A kind of Transmission system of CIGS glass substrates
Technical field
The utility model is related to the preparing technical field of CIGS glass substrates more particularly to a kind of CIGS glass substrates
Transmission system.
Background technology
Clean energy resource is safely directly generated by the solar cell of solar power generation, it may be said that it is before most developing
One of power generation system of scape.And thin-film solar cells makes it have higher frequently with copper indium gallium selenide (being known as CIGS) base
Photoelectric conversion efficiency, therefore, occupation rate of market increases sharply.And in the preparation process of CIGS glass substrates, it needs to glass
Glass substrate upper and lower surface carries out process.As shown in Figure 1, vaporation-type CIGS equipment needs to do technique in lower glass surface, so
And glass substrate 1 from upper track technique reach the regions CIGS when, technique is face-up.Then, overturning upper piece platform 2 is needed glass substrate
It is put on carriage 4 after 1 overturning, then carriage 4 and glass substrate 1 enter vaporation-type CIGS equipment and carry out at technique together
Reason.After the completion of processing, glass substrate 1 is turned into the face-up form of technique by overturning bottom sheet platform 3 again, and is made it into down together
Process.Since glass substrate is after CIGS equipment high temperature process, deformation ratio is larger, and switching mechanism is being drawn
When tilting more substrate, sucker is directly born against on glass substrate, easily makes its crushing.Therefore, how treatment process is improved
In transmission control, so that fragment rate of the glass substrate in processing procedure is declined, have great importance.
Utility model content
The utility model provides a kind of Transmission system of CIGS glass substrates, solves existing transmission control glass substrate and exists
When carrying out process in CIGS equipment, easily there is broken problem, can improve reliability that product in preparation process transmits and
Accuracy reduces manufacturing cost.
In order to achieve the above object, the utility model provides following technical scheme:
A kind of Transmission system of CIGS glass substrates, including:Transfer control, detection device, turnover device;
Detection device, for detecting the deflection for operating in the multiple positions of the glass substrate in CIGS equipment;
Turnover device includes absorbing unit and roll-over unit, and the absorbing unit is described for adsorbing the glass substrate
Roll-over unit is used to control the overturning of the glass substrate;
The transfer control being connect with the detection device and the turnover device signal, for according to described in receiving
The distance between deformation amount controlling absorbing unit and the glass substrate.
Preferably, the roll-over unit includes:Upset motor and torsion shaft;
One end of the torsion shaft is sequentially connected with upset motor, and the other end of the torsion shaft is passed with the absorbing unit
Dynamic connection.
Preferably, the absorbing unit includes:First servo motor, the second servo motor, the first lift arm and the second lift
Rise arm;
The first servo motor is used to control the lifting of first lift arm;
Second servo motor is used to control the lifting of second lift arm;
First lift arm and second lift arm are vertically arranged with the torsion shaft, first lift arm and institute
It states and is equipped with multiple suckers in the second lift arm.
Preferably, the detection device includes:First range sensor and second distance sensor;
First range sensor is used to detect the first setting position and the setting reference plane of the glass baseplate surface
The first distance, the second distance sensor is used to detect the second setting position of the glass baseplate surface and setting benchmark
The second distance in face;
When first distance and the difference of the second distance are more than difference threshold, the transfer control passes through institute
It states first servo motor or second servo motor adjusts the lifting position of first lift arm or second lift arm.
Preferably, the Transmission system of CIGS glass substrates further includes:Jacking system;The jacking system is controlled with the transmission
Device signal connection processed, the jacking system are arranged in the lower section of the glass substrate;
The jacking system includes:Pedestal and thimble, the thimble are vertically arranged on the base, thimble position and institute
The sucker position for stating absorbing unit corresponds, and the area for the one side that the thimble is contacted with the glass substrate is more than corresponding
The area that the sucker is contacted with the glass substrate.
Preferably, the jacking system further includes:Driving equipment is lifted, the lifting driving equipment is for driving the bottom
Seat lifting.
Preferably, the lifting driving equipment includes following any equipment:Cylinder, lifting motor.
Preferably, further include:Carriage, the carriage include:Outline border, support bar and limited post;
The outline border is square structure, and the middle part of the outline border is equipped with the support bar, multiple institutes are arranged on the outline border
State limited post;
When the glass substrate is placed in the carriage, the limited post limits the glass substrate,
The support bar provides support to the middle part of the glass substrate;
When the turnover device adsorbs the glass substrate, the jacking system jacks up the glass substrate to described
The specified location of limited post.
Preferably, the limited post is arranged by axial symmetry of the support bar on the outline border.
Preferably, further include:First limit switch and the second limit switch;
First limit switch is serially connected between the first input end and power ground of the transfer control, and described second
Limit switch is serially connected between the second input terminal of the transfer control and power ground;
First limit switch is arranged in the first defined position of the CIGS equipment, and second limit switch is set
It sets in the second defined position of the CIGS equipment.
