CN207637763U - Automatic round silicon wafer reversing machine - Google Patents
Automatic round silicon wafer reversing machine Download PDFInfo
- Publication number
- CN207637763U CN207637763U CN201721238234.5U CN201721238234U CN207637763U CN 207637763 U CN207637763 U CN 207637763U CN 201721238234 U CN201721238234 U CN 201721238234U CN 207637763 U CN207637763 U CN 207637763U
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- Prior art keywords
- basket
- silicon chip
- piece
- material position
- process chamber
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 89
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 84
- 239000010703 silicon Substances 0.000 title claims abstract description 84
- 230000007246 mechanism Effects 0.000 claims abstract description 33
- 238000000034 method Methods 0.000 claims abstract description 26
- 230000008569 process Effects 0.000 claims abstract description 25
- 239000000463 material Substances 0.000 claims description 74
- 238000012545 processing Methods 0.000 claims description 19
- 238000001514 detection method Methods 0.000 claims description 8
- 239000002184 metal Substances 0.000 abstract description 15
- 229910052751 metal Inorganic materials 0.000 abstract description 15
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000002955 isolation Methods 0.000 abstract 2
- 230000000087 stabilizing effect Effects 0.000 abstract 1
- 238000011109 contamination Methods 0.000 description 6
- 230000007306 turnover Effects 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000012864 cross contamination Methods 0.000 description 3
- 230000007812 deficiency Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 241001062009 Indigofera Species 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- SBEQWOXEGHQIMW-UHFFFAOYSA-N silicon Chemical compound [Si].[Si] SBEQWOXEGHQIMW-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model provides an automatic circular silicon chip rewinding machine, including frame, first process chamber and second process chamber, first process chamber and the relative isolation setting of second process chamber set up the rewinding piece in the middle of the frame, and rewinding piece includes first rewinding mechanism and second rewinding mechanism, and first rewinding mechanism sets up in first process chamber, and second rewinding mechanism sets up in the second process chamber. The beneficial effects of the utility model are that solve with pitch with specification piece basket inversion manual operation not enough and avoided the metal pollution problem that clean regional piece basket and metal regional piece basket produced, automatic circular silicon chip inversion machine makes the clean district and the complete isolation of metal area piece basket, avoids clean district piece basket metal to stain, realizes stabilizing high-efficient output.
Description
Technical field
The utility model belongs to silicon chip manufacturing machine technical field, more particularly, to a kind of automatic circular silicon chip rewinder.
Background technology
With the rapid development of semicon industry, semi-conductor silicon chip production capacity expands increasingly, needs a kind of automation equipment real
Reviewing of the existing circle silicon chip between of the same race basket.It can be related to several work region when silicon chip produces, be roughly divided into clean area
Domain (such as ten thousand grades of cleanings, thousand grades of cleanings etc.), gray area, metallic region etc..Due to cleanliness factor difference, tooling and piece basket etc. is needed to exist
It trans-regional cannot be used during use.For example, the piece basket of clean area can only be used in clean area, the piece of metallic region
Basket can only be used in metallic region.Therefore, the reviewing problem between of the same race basket is just produced in actual production engineering.
Currently, clean area and the reviewing of metallic region semi-conductor silicon chip are led using jig by manually reviewing
To transmission of the realization semi-conductor silicon chip in piece basket and piece basket.
The operating method of such manual reviewing has the following disadvantages：
1, manual work fault rate is high；
2, special messenger need to be equipped with to operate；
3, the piece basket of clean area and the piece basket of metallic region will produce cross contamination (metal)；
To solve be manually operated insufficient of pitch same specification piece basket reviewing and avoiding clean area piece basket and metallic region
The rnetal contamination problem that piece basket generates need to design and develop fully-automatic equipment and realize reviewing technology, make clean area and metal area piece basket
It is completely isolated, avoid clean area piece basket metal contamination, realize stability and high efficiency output.
Invention content
The purpose of this utility model is to provide a kind of automatic circular silicon chip rewinder, solves manual work in the prior art and loses
Accidentally rate is high and needs the deficiency of special messenger's operation.
In order to solve the above technical problems, the technical solution adopted in the utility model is：A kind of automatic circular silicon chip rewinder,
Including rack, the first process chamber and second processing room, first process chamber and the second processing room are relatively isolated setting, institute
Setting reviewing portion among rack is stated, the reviewing portion includes the first rewinding device and the second rewinding device, first rewinder
Structure is arranged in first process chamber, and second rewinding device is arranged in the second processing room.
