CN208092124U - The piezoelectric type microwave power detector of d31 based on clamped beam - Google Patents
The piezoelectric type microwave power detector of d31 based on clamped beam Download PDFInfo
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- CN208092124U CN208092124U CN201820610220.XU CN201820610220U CN208092124U CN 208092124 U CN208092124 U CN 208092124U CN 201820610220 U CN201820610220 U CN 201820610220U CN 208092124 U CN208092124 U CN 208092124U
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- clamped beam
- piezoelectric material
- material layer
- microwave power
- piezoelectric
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- 239000000463 material Substances 0.000 claims abstract description 77
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- 230000000694 effects Effects 0.000 claims abstract description 14
- 238000001514 detection method Methods 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 12
- 229910052782 aluminium Inorganic materials 0.000 claims description 12
- 239000004411 aluminium Substances 0.000 claims description 12
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 12
- 229910052802 copper Inorganic materials 0.000 claims description 11
- 239000010949 copper Substances 0.000 claims description 11
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 9
- 239000010936 titanium Substances 0.000 claims description 9
- 229910052719 titanium Inorganic materials 0.000 claims description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical group [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 6
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical class [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- 239000010941 cobalt Substances 0.000 claims description 3
- 229910017052 cobalt Inorganic materials 0.000 claims description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 3
- 229910052681 coesite Inorganic materials 0.000 claims description 3
- 229910052906 cristobalite Inorganic materials 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 239000010445 mica Substances 0.000 claims description 3
- 229910052618 mica group Inorganic materials 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 3
- 229920005591 polysilicon Polymers 0.000 claims description 3
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- 229910052682 stishovite Inorganic materials 0.000 claims description 3
- 229910052905 tridymite Inorganic materials 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
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Abstract
The utility model is a kind of piezoelectric type microwave power detector of the d31 based on clamped beam, sensor includes HR-Si substrate, coplanar waveguide transmission line and clamped beam are equipped on HR-Si substrate, coplanar waveguide transmission line be include center signal line and ground wire, the both sides of the centrally disposed signal wire of ground wire, clamped beam both ends are fixed on using bridge pier between letter center signal line and ground wire, an embedded mass block immediately below clamped beam, there are four pieces of piezoelectric material layers above clamped beam, four pieces are filled with dielectric layer between piezoelectric material layer and clamped beam, when microwave power is in coplanar wave guide transmission, clamped beam is pulled down by electrostatic force, piezoelectric material layer generates deformation therewith, according to piezoelectric effect, the distribution of charge changes on piezoelectric material layer, it generates and the one-to-one voltage of microwave power, the detection of microwave power is carried out by detecting voltage.The microwave power detector structure novel of the utility model is easily integrated, and sensitivity is higher.
Description
Technical field
The utility model is related to technical field of microelectronic mechanical systems, and in particular to a kind of pressure of the d31 based on clamped beam
Electric-type microwave power senses.
Background technology
In microelectromechanical systems（MEMS）Microwave study in, microwave power be characterize microwave signal an important ginseng
Number, in the generation of microwave signal, transmission and receiving the research of links, the detection of microwave power is essential.Most
Common microwave power detector is the capacitance microwave power sensor based on fixed beam structure, as the clamped beam types of MEMS are online
Microwave power detector and preparation method thereof patent No.：201010223810.5 being based on clamped beam and direct-type power sensor
Microwave detection system and its detection method（The patent No.：201310027303.8）.When microwave signal passes through coplanar wave guide transmission
When, electrostatic force is generated between co-planar waveguide and clamped beam, clamped beam is made to pull down, and is tested capacitance between electrode and clamped beam and is sent out
Changing measures capacitance by capacitive detection circuit, and it is one-to-one that value, which is with signal power amplitude, to detect letter
The amplitude of number power.However, the output of capacitance microwave power sensor has non-linear, parasitic capacitance and distribution capacity are to spirit
Sensitivity and measurement accuracy are affected, and connection circuit is more complex etc..
Invention content
The utility model provides a kind of piezoelectric type microwave power biography of the d31 based on clamped beam to solve the above-mentioned problems
Sensor.The microwave power detector is generated using piezoelectric effect and the one-to-one electric signal of microwave power, to measure,
With considerable electricity output performance, higher stability, the features such as rate of good quality rate.
