CN207992557U - A kind of light-beam scanner - Google Patents
A kind of light-beam scanner Download PDFInfo
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- CN207992557U CN207992557U CN201820325905.XU CN201820325905U CN207992557U CN 207992557 U CN207992557 U CN 207992557U CN 201820325905 U CN201820325905 U CN 201820325905U CN 207992557 U CN207992557 U CN 207992557U
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Abstract
The utility model discloses a kind of light-beam scanners, including：MEMS scanning mirrors, there are two rotation axis and a speculum, speculum can simultaneously rotate the MEMS scanning mirrors tool around two rotation axis；Driving control system, the drive system provide the drive signal of MEMS two rotation axis of scanning mirror, realize improved raster scanning.The utility model has many advantages, such as that small, sweep speed is fast, the pattern of scanning is uniform.The corner control mode that the utility model passes through change two rotation axis of MEMS scanning mirrors, realize that laser radar forms equally distributed scan pattern in space, it solves the problems, such as that scan pattern is complicated in MEMS scanning mirror scan methods, scanning is non-uniform, improves the efficiency of scanning, reduces the complexity of Lidar image procession.
Description
Technical field
The utility model belongs to laser radar technique field, and in particular to a kind of light-beam scanner.
Background technology
Laser radar has high resolution, few by environmental disturbances as a kind of high-precision active three-dimensional imaging sensor
Feature is widely used in fields such as unmanned vehicle, unmanned planes.Laser scanning imaging technology is frequently with scanning imagery mode, with micro-
The development of mechanical ＆ electrical technology (MEMS), the feature that the light weight of MEMS scanning mirrors, sweep speed are fast, at low cost make it be expected to substitution biography
The mechanical scanner of system becomes main scanning means.
Currently, the scan mode based on MEMS scanning mirrors mainly has Lee's Sa such as formula and raster pattern two ways.Li Sa such as formulas
In scan mode, the drive signal of two rotation axis of MEMS scanning mirrors is all the sinusoidal signal of certain frequency, and scan pattern compares
Complexity, while also certain intractability is caused to the processing of laser radar 3-D view.Raster scanning theoretically comes
Say it is a kind of a kind of Lee's Sa such as scan mode that the frequency ratio of two axis sinusoidal drive signals of MEMS scanning mirrors is larger, it is both above
Mode all has that sparse both sides among scan pattern are close, the non-uniform disadvantage of scanning.And in the real work of laser radar, it is right
Target near among image is more concerned about.
Invention content
It is described the utility model proposes a kind of light-beam scanner in order to solve the technical problems existing in the prior art
Scanning means includes：
MEMS scanning mirrors, the MEMS scanning mirrors have the first rotation axis, the second rotation axis and speculum；The reflection
Mirror deflected as rotary shaft using first rotation axis and/or the second rotation axis under the driving of drive signal and, driving
Control system, the driving control system provide the MEMS scanning mirrors and are sent out around first rotation axis and/or the second rotation axis
The drive signal of raw deflection.
Further, the speculum is different around the deflection frequency of first rotation axis, the second rotation axis.
Further, the MEMS scanning mirrors further comprise that angular measurement sensor, the angular measurement sensor are integrated in described
On speculum, the angular measurement sensor is configured to the angle signal of output MEMS scanning mirrors rotation.
Further, the driving control system includes driving signal generator, the driving signal generator quilt
It is configured to generate the drive signal.
Further, the drive signal includes the first drive signal and the second drive signal, first drive signal
It is respectively used to drive the first rotation axis and the second rotation axis of the MEMS scanning mirrors with the second drive signal.
Preferably, first drive signal and the second drive signal are respectively sine wave and mixing triangular wave.
Preferably, the mixing triangular wave includes stair-stepping waveform.
Preferably, the driving control system further includes feedback control system, described in the feedback control system control
MEMS scanning mirrors are according to the first drive signal and the second drive signal.
Further, MEMS scanning mirrors realize improved raster scanning under the driving of the drive signal.
The advantageous effect that the utility model can reach：
By changing the corner control mode of two rotation axis of MEMS scanning mirrors, realize that laser radar is formed uniformly in space
The scan pattern of distribution solves the problems, such as that scan pattern is complicated in MEMS scanning mirror scan methods, scanning is non-uniform, improves scanning
Efficiency, reduce Lidar image procession complexity.
