CN208023110U - Monocrystalline silicon growing device and guide shell - Google Patents
Monocrystalline silicon growing device and guide shell Download PDFInfo
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- CN208023110U CN208023110U CN201820391580.5U CN201820391580U CN208023110U CN 208023110 U CN208023110 U CN 208023110U CN 201820391580 U CN201820391580 U CN 201820391580U CN 208023110 U CN208023110 U CN 208023110U
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- cone cylinder
- cylinder
- guide shell
- groove
- protrusion
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Abstract
The utility model proposes a kind of monocrystalline silicon growing device and guide shells.The guide shell of the utility model includes outer barrel, inner cylinder and cone cylinder.Inner cylinder is set in outer barrel.Cone cylinder is set in inner cylinder, and the inner surface of cone cylinder side wall has protrusion and/or groove, and the heat transfer coefficient of cone cylinder is all higher than the heat transfer coefficient of inner cylinder.
Description
Technical field
The utility model is related to a kind of monocrystalline silicon growing device and guide shells.
Background technology
With the development of photovoltaic industry, the demand of monocrystalline silicon is higher and higher.Currently, the method for manufacture monocrystalline silicon
Generally there are vertical pulling method, floating zone method and platy-monocrystal growth method etc., wherein due to the equipment and work of monocrystalline growth with czochralski silicon
Skill is relatively simple, and production efficiency is high, and is easy to control the impurity concentration in monocrystalline, thus application is relatively broad.Wherein, vertical pulling method
Used single crystal growing furnace is important monocrystalline silicon growing device, and thermal field is housed inside single crystal growing furnace, and thermal field is equipped with guide shell.It can make lazy
Property gas (such as argon gas) air-flow can from top to bottom pass through guide shell import thermal field inside, take away the SiO of silicon superjacent, and
Cool down to monocrystalline silicon, increase its longitudinal temperature gradient, makes monocrystalline fast-growth.
Existing guide shell is usually the materials such as graphite, and internal longitudinal temperature gradient is relatively small, internal usually to set
There is one layer of heat-conducting piece, the heat of silicon single crystal rod can be dissipated to heat-conducting piece, to increase longitudinal temperature gradient.But the heat-conducting piece
Surface is smooth bright surface, is easy the heat that silicon single crystal rod distributes being reflected back silicon single crystal rod, causes monocrystalline silicon growing fast
Rate reduces, to make production efficiency reduce.
Above- mentioned information is only used for reinforcing the understanding to the background of the utility model disclosed in the background technology part, because
This it may include the information not constituted to the prior art known to persons of ordinary skill in the art.
Utility model content
The purpose of the utility model is to overcome above-mentioned the deficiencies in the prior art, providing a kind of can improve monocrystalline silicon production effect
The monocrystalline silicon growing device and guide shell of rate.
The additional aspect and advantage of the utility model will be set forth in part in the description, and partly will be from retouching
It is apparent from stating, or can the acquistion by practice of the utility model.
One side according to the present utility model, a kind of guide shell, the guide shell include outer barrel, inner cylinder and cone
Cylinder.The inner cylinder is set in the outer barrel.The cone cylinder is set in the inner cylinder, and the inner surface of the cone cylinder side wall has
There are protrusion and/or groove, and the heat transfer coefficient of the cone cylinder is all higher than the heat transfer coefficient of the inner cylinder.
The inner surface of an embodiment according to the present utility model, the side wall of the cone cylinder has the protrusion and institute simultaneously
State groove.
An embodiment according to the present utility model, it is described protrusion be protrude from the cone cylinder side wall inner surface it is convex
Rib, and the fin and the groove twist extend to the other end by described cone cylinder one end.
An embodiment according to the present utility model, it is described protrusion be protrude from the cone cylinder side wall inner surface it is convex
Rib, the fin and the groove are annular, and quantity is multiple.