In order to achieve the above object, the utility model is achieved through the following technical solutions：
The utility model is a kind of piezoelectric type microwave power detector of the d31 based on clamped beam, and sensor includes high resistant
Silicon substrate, on HR-Si substrate be equipped with coplanar waveguide transmission line and clamped beam, coplanar waveguide transmission line be include center signal
Line and ground wire, the both sides of the centrally disposed signal wire of ground wire, clamped beam both ends are fixed on letter center signal line and ground using bridge pier
Between line, an embedded mass block immediately below clamped beam has four pieces of piezoelectric material layers above clamped beam, four pieces of piezoelectric material layers with
Dielectric layer is filled between clamped beam, when microwave power is in coplanar wave guide transmission, clamped beam is pulled down by electrostatic force, piezoresistive material
The bed of material generates deformation therewith, according to piezoelectric effect, on piezoelectric material layer the distribution of charge change, generate with microwave power one
One corresponding voltage carries out the detection of microwave power by detecting voltage.
Further improvement of the utility model is：Piezoelectric material layer includes piezoelectric material layer P1, piezoelectric material layer P2, pressure
Material layer P3, piezoelectric material layer P4, the piezoelectric material layer P1, piezoelectric material layer P2, piezoelectric material layer P3, piezoelectric material layer
It is together in series by plate electrode and its interconnection line between P4.
Further improvement of the utility model is：Piezoelectric material layer P1, piezoelectric material layer P2, piezoelectric material layer P3, pressure
Material layer P4 is piezoelectric material layer made of ZnO, PZT-5 series or AlN.
Further improvement of the utility model is：Dielectric layer is ZrO2、SiO2、Si3N4Or medium made of mica material
Layer.
Further improvement of the utility model is：Mass block is nickel, cobalt, mass block made of aluminium or copper.
Further improvement of the utility model is：Piezoelectric material layer is piezoresistive material made of ZnO, PZT-5 series or AlN
The bed of material.
Further improvement of the utility model is：The plate electrode is platinum, gold, copper, tablet electricity made of titanium or aluminium
Pole.
Further improvement of the utility model is：Clamped beam is copper, clamped beam made of aluminium or titanium.
Further improvement of the utility model is：Bridge pier is polysilicon, aluminium, copper, bridge pier made of tungsten or titanium.
The utility model has the beneficial effects that：（1）The utility model uses fixed beam structure, has higher stability,
The advantages that being easy to realize by microfabrication；（2）Piezoelectric effect of the utility model based on pzt thin film d31 patterns, utilizes piezoelectricity
Effect realizes clamped Liang Sicheng --- the conversion of electric signal, practical measurement parameter are directly exported with electric signal, can directly be measured,
Reduce the complexity of conversion circuit；（3）The utility model is placed on using the larger metal derby of density under clamped beam middle
Side, increases clamped beam displacement amplitude, to reduce resonant frequency, to realize the detection of microwave power in low frequency environments.
In addition, the utility model is to be based on MEMS technology, the principal advantages with MEMS, such as small, light-weight, power consumption
Low, convenient for integrated etc., this series of advantages is that traditional microwave power detector is incomparable, piezoelectric material is applied to solid
On strutbeam, when microwave power is from coplanar wave guide transmission, due to electrostatic force so that clamped beam pulls down, and cause piezoelectric layer deformation,
According to piezoelectric effect, on piezoelectric layer the distribution of charge change, generate with the one-to-one electric signal of microwave power, pass through inspection
The detection that electric signal carries out microwave power is surveyed,
Therefore it has research and application value well.
The microwave power detector structure novel of the utility model, measuring amplitude range are big, are easily integrated, and sensitivity compared with
It is high.
Description of the drawings
Fig. 1 is the vertical view of the utility model.
Fig. 2 is the sectional view of the utility model.
Fig. 3 is the sectional view of the utility model clamped beam.
Wherein：1- center signal lines；2- ground wires；3 clamped beams；4- mass blocks；5- dielectric layers；6 plate electrodes and its interconnection
Line.
Specific implementation mode
In order to deepen the understanding to the utility model, the utility model is done further below in conjunction with drawings and examples
Detailed description, the embodiment are only used for explaining the utility model, do not constitute and limit to the scope of protection of the utility model.
