CN208043929U - The piezoelectric type microwave power detector of d33 based on cantilever beam - Google Patents
The piezoelectric type microwave power detector of d33 based on cantilever beam Download PDFInfo
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- CN208043929U CN208043929U CN201820608969.0U CN201820608969U CN208043929U CN 208043929 U CN208043929 U CN 208043929U CN 201820608969 U CN201820608969 U CN 201820608969U CN 208043929 U CN208043929 U CN 208043929U
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- piezoelectric
- cantilever
- microwave power
- cantilever beam
- material layer
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- 239000000463 material Substances 0.000 claims abstract description 27
- 230000005540 biological transmission Effects 0.000 claims abstract description 14
- 230000000694 effects Effects 0.000 claims abstract description 11
- 238000001514 detection method Methods 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims abstract description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 12
- 239000004411 aluminium Substances 0.000 claims description 12
- 229910052782 aluminium Inorganic materials 0.000 claims description 12
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 12
- 229910052802 copper Inorganic materials 0.000 claims description 12
- 239000010949 copper Substances 0.000 claims description 12
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 9
- 239000010936 titanium Substances 0.000 claims description 9
- 229910052719 titanium Inorganic materials 0.000 claims description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 6
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- 229910017052 cobalt Inorganic materials 0.000 claims description 3
- 239000010941 cobalt Substances 0.000 claims description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 3
- 229910052681 coesite Inorganic materials 0.000 claims description 3
- 229910052906 cristobalite Inorganic materials 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical class [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims description 3
- 239000010445 mica Substances 0.000 claims description 3
- 229910052618 mica group Inorganic materials 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 3
- 229920005591 polysilicon Polymers 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 229910052682 stishovite Inorganic materials 0.000 claims description 3
- 229910052905 tridymite Inorganic materials 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000024241 parasitism Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
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Abstract
The utility model is a kind of piezoelectric type microwave power detector of the d33 based on cantilever beam, sensor includes HR-Si substrate, coplanar waveguide transmission line and piezoelectric cantilever are provided on substrate, coplanar waveguide transmission line includes center signal line and ground wire, the both sides of the centrally disposed signal wire of ground wire, piezoelectric cantilever is fixed on by bridge pier between center signal line and the ground wire of side, one end load mass block of piezoelectric cantilever, on piezoelectric cantilever, dielectric layer is adhered in the top of non-load mass block, piezoelectric material layer is provided with above dielectric layer, on the top of piezoelectric material layer, interdigital electrode is set.Cantilever beam is pulled down by electrostatic force when device works, and according to piezoelectric effect, the interdigital electrode above piezoelectric cantilever will generate voltage by between, which corresponds with microwave power, therefore can be obtained the power of microwave signal by measuring voltage.The utility model is easily integrated and measured parameter directly exports in electrical signal form, and rear class detection circuit is simple.
Description
Technical field
The utility model is related to technical field of microelectronic mechanical systems, and in particular to a kind of d33 piezoelectricity based on cantilever beam
Type micro-wave power sensor.
Background technology
In microelectromechanical systems（MEMS）Microwave study in, microwave power be characterize microwave signal an important ginseng
Number.In the generation of microwave signal, transmission and receiving the research of links, the detection of microwave power is essential.Most
Common microwave power detector is the capacitance microwave power sensor based on cantilever beam structure, such as a kind of more cantilever beam structures
Microwave power detector（The patent No.：201310184504.9）, the online microwave power detector of MEMS beam types and its preparation
Method（The patent No.：201010223806.9）.Cantilever beam one end is fixed, can be altogether when microwave signal is from coplanar wave guide transmission
Surface wave is led and generates electrostatic force between cantilever beam, and cantilever beam other end drop-down, the capacitance between cantilever beam and test electrode is sent out
Changing, to carry out the measurement of microwave power.However, the output of capacitance microwave power sensor has non-linear, parasitism
Capacitance and distribution capacity are affected to sensitivity and measurement accuracy, and connection circuit is more complex etc..
