CN208057701U - A kind of Coupled Rigid-flexible sliding block and motion platform - Google Patents
A kind of Coupled Rigid-flexible sliding block and motion platform Download PDFInfo
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- CN208057701U CN208057701U CN201820304709.4U CN201820304709U CN208057701U CN 208057701 U CN208057701 U CN 208057701U CN 201820304709 U CN201820304709 U CN 201820304709U CN 208057701 U CN208057701 U CN 208057701U
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- rigid
- sliding block
- flexible sliding
- coupled
- flexible
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Abstract
The utility model discloses a kind of Coupled Rigid-flexible sliding block and motion platforms.Wherein, a kind of Coupled Rigid-flexible sliding block, including：Slide unit, the rigid frame on the slide unit, the guide pad being connect by flexible hinge chain group with the rigid frame, the tensile force adjusting mechanism that the rigid frame can be made to be deformed.The utility model can realize the fine compensation of micro-displacement and error with flexible deformation in micro-displacement pattern and moving end using Low rigidity pattern；In the high-speed motion stage, using stiffness mode is done, reduce component during the motion, vibration, improve control bandwidth.
Description
Technical field
The utility model is related to the technical fields of high speed and precision motion control field, more particularly, to a kind of hard and soft coupling
Close sliding block.
Background technology
High speed and precision motion control field, the motion based on mechanical contact kinematic pair are flat by rail friction and work
The influence of platform elastic vibration, precision can only achieve micron order.Higher precision require occasion, industrially need using air supporting,
The modes such as magnetic suspension and hydrostatic slideway even are eliminated the influence of friction to reduce, of high cost, and use environment requires high, discomfort application
With the electronic manufacture occasion having a large capacity and a wide range.However, electronics manufacturing Moore's Law (when price is constant, can on integrated circuit
The number of the component of receiving will about be doubled every 18-24 months, and performance will also promote one times) to encapsulation equipment essence
Degree and speed are proposed harsh requirement.The manufacture of semiconductor of 5-7nm of new generation, it is desirable that encapsulation precision reaches submicron order,
It must seek new the linear guide form.
First technology：
A kind of single driving Coupled Rigid-flexible precision movement platforms of CN201610508540.X and its implementation and application, it is single to drive
Dynamic Rigid-flexible Coupled Motion platform, realizes Rigid-flexible Coupled Motion, but work area is small.In addition, bear crooked deformability compared with
Difference.
CN201510948662.6 flexible linears kinematic pair has used gum cover between linear bearing and other connecting components,
The invention flexible linear kinematic pair is allow to absorb the various errors that processing and manufacturing and installation generate.
Rigid-flexible Coupled Motion may be implemented in the first above-mentioned invention, but needs to change the form of workbench, promotes
Coming may be relatively difficult.In addition, if there is fatigue life, when needing to make of the titanium alloy of high fatigue life, integral platform
It makes, it is of high cost.Finally, the High-speed precision positioning of flexible hinge, it is also necessary to have suitable damping.Second of invention is in linear axis
It holds and increases gum cover between shell, to absorb foozle.
Invention content
To solve the problems, such as the frictional dead of mechanical contact kinematic pair, the utility model proposes existing machinery contact is straight
Line guide rail slide block transform Coupled Rigid-flexible sliding block as so that realizes that the structure of Rigid-flexible Coupled Motion is compacter, haves no need to change work
Make flat form, it is easier to promote.
In order to solve the above technical problems, the technical solution adopted in the utility model is：
A kind of Coupled Rigid-flexible sliding block, the Coupled Rigid-flexible sliding block include：Slide unit, on the slide unit
Rigid frame, the guide pad being connect by flexible hinge chain group with the rigid frame.
Further, which further includes that the tensile force that the rigid frame can be made to be deformed adjusts machine
Structure.
Further, the tensile force adjusting mechanism includes：It is provided with the wedge-shaped briquetting of chamfering and is arranged in the rigid frame
Chamfering on frame；The chamfering of the wedge shape briquetting presses the chamfering of the rigid frame, so that the rigid frame is deformed.