The utility model provides a kind of Transmission system of CIGS glass substrates, and the change of glass substrate is detected by detection device
Shape amount is controlled the distance between absorbing unit and the glass substrate of turnover device by transfer control, to adjust glass substrate
Easily there is broken asks when the existing transmission control glass substrate of solution carries out process in CIGS equipment in stress balance
Topic can improve product transmits in preparation process reliability and accuracy, reduce manufacturing cost.
Description of the drawings
It, below will be to needed in the embodiment attached in order to illustrate more clearly of specific embodiment of the utility model
Figure is briefly described.
Fig. 1:It is the schematic diagram that existing glass substrate conveys in CIGS equipment;
Fig. 2:It is a kind of Transmission system structure chart of CIGS glass substrates provided by the utility model;
Fig. 3:It is the schematic top plan view of the utility model Fig. 2;
Fig. 4:It is the jacking system support schematic diagram that the utility model embodiment provides;
Fig. 5:It is carriage structural schematic diagram provided by the utility model;
Fig. 6:It is transfer control control schematic diagram provided by the utility model.
Reference numeral
1 glass substrate
2 overturning upper piece platforms
3 overturning bottom sheet platforms
4 carriages
41 limited posts
42 support bars
5 absorbing units
51 first lift arms
52 second lift arms
6 roll-over units
61 torsion shafts
7 jacking systems
71 thimbles
72 pedestals
8 detection devices
M1 upset motors
M2 first servo motors
The second servo motors of M3
The first limit switches of K1
The second limit switches of K2
Specific implementation mode
In order to make those skilled in the art more fully understand the scheme of the utility model embodiment, below in conjunction with the accompanying drawings and
Embodiment is described in further detail the utility model embodiment.
When the process of the CIGS glass substrates in being prepared for current thin-film solar cells, due to glass substrate work
Skill handles temperature distortion, easily makes absorption unbalance stress of the transmission equipment to glass substrate, causes to be crushed.The utility model provides one
The Transmission system of kind CIGS glass substrates, solves the problem above-mentioned, and can improve the reliability and standard that product transmits in preparation process
True property reduces manufacturing cost.
As shown in Fig. 2, a kind of transmission control system of CIGS glass substrates, including:Transfer control (not shown),
Detection device 8, turnover device.Detection device 8 is for detecting the deformation for operating in the multiple positions of the glass substrate in CIGS equipment
Amount.Turnover device includes absorbing unit 5 and roll-over unit 6, and the absorbing unit 5 is described to turn over for adsorbing the glass substrate 1
Turn overturning of the unit 6 for controlling the glass substrate 1, the upper surface of the glass substrate 1 is made to face upward or downward.With the inspection
The transfer control that device 8 is connected with the turnover device signal is surveyed, for according to the deformation amount controlling absorption received
The distance between unit 5 and the glass substrate 1.
Specifically, the deflection of detection device detection glass substrate multiple positions, and by the deflection of each position
Be sent to transfer control, the transfer control according to the deflection adjust between absorbing unit and glass substrate away from
From making each absorption position stress balance of glass substrate.Fragment rate when making process of the glass substrate in CIGS equipment
Decline, improve the reliability and accuracy that product transmits in preparation process, reduces manufacturing cost.
As shown in figure 3, the roll-over unit 6 includes:Upset motor M1 and torsion shaft 61.One end of the torsion shaft 61 with
Upset motor M1 is sequentially connected, and the other end of the torsion shaft 61 is sequentially connected with the absorbing unit 5.
As shown in figure 3, the absorbing unit 5 includes:First servo motor M2, the second servo motor M3, the first lift arm
51 and second lift arm 52.The first servo motor M2 is used to control the lifting of first lift arm 51.Described second watches
Take liftings of the motor M3 for controlling second lift arm 52.First lift arm 51 and second lift arm 52 with
The torsion shaft 61 is vertically arranged, and multiple suckers are equipped with (in figure in first lift arm 51 and second lift arm 52
It is not shown).Specifically, first servo motor M2 and the second servo motor M3 may be provided on torsion shaft 61.
In practical applications, the Transmission system of CIGS glass substrates can also include more servo motors, each sucker
It is all controlled by a lift arm, by keeping the adsorptive pressure of each sucker and glass substrate available the control of servo motor
Adjustment.It should be noted that the actuation or release of sucker can also be controlled by transfer control.
The detection device 8 includes:First range sensor and second distance sensor.First range sensor is used
The first distance in the first setting position and setting reference plane for detecting the glass baseplate surface, the second distance sensor
Second distance for the second setting position and setting reference plane of detecting the glass baseplate surface.First distance with
When the difference of the second distance is more than difference threshold, the transfer control passes through the first servo motor or described second
Servo motor adjusts the lifting position of first lift arm or second lift arm, to reduce the Acetabula device to described
The adsorptive pressure that glass substrate generates.