An embodiment according to the present utility model, the protrusion are spherical crown shape, and the groove is rounded channels, and described convex
It rises and the quantity of the groove is multiple.
An embodiment according to the present utility model, the protrusion be recessed inwardly by the side wall of the cone cylinder and one at
Type, the groove are recessed and are integrally formed outward by the side wall of the cone cylinder, the outer surface of the side wall of the cone cylinder with it is described outer
Cylinder contact.
An embodiment according to the present utility model, the cone cylinder by being spliced along multiple cylinders that central axes are distributed,
And adjacent two cylinder is fixedly connected.
An embodiment according to the present utility model, the cone cylinder are surrounded by multiple circumferentially distributed plates, and adjacent
Two described plates are fixedly connected.
The material of an embodiment according to the present utility model, the cone cylinder is molybdenum, the outer barrel and the inner cylinder
Material be graphite.
One side according to the present utility model, a kind of monocrystalline silicon growing device, including water conservancy diversion described in any one of the above embodiments
Cylinder.
As shown from the above technical solution, the utility model has at least one of following advantages and good effect：
Since the inner surface of cone cylinder side wall has protrusion and/or groove so that the inner surface of the inner wall of cone cylinder becomes bumps
Uneven structure, the heat that silicon single crystal rod distributes above can around be dissipated by the rough inner surface, and avoided or subtracted
The heat being reflected into less on silicon single crystal rod enables production efficiency to be promoted to improve the speed of growth of monocrystalline silicon.
Cone cylinder is set in inner cylinder, and the heat transfer coefficient of cone cylinder is all higher than the heat transfer coefficient of inner cylinder, and guide shell can be improved
Interior temperature gradient makes the growth rate of silicon single crystal rod increase, and improves production efficiency.
Description of the drawings
Its example embodiment is described in detail by referring to accompanying drawing, above and other feature and advantage of the utility model will
It becomes readily apparent from.
Fig. 1 is the sectional view of the utility model embodiment guide shell；
Fig. 2 is the sectional view of an embodiment of the cone cylinder of the utility model embodiment guide shell；
Fig. 3 is the schematic diagram of Fig. 2 middle conical tubes；
Fig. 4 is the sectional view of another embodiment of the cone cylinder of the utility model embodiment guide shell；
Fig. 5 is the schematic diagram of Fig. 4 middle conical tubes.
In figure：1, outer barrel；2, inner cylinder；3, cone cylinder；31, raised；32, groove；4, interlayer；5, silicon single crystal rod.
Specific implementation mode
Example embodiment is described more fully with reference to the drawings.However, example embodiment can be with a variety of shapes
Formula is implemented, and is not understood as limited to embodiment set forth herein.Although using the term of relativity, example in this specification
Relativeness of the component for another component of icon is described such as "upper", "lower", but these terms are used for this explanation
Merely for convenient in book, for example, with reference to the accompanying drawings described in exemplary direction.It is appreciated that, if the device of icon overturn
It is set to turn upside down, then the component described in "upper" will be as in the component of "lower".The term of other relativities, such as
"top", "bottom" etc. also make have similar meaning.When certain structure is in other structures "upper", it is possible to refer to that certain structural integrity is formed
In in other structures, or refer to that certain structure is " direct " to be arranged in other structures, or refers to certain structure and set by another structure " indirect "
It sets in other structures.Term "one", " one ", "the" and " described " be indicating that there are one or more elements/composition portions
Point/etc.；Term " comprising " and " having " to indicate the open meaning being included and refer in addition to list element/
Also may be present except component part/wait other element/component part/etc..
A kind of guide shell is provided in the utility model example embodiment, can be used for monocrystalline silicon growing device, the monocrystalline silicon
Grower can be single crystal growing furnace, it is of course also possible to be other monocrystalline silicon growing devices comprising guide shell, below only with monocrystalline
For stove.
As shown in Figure 1, the guide shell of present embodiment may include outer barrel 1, inner cylinder 2 and cone cylinder 3.