Further, the Coupled Rigid-flexible sliding block include at least a pair of bottom for being mounted on the rigid frame in opposite directions respectively and
The wedge-shaped briquetting on top.
Further, the wedge-shaped briquetting passes through screw adjusting elasticity.
Further, the Coupled Rigid-flexible sliding block further includes adjustable damper；The adjustable damper connects with the guide pad
It connects.
A kind of motion platform, the motion platform include：The motion platform includes：Pedestal, the linear guide, guide rail are slided
Block, workbench and the linear actuator for driving the workbench；Wherein, the guide rail slide block is slided for Coupled Rigid-flexible above-mentioned
Block.
Compared with prior art, advantageous effect is：The utility model proposes Coupled Rigid-flexible sliding blocks, are contacted in existing machinery
On formula straight-line guide rail slide block, increase by one layer of flexible hinge scheme, to be mended by flexible deformation in the linear guide speed zero crossing
Repay frictional dead.On original sliding block, rigidity adjustable flexibility hinge and adjustable damper are being installed additional with workpiece junction,
It is made of the material of high fatigue life, workbench is mounted on the guide pad of flexible hinge support, is realized defeated in accurate displacement
Go out the bit shift compensation with friction in pairs dead zone.Become with elasticity using Low rigidity pattern in micro-displacement pattern and movement latter end
Shape realizes the fine compensation of micro-displacement and error；Reduce motion platform using high rigidity pattern in the high-speed motion stage and transporting
Vibration during dynamic improves control bandwidth.
Description of the drawings
Fig. 1 is the Coupled Rigid-flexible slide block schematic diagram of the utility model.
Fig. 2 is the implementation schematic diagram of the utility model.
Specific implementation mode
The attached figures are only used for illustrative purposes and cannot be understood as limitating the patent；It is attached in order to more preferably illustrate the present embodiment
Scheme certain components to have omission, zoom in or out, does not represent the size of actual product；To those skilled in the art,
The omitting of some known structures and their instructions in the attached drawings are understandable.Being given for example only property of position relationship described in attached drawing
Illustrate, should not be understood as the limitation to this patent.
As shown in Figure 1, a kind of Coupled Rigid-flexible sliding block comprising：Slide unit 3, the rigid frame on slide unit 3
Frame 7, the guide pad 11 being connect by flexible hinge chain group 8 with rigid frame 7.
Preferably, which further includes the tensile force adjusting mechanism for making rigid frame be deformed.The tensioning
Power regulating mechanism includes that the first tensile force of wedge shape adjusts briquetting 9 and the second tensile force adjusting briquetting 10.First tensile force is adjusted
Briquetting 9 and the second tensile force adjust briquetting 10 and are respectively arranged with the chamfering 13,14 that can press rigid frame.11 downside of guide pad
It is provided with and places the groove that the second tensile force adjusts briquetting 10,11 upside of guide pad, which is provided with, places the first tensile force adjusting briquetting
9 groove.Be equipped in the middle part of two sides on rigid frame with the chamfering of two briquettings 13,14 matched chamferings 15, first
Clamp force adjusts briquetting 9 and the second tensile force adjusts the opposite top and bottom installed with rigid frame respectively of briquetting 10.Guide pad
11 middle parts are equipped with through-hole, the first tensile force adjusts briquetting 9 and is equipped with through-hole, and the second tensile force adjusts briquetting 10 and is equipped with threaded hole.Spiral shell
Nail be each passed through from above first tensile force adjust the through-hole of briquetting 9,11 middle part of guide pad through-hole after be screwed into bottom second and open
Clamp force adjusts the threaded hole of briquetting 10.When bolt is tightened, briquetting forces rigid frame both sides to deform outward, to realize flexibility
The stiffness tuning of hinge 8.
Preferably, rigid frame 7 is also equipped with adjustable damper 12 and is connect with guide pad 11, the resistance of usual adjustable damper 12
Buddhist nun's regulation handle is installed outwardly, facilitates the adjusting of adjustable damper 12
In one embodiment, the Coupled Rigid-flexible sliding block of the utility model can be used in motion platform, as shown in Figure 2.