It should be noted that may also set up multiple range sensors, each sucker suction position is measured, to
To more accurate deflection, keep the adjustment to Acetabula device more accurate.
As shown in figs. 2 to 4, which further includes:Jacking system 7.The jacking system 7 and the transfer control signal
Connection, the jacking system 7 are arranged in the lower section of the glass substrate 1, and the jacking system 7 includes:Pedestal 72 and thimble 71,
The thimble 71 is vertically set on the pedestal 72.The suction of the thimble position and the absorbing unit 5 of the jacking system 7
Disk position corresponds, the area of the one side that the thimble is contacted with the glass substrate more than the corresponding sucker with it is described
The area of glass substrate contact.Specifically, when the turnover device 7 adsorbs the glass substrate 1, the sucker is pressed onto described
It is adsorbed on glass substrate, the thimble 71 carries out jack-up support in the sucker position to the glass substrate 1.
Further, the jacking system further includes:Driving equipment is lifted, the lifting driving equipment is for driving the bottom
Seat lifting, makes the thimble jack up the glass substrate by the sucker position.
Further, the lifting driving equipment includes following any equipment:Cylinder, lifting motor.Specifically, described
Telescopic-cylinder movement can be controlled by compressed air by lifting driving equipment, to drive the pedestal of jacking system to carry out elevating movement,
Directly pedestal can also be lifted by lifting motor, is determined with specific reference to actual needs.
As shown in figure 5, the system further includes:Carriage, the carriage 4 include:Outline border, support bar 42 and limited post
41.The outline border is square structure, and the middle part of the outline border is equipped with the support bar 42, multiple limits are arranged on the outline border
Position column 42.When the glass substrate is placed in the carriage, the limited post limits the glass substrate, institute
It states support bar and provides support to the middle part of the glass substrate.When the turnover device adsorbs the glass substrate, the top
The glass substrate is jacked up the specified location to the limited post 41 by lifting device 7.
Further, the limited post 41 is that axial symmetry is arranged on the outline border with the support bar 42.
In practical applications, when carrying out rotary movement, jacking system 7 jacks up glass substrate, makes the bottom of glass substrate
At 2/3 height of limited post 41 (shown in Fig. 4).Limited post can be taper, and glass substrate is 2/3 high limited post 41
When at degree, between the two apart from larger.Both glass substrate can be made not skid off limited post 41 in this way, ensure the position of glass substrate
It sets, and can prevent glass substrate from scraping limited post 41 and fragmentation.
As shown in fig. 6, the system further includes:First limit switch K1 and the second limit switch K2.First limit is opened
It closes K1 to be serially connected between the first input end and power ground of the transfer control, the second limit switch K2 is serially connected in described
Between the second input terminal and power ground of transfer control.The first limit switch K1 is arranged the first of the CIGS equipment
In defined position, when the glass substrate is transmitted to the first defined position, the first limit switch K1 is closed, described
Transfer control controls the turnover device and overturns the glass substrate, keeps the following table of the glass substrate face-up,
And it is placed on the carriage.The first limit switch K2 is arranged in the second defined position of the CIGS equipment,
When the glass substrate is transmitted to the second defined position, the second limit switch K2 is closed, the transfer control control
It makes the turnover device to overturn the glass substrate, keeps the following table of the glass substrate face-down, and be placed into specified
On station.
In practical applications, the first limit switch may be provided at overturning upper piece platform, and second limit switch can be arranged
At overturning bottom sheet platform.Enter before CIGS equipment carries out process in the glass substrate and overturn, makes glass substrate
Following table is face-up.After completing process, glass substrate can be overturn at overturning bottom sheet platform.
The transfer control includes:AD conversion unit, microprocessor and D/A conversion unit.The microprocessor
Input terminal is connected with the output end of the AD conversion unit, the output end of the microprocessor and the D/A conversion unit
Input terminal is connected, the input terminal of the input terminal of the AD conversion unit as the transfer control, the digital-to-analogue conversion list
Output end of the output end of member as the transfer control.The microprocessor can be microcontroller.
As it can be seen that the utility model provides a kind of Transmission system of CIGS glass substrates, glass base is detected by detection device
The deflection of plate is controlled the distance between absorbing unit and the glass substrate of turnover device by transfer control, to adjust glass
The stress balance of substrate is easily crushed when the existing transmission control glass substrate of solution carries out process in CIGS equipment
The problem of, the reliability and accuracy that product transmits in preparation process can be improved, manufacturing cost is reduced.
The structure, feature and effect of the utility model are described in detail according to diagrammatically shown embodiment above, with
Upper described is only the preferred embodiment of the utility model, but the utility model is to limit practical range shown in drawing, it is every according to
Change made by conception according to the utility model, or be revised as the equivalent embodiment of equivalent variations, still without departing from specification and figure
When showing covered spirit, it should be within the protection scope of the present utility model.