Invention content
The utility model provides a kind of d33 piezoelectric type microwave power detectors based on cantilever beam, which passes
Sensor utilizes piezoelectric effect, and generate has wider electric energy defeated with the one-to-one electric signal of microwave power to measure
The features such as going out range, simple in structure, direct measurement, solves the above problems and greatly improves sensitivity.
In order to achieve the above object, the utility model is achieved through the following technical solutions：
The utility model is a kind of piezoelectric type microwave power detector of the d33 based on cantilever beam, and sensor includes high resistant
Silicon substrate, is arranged coplanar waveguide transmission line and piezoelectric cantilever on HR-Si substrate, and coplanar waveguide transmission line includes center letter
Number line and ground wire, the both sides of the centrally disposed signal wire of ground wire, piezoelectric cantilever are fixed on center signal line and one by bridge pier
Between the ground wire of side, one end load mass block of piezoelectric cantilever, on piezoelectric cantilever, the attachment of the top of non-load mass block
Dielectric layer is provided with piezoelectric material layer above dielectric layer, and interdigital electrode is arranged on the top of piezoelectric material layer, when microwave is believed
Number in coplanar wave guide transmission, piezoelectric cantilever is pulled down by electrostatic force, and piezoelectric material layer generates deformation therewith, is imitated according to piezoelectricity
Answer, on piezoelectric material layer the distribution of charge change, generate with the one-to-one voltage of microwave power, by detect voltage into
The detection of row microwave power.
Further improvement of the utility model is：Piezoelectric cantilever is copper, piezoelectric cantilever made of aluminium or titanium.
Further improvement of the utility model is：Bridge pier is polysilicon, aluminium, copper, bridge pier made of tungsten or titanium.
Further improvement of the utility model is：Mass block is nickel, cobalt, mass block made of aluminium or copper.
Further improvement of the utility model is：Dielectric layer is ZrO2、SiO2、Si3N4Or dielectric layer made of mica.
Further improvement of the utility model is：Piezoelectric material layer is piezoresistive material made of ZnO, PZT-5 series or AlN
The bed of material.
Further improvement of the utility model is：Interdigital electrode is platinum, gold, copper, interdigital electrode made of titanium or aluminium.
The utility model has the beneficial effects that：（1）The utility model uses cantilever beam structure, has the rigidity of structure low, knot
Structure is simple, and open-circuit voltage is big, the advantages that being easy to realize by microfabrication；（2）The utility model is realized outstanding using piezoelectric effect
The conversion of arm Liang Sicheng --- electric signal, practical measurement parameter are directly exported with electric signal, can directly be measured, and conversion is reduced
The complexity of circuit；（3）The piezoelectric type microwave power detector of the utility model is operated under d33 patterns, utilizes piezoelectric effect
The stress transmission that Liang Sicheng variation generates there is into higher output voltage for electric signal, therefore there is higher measurement accuracy；（4）
The utility model is placed on the end of cantilever beam using the larger metal derby of density, the displacement amplitude for increasing cantilever beam, together
When reduce resonant frequency.
The utility model is to be based on MEMS technology, and the principal advantages with MEMS are such as small, light-weight, low in energy consumption, just
In integrated etc., this series of advantages is that traditional microwave power detector is incomparable, thus it have research well and
Application value.
Microwave power detector structure novel described in the utility model, be easily integrated and measured parameter in electrical signal form
It directly exports, rear class detection circuit simply waits various features.
Description of the drawings
Fig. 1 is the attached drawing of the utility model.
Fig. 2 is the side view of the utility model.
Fig. 3 is the vertical view of the utility model piezoelectric cantilever.
Fig. 4 is the part lateral cross-sectional view of the utility model piezoelectric cantilever.
Wherein：1- center signal lines；2- ground wires；3 mass blocks；4- piezoelectric cantilevers；5- dielectric layers；6- interdigital electrodes；7-
Piezoelectric material layer.
Specific implementation mode
In order to deepen the understanding to the utility model, the utility model is done further below in conjunction with drawings and examples
Detailed description, the embodiment are only used for explaining the utility model, do not constitute and limit to the scope of protection of the utility model.