As shown in Figs. 1-3, the utility model is a kind of piezoelectric type microwave power detector of the d31 based on clamped beam, is passed
Sensor has the advantages that higher output voltage, stability is high, high sensitivity, the sensor packet compared to traditional sensor
HR-Si substrate is included, coplanar waveguide transmission line and clamped beam 3 are equipped on the HR-Si substrate, the clamped beam 3 is copper, aluminium
Or clamped beam made of titanium, the coplanar waveguide transmission line be include center signal line 1 and ground wire 2, the ground wire 2 is arranged in institute
State the both sides of center signal line 1,3 both ends of the clamped beam using bridge pier be fixed on the letter center signal line 1 and ground wire 2 it
Between, the bridge pier is polysilicon, aluminium, copper, bridge pier made of tungsten or titanium, an embedded mass block 4 immediately below the clamped beam 3, institute
Mass block 4 is stated as mass block made of nickel, cobalt, aluminium or copper, metallic gauge block increases clamped beam position for reducing resonant frequency
It moves, the top of the clamped beam 3 has four pieces of piezoelectric material layers, the piezoelectric material layer to be operated under d31 patterns, in external force
Effect is lower to generate direct piezoelectric effect, and dielectric layer 5 is filled between four pieces of piezoelectric material layers and the clamped beam 3, is given an account of
Matter layer 5 is ZrO2、SiO2、Si3N4Or dielectric layer made of mica material, it is used for isolating metal clamped beam and piezoelectric material layer, when
In coplanar wave guide transmission, clamped beam 3 is pulled down microwave power by electrostatic force, and piezoelectric material layer generates deformation therewith, according to pressure
Electrical effect, on piezoelectric material layer the distribution of charge change, generate with the one-to-one voltage of microwave power, pass through and detect electricity
Pressure carries out the detection of microwave power, and the piezoelectric material layer includes piezoelectric material layer P1, piezoelectric material layer P2, piezoelectric material layer
P3, piezoelectric material layer P4 lead between the piezoelectric material layer P1, piezoelectric material layer P2, piezoelectric material layer P3, piezoelectric material layer P4
It crosses plate electrode and its interconnection line 6 is together in series, that is to say, that the bottom crown of P4 and P3 is connected directly, the top crown of P3 and P2
It is connected directly, the bottom crown of P2 and P1 are connected directly, the piezoelectric material layer P1, piezoelectric material layer P2, piezoelectric material layer P3, pressure
Material layer P4 is piezoelectric material layer made of ZnO, PZT-5 series or AlN, and the plate electrode is platinum, gold, copper, titanium or aluminium
Manufactured plate electrode, plate electrode are used to collect the charge of direct piezoelectric effect generation, that is to say, that the top of clamped beam is first attached
It one layer of dielectric layer, is 4 pieces of piezoelectric material layers above dielectric layer, using electrode and its electrode interconnection line by 4 pieces of piezoelectric material strings
Connection gets up, and plate electrode is used to receive the charge of piezoelectric effect generation, and makes charge polarization direction and stress suffered by clamped beam
Direction is identical, i.e., piezoelectric material is operated under d31 patterns, and dielectric layer can stop that the charge that piezoelectric layer generates is let out as insulating layer
Leakage.
When microwave signal is transmitted on CPW, the beam above center signal line will produce electrostatic force, to make beam produce
Raw displacement, the surface of beam will generate stress variation, and according to piezoelectric effect, piezoelectric material generates charge and flows, above clamped beam
Plate electrode will between will generate voltage, the voltage and microwave power correspond, thus by measure voltage can be obtained it is micro-
The power of wave signal.
The piezoelectric material of the utility model is polarized using d31 modes, i.e., plate electrode is used to receive piezoelectric effect generation
Charge, and make charge polarization direction identical as stress direction suffered by clamped beam.
The utility model needs in work to be to generate sufficiently large mechanical stress and strain to be converted to electric energy, therefore, passes through
The nickel mass block of load constant weight immediately below clamped beam further increases the value of output voltage to further promote detection essence
Degree.
The utility model, using insulating materials as dielectric layer, can stop between piezoelectric material layer and metal girder construction
The charge leakage that piezoelectric layer generates.
