CN207440323U - A kind of polarization uncorrelated broadband reflection grating of 1550 nano wavebands of optic communication - Google Patents
A kind of polarization uncorrelated broadband reflection grating of 1550 nano wavebands of optic communication Download PDFInfo
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Abstract
A kind of polarization uncorrelated broadband reflection grating of 1550 nano wavebands of optic communication,It is related to the reflecting grating field for optic communication,Including substrate,Covered with reflective metal layer above substrate,Being made on metal layer has grating,The grating includes the first refractive film layer set gradually from lower to upper,Second refracting film layer,The refractive index of first refractive film layer is less than the refractive index of the second refracting film layer,The cycle of the grating is 0.99 1.15um,Grating duty cycle is 0.52 0.57,First refractive thicknesses of layers is 0.27 0.55um,Second refracting film layer thickness is 0.67 0.85um,The technical problems to be solved in the utility model is to be provided to polarize uncorrelated broadband reflection grating with 1550 nano wavebands for optic communication,The grating can make 1 order diffraction efficiency of the TE and TM polarised lights in the case of the corresponding Littrow angle incidence of centre wavelength in 100 nanometers of wavelength bandwidth（1500 1600 nanometers）Higher than 90%.The utility model has the advantages that simple in structure, the unrelated, broadband of polarization, there is important practical value in wavelength-division multiplex technique.
Description
Technical field
The present invention relates to the reflecting grating fields for optic communication, and in particular to a kind of 1550 nano wavebands of optic communication
Polarize uncorrelated broadband reflection grating.
Background technology
Wavelength-division multiplex (WDM) technology can be multiplexed dozens or even hundreds of wavelength in simple optical fiber, to meet pair increased
The demand of bandwidth is one of effective ways for improving communication capacity.Wavelength-division multiplex technique has improved to transmit hundreds of
The laser of wavelength, interval 1.6nm, 0.8nm or 0.4nm or even 0.2nm between each wavelength, this technology are referred to as dense wavelength division
It is multiplexed (DWDM).WDM is had been widely used in long distance transmission, is also begun into short distance optical communication network.
Wavelength division multiplexer is the device of most critical in division multiplex fibre-optic communication wave system.Plane diffraction grating is traditional color
Dissipate element, have the characteristics that simple in structure, diffraction efficiency is high, temperature stability is good, the device in optical communications industry field
It widely uses.Optical signalling in optical fiber has uncertain polarization state, needs to multiplex（Demultiplexing）Device is substantially
Polarization-insensitive, to minimize Polarization Dependent Loss.Polarization insensitive is required to diffraction grating.
United States Patent (USP) US8989537B2 describes the uncorrelated transmission-type grating of polarization suitable for optic communication.It is but very much
In light path design, for example, current wavelength-division multiplex technique latest development wavelength selection technique (WSS), it is necessary to which to use reflection-type inclined
Shake uncorrelated grating.In order to improve diffraction efficiency, generally using sub-wavelength grate structure, i.e., screen periods are less than or close to work
Wavelength, also referred to as high dencity grating.This kind of grating generally to the Polarization-Sensitive of incident light, i.e., is reached for a polarized diffraction efficiency
To maximum, another polarized diffraction efficiency can be than relatively low.
The diffraction of high dencity grating cannot be explained by simple scalar optical grating diffraction equation, and must use vector form
Maxwell equation and with reference to boundary condition, result is precisely calculated by the computer program of coding.Moharam et al.
The algorithm of rigorous coupled wave approach is given【First technology 4:M.G.Moharam et al, J.Opt.Soc.AmA.12,
1077(19%)】.Using rigorous couple-wave analysis, grating diffration efficiency can be calculated, rigorous couple-wave analysis and simulation will be closed
Annealing algorithm is combined, and can polarize uncorrelated broadband reflection grating with optimization design.