The motion platform includes：Pedestal 21, the linear guide 22, Coupled Rigid-flexible sliding block 23, linear motor stator electric 24, linear motor rotor
25, grating ruler reading head 26 and workbench 27.The linear guide 22 and linear motor stator electric 24 are installed, Coupled Rigid-flexible is slided on pedestal 21
Block 23 is mounted in the linear guide 22.Workbench 27 bolt and grating ruler reading head 26, linear motor rotor 25, rigid frame
The guide pad at middle part links together, and a usual workbench needs four Coupled Rigid-flexible sliding blocks 23, workbench 27 and pedestal
Grating scale and linear motor stator electric 24 on 21 are detected by non-contact composition and driving element.For safety, gone back on pedestal 21
It is mounted with anticollision device, collision-prevention device 28.
Obviously, above-described embodiment of the utility model is only intended to clearly illustrate the utility model example, and
It is not the restriction to the embodiment of the utility model.For those of ordinary skill in the art, in above description
On the basis of can also make other variations or changes in different ways.There is no need and unable to give all embodiments
It is exhaustive.All any modification, equivalent and improvement made within the spirit and principle of the present invention etc., should be included in
Within the protection domain of the utility model claims.
Claims (7)
1. a kind of Coupled Rigid-flexible sliding block, which is characterized in that the Coupled Rigid-flexible sliding block includes：Slide unit is mounted on the cunning
Rigid frame on dynamic component, the guide pad being connect by flexible hinge chain group with the rigid frame.
2. Coupled Rigid-flexible sliding block according to claim 1, which is characterized in that the Coupled Rigid-flexible sliding block further includes that can make institute
State the tensile force adjusting mechanism that rigid frame is deformed.
3. Coupled Rigid-flexible sliding block according to claim 2, which is characterized in that the tensile force adjusting mechanism includes：Setting
There are the wedge-shaped briquetting of chamfering and the chamfering being arranged on the rigid frame；
The chamfering of the wedge shape briquetting presses the chamfering of the rigid frame, so that the rigid frame is deformed.
4. Coupled Rigid-flexible sliding block according to claim 3, which is characterized in that the Coupled Rigid-flexible sliding block includes at least a pair
It is mounted on the bottom of the rigid frame and the wedge-shaped briquetting on top in opposite directions respectively.
5. Coupled Rigid-flexible sliding block according to claim 3 or 4, which is characterized in that the wedge shape briquetting is adjusted by screw
It is elastic.
6. the Coupled Rigid-flexible sliding block according to any one of claim 1-4, which is characterized in that the Coupled Rigid-flexible sliding block is also
Including adjustable damper；The adjustable damper is connect with the guide pad.
7. a kind of motion platform, the motion platform include：Pedestal, the linear guide, guide rail slide block, workbench and for driving
State the linear actuator of workbench；
It is characterized in that, the guide rail slide block is claim 1-6 any one of them Coupled Rigid-flexible sliding blocks.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820304709.4U CN208057701U (en) | 2018-03-05 | 2018-03-05 | A kind of Coupled Rigid-flexible sliding block and motion platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820304709.4U CN208057701U (en) | 2018-03-05 | 2018-03-05 | A kind of Coupled Rigid-flexible sliding block and motion platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208057701U true CN208057701U (en) | 2018-11-06 |
Family
ID=63991198
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820304709.4U Withdrawn - After Issue CN208057701U (en) | 2018-03-05 | 2018-03-05 | A kind of Coupled Rigid-flexible sliding block and motion platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208057701U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108386447A (en) * | 2018-03-05 | 2018-08-10 | 广东工业大学 | A kind of Coupled Rigid-flexible sliding block and motion platform |
-
2018
- 2018-03-05 CN CN201820304709.4U patent/CN208057701U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108386447A (en) * | 2018-03-05 | 2018-08-10 | 广东工业大学 | A kind of Coupled Rigid-flexible sliding block and motion platform |
| CN108386447B (en) * | 2018-03-05 | 2023-10-03 | 广东工业大学 | Rigid-flexible coupling sliding block and motion platform |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20181106 Effective date of abandoning: 20231003 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20181106 Effective date of abandoning: 20231003 |