Description of the drawings
Specific embodiment of the present utility model is described in further detail below in conjunction with the accompanying drawings；
Fig. 1 is according to the utility model embodiment based on the laser radar scanning schematic device for improving raster scanning.
Fig. 2 is the drive signal schematic diagram according to two rotation axis of MEMS scanning mirrors of the utility model embodiment.
Fig. 3 is to be illustrated according to the drive signal partial enlargement of two rotation axis of MEMS scanning mirrors of the utility model embodiment
Figure.
Fig. 4 is according to the utility model embodiment based on the forward scan schematic diagram for improving raster-scan method.
Fig. 5 is according to the utility model embodiment based on the reverse scanning schematic diagram for improving raster-scan method.
Specific implementation mode
In order to make those skilled in the art more fully understand the scheme of this specification, below in conjunction with attached in embodiment
Figure, is clearly and completely described the technical solution in this specification embodiment, it is clear that described embodiment is only
A part of the embodiment of this specification, rather than whole examples.The embodiment of base in this manual, ordinary skill
The every other embodiment that personnel are obtained without making creative work should all belong to this specification protection
Range.
In one embodiment of this specification, as shown in Figure 1 and Figure 2, provide a kind of based on the laser for improving raster scanning
Radar scanner, including MEMS scanning mirrors 15 and driving control system 10, driving control system include that 2 drive signals occur
Device and 2 feed back control systems.Fast axle driving signal generator 11 generates the (sinusoidal signal in such as Fig. 2 of sinusoidal signal 21
Sinusoidal signal 41 in 31 and Fig. 3), it is input in fast axle feed back control system 12, fast axle feed back control system 12 is swept from MEMS
The angle feedback signal 23 that mirror 15 inputs fast axle is retouched, while output drive signal 22 arrives MEMS scanning mirrors 15, passes through feedback control
Ensure that the rotational angle of MEMS scanning mirror fast axles is identical as the sinusoidal signal 21 in Fig. 2.Slow axis driving signal generator 13 produces
Raw mixing triangular wave 24 (sinusoidal signal 42 in sinusoidal signal 32 and Fig. 3 in such as Fig. 2), is input to slow axis feed back control system
In 14, slow axis feed back control system inputs the angle feedback signal 26 of fast axle, while output drive signal from MEMS scanning mirrors 15
25 arrive MEMS scanning mirrors 15, ensure the mixing triangular wave in the rotational angle and Fig. 2 of MEMS scanning mirror fast axles by feedback control
24 is identical.The drive signal of two rotation axis of MEMS scanning mirrors of Fig. 2 is the drive signal in a cycle, aforementioned a cycle
Forward scan and reverse scanning two parts can be divided into again, generate forward scan pattern 51 and reverse scanning pattern 61.
In one embodiment of this specification, to solve, scan pattern in MEMS scanning mirror scan methods is complicated, scans
Non-uniform problem improves the efficiency of scanning.The device includes：MEMS scanning mirrors, there are two rotations for the MEMS scanning mirrors tool
Axis and a speculum, speculum can simultaneously be rotated around two rotation axis；Driving control system, the drive system provide
The drive signal of two rotation axis of MEMS scanning mirrors, realizes improved raster scanning.The MEMS scanning mirrors include two rotations
Axis and a speculum, the speculum can rotate the rotation for realizing two axis, two axis around described two rotation axis
One frequency height of rotation, a frequency it is low.The MEMS scanning mirrors further comprise angular measurement sensor, the angular measurement sensor
It is integrated on MEMS scanning mirrors, the angular measurement sensor is configured to the angle signal of output MEMS scanning mirrors rotation.Institute
It includes driving signal generator to state driving control system, and the driving signal generator is configured to generate two drives
Dynamic signal, described two drive signals respectively drive two axis of MEMS scanning mirrors.Described two drive signals are respectively sine
Wave and mixing triangular wave, the mixing triangular wave are including stair-stepping waveform.It, can according to above-mentioned laser radar scanning device
Choosing, the driving control system further comprises that feedback control system, the feedback control system control MEMS scanning mirrors are pressed
It is rotated according to drive signal.
