CN102383111B - Solar cell deposition fixture capable of reducing diffraction - Google Patents
Solar cell deposition fixture capable of reducing diffraction Download PDFInfo
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- CN102383111B CN102383111B CN201110296022.3A CN201110296022A CN102383111B CN 102383111 B CN102383111 B CN 102383111B CN 201110296022 A CN201110296022 A CN 201110296022A CN 102383111 B CN102383111 B CN 102383111B
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- battery lead
- lead plate
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- guide groove
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Abstract
The invention relates to a solar cell deposition fixture capable of reducing diffraction, belongs to the technical field of solar cells and solves the technical problems of reducing diffraction phenomenon and preventing friction between substrates and electrode plates and the like in the solar cell deposition process. The solar cell deposition fixture designed by the invention comprises the electrode plates installed in a deposition box and an electrode plate array composed of the electrode plates, wherein each electrode plate is provided with a guide rail for reducing the diffraction; the guide rail is provided with a support and a guide slot for placing of a substrate to be deposited; a protection pad for preventing friction is arranged between the substrate and the electrode plate; the guide rail for reducing the diffraction depends on the structural width of the guide slot; and the structural width satisfies the condition that clinging surface contact is formed between the electrode plate and the substrate. According to the solar cell deposition fixture, the substrate is tightly clung to the electrode plates to avoid diffraction and friction between the substrate and the electrode plates. Meanwhile, substrates of different specifications can be installed on the same electrode plate, and production efficiency is improved.
Description
Technical field
The present invention relates to a kind of deposition clamp that is used for solar cell, especially thin-film solar cells prevent diffraction in coating process deposition clamp, belong to technical field of solar batteries.
Background technology
At present, all using plasma enhanced chemical vapor deposition (PECVD) preparations of thin-film solar cells adopt radio frequency (RF) glow discharge to prepare the photoelectric conversion layer of battery.During PECVD deposit film solar cell, the modes of emplacement of substrate adopts usually and keeps flat and stand up two kinds of forms, as the patent No.: the disclosed technology of 200710176718.6 " the PECVD equipment of a kind of grown silicon base film and efficient silicon-based film solar cells " is to adopt to keep flat deposition substrate, the patent No.: the disclosed technology of 201010197749.1 " film deposition equipments " is to adopt the substrate form that stands up.Usually stand up the substrate form and be used for single chamber multi-disc depositing system, be used for multicell monolithic successive sedimentation system and keep flat the substrate form.Will be because of standing up the sedimentary substrate quantity of substrate form more than keeping flat the substrate form, so the formula of standing up enjoys favor.But stand up the substrate form exist substrate how with the tight proximate problem of electrode plate surface, if substrate and battery lead plate are not adjacent to, deposition gases will be goed deep into substrate by the space between substrate and the battery lead plate, cause taking place in the glow discharging process diffraction, make the periphery of substrate sensitive surface also deposit film, and caused following problem: the one, follow-up laser can't be delineated the thin film layer of substrate sensitive surface periphery; The 2nd, reduced the useful area of battery, light can not penetrate this rete, has influenced the electrical property of solar cell; The 3rd, had a strong impact on the outward appearance of solar module.
Stand up the formula substrate and mainly contain two kinds in the surface support consolidated form of battery lead plate: the one, substrate is by wheel support, has certain clearance between substrate and the battery lead plate, be convenient to pick and place substrate, and substrate also not can with the battery lead plate contact friction, but substrate can not closely contact with battery lead plate, causes producing the diffraction phenomenon; The 2nd, substrate is by deposition clamp bottom palisade supporting structure support, as Chinese patent 201020540459.8 " thin-film solar cell panel deposition clamp ", it treats that sedimentary substrate is to be placed on the lower support structure, lower support structure is the grating structure that the metal rod by the metal sheet of a plurality of strips or column constitutes, and is fixed in the lower edge portion of deposition clamp side plate.This grating structure is to be used for giving off the waste gas that produces in the deposition process anchor clamps casing, and its complex structure can not prevent the generation of diffraction phenomenon, and can not place polylith on same battery lead plate and treat sedimentary substrate.