As shown in Figs 1-4, the utility model is a kind of piezoelectric type microwave power detector of the d33 based on cantilever beam, is passed
Sensor has higher output voltage compared to traditional sensor, and high sensitivity is simple in structure, the advantages that being easily integrated, institute
It includes HR-Si substrate to state sensor, and coplanar waveguide transmission line and piezoelectric cantilever 4 are arranged on the HR-Si substrate, described
Coplanar waveguide transmission line includes center signal line 1 and ground wire 2, and the ground wire 2 is arranged in the both sides of the center signal line 1, institute
Piezoelectric cantilever 4 is stated to be fixed between center signal line 1 and the ground wire 2 of side by bridge pier, the piezoelectric cantilever 4
One end load mass block 3, on the piezoelectric cantilever 4, do not load the mass block 3 top attachment dielectric layer 5, described
The top of dielectric layer 5 is provided with piezoelectric material layer 7, and interdigital electrode 6 is arranged on the top of the piezoelectric material layer 7, when microwave is believed
Number in coplanar wave guide transmission, the piezoelectric cantilever 4 is pulled down by electrostatic force, and piezoelectric material layer 7 generates deformation therewith, according to pressure
Electrical effect, on piezoelectric material layer 7 distribution of charge change, generate with the one-to-one voltage of microwave power, pass through detection
Voltage carries out the detection of microwave power.The piezoelectric cantilever 4 is copper, piezoelectric cantilever made of aluminium or titanium；The bridge pier is
Bridge pier made of polysilicon, aluminium, copper, tungsten or titanium；The mass block 3 is nickel, cobalt, mass block made of aluminium or copper, for reducing
Resonant frequency increases cantilever Liang Sicheng；The dielectric layer 5 is ZrO2、SiO2、Si3N4Or dielectric layer made of mica.For every
From metal cantilever beams and piezoelectric material layer；The piezoelectric material layer 7 is piezoelectric material layer made of ZnO, PZT-5 series or AlN,
Piezoelectric material layer is operated under d33 patterns, and for generating direct piezoelectric effect under external force, piezoelectric material is operated in d33 moulds
Under formula, interdigital electrode is used to receive the charge of piezoelectric effect generation, and dielectric layer can stop that piezoelectric layer generates as insulating layer
Charge leakage；The interdigital electrode 6 is platinum, gold, copper, interdigital electrode made of titanium or aluminium, for collecting direct piezoelectric effect
The charge of generation.
The operation principle of the utility model is：When microwave signal is transmitted on CPW, the pressure above center signal line
Electric cantilever beam will produce electrostatic force, and to make piezoelectric cantilever generate displacement, the surface of piezoelectric cantilever will generate stress variation,
According to piezoelectric effect, piezoelectric material generates charge flowing, and the interdigital electrode above piezoelectric cantilever will generate voltage by between, should
Voltage is corresponded with microwave power, therefore can be obtained the power of microwave signal by measuring voltage.
The piezoelectric material of the utility model institute sensor is polarized using d33 modes, i.e., interdigital electrode is for receiving piezoelectricity effect
The charge that should be generated, and make the direction of charge polarization vertical with stress direction suffered by clamped beam.
In order to further increase the value of output voltage to further promote accuracy of detection, the utility model needs are working
It is to generate sufficiently large mechanical stress and strain to be converted to electric energy, therefore, the nickel matter of constant weight is loaded by cantilever beam end
Gauge block.
Claims (7)
1. a kind of piezoelectric type microwave power detector of the d33 based on cantilever beam, it is characterised in that：The sensor includes high resistant
Coplanar waveguide transmission line and piezoelectric cantilever is arranged in silicon substrate on the HR-Si substrate（4）, the coplanar waveguide transmission line
Including center signal line（1）And ground wire（2）, the ground wire（2）It is arranged in the center signal line（1）Both sides, the piezoelectricity
Cantilever beam（4）It is fixed on center signal line by bridge pier（1）With the ground wire of side（2）Between, the piezoelectric cantilever（4）
One end load mass block（3）, in the piezoelectric cantilever（4）Above, the mass block is not loaded（3）Top adhere to dielectric layer
（5）, in the dielectric layer（5）Top be provided with piezoelectric material layer（7）, in the piezoelectric material layer（7）Top setting fork
Refer to electrode（6）, when microwave signal is in coplanar wave guide transmission, the piezoelectric cantilever（4）It is pulled down by electrostatic force, piezoelectric material layer
（7）Deformation is generated therewith, according to piezoelectric effect, piezoelectric material layer（7）The distribution of upper charge changes, generation and microwave power
One-to-one voltage carries out the detection of microwave power by detecting voltage.