In one embodiment, outer barrel 1 be both ends perforation tubular structure, can have perforation upper opening and under
Opening.The material of outer barrel 1 can be graphite, and shape can be the tubular structure of cone, and upper opening is located at its big end, under
Port is located at its small end.Upper opening can be formed with outwardly extending first flange, and under shed is formed with a inwardly extending to form annular
Portion, and the edge of the ring part can be formed with convex bulge loop, which can be used as the bottom of outer barrel 1.Certainly, in this reality
With in novel other embodiment, outer barrel 1 can also be the shapes such as cylinder.
As shown in Figure 1, in one embodiment, the material of inner cylinder 2 can be graphite, and shape can be both ends perforation
Conical tubular structure, its interior taper can be more than 1 taper of outer barrel.Inner cylinder 2 can also have to be opened in its big end
Mouthful and positioned at small end under shed, the edge of the upper opening of inner cylinder 2 can extend outwardly, to be formed with the second flange.Inner cylinder 2
In outer barrel 1, and the second flange is set up on the first flange, and the upper opening of inner cylinder 2 then can be used as leading for present embodiment
The upper port of flow cartridge；Meanwhile the edge of the under shed of inner cylinder 2 can be equipped with annular groove, the edge of the under shed of inner cylinder 2 can support
It is against the ring part of the lower port of outer barrel 1, and above-mentioned annular groove coordinates with above-mentioned bulge loop, the under shed of outer barrel 1 can
The lower port of guide shell as present embodiment.
In addition, as shown in Figure 1, incubation cavity can be formed between the side wall and the side wall of inner cylinder 2 of outer barrel 1, the heat preservation
Chamber can surround inner cylinder 2 one weeks, and can be filled with heat preservation sandwich layer 4 in the incubation cavity, and heat preservation sandwich layer 4 can be graphite soft felt, consolidate
Change felt or other materials that can play insulation effect, will not enumerate herein, to improve the heat insulation effect of guide shell.
As shown in Figure 1, in one embodiment, cone cylinder 3 can be the pyramidal structure of both ends perforation, can be set to inner cylinder 2
Interior, the big end of cone cylinder 3 can be connected to above-mentioned upper port, and small end can be connected to lower port, and silicon single crystal rod 5 can be upward by lower port
Port extends.The sidewall thickness of cone cylinder 3 does not do particular determination herein, and tool side wall has outer surface and inner surface, which can be with
Inner cylinder 2 contacts, and protrusion 31 and groove 32 can be formed on the inner surface.As shown in Figures 2 and 3, protrusion 31 is fin, i.e. item
Shape structure, and protrusion 31 can be recessed inwardly integrated molding by the side wall of cone cylinder 3 so that inner surface convex, correspondingly, on outer surface
Sunk structure is then formed with 31 corresponding regions of protrusion.Protrusion 31 can in the shape of a spiral, and be extended to by one end of cone cylinder 3 another
End.
Groove 32 can be outward recessed integrated molding by the side wall of cone cylinder 3 so that inner surface is recessed outward, correspondingly, appearance
Corresponding region evagination on face, and the region of these evaginations can be bonded with inner cylinder 2, and the outer surface of cone cylinder 3 is made to be connect with inner cylinder 2
It touches, so as to utilize the gravity of itself of cone cylinder 3, you can cone cylinder 3 to be fixed in inner cylinder 2.Meanwhile the width of groove 32 can be with
Protrusion 31 it is of same size, and groove 32 in the shape of a spiral, and can extend to the other end by one end of cone cylinder 3, and with protrusion 31
It is arranged side by side.
