CN207587691U - A kind of plasma discharge electrode - Google Patents
A kind of plasma discharge electrode Download PDFInfo
- Publication number
- CN207587691U CN207587691U CN201721441390.1U CN201721441390U CN207587691U CN 207587691 U CN207587691 U CN 207587691U CN 201721441390 U CN201721441390 U CN 201721441390U CN 207587691 U CN207587691 U CN 207587691U
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- China
- Prior art keywords
- aluminium base
- insulating layer
- screw rod
- adjusting screw
- fixed bed
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Abstract
The utility model is related to technical field of plasma more particularly to a kind of plasma discharge electrodes.A kind of plasma discharge electrode of the utility model, including：Power fixing frame, aluminium base, insulating layer, adjusting screw rod, compressed spring, fixed bed, alumina layer, fixing bolt, radio-frequency power supply and adjusting nut；It can be by rotating adjusting nut, the distance between fixed bed and alumina layer are adjusted via adjusting screw rod, the automatic bias of surface of insulating layer is adjusted, the ion energy characteristic and distribution situation for making surface of insulating layer reach technological requirement, so as to reduce the time for replacing electrode, the operational efficiency of plasma apparatus is improved.
Description
Technical field
The utility model is related to technical field of plasma more particularly to a kind of plasma discharge electrodes.
Background technology
With the progress of plasma technique, plasma technique has been expanded to from traditional semiconductor and micromechanics field
Field of solar energy, and gradually develop to other fields, this causes the competition between plasma apparatus exploitation enterprise to swash increasingly
Strong, so as to which equipment development enterprise be promoted constantly to innovate, plasma equipment is transformed or improves.Existing plasma
After discharge electrode is mounted on plasma apparatus, plasma discharge electrode dielectric layer influences the automatic bias on its surface true
Fixed, if technique changes, the plasma discharge electrode that can only more renew is inconvenient to adapt to the requirement of new process.
Therefore, it is necessary to a kind of plasma discharge electrode is provided, to solve the above problems.
Utility model content
The technical problem to be solved by the present invention is to provide a kind of plasma discharge electrode, with solve existing grade from
Daughter discharge electrode insulating layer influences it has been determined that the problem of can not adapting to different process the automatic bias on its surface.
In order to solve the above technical problems, the technical solution adopted in the utility model is：
A kind of plasma discharge electrode, including：Power fixing frame, aluminium base, insulating layer, adjusting screw rod, compressed spring,
Fixed bed, alumina layer, fixing bolt, radio-frequency power supply and adjusting nut；
The side of the power fixing frame is provided with groove body, and the aluminium base is arranged on the side of the groove body, described to penetrate
Frequency power is fixed on side opposite with the groove body on the power fixing frame；The insulating layer is set on the aluminium base
Side far from the power fixing frame；The insulating layer end face setting is fluted, the top and bottom difference of the insulating layer
It is provided with the adjusting channel connected with the groove；The fixed bed and the alumina layer are vertically arranged at described fluted
It is interior；The fixed bed is mutually parallel with the alumina layer, and the fixed bed is located at the outside of the groove, the alumina layer
Positioned at the inside of the groove；The through-hole of the aluminium base both ends of the surface is provided through at the top and bottom of the aluminium base；Institute
It is L-shaped to state adjusting screw rod, the adjusting screw rod is set in the through-hole；The adjusting screw rod stretch out one end of the through-hole with
The end connection of the alumina layer；The compressed spring is provided between the end face of the aluminium base and the adjusting screw rod；
The through-hole is corresponded on the power fixing frame and is provided with via, the end of the adjusting screw rod passes through one end of the via to set
It is equipped with the adjusting nut；It is connected between the power fixing frame and the aluminium base by the fixing bolt.
Preferably, the height of the insulating layer is less than the height of the aluminium base, the top and bottom of the aluminium base
The distance between through-hole is more than the height of the insulating layer, and the insulating layer is located at the through-hole of the top and bottom of the aluminium base
Between region.
Preferably, the thickness of the fixed bed and the alumina layer is equal, and the thickness of the insulating layer is less than the aluminium
The thickness of pedestal.
