 is three-dimensional piezoelectric sample
Platform, 13 is Glan-Taylor prism, and 14 is convex lens, and 15 is white light source, and 16 is 1/2nd wave plates, and 17 is Glan-Taylor prism, and 18 is anti-
Penetrating prism, 19 is Glan-Taylor prism, and 20 is convex lens, and 21 is three-dimensional piezoelectric sample stage controller, and 22 is lock-in amplifier, and 23 is light level
Weighing apparatus detector, 24 is CCD, and 25 is current source controller, and 26 is computer；Label in Fig. 2: 1 is two point of one wave plate, and 2 is Glan Taylor
Prism, 3 is reflecting prism, and 4 is photoelectricity balanced detector.
One spatial discrimination Kerr magnetooptical effect measurement apparatus of the present invention, including two parts: light path system part；Three-dimensional piezoelectric sample stage and current source
Control system part and computer control system composition.
As it is shown in figure 1, described light path system is as follows: central LASER Light Source is the semiconductor laser 1 of 635nm, output is 3mW,
Laser is through a power attenuator 2 (in order to control laser intensity), and the rear beam expander 3 that passes through (amplifies primarily to reduce light beam by expanding
The angle of divergence).Through chopper 4 after expanding, through Glan Taylor 5 so that incident illumination is a line polarized light with high-polarization, the most successively
Through beam splitter 7,8, and by microcobjective 9, focus on sample 10 surface.Wherein white light source 15 is reflected into CCD 24 through sample 10,
The movement of sample can be observed by CCD 24, and then by controlling sample stage, laser can be got to the ad-hoc location of sample surfaces.At mobile sample
During product, it should laser intensity is decayed to minimum, such that it is able to observe image the most clearly.Laser facula in equipment minimum can focus on 0.55
um.When sample is magnetic medium, the laser polarizing face returned by sample reflection will deflect.The laser reflected through sample passes sequentially through micro-
Object lens 9, beam splitter 8 arrive cube beam splitter 7, and quilt cube beam splitter 7 is along the reflection light of an angle of 90 degrees beam splitting.Separate through cube beam splitter 7
S component makes through Glan through 1/2nd wave plates 16 (this wave plate is used for regulating the polarization direction of the light before being input to Glan-Taylor prism 17)
The two-beam of Taylor prism 17 is the most of substantially equal.This two-beam respectively enters two detector A and B of balance light bridge.Photoelectricity balanced detector 23
There is the output voltage signal I of three signal outputs, respectively photodiode AA, the output voltage signal I of photodiode BBAnd photoelectricity two
Pole pipe A and B differential output signal voltage IA-IB。
Power attenuator: for controlling the intensity of laser, has multiple gear, generally, uses deep low gear, make laser intensity the strongest during measurement.
During by CCD observing samples surface, use the most high-grade, make laser intensity the most weak, the most just can clearly observe sample surfaces.
Lock-in amplifier utilizes chopper to produce reference signal, and measured signal is compared with reference signal, thus only to measured signal itself with
And be amplified with the noise component(s) of reference signal same frequency, same phase.Accordingly, it is capable to remove background noise efficiently, significantly improve signal to noise ratio.
Owing to general magnetisable material kerr rotation angle is little, reflective light intensity change is fainter, therefore uses balance light bridge to amplify light path and carry out Ke Er signal
Detection.So can eliminate the impact that in experimental system, light-intensity variation brings.When, under the specific half-wave plate angle with incident ray polarized light, two restraint
Light intensity is kept to zero mutually, and therefore when reflecting light and having minor variations, balance light bridge light path can be sensitive by this change-detection out, and by phase-locked
Amplifier connects computer, carries out data acquisition.The distinctive feature of this difference method is that the random noise that laser intensity fluctuating causes is orthogonal at two-way
Between component, performance is consistent, and when equilibrium point is adjusted relatively good, differential signal is the most substantially zeroed, hereby it is ensured that measurement system has high common mode rejection ratio and good
Good dynamic response characteristic.