Preferably, the reviewing portion includes：
Transmitting device, through the reviewing portion, for transmitting round silicon chip；
First sensor is set in first rewinding device, is located on the initial position of the transmitting device, is used for
Whether there is or not round silicon chips for detection；
Second sensor is set in second rewinding device, is located at the tail end of the transmitting device, has for detection
Without round silicon chip；
Driving device is transmitted, the side of the transmitting device is set to, for driving transmitting device；
First silicon chip locating piece is set in first rewinding device, including silicon chip locating piece one and silicon chip locating piece
Two, the silicon chip locating piece one and the opposite both sides for being set to the transmitting device of the silicon chip locating piece two.
Second silicon chip locating piece is set in second rewinding device, including silicon chip locating piece three and silicon chip locating piece
Four, the silicon chip locating piece three and the opposite both sides for being set to the transmitting device of the silicon chip locating piece four.
Preferably, first process chamber further includes：Full blue upper material position, feeding bit flipping mechanism and upper material position promote dress
It sets, wherein
Full blue upper material position, for placing and transmitting full blue supplied materials；
Feeding bit flipping mechanism overturns full blue supplied materials, so that piece basket is in and stand up state；
Upper material position lifting device is risen the piece basket in cube state by pitch.
Preferably, further include material position under sky basket in first process chamber, material position and the full basket feeding under the sky basket
Position is oppositely arranged on the both sides of the feeding turnover mechanism.
Preferably, the upper material position lifting device includes,
First basket Y-direction fixing device and first basket X are fixedly clamped to piece basket to fixing device；
First basket Y-direction drives electric cylinders, is connect, is used for by the first connector with first basket Y-direction fixing device
The piece basket being clamped and fixed is driven to be risen or declined by the pitch of setting.
Preferably, the second processing room further includes：Empty blue upper material position, blanking bit flipping mechanism and lower material position promote dress
It sets, wherein
Empty blue upper material position, the silicon chip to come is conveyed for storing the transmitting device；
Lower material position lifting device is declined the piece basket in the state that stands up by pitch, forms full blue state；
Blanking bit flipping mechanism overturns the full piece basket stood up, piece basket is made to be in traverse state.
Preferably, further include material position under full basket in the second processing room, material position and the empty basket feeding under the full basket
Position is oppositely arranged on the both sides of the blanking turnover mechanism, and material position exports the piece basket for filling silicon chip under the full basket.
Preferably, the lower material position lifting device includes,
Second basket Y-direction fixing device and second basket X are fixedly clamped to piece basket to fixing device；
Second basket Y-direction drives electric cylinders, is connect, is used for by the second connector with second basket Y-direction fixing device
The piece basket being clamped and fixed is driven to be risen or declined by the pitch of setting.
Preferably, further include that setting handles indoor air-supply arrangement described first, the air-supply arrangement forced draft is blown
To the second processing room.
The utility model has the advantages and positive effects of：
1. the high loss of fragment rate caused by eliminating manual work error using equipment automatization, and automation equipment without
Special messenger is needed to operate, operator can take into account other equipment and carry out operation simultaneously, reduce personnel cost.
2. automatic circular silicon chip rewinder is divided in two regions, respectively by the clean siding of center setting by equipment
For clean area and metallic region, metallic region is blowed to by the forced draft of clean area.In this way, can reach completely isolated cleaning
The purpose of piece basket and sheet metal basket avoids clean piece basket from causing metallic pollution.
3. automatic circular silicon chip rewinder solves the deficiency being manually operated with pitch same specification piece basket reviewing and avoids
The rnetal contamination problem that clean area piece basket and metallic region piece basket generate makes the completely isolated of clean area and metal area piece basket,
It under the premise of not generating cross contamination, realizes the automatic reviewing of round silicon chip, avoids clean area piece basket metal contamination, realize steady
Fixed efficient output.
Description of the drawings
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the overlooking structure diagram of the utility model；
Fig. 3 is the structural schematic diagram of the utility model silicon chip detent mechanism；
Fig. 4 is the structural schematic diagram of the utility model feeding (blanking) lifting device.