Due to foring protrusion 31 and groove 32 on the inner surface of cone cylinder 3 so that the inner surface is rough surface,
As illustrated by the arrows in fig. 1, the heat that silicon single crystal rod 5 distributes can by protrusion 31 surface and groove 32 surface reflection, and to
Surrounding dissipates, and to avoid or reduce the heat being reflected on silicon single crystal rod 5, to improve the speed of growth of monocrystalline silicon, makes life
Production efficiency is promoted.Meanwhile the outer surface of cone cylinder 3 is contacted with inner cylinder 2, can prevent the powdered graphite of inner cylinder 2 from falling into down
In the silicon solution of side, the carbon content of monocrystalline silicon is advantageously reduced, to improve the quality of product.
As shown in Figure 4 and Figure 5, in another embodiment of the utility model, protrusion 31 is fin, and equal with groove 32
For ring-type, the quantity of protrusion 31 and groove 32 be it is multiple, multiple raised 31 and multiple grooves 32 along the central axes side of cone cylinder 3
To distribution, and protrusion 31 and groove 32 be spaceds setting one by one, i.e. between two protrusions 31 there are one groove 32, between two grooves 32
Only there are one protrusions 31.Protrusion 31 in present embodiment equally can be by cone cylinder 3 side convex and integrated molding, groove 32 it is same
Sample can be recessed and be integrally formed outward by the side wall of cone cylinder 3.
In a further embodiment of the utility model, protrusion 31 may be the structure of spherical crown shape, and groove 32 can be
The quantity of rounded channels, protrusion 31 and groove 32 is multiple, and is uniformly distributed in the side wall of cone cylinder 3, i.e., protrusion 31 and groove 32 are in
Spot distribution.The generation type of protrusion 31 and groove 32 in present embodiment, can be equally by the side wall concave, convex and one of cone cylinder 3
Body formed, this will not be detailed here.
In the other embodiment of the utility model, the outer surface of cone cylinder 3 can be the smooth conical surface, and only inner surface
For rough surface.The inner surface of cone cylinder 3 also can only form protrusion 31 without forming groove 32, alternatively, can also only shape
At groove 32, protrusion 31 is not formed.
As shown in Figure 1, in one embodiment, the thermal coefficient of cone cylinder 3 is more than the heat conduction system of inner cylinder 2 and outer barrel 1
The molybdenum that thermal coefficient is higher than graphite can be used in number, for example, the material of cone cylinder 3.Certainly, cone cylinder 3 can also be other materials,
As long as the thermal coefficient of cone cylinder 3 is made to be higher than outer barrel 1 and inner cylinder 2, will not enumerate herein.
In one embodiment, cone cylinder 3 may include multiple cylinders, such as two, three or more, not be spy herein
It is different to limit.Each cylinder may each be the pyramidal structure of both ends perforation.Each cylinder can be sequentially distributed along central axes, be spliced into cone
Cylinder 3, and two neighboring cylinder can be fixedly connected by modes such as welding, riveting or clampings.
In another embodiment of the utility model, cone cylinder 3 may include multiple plates, such as two, three or more
It is multiple, particular determination is not done herein.Each plate may each be arc panel, and circumferentially distributed, and surround cone cylinder 3, and adjacent
Two cylinder plates can be fixedly connected by modes such as welding, riveting or clampings.
In the other embodiment of the utility model, cone cylinder 3 can also be integral structure.
The utility model embodiment also provides a kind of monocrystalline silicon growing device, which can be monocrystalline
Stove may include the guide shell of any of the above-described embodiment.Certainly, it includes to lead which, which can also be other,
The monocrystalline silicon growing device of flow cartridge, will not enumerate herein.
The monocrystalline silicon growing device and guide shell of the utility model example embodiment, due to the inner surface shape of cone cylinder side wall
At there is protrusion 31 and/or groove 32 so that the inner surface of the inner wall of cone cylinder 3 becomes rough structure, above silicon single crystal rod 5
The heat distributed can around be dissipated by the rough inner surface, and avoid or reduce the heat being reflected on silicon single crystal rod 5
Amount, to improve the speed of growth of monocrystalline silicon, enables the production efficiency of monocrystalline silicon to be promoted.Meanwhile cone cylinder 3 is set to inner cylinder 2
It is interior, and the heat transfer coefficient of cone cylinder 3 is all higher than the heat transfer coefficient of inner cylinder 2, and the temperature gradient in guide shell can be improved, make monocrystalline silicon
The growth rate of stick 5 increases, to improve the production efficiency of monocrystalline silicon.