The foregoing description of the disclosed embodiments enables professional and technical personnel in the field to realize or use this practicality new
Type.Various modifications to these embodiments will be apparent to those skilled in the art, and determine herein
The General Principle of justice can be realized in other embodiments without departing from the spirit or scope of the present utility model.Cause
This, the utility model is not intended to be limited to the embodiments shown herein, and is to fit to and principles disclosed herein
The widest range consistent with features of novelty.
Claims (9)
1. a kind of light-beam scanner, which is characterized in that the scanning means includes：
MEMS scanning mirrors, the MEMS scanning mirrors have the first rotation axis, the second rotation axis and speculum；
The speculum occurs under the driving of drive signal using first rotation axis and/or the second rotation axis as rotary shaft inclined
Turn
And
Driving control system, the driving control system provide the MEMS scanning mirrors around first rotation axis and/or second
The drive signal that rotation axis deflects.
2. light-beam scanner according to claim 1, which is characterized in that the speculum around first rotation axis,
The deflection frequency of second rotation axis is different.
3. according to light-beam scanner shown in claim 2, which is characterized in that the MEMS scanning mirrors further comprise angle measurement
Sensor, the angular measurement sensor are integrated on the speculum, and the angular measurement sensor is configured to output MEMS and sweeps
Retouch the angle signal of mirror rotation.
4. according to light-beam scanner shown in claim 1, which is characterized in that the driving control system includes drive signal
Generating means, the driving signal generator are configured to generate the drive signal.
5. according to light-beam scanner shown in claim 1, which is characterized in that the drive signal includes the first drive signal
With the second drive signal, first drive signal and the second drive signal are respectively used to drive the first of the MEMS scanning mirrors
Rotation axis and the second rotation axis.
6. according to light-beam scanner shown in claim 5, which is characterized in that first drive signal and the second driving letter
Number be respectively sine wave and mixing triangular wave.
7. according to light-beam scanner shown in claim 6, which is characterized in that the mixing triangular wave includes stair-stepping wave
Shape.
8. according to light-beam scanner shown in claim 5, which is characterized in that the driving control system further includes feedback control
System processed, the feedback control system control the MEMS scanning mirrors according to the first drive signal and the second drive signal.
9. according to light-beam scanner shown in claim 1, which is characterized in that drive of the MEMS scanning mirrors in the drive signal
Under dynamic, improved raster scanning is realized.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820325905.XU CN207992557U (en) | 2018-03-09 | 2018-03-09 | A kind of light-beam scanner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820325905.XU CN207992557U (en) | 2018-03-09 | 2018-03-09 | A kind of light-beam scanner |
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| Publication Number | Publication Date |
|---|---|
| CN207992557U true CN207992557U (en) | 2018-10-19 |
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| CN201820325905.XU Active CN207992557U (en) | 2018-03-09 | 2018-03-09 | A kind of light-beam scanner |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109991611A (en) * | 2019-04-30 | 2019-07-09 | 上海禾赛光电科技有限公司 | Two-dimensional scanner and its driving method |
| CN111751982A (en) * | 2019-03-29 | 2020-10-09 | 成都理想境界科技有限公司 | Scanning display method and device |
| CN111788514A (en) * | 2018-12-07 | 2020-10-16 | 北京航迹科技有限公司 | Light turning mirror assembly |
-
2018
- 2018-03-09 CN CN201820325905.XU patent/CN207992557U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111788514A (en) * | 2018-12-07 | 2020-10-16 | 北京航迹科技有限公司 | Light turning mirror assembly |
| CN111788514B (en) * | 2018-12-07 | 2022-11-29 | 北京航迹科技有限公司 | Light turning mirror assembly |
| CN111751982A (en) * | 2019-03-29 | 2020-10-09 | 成都理想境界科技有限公司 | Scanning display method and device |
| CN109991611A (en) * | 2019-04-30 | 2019-07-09 | 上海禾赛光电科技有限公司 | Two-dimensional scanner and its driving method |
| CN109991611B (en) * | 2019-04-30 | 2020-07-03 | 上海禾赛光电科技有限公司 | Two-dimensional scanning device and driving method thereof |
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