In figure：
1, material position 2, upper material position lifting device 3, feeding bit flipping mechanism on full basket
4, material position 5 under empty basket, rewinding device 6, material position on empty basket
7, material position under lower material position hoisting mechanism 8, blanking bit flipping mechanism 9, full basket
10, rack 21, piece basket Y-direction fixing device 22, piece basket
23, piece basket Y-direction driving electric cylinders 24,3rd sensor 25, piece basket X are to fixing device
51, sensor 52, transmitting device 53, transmission driving device
54, locating piece 1, locating piece two
Specific implementation mode
As shown in Figs. 1-3, a kind of automatic circular silicon chip rewinder of this example, including rack 10, the first process chamber and second
Process chamber, the first process chamber and second processing room are relatively isolated setting, and the first process chamber is clean area, and second processing room is gold
Belong to region, reviewing portion is set among rack 10, reviewing portion includes the first rewinding device 5 and the second rewinding device 5, the first rewinder
Identical device is oppositely arranged inside structure 5 and the second rewinding device 5, the first rewinding device 5 is arranged in the first process chamber,
Second rewinding device 5 is arranged in second processing room.Wherein, reviewing portion includes：Transmitting device 52, sensor, transmission driving dress
53 and locating piece are set, transmitting device 52 can select suitable transmitting device 52, this example basis according to needs of production
Production needs to select belt transport, through entire reviewing portion, for transmitting round silicon chip；First sensor 51 is set to
In one rewinding device 5, it is located on the initial position of transmitting device 52, for detection, whether there is or not round silicon chips；Second sensor 51, if
It is placed in the second rewinding device 5, is located at the tail end of transmitting device 52, whether there is or not round silicon chips for detection；Driving device 53 is transmitted,
It is set to the side of transmitting device 52, for driving transmitting device 52；First silicon chip locating piece, is set to the first rewinding device
It is interior, including silicon chip locating piece 1 and silicon chip locating piece 2 55, silicon chip locating piece 1 and silicon chip locating piece 2 55 is opposite sets
The both sides of transmitting device 52 are placed in, the silicon chip transmitted in feeding process is positioned.Second silicon chip locating piece, is set to second
In rewinding device, including silicon chip locating piece three and silicon chip locating piece four, silicon chip locating piece three and silicon chip locating piece four is opposite sets
The both sides of transmitting device 52 are placed in, for being positioned to the silicon chip transmitted in blanking process, wherein each unit uses bolt
It is fastened in rack, including being protected by device housings.In the course of work, silicon chip first has to by first sensor 51, to circle
Whether there is or not confirmations for silicon chip transmission, by driving driving of the transmitting device 52 to round silicon chip feed belt, are passing through fixed delay
It calculates, when silicon chip is in the first silicon chip locating piece region, silicon chip locating piece one and silicon chip locating piece two act together, to circle
Silicon chip carries out position correction.Round silicon chip after position correction is delivered in sky piece basket, realizes accurate inserted sheet.
First process chamber further includes：Full blue upper material position 1, feeding bit flipping mechanism 3 and upper material position lifting device 2, wherein full
Material position 1 in basket, for placing and transmitting full blue supplied materials；Feeding bit flipping mechanism 3 overturns full blue supplied materials, full indigo plant supplied materials
Piece basket is in traverse state, so that piece basket is in by the overturning of feeding turnover mechanism 3 and stands up state；Upper material position lifting device, it is right
Piece basket in cube state is risen by pitch.Further include material position 4 under sky basket, under empty basket material position 4 with material position 1 is opposite on full basket sets
It sets in the both sides of feeding turnover mechanism 3.Upper material position lifting device includes, first basket Y-direction fixing device 21 and first basket X to
Fixing device 25 is fixedly clamped to piece basket 22；First basket Y-direction drives electric cylinders 23, passes through with first basket Y-direction fixing device 21
First connector connects, for driving the piece basket 22 being clamped and fixed to be risen or declined by the pitch of setting.
Second processing room further includes：Empty blue upper material position 6, blanking bit flipping mechanism 8 and lower material position lifting device 7, wherein empty
Material position 6 in basket convey the silicon chip to come for storing transmitting device 52；Lower material position lifting device 7, to the piece in the state that stands up
Basket is declined by pitch, forms full blue state；Blanking bit flipping mechanism 8 overturns the full piece basket stood up, and piece basket is made to be in cross
Put state.Further include material position under full basket, material position 9 is oppositely arranged on the two of blanking turnover mechanism 8 with material position 6 on empty basket completely under basket
Side, material position 9 will fill the piece basket output of silicon chip completely under basket.Lower material position lifting device 7 includes second basket Y-direction fixing device 21
With second basket X to fixing device 25, it is fixedly clamped to piece basket；Second basket Y-direction drives electric cylinders 23, solid with second basket Y-direction
Determine device 21 to connect by the second connector, for driving the piece basket being clamped and fixed to be risen or declined by the pitch of setting.
