CN207440322U - A kind of 800 nano waveband broadband reflection type diffraction grating - Google Patents
A kind of 800 nano waveband broadband reflection type diffraction grating Download PDFInfo
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- CN207440322U CN207440322U CN201721304701.XU CN201721304701U CN207440322U CN 207440322 U CN207440322 U CN 207440322U CN 201721304701 U CN201721304701 U CN 201721304701U CN 207440322 U CN207440322 U CN 207440322U
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Abstract
A kind of 800 nano waveband broadband reflection type diffraction grating, it is related to reflection-type grating, including substrate, covered with a reflective metal layer above the substrate, the metal layer is equipped with grating, the cycle of the grating is 450 550 nanometers, 400 560 nanometers of etching depth, the grating duty cycle is 0.4 0.65, the thickness of the metal layer is more than 300 nanometers, the utility model provides a kind of 800 nano waveband broadband reflection type diffraction grating, it is simple in structure, technique is easy to implement, the broadband reflection grating can make 1 order diffraction efficiency of the TM polarised lights in the case of the incidence angle of Littrow at 105 nanometers（780 885 nanometers）Wavelength bandwidth in higher than 80%, which has important practical value in Chirped Pulse Compression technology.
Description
Technical field
The utility model is related to reflection-type gratings, particularly a kind of broadband reflection type diffraction light for being used for 800 nano wavebands
Grid.
Background technology
In chirped pulse amplification, people generally require high-diffraction efficiency, wider wave-length coverage and higher resisting and swash
The diffraction grating of light injury ability.Recently, Wei Jia et al. have produced the transmission of this high-diffraction efficiency on vitreous silica
Formula grating, -1 grade of diffraction efficiency is theoretically up to 98%.【First technology 1:W.Jia et al., Appl.Opt.47,6058
(2008)】.But much applying, for example need to reflect in grating tuning narrow linewidth oscillator, grating pulse compressor etc.
Formula grating.Although traditional multilayer dielectricity grating and simple metal grating can be met the requirements, the system of multilayer dielectricity grating
Make that considerably complicated, cost of manufacture is higher；The holographic grating of simple metal and the mechanical strength of ruled grating and resisting laser damage energy
Power is weaker, is not suitable for high power laser system.
Vitreous silica is a kind of preferable grating material, it has high optical quality：Stable performance, high damage threshold and
Wide transmission spectrum from deep ultraviolet to far infrared.Gold is used as a kind of common metallic reflective coating, and strength and stability is preferable, red
The reflectivity of outskirt is very high.At present, common metallic reflection grating is mostly using gold as thin-film material.Therefore, vitreous silica is utilized
The new embedded reflective gratings of making are combined with golden material to be with a wide range of applications.Hafnium oxide is thin as high index of refraction
Film, it is similary to there is threshold for resisting laser damage height, through spectral width, it is commonly used in laser coating.
Rectangular raster is the grating with rectangle flute profile processed in substrate using microelectronics deep etching process.It is high
Density rectangle grating diffration is theoretical, it is impossible to be explained by simple scalar optical grating diffraction equation, and must use vector form
Maxwell equation and with reference to boundary condition, result is precisely calculated by the computer program of coding.Moharam et al.
The algorithm of rigorous coupled wave approach is given【First technology 2:M.G Moharam et al., J.Opt.Soc.Am. Α .12,
1077(1995)】, the Diffraction Problems of this kind of high dencity grating can be solved.But as far as we know, so far, there are no people's pins
The design parameter of the embedded reflecting grating of gold made to 800 nano wave lengths is commonly used to be given on vitreous silica substrate.
Chinese invention patent CN101609176A discloses a kind of metal embedded fused quartz broadband reflection grating, still
It is the optical system for TE patterns, is not suitable for the optical system of TM patterns, in addition embedded optical grating construction difficulty in process, no
Beneficial to batch production.