Summary of the invention:
The present invention is directed to the defective that prior art exists, how solution reduces the diffraction phenomenon and prevents technical problems such as substrate and battery lead plate friction in the solar cell deposition process, design when a kind of substrate stands up deposition and both do not had diffraction, the PECVD anchor clamps of the substrate that can not rub again.
The technical scheme that the present invention adopts for the technical solution problem: design a kind of solar cell deposition anchor clamps that reduce diffraction, comprise battery lead plate that is installed in the deposition box and the battery lead plate array that constitutes by battery lead plate, in described battery lead plate or the battery lead plate array that constitutes by battery lead plate, the guide rail that reduces diffraction all is housed on every electrode plate, this guide rail is provided with guide groove, place support in its groove and treat sedimentary substrate, and be provided with antifrictional protection pad between substrate and the battery lead plate; The guide rail of said minimizing diffraction depends on the structure width of guide groove, and this structure width satisfies between battery lead plate and the substrate has one proximate to contact.
Sedimentary substrate is treated in symmetric placement on the both sides of battery lead plate, and this symmetric substrate is placed on respectively in the guide groove of the symmetrical guide rail of installing in battery lead plate two.
The guide groove of the guide rail that battery lead plate two symmetry is installed is the monolateral groove of arc, and its edge is provided with the platform of placing protection pad.
The battery lead plate that has at least a double-sided discharging to install in the battery lead plate array, and on each discharge face, place two and treat sedimentary substrate, guide groove is installed at end, middle part at said battery lead plate respectively, treats that sedimentary substrate is placed on the battery lead plate end and the middle part cooperates in the guide groove of installing.
Two or more than two substrate is housed on each discharge face in the battery lead plate array, the end of battery lead plate and middle part be mounting guide rail and guide groove respectively, wherein the guide groove of end rail is the monolateral groove of arc, the guide groove of battery lead plate central guide track is mirror symmetry bilateral groove, and can be according to the size adjustment central guide track of substrate and the installation site of guide groove.Treat that sedimentary substrate stands up in the guide groove of guide rail, and substrate and battery lead plate are adjacent to closely.
Be equipped with two on each discharge face of battery lead plate in the battery lead plate array and treat sedimentary substrate, the two ends of substrate are inserted in the corresponding guide groove, and promptly an end of substrate is placed in the guide groove of battery lead plate end, and the other end of substrate is placed in the guide groove at battery lead plate middle part.
Treat on the battery lead plate that sedimentary substrate is glass or flexible base, board.
Place in the guide groove of the guide rail of battery lead plate and remain sedimentary flexible base, board, and guide rail is provided with hold-down mechanism, flexible base, board is compressed by hold-down mechanism and stands up in guide groove.
Hold-down mechanism on the guide rail of battery lead plate mainly is made of retaining plate, rotation axis, stage clip and steady brace, described rotation axis is connected the guide groove of guide rail with stage clip, and be installed on the battery lead plate by retaining plate, treat that sedimentary flexible base, board is pressed on the discharge face of battery lead plate by stage clip.
Guide rail and guide groove all are equipped with in the two ends of battery lead plate, and the guide rail of battery lead plate upper end is provided with hold-down mechanism, treat that sedimentary flexible base, board is compressed with battery lead plate by hold-down mechanism closely to contact.Also be provided with the boss that compresses flexible base, board in the guide groove of the guide rail of battery lead plate.
The invention has the beneficial effects as follows and designed a kind of deposition clamp simple in structure, be provided with the guide rail and the guide groove of support, fixed substrate in the anchor clamps, the guide groove of guide rail adopts the arc design, is convenient to mounted substrate; And be provided with protection pad between substrate and the battery lead plate, and make substrate can be adjacent to battery lead plate and can not produce friction again, avoided the generation of diffraction phenomenon.The guide rail of mounted substrate and guide groove flexible design, can be according to the size adjusting guide rail of substrate and the installation site of guide groove, be implemented in the substrate that different size is installed on the same battery lead plate, the solar cell of primary depositing different size, solve the technical barrier that existing single cavity can only deposit a kind of specification solar cell, improved production efficiency simultaneously.
