CN204615598U - Air-float guide rail formula linear electric motors module - Google Patents
Air-float guide rail formula linear electric motors module Download PDFInfo
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- CN204615598U CN204615598U CN201520306428.9U CN201520306428U CN204615598U CN 204615598 U CN204615598 U CN 204615598U CN 201520306428 U CN201520306428 U CN 201520306428U CN 204615598 U CN204615598 U CN 204615598U
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Abstract
The utility model relates to electron product checking device technical field, refer in particular to a kind of air-float guide rail formula linear electric motors module, comprise track base and linear electric motors, described linear electric motors comprise the motor slide rail, electric mover and the multiple permanent-magnet stator that are fixed on track base, have air supporting interval between the outer wall of motor slide rail and electric mover inwall; The top of described electric mover offers throttle orifice, and the outer wall of electric mover is equiped with the gas be communicated with throttle orifice and connects mouth.High pressure gas enters air supporting interval through throttle orifice, and high pressure gas is filled in the whole air supporting interval between the outer wall of motor slide rail and electric mover inwall, bearing capacity on the tension force that high pressure gas produces and electric mover air supporting gap-forming work air film when mutually balancing, by work gas film lubrication between electric mover and motor slide rail, thus the frictional resistance reduced to a greater extent between the two, improve the response speed of linear electric motors and the running precision of air-float guide rail.
Description
Technical field
The utility model relates to linear module technical field, refers in particular to a kind of air-float guide rail formula linear electric motors module.
Background technology
The XY air-flotation workbench that permanent magnet linear synchronous motor drives, has a wide range of applications in elaborate servo fields such as semiconductor lithography, the inspection of PC plate and boring, processing of wafers processing, ion implantation, electronic assemblies and measurement of coordinates.As the drive motors of XY air-flotation workbench, permanent magnet linear synchronous motor has the features such as Great inertia, high speed, high accuracy and high thrust, and meanwhile, the temperature rise of motor also can realize good control, to stop the copper loss of motor to reject heat to external environment, affect the resolution of whole system.
Compared with the coreless permanent magnet linear electric motors driving XY air-flotation workbench to move used, dynamic armature type permanent magnet linear synchronous motor has the large advantage of pushing force density active force that is large and unit sizes.This permanent magnet linear synchronous motor adopts monolateral magnet steel to arrange, and cost is lower; The more important thing is, the iron core of permanent magnet linear synchronous motor directly contacts with armature winding, and its cooling surface area increases, and meanwhile, its elementary yoke portion is easy to arrange water-cooling structure, and this makes its heat dispersion fine.To permanent magnet linear synchronous motor by rational structural design, Electromagnetic Design and Motor Optimizing Design, effectively can reduce the impact of slot effect, meanwhile, the mover of motor is supported by air-float guide rail, can eliminate frictional force, improves the positioning precision of linear electric motors.The main drawback of existing permanent magnet linear synchronous motor is that linear electric motors need configuration at least two air-float guide rails that the mover of linear electric motors can be made to keep stability and balance, but its complicated structure, need in a device to take larger space, and trueness error when controlling is comparatively large, be difficult to satisfy the demands.
Summary of the invention
The technical problems to be solved in the utility model is to provide that a kind of structure is simple, installation dimension is little, control precision is high, the air-float guide rail formula linear electric motors module of fast response time.
In order to solve the problems of the technologies described above, the utility model adopts following technical scheme: a kind of air-float guide rail formula linear electric motors module, comprise track base and linear electric motors, described linear electric motors comprise the motor slide rail being fixed on track base, the electric mover be connected with motor slide rail and word order and are arranged at multiple permanent-magnet stators on motor slide rail, the both sides of electric mover are provided with a slide block sidepiece, one section of activity of described motor slide rail is embedded between two slide block sidepieces, has air supporting interval between the outer wall of motor slide rail and electric mover inwall; The top of described electric mover offers throttle orifice, and this throttle orifice extends to air supporting interval, and the outer wall of electric mover is equiped with the gas be communicated with throttle orifice and connects mouth.
Preferably, described permanent-magnet stator is cuboid, and is arranged at described motor slide rail in a word array.
Preferably, the angle between described permanent-magnet stator and motor slide rail is 70 ~ 90 degree.
Preferably, the lower end inside of described slide block sidepiece is provided with protuberance, and the top of this protuberance abuts with the lower surface of motor slide rail.
Preferably, the cross section of described track base is in " T " font stood upside down.
Preferably, the quantity that described gas connects mouth is eight, and the both sides outer wall of described electric mover arranges four gas respectively and connects mouth.