As in figure 2 it is shown, incide Glan-Taylor prism 2 after the line polarized light of sample reflection incides 1/2nd wave plates 1, will be anti-through sample
The photolysis penetrated is horizontally and vertically two quadrature components, a branch of photodiode A being directly incident on photoelectricity balanced detector 23, another Shu Jing
The photodiode B of photoelectricity balanced detector 23 is incided in reflection.Adjust half-wave plate and make the plane of oscillation angle change of its main shaft and line polarisation, i.e.
Can control the light intensity magnitude that photodiode A, B receive identical, this time bridge reaches balance.When the plane of polarization of incident illumination rotates, warp
The two-beam crossing Glan-Taylor prism 2 changes by force, the difference output I of photodiode A, BA-IBChange, the kerr rotation of incident illumination
Angle is i.e. proportional to IA-IB.The distinctive feature of this difference method is that the random noise that laser intensity fluctuating causes shows unanimously between two-way quadrature component,
When equilibrium point adjust relatively good time differential signal substantially zeroed, hereby it is ensured that measurement system has higher common mode rejection ratio.
The core of the present invention is three-dimensional piezoelectric sample stage and current source control system part.Sample stage and magnet control part are mainly by three-dimensional piezoelectric
Sample stage, electric magnet, three-dimensional piezoelectric sample stage controller, current source controller and computer composition.
This measurement system only need to control the output area of power supply, scanning step and the sweep limits of three-dimensional piezoelectric sample stage and step-length by computer
Realize under variation magnetic field, single-point quickly being carried out pole to or longitudinal Ke Er signal scanning is measured and under fixed magnetic field in the way of matrix-scanning to district
In territory, each point carries out Ke Er signal measurement.Drastically increase the range of Kerr magnetooptical effect and measure efficiency.
Performance indications:
In the present invention, the resolution of microcobjective 9 can reach 550nm；
The distance between two poles of electric magnet 11 is adjustable；
Three-dimensional piezoelectric sample stage 12 displacement accuracy can reach 20nm；
Minimum kerr rotational angle detection angle 0.5mdeg:
Minimum reflectance rate of change detected level 0.02%.
More specifically light path system: in the present invention, laser instrument 1 uses semiconductor laser, wavelength X=635nm, laser instrument 1 sends
Laser passes through power attenuator 2, then by beam expander 3, chopper 4, polaroid 5, beam splitter 6, cube beam splitter 7, beam splitter 8, passes through
Microcobjective 9, reflects through sample 10, and reflection light is divided into two bundles through beam splitter 8, the most a branch of through Glan-Taylor prism 19, convex lens
Mirror 20, injects CCD24, and then the signal collected is sent into computer 26 by CCD24, and another bundle is through beam splitter 8, through cube beam splitter
7,1/2nd wave plate 16, then through Glan-Taylor prism 17, laser is divided into two bundles, the most a branch of is emitted directly toward photoelectricity balanced detector 23,
It is a branch of that through reflecting prism 18, incident light electric equilibrium detector 23, then the signal gathered is sent into lock-in amplifier 22 by photoelectricity balanced detector 23,
Lock-in amplifier 22 connects computer 26；White light 15 by convex lens 14, through Glan-Taylor prism 13, beam splitter 6, cube beam splitter 7,
Beam splitter 8, then through microcobjective 9, reflect through sample 10, reflection light is through microcobjective 9, then through Glan-Taylor prism 19, convex lens
Mirror 20, injects CCD24；Specimen holder connects three-dimensional piezoelectric sample stage 12, is placed in the middle of electric magnet 11, current source controller 25 and electric magnet
11 connect, and three-dimensional piezoelectric sample stage 12 is connected with three-dimensional piezoelectric sample stage controller 21, and current source controller 25 and three-dimensional piezoelectric sample stage
Controller 21 is all connected with computer 26, is controlled by computer 26, and the Kerr signal of photoelectricity balanced detector conversion collected by computer 26, and
And control current source controller 25 and three-dimensional piezoelectric sample stage controller 21, thus realize the magneto-optical kerr signals collecting of spatial discrimination.
Computer control system is by Labview programming.
Operation control system includes three parts: field scan current source control, Sample Scan piezoelectricity sample stage control part and signal acquisition part
Point.