Advantage possessed by the utility model is with effect：
A kind of plasma discharge electrode of the utility model, including：Power fixing frame, insulating layer, adjusts spiral shell at aluminium base
Bar, compressed spring, fixed bed, alumina layer, fixing bolt, radio-frequency power supply and adjusting nut；The side of power fixing frame is set
Groove body is equipped with, aluminium base is arranged on the side of groove body, and radio-frequency power supply is fixed on side opposite with groove body on power fixing frame；Absolutely
Edge layer is set to the side far from power fixing frame on aluminium base；Insulating layer end face sets fluted, the top and bottom of insulating layer
Portion is respectively arranged with the adjusting channel connected with groove；Fixed bed and alumina layer are vertically arranged in fluted；Fixed bed
It is mutually parallel with alumina layer, fixed bed is located at the outside of groove, and alumina layer is located at the inside of groove；The top of aluminium base and
Bottom is provided through the through-hole of aluminium base both ends of the surface；Adjusting screw rod is L-shaped, and adjusting screw rod is set in through-hole；Adjusting screw rod
One end of through-hole and the end of alumina layer is stretched out to connect；Compressed spring is provided between the end face of aluminium base and adjusting screw rod；
Through-hole is corresponded on power fixing frame and is provided with via, the end of adjusting screw rod passes through one end of via to be provided with adjusting nut；Electricity
It is connected between source fixed frame and aluminium base by fixing bolt；Available in plasma apparatus, and it can pass through to rotate and adjust
Nut adjusts the distance between fixed bed and alumina layer via adjusting screw rod, the automatic bias of surface of insulating layer is adjusted,
The ion energy characteristic and distribution situation for making surface of insulating layer reach technological requirement, so as to reduce the time for replacing electrode, improve
The operational efficiency of plasma apparatus.
Description of the drawings
The utility model is described in further detail below in conjunction with the accompanying drawings：
Fig. 1 is a kind of structure chart of plasma discharge electrode of the utility model.
Fig. 2 is a kind of schematic diagram of the automatic bias of plasma discharge electrode regulating surface of insulating layer of the utility model.
In figure：Power fixing frame 1, aluminium base 2, insulating layer 3, adjusting screw rod 4, compressed spring 5, fixed bed 6, alumina layer
7th, channel 8, fixing bolt 9, via 10, radio-frequency power supply 11, adjusting nut 12, through-hole 13, groove body 14, groove 15 are adjusted.
Specific embodiment
As shown in Figure 1 to Figure 2, the utility model provides a kind of plasma discharge electrode, including：Power fixing frame 1, aluminium
Pedestal 2, insulating layer 3, adjusting screw rod 4, compressed spring 5, fixed bed 6, fixing bolt 9, radio-frequency power supply 11 and adjusting nut 12.
The side of the power fixing frame 1 is provided with groove body 14, and the aluminium base 2 is arranged on the side of the groove body 14, the radio frequency
Power supply 11 is fixed on side opposite with the groove body 14 on the power fixing frame 1；The insulating layer 3 is set to the aluminium base
Side far from the power fixing frame 1 on seat 2；3 end face of the insulating layer setting fluted 15, the top of the insulating layer 3
The adjusting channel 8 connected with the groove 15 is respectively arranged with bottom；The fixed bed 6 and the alumina layer 7 are vertical
It is set in described fluted 15；The fixed bed 6 is mutually parallel with the alumina layer 7, and the fixed bed 6 is located at described recessed
The outside of slot 15, the alumina layer 7 are located at the inside of the groove 15；The top and bottom of the aluminium base 2, which are provided with, to be passed through
Wear the through-hole 13 of 2 both ends of the surface of aluminium base；The adjusting screw rod 4 is L-shaped, and the adjusting screw rod 4 is set to the through-hole 13
It is interior；One end that the adjusting screw rod 4 stretches out the through-hole 13 is connect with the end of the alumina layer 7；The end of the aluminium base 2
The compressed spring 5 is provided between face and the adjusting screw rod 4；The through-hole 13 is corresponded on the power fixing frame 1 to set
There is via 10, the end of the adjusting screw rod 4 passes through one end of the via 10 to be provided with the adjusting nut 12；The power supply
It is connected between fixed frame 1 and the aluminium base 2 by the fixing bolt 9.The height of the insulating layer 3 is less than the aluminium base
The distance between 2 height, the through-hole 13 of top and bottom of the aluminium base 2 is more than the height of the insulating layer 3, described exhausted
Edge layer 3 is located at the region between the through-hole 13 of the top and bottom of the aluminium base 2.The fixed bed 6 and the alumina layer 7
Thickness it is equal, the thickness of the insulating layer 3 is less than the thickness of the aluminium base 2.The plasma discharge electricity of the utility model
Pole available in plasma apparatus, and can adjust fixed bed 6 and oxygen by rotating adjusting nut 12 via adjusting screw rod 4
Change the distance between aluminium layer 7, the automatic bias on 3 surface of insulating layer be adjusted, make 3 surface of insulating layer ion energy characteristic and
Distribution situation reaches technological requirement, so as to reduce the time for replacing electrode, improves the operational efficiency of plasma apparatus.This practicality
The preparation method of novel plasma discharge electrode is as follows, using sedimentation on aluminium base 2 depositing insulating layer 3, then adopt
With etching method, make adjust channel 8 and groove 15 on the insulating layer 3, fixed bed 6 and insulating layer 3 are fixed later, set later
The components such as alumina layer 7 and adjusting screw rod 4, compressed spring 5.Adjusting screw rod 4 can be by common group of vertical portion and horizontal part
It closes and forms.