As shown in figure 4, feeding (blanking) lifting device, empty piece basket or full piece basket are at the bottom of feeding (blanking) lifting device
On seat, is pneumatically stepped up fixing device 21 and piece basket X to fixing device 25 from piece basket Y-direction while being acted, piece basket 22 is stepped up
It is fixed, by the drive of 23 and its connector of piece basket Y-direction action drives electric cylinders stepped up fixed basket 22 rise by setting pitch or
Person declines.Simultaneously by 3rd sensor 24, whether there is or not it is true successfully carry out detection to detection circle silicon chip to slice or into piece
Recognize.
Further include that setting handles indoor air-supply arrangement first, air-supply arrangement is fixed at positioned at the first process chamber
The top of 52 tail end of transmitting device, air-supply arrangement forced draft blow to second processing room, are blowed to by the forced draft of clean area
Metallic region.In this way, can reach the purpose of completely isolated clean piece basket and sheet metal basket, clean piece basket is avoided to cause metal dirty
Dye.
The course of work of this example：First, full basket supplied materials is placed on full basket in material position by operating personnel, is transmitted by belt
To locating piece position, full basket supplied materials is overturn by feeding bit flipping mechanism, so that piece basket is in and stands up state.Turnover device will
The full piece basket for standing up state is delivered in material position lifting device, and line position of going forward side by side sets positioning, by stepping up for upper material position lifting device
Mechanism carries out position to piece basket and fixes, and is lifted by pitch to piece basket by the driving device of upper material position lifting device.Pass through round silicon
Silicon chip is taken out from piece basket and is sent to the empty piece basket of lower material position by piece transmission detent mechanism.Wait for expiring on material position lifting device
After the completion of all silicon chips extract in piece basket, feeding bit flipping mechanism can overturn piece basket, will eventually by material position under empty basket
Empty gaily decorated basket output, the empty piece basket of output is taken out complete feeding action by operator.
At the same time, the piece basket filled is passed through blanking bit flipping machine by material position hoisting mechanism under empty piece basket by empty blue upper material position
Structure carries out rotary movement to the full piece basket stood up, is that full piece basket is in traverse state.Silicon chip will be filled by material position under full basket
Piece basket is exported, and is finally taken full piece basket away by operator and is carried out next procedure processing.
The utility model has the beneficial effects that：
1. the high loss of fragment rate caused by eliminating manual work error using equipment automatization, and automation equipment without
Special messenger is needed to operate, operator can take into account other equipment and carry out operation simultaneously, reduce personnel cost.
2. automatic circular silicon chip rewinder is divided in two regions, respectively by the clean siding of center setting by equipment
For clean area and metallic region, metallic region is blowed to by the forced draft of clean area.In this way, can reach completely isolated cleaning
The purpose of piece basket and sheet metal basket avoids clean piece basket from causing metallic pollution.
3. automatic circular silicon chip rewinder solves the deficiency being manually operated with pitch same specification piece basket reviewing and avoids
The rnetal contamination problem that clean area piece basket and metallic region piece basket generate makes the completely isolated of clean area and metal area piece basket,
It under the premise of not generating cross contamination, realizes the automatic reviewing of round silicon chip, avoids clean area piece basket metal contamination, realize steady
Fixed efficient output.
One embodiment of the utility model is described in detail above, but the content is only the utility model
Preferred embodiment should not be considered as limiting the scope of the present invention.It is all to be made according to application scope of the utility model
All the changes and improvements etc., should all still belong within the patent covering scope of the utility model.
Claims (9)
1. a kind of automatic circular silicon chip rewinder, it is characterised in that：It is described including rack, the first process chamber and second processing room
First process chamber and the second processing room are relatively isolated setting, setting reviewing portion in the rack, and the reviewing portion includes the
One rewinding device and the second rewinding device, first rewinding device are arranged in first process chamber, second reviewing
Mechanism is arranged in the second processing room.