Description of drawings:
Fig. 1: structural representation of the present invention.
Fig. 2: the A portion enlarged view among Fig. 1.
The structural representation of Fig. 3: embodiment 1.
The structural representation of Fig. 4: embodiment 2.
Fig. 5: monolateral groove 3 schematic cross-sections of arc.
Fig. 6: the schematic cross-section of bilateral rail groove 3 ' among Fig. 4.
The structural representation of Fig. 7: embodiment three.
Fig. 8: the B place enlarged diagram among Fig. 7.
Fig. 9: the C-C diagrammatic cross-section among Fig. 8.
Figure 10: the schematic cross-section that rotates rail groove among Fig. 7.
Figure 11: the structural representation of rotation axis 7 among Fig. 7.
Figure 12: the structural representation of retaining plate 11 among Fig. 7.
Among the figure: 1, deposition box, 2, battery lead plate, 3, the monolateral groove of arc, 3-1, edge platform I, 3-2, following hook arc, 3 ', bilateral rail groove, 3 '-1, edge platform II, 4, substrate, 5, standing bolt, 6, antifriction protection pad, 3 ", the rotation track groove, 4 ', flexible base, board; 7, rotation axis, 8, shifting shaft, 9, stage clip; 10, steady brace, 11, retaining plate, 12, standing bolt.
Embodiment
The guide rail that reduces diffraction all is housed on every electrode plate 2 in the deposition clamp of the present invention, and this guide rail is provided with guide groove, places in the guide groove to remain sedimentary substrate 4, and is provided with antifrictional protection pad 6 between substrate 4 and the battery lead plate 2; The guide rail of said minimizing diffraction depends on the structure width of guide groove, and this structure width makes between battery lead plate 2 and the substrate 4 has one proximate to contact.The guide rail of mounted substrate and guide groove flexible design, the guide groove that is positioned at the guide rail at battery lead plate two ends is monolateral deep-slotted chip breaker, the guide groove that is positioned at the guide rail at battery lead plate middle part is bilateral groove, the bilateral groove at middle part and the monolateral groove of the deep-slotted chip breaker at battery lead plate two ends cooperate, can be implemented in the substrate that different size is installed on the same battery lead plate, the solar cell of primary depositing different size has improved production efficiency, has solved the technological difficulties that existing single cavity can only deposit a kind of specification solar cell.
The depositing operation of non-crystal silicon solar cell of the present invention is as follows:
1. deposition clamp is cleaned comprehensively;
2. before the dress substrate anchor clamps are carried out preheating;
3. clean deposition anchor clamps after the preheating;
4. antifriction protection pad 6 is attached to the last lower rim of substrate 4, inserts simultaneously in the rail groove, more antifriction protection pad 6 is extracted out after putting well;
5. the deposition clamp that substrate 4 will be housed pushes and carries out preheating in the baking oven;
6. the deposition clamp that substrate 4 is housed that preheating is good pushes in the vacuum chamber, and battery lead plate 2 connects with radio-frequency power supply;
7. vacuumize before vacuum chamber being deposited, enter test phase;
8. set argon flow amount and radio frequency (RF) power according to the product corresponding technological parameters, open the argon gas control valve,, after test is finished, stop discharge, close the argon gas air inlet, enter the P layer stage that deposit when pressure-stabilisation begins discharge test during to process value;
9. vacuum chamber is carried out pumping high vacuum, set P type gas mixture, hydrogen and radio frequency power according to the product corresponding technological parameters, open P type gas mixture and hydrogen control valve and begin air inlet, when deposition pressure is stabilized to the process value of corresponding product, the beginning discharge depositing after the P layer has deposited, stops discharge, close P type gas mixture and hydrogen air inlet, enter the deposition I layer stage;
10. vacuum chamber is carried out pumping high vacuum, set I layer silane gas, hydrogen and radio frequency power according to the product corresponding technological parameters, open I layer silane gas and hydrogen control valve and begin air inlet, when deposition pressure is stabilized to the process value of corresponding product, the beginning discharge depositing after the I layer has deposited, stops discharge, close I layer silane gas and hydrogen, vacuumize and enter the deposition transition layer stage;
11. vacuum chamber is carried out pumping high vacuum, open argon gas and hydrogen control valve air inlet, when deposition pressure is stabilized to corresponding process value, begin discharge, after transition layer has deposited, stop discharge depositing, close argon gas and hydrogen, vacuumize and enter the deposition N layer stage.