Utility model content
The technical problems to be solved in the utility model is the laser for common 800 nano wave lengths, provides one kind 800 and receives
VHF band broadband reflection type diffraction grating, simple in structure, technique is easy to implement, which can make TM polarised lights exist
- 1 order diffraction efficiency in the case of the incidence angle of Littrow is at 105 nanometers（780 885 nanometers）Wavelength bandwidth in higher than 80%,
The broadband reflection grating has important practical value in Chirped Pulse Compression technology, and technical solution is as follows:
A kind of 800 nano waveband broadband reflection type diffraction grating, including substrate, transparent material or gold may be selected in substrate
The opaque materials such as category, ceramics, covered with a reflective metal layer, the metal layer is equipped with grating, described for the substrate top
The cycle of grating is 450 550 nanometers, 400 560 nanometers of etching depth, and the grating duty cycle is 0.4 0.65, described
The thickness of metal layer is more than 300 nanometers, to reach lighttight purpose.
Further, the cycle of the grating is 550 nanometers, and the etching depth of grating is 520 nanometers, and grating duty cycle is
0.45.Lambda1-wavelength scope is in 780 885 nanometers at this time, and along the 46.65 degree of incidences of Littrow angle, -1 grade of TM polarization spreads out
Efficiency is penetrated higher than 80%.
Further, the material of the metal layer is gold, silver, aluminium or copper.
Further, the making material of the grating is hafnium oxide.
Further, the substrate is vitreous silica, metal, glass or ceramics.
According to above-mentioned technical proposal, the uncorrelated diffraction grating of reflective polarizing of the utility model, there is simple in structure, appearance
It easily realizes, the high feature of diffraction efficiency, particularly when the cycle of grating is 550 nanometers, the etching depth of grating is 520 nanometers, light
When grid duty cycle is 0.45, incident light of the wave-length coverage in 780 885 nanometers enters for 46.65 degree along Littrow angle at this time
It penetrates, -1 grade of TM polarized diffraction efficiency is above 80%；The utility model has no special requirements to substrate material, if with zero thermal expansion glass
The ceramics of glass or low thermal coefficient of expansion are substrate, and the grating thermal stability than using vitreous silica at present is more preferable.
Description of the drawings
The utility model is described in further detail below by specific embodiment combination attached drawing.
Fig. 1 is the geometry schematic diagram of the utility model；
Fig. 2 be the utility model screen periods be 550 nanometers, etching depth is 520 nanometers, grating duty cycle is
0.45, incident angle is along diffraction efficiency during Littrow angle incidence with the variation characteristic curve of lambda1-wavelength.
Wherein, 1, substrate；2nd, metal layer；3rd, grating；4th, incident light；5th, diffraction light.
Specific embodiment
The utility model is described in further detail below by specific embodiment combination attached drawing.
Referring to Fig. 1, Fig. 1 is the geometry schematic diagram of broadband reflection grating.The present embodiment substrate 1 uses tekite
English, 2 material of metal layer is using gold, and the thickness of metal layer 2 is 350 nanometers, and 3 material of grating used is hafnium oxide, and refractive index is
1.895。
Incident light 4 is incident with the corresponding Littrow angle θ of centre wavelength from air in Fig. 1, and diffraction light 5 and incident light 4 are flat
Row is reversed, and b represents 3 width of grating, and d represents screen periods, and grating duty cycle is defined as f=b/d.Metal layer 2 has spectrum very wide
In the range of all have a higher reflectivity, therefore the grating of geometry as shown in Figure 1 can be used for designed central wavelength for 800
The polarization-independent wide band reflection grating of nanometer.Under optical grating construction as shown in Figure 1, as shown in Fig. 2, the utility model is using tight
Lattice coupled-mode theory calculates -1 order diffraction efficiency of the reflecting grating with the variation characteristic curve of lambda1-wavelength, that is, works as grating
Cycle for 550 nanometers, grating duty cycle is 0. 45, and when the etching depth of grating is 520 nanometers, TM polarised lights are with centre wavelength
During 800 nanometers of corresponding 46.65 degree of incidence of Littrow angle, -1 order diffraction efficiency of the grating is in 100 nano wave length bandwidth
（780 885 nanometers) it is interior more than 80%.