It should be appreciated that the utility model be not limited in its application to this specification proposition component detailed construction and
Arrangement.The utility model can have other embodiment, and can realize and execute in many ways.Aforementioned change
Shape form and modification are fallen in the scope of the utility model.It should be appreciated that this reality of this disclosure and restriction
It is mentioned or all alternative groups of two or more apparent independent features with the novel text and/or drawings that extend to
It closes.All these different combinations constitute multiple alternative aspects of the utility model.Embodiment described in this specification is said
The best mode for becoming known for realizing the utility model is illustrated, and those skilled in the art will be enable new using this practicality
Type.
Claims (10)
1. a kind of guide shell, which is characterized in that the guide shell includes：
Outer barrel；
Inner cylinder is set in the outer barrel；
Cone cylinder is set in the inner cylinder, and the inner surface of the cone cylinder side wall has protrusion and/or a groove, and the cone cylinder
Heat transfer coefficient is all higher than the heat transfer coefficient of the inner cylinder.
2. guide shell according to claim 1, which is characterized in that the inner surface of the side wall of the cone cylinder has described simultaneously
The raised and described groove.
3. guide shell according to claim 2, which is characterized in that the protrusion is to protrude from the interior table of the cone cylinder side wall
The fin in face, and the fin and the groove twist extend to the other end by described cone cylinder one end.
4. guide shell according to claim 2, which is characterized in that the protrusion is to protrude from the interior table of the cone cylinder side wall
The fin in face, the fin and the groove are annular, and quantity is multiple.
5. guide shell according to claim 2, which is characterized in that the protrusion is spherical crown shape, and the groove is rounded channels,
And the protrusion and the quantity of the groove are multiple.
6. guide shell according to claim 2, which is characterized in that the protrusion be recessed inwardly by the side wall of the cone cylinder and
Be integrally formed, the groove by the cone cylinder side wall outward be recessed and be integrally formed, the outer surface of the side wall of the cone cylinder with
The outer barrel contact.
7. guide shell according to claim 1, which is characterized in that the cone cylinder is spelled by the multiple cylinders being distributed along central axes
It connects, and adjacent two cylinder is fixedly connected.
8. guide shell according to claim 1, which is characterized in that the cone cylinder is enclosed by multiple circumferentially distributed plates
At, and adjacent two described plates are fixedly connected.
9. according to claim 1-8 any one of them guide shells, which is characterized in that the material of the cone cylinder is molybdenum, described outer
The material of cylinder and the inner cylinder is graphite.
10. a kind of monocrystalline silicon growing device, which is characterized in that including claim 1 to 9 any one of them guide shell.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820391580.5U CN208023110U (en) | 2018-03-21 | 2018-03-21 | Monocrystalline silicon growing device and guide shell |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820391580.5U CN208023110U (en) | 2018-03-21 | 2018-03-21 | Monocrystalline silicon growing device and guide shell |
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| Publication Number | Publication Date |
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| CN208023110U true CN208023110U (en) | 2018-10-30 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021243993A1 (en) * | 2020-06-05 | 2021-12-09 | 隆基绿能科技股份有限公司 | Heat exchange device and single crystal furnace |
-
2018
- 2018-03-21 CN CN201820391580.5U patent/CN208023110U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021243993A1 (en) * | 2020-06-05 | 2021-12-09 | 隆基绿能科技股份有限公司 | Heat exchange device and single crystal furnace |
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| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181030 Termination date: 20200321 |
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| CF01 | Termination of patent right due to non-payment of annual fee |