12. vacuum chamber is carried out pumping high vacuum, set N type gas mixture, hydrogen and radio frequency power according to the product corresponding technological parameters, open N type gas mixture and hydrogen control valve air inlet, when deposition pressure is stabilized to the process value of corresponding product, the beginning discharge depositing after the N layer has deposited, stops discharge, close N type gas mixture and hydrogen air inlet, finish the deposition plating stage.
13. vacuum chamber is carried out pumping high vacuum, close air-bleed system and begin topping up nitrogen, open fire door.
14. unclamp the radio-frequency power supply joint, anchor clamps released the vacuum chamber cooling;
15. in the slit between antifriction protection pad 6 insertion substrates 4 and the battery lead plate 2, will deposit good substrate 4 and antifriction protection pad 6 lentamente and pull out anchor clamps simultaneously, finish the deposition of substrate 4.
Embodiment one:
As shown in Figure 3, be positioned at the battery lead plate single face discharge on both sides in the deposition clamp in the battery lead plate array, other battery lead plate is double-sided discharging, be equipped with one on each discharge face of battery lead plate and treat sedimentary substrate 4, substrate 4 is placed in the guide groove of the symmetric guide rail in battery lead plate two ends, the guide groove of this guide rail is the monolateral groove 3 of arc, the monolateral groove of arc is installed in battery lead plate 2 edges at two ends places in the deposition box 1 by standing bolt 5, make the following hook arc 3-2 of the monolateral groove of arc at battery lead plate two ends be relative up and down arc-shaped slot, and the spacing between the guide groove at battery lead plate two ends is slightly larger than the size of deposition substrate, in order to reduce the generation of diffraction, the guide groove of guide rail has a structure width, this structure width has certain elasticity, antifrictional protection pad is inserted easily and extract, making simultaneously between battery lead plate 2 and the substrate 4 has one proximate to contact.When inserting substrate 4 in the monolateral groove of arcs, earlier antifriction protection pad 6 is rubbed on the edge platform I3-1 of the monolateral groove of two arcs up and down, after substrate installs, take out antifriction protection pad 6, there be one proximate to contact between battery lead plate 2 and the substrate 4.Plated film on deposition substrate 4 after deposition is finished, before taking out substrate 4, is rubbed into antifriction protection pad 6 on the edge platform I3-1 of the monolateral groove of two arcs earlier, gets the good substrate 4 of deposition again.
Guide rail in the deposition clamp of the present invention on the battery lead plate and guide groove adopt extrudes aluminium section bar, processing is simple, not yielding, cost is low, and the guide rail guide groove is made by aluminum alloy materials, the hardness height, can not be damaged when sandblast is cleaned, the arcuate structure of the monolateral groove of arc is consistent with the fillet of substrate, makes things convenient for substrate to be rubbed into, and what substrate was firm is placed in the guide rail guide groove, does not rock.