The utility model is not limited to above-described embodiment, and embodiment is only exemplary, it is intended to for explaining that this practicality is new
Type, and it is not intended that limitation to the utility model.
Claims (3)
1. a kind of plasma discharge electrode, which is characterized in that including：Power fixing frame (1), aluminium base (2), insulating layer (3),
Adjusting screw rod (4), compressed spring (5), fixed bed (6), alumina layer (7), fixing bolt (9), radio-frequency power supply (11) and tune
Save nut (12)；
The side of the power fixing frame (1) is provided with groove body (14), and the aluminium base (2) is arranged on the one of the groove body (14)
Side, the radio-frequency power supply (11) are fixed on side opposite with the groove body (14) on the power fixing frame (1)；The insulation
Layer (3) is set to the side far from the power fixing frame (1) on the aluminium base (2)；Insulating layer (3) end face is provided with
Groove (15) is respectively arranged with the adjusting channel (8) connected with the groove (15) at the top and bottom of the insulating layer (3)；
The fixed bed (6) and the alumina layer (7) are vertically arranged in fluted (15)；The fixed bed (6) and institute
It states alumina layer (7) to be mutually parallel, the fixed bed (6) is located at positioned at the outside of the groove (15), the alumina layer (7)
The inside of the groove (15)；The logical of the aluminium base (2) both ends of the surface is provided through at the top and bottom of the aluminium base (2)
Hole (13)；The adjusting screw rod (4) is L-shaped, and the adjusting screw rod (4) is set in the through-hole (13)；The adjusting screw rod
(4) one end for stretching out the through-hole (13) is connect with the end of the alumina layer (7)；The end face of the aluminium base (2) and institute
It states and is provided with the compressed spring (5) between adjusting screw rod (4)；The through-hole (13) is corresponded on the power fixing frame (1) to set
Via (10) is equipped with, the end of the adjusting screw rod (4) passes through one end of the via (10) to be provided with the adjusting nut
(12)；It is connected between the power fixing frame (1) and the aluminium base (2) by the fixing bolt (9).
A kind of 2. plasma discharge electrode according to claim 1, which is characterized in that the height of the insulating layer (3)
Less than the height of the aluminium base (2), the distance between through-hole (13) of top and bottom of the aluminium base (2) is more than described
The height of insulating layer (3), area of the insulating layer (3) between the through-hole (13) of the top and bottom of the aluminium base (2)
Domain.
A kind of 3. plasma discharge electrode according to claim 1, which is characterized in that the fixed bed (6) and described
The thickness of alumina layer (7) is equal, and the thickness of the insulating layer (3) is less than the thickness of the aluminium base (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721441390.1U CN207587691U (en) | 2017-11-02 | 2017-11-02 | A kind of plasma discharge electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721441390.1U CN207587691U (en) | 2017-11-02 | 2017-11-02 | A kind of plasma discharge electrode |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207587691U true CN207587691U (en) | 2018-07-06 |
Family
ID=62730286
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721441390.1U Expired - Fee Related CN207587691U (en) | 2017-11-02 | 2017-11-02 | A kind of plasma discharge electrode |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207587691U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113189465A (en) * | 2021-04-26 | 2021-07-30 | 哈尔滨理工大学 | Relative position adjustable cardboard overlap joint structure discharge characteristic test electrode |
-
2017
- 2017-11-02 CN CN201721441390.1U patent/CN207587691U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113189465A (en) * | 2021-04-26 | 2021-07-30 | 哈尔滨理工大学 | Relative position adjustable cardboard overlap joint structure discharge characteristic test electrode |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180706 Termination date: 20181102 |