Table 1 gives a series of embodiments of the utility model.When grating duty cycle for 0.45, screen periods are 450
When in 550 nanometers, same grating layer height（That is the etching depth of grating）The diffraction efficiency data result of corresponding different screen periods.
Table 2 gives the utility model another series embodiment.When screen periods are 550 nanometers, grating duty cycle is
0.55th, when the etching depth of grating is 520 nanometers, lambda1-wavelength is between 780 900 nanometers, and along during Littrow angle incidence
- 1 grade of TM diffraction efficiency data result, as shown in Table 2, lambda1-wavelength is when between 780 885 nanometers, along Littrow angle
Incidence, -1 grade of TM diffraction efficiency are more than 80%.
Table 3 gives the utility model another series embodiment.When screen periods are 550 nanometers, the etching depth of grating is
At 520 nanometers, incident center wavelength of light 800nm diffraction efficiencies with grating duty cycle delta data.As shown in Table 3, grating accounts for
For empty ratio between 0.4 0.65, incident centre wavelength 800nm TM polarized diffraction efficiencies are more than 90%.
Table 4 gives the utility model another series embodiment.When screen periods are 550 nanometers, the etching depth of grating is
520 nanometers, grating duty cycle be 0.45 when, incident center wavelength of light diffraction efficiency with incident angle delta data.It can by table 4
Know, incident center wavelength of light angle of diffraction diffraction efficiency in the range of 40 ~ 54 degree is both greater than 90%.
Table 1
Table 2
Table 3
Table 4
Use above specific case is illustrated the utility model, is only intended to help to understand the utility model, and
Not limiting the utility model.For those skilled in the art of the present invention, the think of according to the utility model
Think, several simple deductions, deformation can also be made or replace.
Claims (5)
1. a kind of 800 nano waveband broadband reflection type diffraction grating, which is characterized in that including substrate, covering above the substrate
There is a reflective metal layer, the metal layer is equipped with grating, and the cycle of the grating is 450 550 nanometers, etching depth
400 560 nanometers, the grating duty cycle is 0.4 0.65, and the thickness of the metal layer is more than 300 nanometers.
2. 800 nano waveband broadband reflection type diffraction grating of one kind as described in claim 1, which is characterized in that the grating
Cycle for 550 nanometers, the etching depth of grating is 520 nanometers, and grating duty cycle is 0.45.
3. 800 nano waveband broadband reflection type diffraction grating of one kind as claimed in claim 2, which is characterized in that the metal
The material of layer is gold, silver, aluminium or copper.
4. 800 nano waveband broadband reflection type diffraction grating of one kind as claimed in claim 3, which is characterized in that the grating
Making material be hafnium oxide.
5. a kind of 800 nano waveband broadband reflection type diffraction grating, feature exist according to any one of claims 1 to 4
In the substrate is vitreous silica, metal, glass or ceramics.
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| CN201721304701.XU CN207440322U (en) | 2017-10-11 | 2017-10-11 | A kind of 800 nano waveband broadband reflection type diffraction grating |
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| CN201721304701.XU CN207440322U (en) | 2017-10-11 | 2017-10-11 | A kind of 800 nano waveband broadband reflection type diffraction grating |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108732670A (en) * | 2018-07-09 | 2018-11-02 | 中国科学院上海光学精密机械研究所 | A kind of metal dielectric-coating broadband pulse compress gratings of 800 nanometer centers wavelength |
| CN112180474A (en) * | 2020-10-16 | 2021-01-05 | 厦门大学 | All-dielectric metamaterial with near-infrared ultra-wideband perfect reflection and tunneling transmission |
-
2017
- 2017-10-11 CN CN201721304701.XU patent/CN207440322U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108732670A (en) * | 2018-07-09 | 2018-11-02 | 中国科学院上海光学精密机械研究所 | A kind of metal dielectric-coating broadband pulse compress gratings of 800 nanometer centers wavelength |
| CN112180474A (en) * | 2020-10-16 | 2021-01-05 | 厦门大学 | All-dielectric metamaterial with near-infrared ultra-wideband perfect reflection and tunneling transmission |
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