Embodiment two:
As shown in Figure 4, be equipped with two on the battery lead plate discharge face in the deposition clamp in the battery lead plate array and treat sedimentary substrate 4, this substrate is placed on the battery lead plate end and the middle part cooperates in the guide groove of installing.The guide groove of battery lead plate 2 ends is the monolateral groove 3 of arc, and the guide groove at battery lead plate 2 middle parts is mirror symmetry bilateral groove 3 '-2, treats that an end of sedimentary substrate 4 is placed in the guide groove of battery lead plate end, and the other end of substrate 4 is placed in the guide groove at battery lead plate middle part.The monolateral groove 3 of arc is installed in the place of edges at two ends up and down of the battery lead plate 2 on the deposition box 1 by standing bolt 5, make the monolateral groove of arc following hook arc 3-2 be relative arc-shaped slot up and down, simultaneously bilateral groove 3 '-2 is installed in the middle part of battery lead plate 2 by standing bolt 5, when substrate 4 being inserted between battery lead plate end guide groove and the battery lead plate middle part bilateral groove 3 '-2, earlier antifriction protection pad 6 is rubbed on the edge platform I3-1 and bilateral 3 ' edge platform II3 '-1 of the monolateral groove 3 of arc, after substrate installs, take out antifriction protection pad 6 again, making between battery lead plate 2 and the substrate 4 has one proximate to contact.Plated film on the sedimentary substrate 4 is being treated in beginning, after deposition is finished, before taking out substrate 4, earlier antifriction protection pad 6 is rubbed between battery lead plate and the substrate, gets substrate 4 again.
When substrate 4 more than two being housed for each discharge face of battery lead plate 2 in the battery lead plate array, a plurality of mirror symmetry bilateral grooves 3 '-2 can be installed in the mid-way of battery lead plate, and can be according to the installation site of the bilateral guide rail guide groove of the size adjusting of substrate 4, the different size substrate all can be deposited in same deposition clamp, solved the technical barrier that single cavity can only deposit a kind of specification.
Embodiment three:
See Fig. 7, the deposition clamp of the present invention's design also is applicable to the deposition flexible thin-film solar cell.Because flexible base, board 4 ' adopts thin macromolecular material or thin metallic substance usually, if the last following rail groove that all adopts no hold-down mechanism, flexible base, board 4 ' is equivalent to freely place in groove, flexible base, board 4 ' can down fall owing to deadweight so, bulge or wave phenomenon appear in the middle part, can't be adjacent to battery lead plate 2, influence deposition effect.Therefore use deposition clamp for flexible base, board 4 ', need the upper limb of flexible base, board 4 ' be compressed, it can not down be fallen, on the basis of embodiment 1, present embodiment is provided with hold-down mechanism with the guide rail of the upper end of battery lead plate, flexible base, board 4 ' is compressed by hold-down mechanism and stands up in guide groove, and treats that sedimentary flexible base, board 4 ' is compressed with battery lead plate 2 by hold-down mechanism and closely contact.The guide groove that is provided with the hold-down mechanism guide rail is rotary, by shifting shaft 8 rotation axis 7 being rotated when placing flexible base, board 4 ' overcomes the pressure of stage clip 9 and drives rotation track groove 3 " rotate together; make flexible base, board 4 ' be easy to place; after flexible base, board 4 ' places; unclamp shifting shaft 8; rotation track groove 3 " because the effect of superjacent stage clip 9 makes rotation track groove 3 again " be pressed on the flexible base, board 4 '; realize pressuring action, flexible base, board 4 ' can finely entirely be attached on the battery lead plate 2 flexible base, board 4 ' upper limb.