Claims (9)
1. a kind of piezoelectric type microwave power detector of the d31 based on clamped beam, it is characterised in that：The sensor includes high resistant
Silicon substrate is equipped with coplanar waveguide transmission line and clamped beam on the HR-Si substrate（3）, the coplanar waveguide transmission line is packet
Include center signal line（1）And ground wire（2）, the ground wire（2）It is arranged in the center signal line（1）Both sides, the clamped beam
（3）Both ends are fixed on the letter center signal line using bridge pier（1）And ground wire（2）Between, the clamped beam（3）Underface is embedded in
One mass block（4）, the clamped beam（3）Top have four pieces of piezoelectric material layers, four pieces of piezoelectric material layers with it is described clamped
Beam（3）Between be filled with dielectric layer（5）, when microwave power is in coplanar wave guide transmission, clamped beam（3）It is pulled down by electrostatic force,
Piezoelectric material layer generates deformation therewith, according to piezoelectric effect, on piezoelectric material layer the distribution of charge change, generate and microwave
The one-to-one voltage of power carries out the detection of microwave power by detecting voltage.
2. the piezoelectric type microwave power detector of the d31 based on clamped beam according to claim 1, it is characterised in that：It is described
Piezoelectric material layer includes piezoelectric material layer P1, piezoelectric material layer P2, piezoelectric material layer P3, piezoelectric material layer P4, the piezoresistive material
Pass through plate electrode and its interconnection line between bed of material P1, piezoelectric material layer P2, piezoelectric material layer P3, piezoelectric material layer P4（6）String
Connection gets up.
3. the piezoelectric type microwave power detector of the d31 based on clamped beam according to claim 2, it is characterised in that：It is described
Piezoelectric material layer P1, piezoelectric material layer P2, piezoelectric material layer P3, piezoelectric material layer P4 are made of ZnO, PZT-5 series or AlN
Piezoelectric material layer.
4. the piezoelectric type microwave power detector of the d31 based on clamped beam according to claim 1, it is characterised in that：It is described
Dielectric layer（5）For ZrO2、SiO2、Si3N4Or dielectric layer made of mica material.
5. the piezoelectric type microwave power detector of the d31 based on clamped beam according to claim 1, it is characterised in that：It is described
Mass block（4）For mass block made of nickel, cobalt, aluminium or copper.
6. the piezoelectric type microwave power detector of the d31 based on clamped beam according to claim 1, it is characterised in that：It is described
Piezoelectric material layer is piezoelectric material layer made of ZnO, PZT-5 series or AlN.
7. the piezoelectric type microwave power detector of the d31 based on clamped beam according to claim 2, it is characterised in that：It is described
Plate electrode is platinum, gold, copper, plate electrode made of titanium or aluminium.
8. the piezoelectric type microwave power detector of the d31 based on clamped beam according to claim 1, it is characterised in that：It is described
Clamped beam（3）For clamped beam made of copper, aluminium or titanium.
9. the piezoelectric type microwave power detector of the d31 based on clamped beam according to claim 1, it is characterised in that：It is described
Bridge pier is polysilicon, aluminium, copper, bridge pier made of tungsten or titanium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820610220.XU CN208092124U (en) | 2018-04-26 | 2018-04-26 | The piezoelectric type microwave power detector of d31 based on clamped beam |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820610220.XU CN208092124U (en) | 2018-04-26 | 2018-04-26 | The piezoelectric type microwave power detector of d31 based on clamped beam |
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| CN208092124U true CN208092124U (en) | 2018-11-13 |
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| CN201820610220.XU Expired - Fee Related CN208092124U (en) | 2018-04-26 | 2018-04-26 | The piezoelectric type microwave power detector of d31 based on clamped beam |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108362936A (en) * | 2018-04-26 | 2018-08-03 | 南京邮电大学 | The piezoelectric type microwave power detector of d31 based on clamped beam |
| CN109917182A (en) * | 2019-03-27 | 2019-06-21 | 南京邮电大学 | Microwave power detector based on graphene piezoresistance effect |
-
2018
- 2018-04-26 CN CN201820610220.XU patent/CN208092124U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108362936A (en) * | 2018-04-26 | 2018-08-03 | 南京邮电大学 | The piezoelectric type microwave power detector of d31 based on clamped beam |
| CN109917182A (en) * | 2019-03-27 | 2019-06-21 | 南京邮电大学 | Microwave power detector based on graphene piezoresistance effect |
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Effective date of registration: 20191202 Address after: Room 107, floor 1, No. 30-06, GuangYue Road, Qixia street, Nanjing Economic and Technological Development Zone, Nanjing, Jiangsu Province Patentee after: Nanjing Erxin Electronic Co.,Ltd. Address before: 210023 Jiangsu city of Nanjing province Ya Dong new Yuen Road No. 9 Patentee before: NANJING University OF POSTS AND TELECOMMUNICATIONS |
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