Operation principle is computer output order to current source controller and three-dimensional piezoelectric sample stage controller, and (-6A is extremely to set output current scope
6A), sweep current step-length and set three-dimensional piezoelectric sample stage scan mode.Simultaneously by the kerr rotation angle warp of lock-in amplifier collection reflection light
The voltage signal that balanced detector is converted into draws hysteresis curve.
Claims (4)
1. a spatial discrimination Kerr magnetooptical effect measurement apparatus, is characterized in that including light path system, three-dimensional piezoelectric sample stage and current source control unit；
The laser that in light path system, laser instrument (1) produces pass through attenuator (2), then pass sequentially through beam expander (3), chopper (4), the polarizer (5),
Beam splitter (6), cube beam splitter (7), beam splitter (8), by microcobjective (9), reflect through sample (10), reflection light is through undue
Shu Jing (8) is divided into two bundles, the most a branch of passes through Glan-Taylor prism (19), convex lens (20), and injecting CCD (24), CCD (24) will
The signal collected sends into computer (26), and another bundle of reflection light is through beam splitter (8), through cube beam splitter (7), 1/2nd wave plates
(16), then through Glan-Taylor prism (17), laser is divided into two bundles by Glan-Taylor prism (17), the most a branch of is emitted directly toward light level
Weighing apparatus detector (23) first input end, a branch of through reflecting prism (18), incident light electric equilibrium detector (23) second input, then light
The signal gathered is sent into lock-in amplifier (22) by electric equilibrium detector (23), and lock-in amplifier (22) connects computer；It is additionally provided with white light source,
The white light (15) sent passes through convex lens (14), through Glan-Taylor prism (13), beam splitter (6), cube beam splitter (7), beam splitter
(8), through microcobjective (9), reflecting through sample (10), reflection light is through microcobjective (9), Glan-Taylor prism (19), convex then
Lens (20), inject CCD (24)；Sample (10) is placed in specimen holder, and specimen holder is fixed on three-dimensional piezoelectric sample stage (12), is placed in electric magnet
(11) in the middle of, current source controller (25) is connected with electric magnet (11), three-dimensional piezoelectric sample stage (12) and three-dimensional piezoelectric sample stage controller
(21) connect, and current source controller (25) and three-dimensional piezoelectric sample stage controller (21) are all connected with computer (26), are calculated
Machine (26) controls, and the Kerr signal of photoelectricity balanced detector conversion collected by computer (26).
Spatial discrimination Kerr magnetooptical effect measurement apparatus the most according to claim 1, is characterized in that described three-dimensional piezoelectric sample stage and current source control
Part is made up of three-dimensional piezoelectric sample stage, electric magnet, three-dimensional piezoelectric sample stage controller, current source controller and computer；By computer control
The collection of signal processed, the scanning in magnetic field and the control of sample stage；Three-dimensional piezoelectric sample stage scanning survey is controlled, it is possible to obtain space and depend on by computer
The hysteresis curve relied, and the magnetic domain distribution of direct reaction magnetic sample local.
Spatial discrimination Kerr magnetooptical effect measurement apparatus the most according to claim 2, is characterized in that described program controlled high precision three-dimensional piezoelectric sample stage position
Move precision 20nm.
Spatial discrimination Kerr magnetooptical effect measurement apparatus the most according to claim 1, is characterized in that described laser resolution after microcobjective focuses on
550nm。
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| CN108387855A (en) * | 2018-04-24 | 2018-08-10 | 金华职业技术学院 | A kind of dual-beam magnetic light spectrometer |
| CN108490375A (en) * | 2018-04-24 | 2018-09-04 | 金华职业技术学院 | In-situ measurement method for sample magnetism |
| CN108594142A (en) * | 2018-04-24 | 2018-09-28 | 金华职业技术学院 | Magnetization vector measuring method |
| CN108680875A (en) * | 2018-04-24 | 2018-10-19 | 金华职业技术学院 | Magneto-optical Kerr signal measuring method |
| CN108680876A (en) * | 2018-04-24 | 2018-10-19 | 金华职业技术学院 | A kind of secondary Kerr magnetooptical effect measurement method of nanoscale |
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| CN108594142A (en) * | 2018-04-24 | 2018-09-28 | 金华职业技术学院 | Magnetization vector measuring method |
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