See Fig. 7 to Figure 12, hold-down mechanism on the battery lead plate guide rail is mainly by retaining plate 11, rotation axis 7, shifting shaft 8, stage clip 9, steady brace 10 and rotation track groove 3 " to form; rotation axis 7 is connected guide rail guide groove 3 with stage clip 9; and be installed on the battery lead plate 2 by retaining plate 11, treat that sedimentary flexible base, board 4 ' is pressed on the discharge face of battery lead plate 2 by stage clip 9.Retaining plate 11 is the good metal sheet of wear resistance, be fixed on two end surfaces of battery lead plate 2 by fixed orifices 11-2 by standing bolt 12, having on retaining plate 11 can be by the through hole 11-1 of rotation axis 7, through hole 11-1 size just can make rotation axis 7 within it portion freely rotate and do not rock, rotation axis 7 passes the through hole 11-1 of retaining plate 11 from a side, stage clip 9 and rotation track groove 3 " through hole 3 "-1, pass the stage clip 9 of opposite side and the through hole 11-1 of retaining plate 11 again, have fixed orifices 7-1 at the both ends of rotation axis 7, shifting shaft 8 is fixed thereon, also have pilot hole 7-2 thereon, by steady brace 10 with rotation track groove 3 " be fixed on the rotation axis; make rotation track groove 3 " can rotate with rotation axis 7, stage clip 9 is enclosed within on close retaining plate 11 inboards of rotation axis 7, presser feet is pressed on the battery lead plate 2 on one side, the other side presser feet is pressed in rotation track groove 3 " pressure spring slot 3 " on-4, rotation track groove 3 " the cross section be the T font; through hole 3 is arranged in the upper end "-1, and making and through hole 3 near the inside top edge of battery lead plate 2 "-1 concentric circular arc 3 "-2, make rotation track groove 3 " can touch battery lead plate 2 and rotate; near the inboard of battery lead plate 2 substrate slot 3 is arranged in the bottom "-5 and the lower end angle in little dome 3 "-3; little dome 3 "-3 be used for compressing flexible base, board 4 ', pressure spring slot 3 is arranged in the lower end outside "-4, can make the presser feet of stage clip 9 can slippage.
Below in conjunction with the accompanying drawings embodiments of the invention have been done detailed description, but the present invention is not limited to the foregoing description, in the ken that those of ordinary skills possessed, can also under the prerequisite that does not break away from aim of the present invention, makes various variations.
Claims (9)
1. solar cell deposition anchor clamps that reduce diffraction, comprise battery lead plate or the battery lead plate array that constitutes by battery lead plate, be installed in the deposition box (1) and constitute, in the battery lead plate array that it is characterized in that described battery lead plate (2) or constitute by battery lead plate, the guide rail that reduces diffraction all is housed on every electrode plate (2), this guide rail is provided with guide groove, place support in its groove and treat sedimentary substrate (4), and and battery lead plate (2) between be provided with antifrictional protection pad (6); The guide rail of said minimizing diffraction depends on the structure width of guide groove, this structure width satisfy battery lead plate (2), with substrate (4) between have one proximate to contact, the guide groove that battery lead plate (2) two symmetry is installed is the monolateral groove of arc (3), and its edge is provided with the platform of placing protection pad (6).
2. the solar cell deposition anchor clamps of minimizing diffraction according to claim 1, it is characterized in that described battery lead plate (2), treat sedimentary substrate (4) in the symmetric placement in its both sides, this symmetric substrate (4) is placed on respectively in the guide groove of the symmetrical guide rail of installing in battery lead plate (2) two.
3. the solar cell deposition anchor clamps of minimizing diffraction according to claim 1, it is characterized in that in the described battery lead plate array, the battery lead plate (2) that has at least a double-sided discharging to install, and on each discharge face, place two and treat sedimentary substrate (4), guide groove is installed respectively at end, the middle part of described battery lead plate (2).
4. the solar cell deposition anchor clamps of minimizing diffraction according to claim 3, the guide groove that it is characterized in that described battery lead plate (2) end is the monolateral groove of arc (3), the guide groove at battery lead plate (2) middle part is mirror symmetry bilateral groove (3 '-2), an end for the treatment of sedimentary substrate (4) is placed in the guide groove of battery lead plate end, and the other end of substrate (4) is placed in the guide groove at battery lead plate middle part.
5. the solar cell deposition anchor clamps of minimizing diffraction according to claim 1 is characterized in that treating on the described battery lead plate (2) that sedimentary substrate (4) is glass or flexible base, board.
6. the solar cell deposition anchor clamps of minimizing diffraction according to claim 5, it is characterized in that placing in the guide groove of guide rail of described battery lead plate (2) and remain sedimentary flexible base, board (4 '), and guide rail is provided with hold-down mechanism, and flexible base, board (4 ') is compressed by hold-down mechanism and stands up in guide groove.