Preferably, the two ends of described track base are all equiped with anticreep end plate.
The beneficial effects of the utility model are: the utility model provides a kind of air-float guide rail formula linear electric motors module, gas connects mouth for connecting high-pressure air source equipment, when high-pressure air source equipment connects mouth air feed to gas, high pressure gas enters air supporting interval through throttle orifice, and high pressure gas is filled in the whole air supporting interval between the outer wall of motor slide rail and electric mover inwall, bearing capacity on the tension force that high pressure gas produces and electric mover air supporting gap-forming work air film when mutually balancing, thus achieve the suspension of electronics mover, by work gas film lubrication between electric mover and motor slide rail, thus the frictional resistance reduced to a greater extent between the two, improve the response speed of linear electric motors and the running precision of air-float guide rail, structure is more simply small and exquisite, practicality is stronger.
Accompanying drawing explanation
Fig. 1 is the perspective view of the utility model air-float guide rail formula linear electric motors module.
Fig. 2 is the stereochemical structure decomposing schematic representation of the utility model air-float guide rail formula linear electric motors module.。
Fig. 3 is the cross-sectional view of the utility model air-float guide rail formula linear electric motors module.
Embodiment
For the ease of the understanding of those skilled in the art, be further described the utility model below in conjunction with embodiment and accompanying drawing, the content that execution mode is mentioned is not to restriction of the present utility model.
As shown in accompanying drawing 1 to Fig. 3, a kind of air-float guide rail formula linear electric motors module, comprise track base 1 and linear electric motors, described linear electric motors comprise the motor slide rail 2 being fixed on track base 1, the electric mover 3 be connected with motor slide rail 2 and word order and are arranged at multiple permanent-magnet stators 4 on motor slide rail 2, the both sides of electric mover 3 are provided with a slide block sidepiece 5, one section of activity of described motor slide rail 2 is embedded between two slide block sidepieces 5, has air supporting interval 6 between the outer wall of motor slide rail 2 and electric mover 3 inwall; The top of described electric mover 3 offers throttle orifice 7, and this throttle orifice 7 extends to air supporting interval 6, and the outer wall of electric mover 3 is equiped with the gas be communicated with throttle orifice 7 and connects mouth 8.
Gas connects mouth 8 for connecting high-pressure air source equipment, when high-pressure air source equipment connects mouth 8 air feed to gas, high pressure gas enters air supporting interval 6 through throttle orifice 7, and high pressure gas is filled in the whole air supporting interval 6 between the outer wall of motor slide rail 2 and electric mover 3 inwall, bearing capacity on the tension force that high pressure gas produces and electric mover 3 forms work air film in air supporting interval 6 when mutually balancing, thus achieve the suspension of electronics mover, by work gas film lubrication between electric mover 3 and motor slide rail 2, thus the frictional resistance reduced to a greater extent between the two, improve the response speed of linear electric motors and the running precision of air-float guide rail, structure is more simply small and exquisite, practicality is stronger.
In the present embodiment, described permanent-magnet stator 4 is cuboid, and is arranged at described motor slide rail 2 in a word array.In the present embodiment, angle between described permanent-magnet stator 4 and motor slide rail 2 is 90 degree, the magnetic flux that electric mover 3 produces after passing into alternating current in mover, according to Lenz's law, the metallic plate of electric mover 3 induces eddy current, eddy current and magnetic flux density will then produce continuous print thrust by expense Lay explicit law, thus realize the driving function back and forth of electric mover 3 in linear electric motors.
Certainly, angle between described permanent-magnet stator 4 and motor slide rail 2 can also be 70 ~ 85 degree, because permanent-magnet stator 4 has certain oblique angle when being arranged in juxtaposition, electric mover 3 presents the process of transition gradually between adjacent two permanent-magnet stators 4 during transition, thus improve the running stability of electric mover 3, control precision is higher, and the operation stability of linear electric motors is higher, vibrate less, practicality is stronger.
In the present embodiment, the lower end inside of described slide block sidepiece 5 is provided with protuberance 9, the top of this protuberance 9 abuts with the lower surface of motor slide rail 2, concrete, the cross section of described track base 1 is in " T " font stood upside down, preferably, the quantity that described gas connects mouth 8 is eight, the both sides outer wall of described electric mover 3 arranges four gas respectively and connects mouth 8, four gas of both sides connect mouth 8 and are arranged symmetrically with, throttle orifice 7 is evenly arranged in the inwall of electric mover 3, and the buoyancy produced electric mover 3 to make air pressure is balanced, and stability when electric mover 3 moves operation is higher.