2. the piezoelectric type microwave power detector of the d33 based on cantilever beam according to claim 1, it is characterised in that：It is described
Piezoelectric cantilever（4）For piezoelectric cantilever made of copper, aluminium or titanium.
3. the piezoelectric type microwave power detector of the d33 based on cantilever beam according to claim 1, it is characterised in that：It is described
Bridge pier is polysilicon, aluminium, copper, bridge pier made of tungsten or titanium.
4. the piezoelectric type microwave power detector of the d33 based on cantilever beam according to claim 1, it is characterised in that：It is described
Mass block（3）For mass block made of nickel, cobalt, aluminium or copper.
5. the piezoelectric type microwave power detector of the d33 based on cantilever beam according to claim 1, it is characterised in that：It is described
Dielectric layer（5）For ZrO2、SiO2、Si3N4Or dielectric layer made of mica.
6. the piezoelectric type microwave power detector of the d33 based on cantilever beam according to claim 1, it is characterised in that：It is described
Piezoelectric material layer（7）For piezoelectric material layer made of ZnO, PZT-5 series or AlN.
7. the piezoelectric type microwave power detector of the d33 based on cantilever beam according to claim 1, it is characterised in that：It is described
Interdigital electrode（6）For interdigital electrode made of platinum, gold, copper, titanium or aluminium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820608969.0U CN208043929U (en) | 2018-04-26 | 2018-04-26 | The piezoelectric type microwave power detector of d33 based on cantilever beam |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201820608969.0U CN208043929U (en) | 2018-04-26 | 2018-04-26 | The piezoelectric type microwave power detector of d33 based on cantilever beam |
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| CN208043929U true CN208043929U (en) | 2018-11-02 |
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| CN201820608969.0U Expired - Fee Related CN208043929U (en) | 2018-04-26 | 2018-04-26 | The piezoelectric type microwave power detector of d33 based on cantilever beam |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108279330A (en) * | 2018-04-26 | 2018-07-13 | 南京邮电大学 | The piezoelectric type microwave power detector of d33 based on cantilever beam |
| CN111050256A (en) * | 2019-12-17 | 2020-04-21 | 武汉大学 | Miniaturized high-sensitivity piezoelectric microphone |
| WO2021036653A1 (en) * | 2019-08-28 | 2021-03-04 | 武汉大学 | High-sensitivity piezoelectric microphone |
-
2018
- 2018-04-26 CN CN201820608969.0U patent/CN208043929U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108279330A (en) * | 2018-04-26 | 2018-07-13 | 南京邮电大学 | The piezoelectric type microwave power detector of d33 based on cantilever beam |
| CN108279330B (en) * | 2018-04-26 | 2023-09-19 | 南京邮电大学 | Cantilever beam-based d33 piezoelectric microwave power sensor |
| WO2021036653A1 (en) * | 2019-08-28 | 2021-03-04 | 武汉大学 | High-sensitivity piezoelectric microphone |
| US11902740B2 (en) | 2019-08-28 | 2024-02-13 | Wuhan Memsonics Technologies Co., Ltd. | High-sensitivity piezoelectric microphone |
| CN111050256A (en) * | 2019-12-17 | 2020-04-21 | 武汉大学 | Miniaturized high-sensitivity piezoelectric microphone |
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| TR01 | Transfer of patent right |
Effective date of registration: 20191203 Address after: Room 107, floor 1, No. 30-06, GuangYue Road, Qixia street, Nanjing Economic and Technological Development Zone, Nanjing, Jiangsu Province Patentee after: Nanjing Erxin Electronic Co.,Ltd. Address before: 210023 Jiangsu city of Nanjing province Ya Dong new Yuen Road No. 9 Patentee before: NANJING University OF POSTS AND TELECOMMUNICATIONS |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181102 |
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| CF01 | Termination of patent right due to non-payment of annual fee |