2. a kind of automatic circular silicon chip rewinder according to claim 1, it is characterised in that：The reviewing portion includes：
Transmitting device, through the reviewing portion, for transmitting round silicon chip；
First sensor is set in first rewinding device, is located on the initial position of the transmitting device, and detection is used for
Whether there is or not round silicon chips；
Second sensor is set in second rewinding device, is located at the tail end of the transmitting device, and for detection, whether there is or not circles
Shape silicon chip；
Driving device is transmitted, the side of the transmitting device is set to, for driving transmitting device；
First silicon chip locating piece is set in first rewinding device, including silicon chip locating piece one and silicon chip locating piece two, institute
State silicon chip locating piece one and the opposite both sides for being set to the transmitting device of the silicon chip locating piece two；
Second silicon chip locating piece is set in second rewinding device, including silicon chip locating piece three and silicon chip locating piece four, institute
State silicon chip locating piece three and the opposite both sides for being set to the transmitting device of the silicon chip locating piece four.
3. a kind of automatic circular silicon chip rewinder according to claim 1 or 2, it is characterised in that：First process chamber
Further include：Material position, feeding bit flipping mechanism and upper material position lifting device on full basket, wherein
Material position on full basket, for placing and transmitting full basket supplied materials；
Feeding bit flipping mechanism overturns full basket supplied materials, so that piece basket is in and stands up state；
Upper material position lifting device is risen the piece basket in cube state by pitch.
4. a kind of automatic circular silicon chip rewinder according to claim 3, it is characterised in that：In first process chamber also
Including material position under empty basket, material position is oppositely arranged on the two of feeding bit flipping mechanism with material position on the full basket under the sky basket
Side.
5. a kind of automatic circular silicon chip rewinder according to claim 3, it is characterised in that：The upper material position lifting device
Including,
First basket Y-direction fixing device and first basket X are fixedly clamped to piece basket to fixing device；
First basket Y-direction drives electric cylinders, is connect by the first connector with first basket Y-direction fixing device, for driving
The piece basket being clamped and fixed is risen or is declined by the pitch of setting.
6. a kind of automatic circular silicon chip rewinder according to claim 2, it is characterised in that：It also wraps the second processing room
It includes：Material position on empty basket, blanking bit flipping mechanism and lower material position lifting device, wherein
Material position on empty basket conveys the silicon chip to come for storing the transmitting device；
Lower material position lifting device is declined the piece basket in the state that stands up by pitch, forms full basket state；
Blanking bit flipping mechanism overturns the full piece basket stood up, piece basket is made to be in traverse state.
7. a kind of automatic circular silicon chip rewinder according to claim 6, it is characterised in that：In the second processing room also
Including material position under full basket, material position is oppositely arranged on the two of blanking bit flipping mechanism with material position on the empty basket under the full basket
Side, the piece basket output expired material position under basket and will fill silicon chip.
8. a kind of automatic circular silicon chip rewinder according to claim 6, it is characterised in that：The lower material position lifting device
Including,
Second basket Y-direction fixing device and second basket X are fixedly clamped to piece basket to fixing device；
Second basket Y-direction drives electric cylinders, is connect by the second connector with second basket Y-direction fixing device, for driving
The piece basket being clamped and fixed is risen or is declined by the pitch of setting.
9. a kind of automatic circular silicon chip rewinder according to claim 1, it is characterised in that：Further include setting described the
The one indoor air-supply arrangement of processing, the air-supply arrangement forced draft blow to the second processing room.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721238234.5U CN207637763U (en) | 2017-09-26 | 2017-09-26 | Automatic round silicon wafer reversing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721238234.5U CN207637763U (en) | 2017-09-26 | 2017-09-26 | Automatic round silicon wafer reversing machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207637763U true CN207637763U (en) | 2018-07-20 |
Family
ID=62858513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721238234.5U Active CN207637763U (en) | 2017-09-26 | 2017-09-26 | Automatic round silicon wafer reversing machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207637763U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109560030A (en) * | 2017-09-26 | 2019-04-02 | 天津环鑫科技发展有限公司 | Automatic round silicon wafer reversing machine |
-
2017
- 2017-09-26 CN CN201721238234.5U patent/CN207637763U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109560030A (en) * | 2017-09-26 | 2019-04-02 | 天津环鑫科技发展有限公司 | Automatic round silicon wafer reversing machine |
| CN109560030B (en) * | 2017-09-26 | 2024-02-09 | Tcl环鑫半导体(天津)有限公司 | Automatic circular silicon wafer rewinding machine |
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