7. the solar cell deposition anchor clamps of minimizing diffraction according to claim 6, it is characterized in that the hold-down mechanism on the guide rail of described battery lead plate mainly is made of retaining plate (11), rotation axis (7), stage clip (9) and steady brace (10), described rotation axis (7) is connected the guide groove of guide rail with stage clip (9), and be installed on the battery lead plate (2) by retaining plate (11), treat that sedimentary flexible base, board (4 ') is pressed on the discharge face of battery lead plate (2) by stage clip (9).
8. according to the solar cell deposition anchor clamps of claim 6 or 7 described minimizing diffraction, guide rail and guide groove all are equipped with in the two ends that it is characterized in that described battery lead plate (2), and the guide groove of battery lead plate upper end is provided with hold-down mechanism, treats that sedimentary flexible base, board (4 ') is compressed with battery lead plate (2) by hold-down mechanism closely to contact.
9. the solar cell deposition anchor clamps of minimizing diffraction according to claim 8 is characterized in that also being provided with the boss that compresses flexible base, board (4 ') in the guide groove of guide rail of described battery lead plate (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110296022.3A CN102383111B (en) | 2011-09-28 | 2011-09-28 | Solar cell deposition fixture capable of reducing diffraction |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110296022.3A CN102383111B (en) | 2011-09-28 | 2011-09-28 | Solar cell deposition fixture capable of reducing diffraction |
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| CN102383111A CN102383111A (en) | 2012-03-21 |
| CN102383111B true CN102383111B (en) | 2013-07-31 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105714363B (en) * | 2016-04-28 | 2018-01-05 | 江苏理工学院 | Electro-deposition fixture |
| CN108455881A (en) * | 2017-02-21 | 2018-08-28 | 蓝思科技（长沙）有限公司 | Glass evacuated joint jig and glass evacuated applying method |
| CN111244228B (en) * | 2020-02-10 | 2021-01-26 | 深圳市拉普拉斯能源技术有限公司 | Device for processing semiconductor material |
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| CN101373795A (en) * | 2007-08-20 | 2009-02-25 | 鸿富锦精密工业（深圳）有限公司 | Solar battery |
| CN101545101A (en) * | 2008-03-24 | 2009-09-30 | 东捷科技股份有限公司 | Substrate cassette with electrode array |
| CN201501735U (en) * | 2009-09-25 | 2010-06-09 | 孙中华 | Clamping safety hanger for automobile painting |
| CN201756585U (en) * | 2010-06-11 | 2011-03-09 | 深圳市创益科技发展有限公司 | Solar battery deposition fixture |
| CN101988192A (en) * | 2010-11-16 | 2011-03-23 | 深圳市创益科技发展有限公司 | Compound electrode plate and PECVD deposition box and PECVD system |
| CN201801592U (en) * | 2010-09-25 | 2011-04-20 | 深圳市拓日新能源科技股份有限公司 | Thin-film solar-cell panel deposition fixture |
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2011
- 2011-09-28 CN CN201110296022.3A patent/CN102383111B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101373795A (en) * | 2007-08-20 | 2009-02-25 | 鸿富锦精密工业（深圳）有限公司 | Solar battery |
| CN101545101A (en) * | 2008-03-24 | 2009-09-30 | 东捷科技股份有限公司 | Substrate cassette with electrode array |
| CN201501735U (en) * | 2009-09-25 | 2010-06-09 | 孙中华 | Clamping safety hanger for automobile painting |
| CN201756585U (en) * | 2010-06-11 | 2011-03-09 | 深圳市创益科技发展有限公司 | Solar battery deposition fixture |
| CN201801592U (en) * | 2010-09-25 | 2011-04-20 | 深圳市拓日新能源科技股份有限公司 | Thin-film solar-cell panel deposition fixture |
| CN101988192A (en) * | 2010-11-16 | 2011-03-23 | 深圳市创益科技发展有限公司 | Compound electrode plate and PECVD deposition box and PECVD system |
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