Preferably, the two ends of described track base 1 are all equiped with anticreep end plate 10, and produce contingency to prevent electric mover 3 from slidably reciprocating to departing from from track base during end, fail safe is higher.
Above-described embodiment is the utility model preferably implementation, and in addition, the utility model can also realize by alternate manner, and under the prerequisite not departing from the technical program design, any apparent replacement is all within protection range of the present utility model.
Claims (7)
1. air-float guide rail formula linear electric motors module, comprise track base (1) and linear electric motors, it is characterized in that: described linear electric motors comprise the motor slide rail (2) being fixed on track base (1), the electric mover (3) be connected with motor slide rail (2) and word order are arranged at the multiple permanent-magnet stators (4) on motor slide rail (2), the both sides of electric mover (3) are provided with a slide block sidepiece (5), one section of activity of described motor slide rail (2) is embedded between two slide block sidepieces (5), air supporting interval (6) is had between the outer wall of motor slide rail (2) and electric mover (3) inwall,
The top of described electric mover (3) offers throttle orifice (7), and this throttle orifice (7) extends to air supporting interval (6), and the outer wall of electric mover (3) is equiped with the gas be communicated with throttle orifice (7) and connects mouth (8).
2. air-float guide rail formula linear electric motors module according to claim 1, is characterized in that: described permanent-magnet stator (4) is cuboid, and is arranged at described motor slide rail (2) in a word array.
3. air-float guide rail formula linear electric motors module according to claim 1, is characterized in that: the angle between described permanent-magnet stator (4) and motor slide rail (2) is 70 ~ 90 degree.
4. air-float guide rail formula linear electric motors module according to claim 1, it is characterized in that: the lower end inside of described slide block sidepiece (5) is provided with protuberance (9), the top of this protuberance (9) abuts with the lower surface of motor slide rail (2).
5. air-float guide rail formula linear electric motors module according to claim 4, is characterized in that: the cross section of described track base (1) is in " T " font stood upside down.
6. air-float guide rail formula linear electric motors module according to claim 1, is characterized in that: the quantity that described gas connects mouth (8) is eight, the both sides outer wall of described electric mover (3) arranges four gas respectively and connects mouth (8).
7. air-float guide rail formula linear electric motors module according to claim 1, is characterized in that: the two ends of described track base (1) are all equiped with anticreep end plate (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520306428.9U CN204615598U (en) | 2015-05-13 | 2015-05-13 | Air-float guide rail formula linear electric motors module |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520306428.9U CN204615598U (en) | 2015-05-13 | 2015-05-13 | Air-float guide rail formula linear electric motors module |
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| CN204615598U true CN204615598U (en) | 2015-09-02 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106533114A (en) * | 2015-09-15 | 2017-03-22 | Lg伊诺特有限公司 | Stepping motor |
| CN108494165A (en) * | 2018-03-09 | 2018-09-04 | 西安工业大学 | The straight purging of ultraprecise floats hydrostatic slideway component |
| WO2022041436A1 (en) * | 2020-08-28 | 2022-03-03 | 瑞声声学科技(深圳)有限公司 | Air gap adjustable linear motor |
-
2015
- 2015-05-13 CN CN201520306428.9U patent/CN204615598U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106533114A (en) * | 2015-09-15 | 2017-03-22 | Lg伊诺特有限公司 | Stepping motor |
| CN106533114B (en) * | 2015-09-15 | 2020-10-23 | Lg伊诺特有限公司 | Stepping motor |
| CN108494165A (en) * | 2018-03-09 | 2018-09-04 | 西安工业大学 | The straight purging of ultraprecise floats hydrostatic slideway component |
| CN108494165B (en) * | 2018-03-09 | 2024-01-26 | 西安工业大学 | Ultra-precise direct-drive air floatation hydrostatic guideway assembly |
| WO2022041436A1 (en) * | 2020-08-28 | 2022-03-03 | 瑞声声学科技(深圳)有限公司 | Air gap adjustable linear motor |
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| C14 | Grant of patent or utility model | ||
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Address after: Room 101, Building 7, No. 232, Hongtu Road, Nancheng Street, Dongguan City, Guangdong Province, 523073 Patentee after: DONGGUAN SMARTWIN INTELLIGENT EQUIPMENT Co.,Ltd. Address before: Room 106, Floor 1, Building F, Phase I, Goldman Sachs Science Park, No. 5, Longxi Road, Zhouxi, Nancheng District, Dongguan City, Guangdong Province, 523000 Patentee before: DONGGUAN SMARTWIN INTELLIGENT EQUIPMENT Co.,Ltd. |