The content of the invention
It is anti-with the uncorrelated broadband of 1550 nano wavebands offer polarization the technical problem to be solved by the present invention is to be directed to optic communication
Grating is penetrated, which can make -1 order diffraction of the TE and TM polarised lights in the case of the corresponding Littrow angle incidence of centre wavelength
Efficiency is in 100 nanometers of wavelength bandwidth（1500 1600 nanometers）Higher than 90%.The present invention have it is simple in structure, polarization it is unrelated,
The advantages of broadband, therefore the reflecting grating is with practical value in wavelength-division multiplex technique, technical solution is as follows：
A kind of uncorrelated broadband reflection grating of polarization of 1550 nano wavebands of optic communication, including substrate, substrate can select
The opaque materials such as transparent material or metal, ceramics are selected, covered with reflective metal layer above the substrate, on the metal layer
Making has grating, which includes the first refractive film layer set gradually from lower to upper, the second refracting film layer, first refractive film layer
Refractive index be less than the refractive index of the second refracting film layer, the refractive index of the second refracting film layer is in 2 or so, the cycle of the grating
0.99 1.15um, grating duty cycle be 0.52 0.57, first refractive thicknesses of layers be 0.27 0.55um, the second refraction film
Layer thickness is 0.67 0.85um.
Further, the cycle of the grating is 1060 nanometers, grating duty cycle is 0.55, first and second refraction film thickness
Degree is respectively 0.32,0.73um.
Further, the refractive index of first and second refracting film layer is respectively 1.444,1.998.
Further, the first refractive film layer material is silica.
Further, the second refracting film layer material is silicon nitride, tantalum pentoxide or hafnium oxide.
Further, the substrate is silicon chip, vitreous silica, metal, glass or ceramics.
Further, the material of the metal layer is gold, silver, aluminium or copper.
According to above-mentioned technical proposal, the uncorrelated broadband reflection grating of polarization of the invention, have it is simple in structure, to substrate material
The characteristics of expecting no requirement (NR), polarization insensitive, high diffraction efficiency, particularly when metal layer material selection gold, the cycle of grating is
1.06um, first refractive film layer be 0.32um thickness silica, the second refracting film layer be 0.73um thickness silicon nitride, light
When grid duty cycle is 0.55, incident light of the wave-length coverage in 1500 1600nm is incident along Littrow angle, TE and TM films spread out
It penetrates efficiency and is above 90%；It is if more molten than what is generally used at present with the ceramic substrate of zero expansion glass or low thermal coefficient of expansion
The grating thermal stability of fused silica substrate is more preferable, can be applied to wavelength-division multiplex system.
Description of the drawings
The present invention is described in further detail below by specific embodiment combination attached drawing.
Fig. 1 is the geometry schematic diagram of the uncorrelated broadband reflection grating of polarization of the present invention；
Fig. 2 be the present invention metal layer material is gold, screen periods are 1060 nanometers, grating duty cycle is 0.55, first,
Two refraction thicknesses of layers are respectively 0.32,0.73um, and incident angle is along diffraction efficiency during Littrow angle incidence with lambda1-wavelength
Variation characteristic curve.
Wherein, 1, substrate；2nd, metal layer；3rd, first refractive film layer；4th, the second refracting film layer；5th, incident light；6th, diffraction light.
Specific embodiment
The present invention is described in further detail below by specific embodiment combination attached drawing.
Referring to Fig. 1, Fig. 1 is the geometry schematic diagram that the present invention polarizes uncorrelated broadband reflection grating.The present embodiment
Substrate 1 uses silicon chip, and metal layer 2 is using gold, and grating is two-layer structure, and bottom first refractive film layer 3 is silica membrane, top
The second refracting film layer of portion 4 is the silicon nitride film that refractive index is 2 or so.Silicon nitride film refractive index is 1.998, and silica is thin
Film refractive index is 1.444, and the cycle using rigorous coupled wave method optimization grating is 1060 nanometers, 3 He of optimization first refractive film layer
Second refracting film layer, 4 thickness is 0.32um and 0.73um.For 1,550 45 degree of the polarized incident angles of nano waveband TE and TM two
Left and right, -1 order diffraction efficiency is more than 95%.The cycle of the grating is 0.99 1.15um, and grating duty cycle is 0.52 0.
57,3 thickness of first refractive film layer is 0.27um 0.55um, and 4 thickness of the second refracting film layer is 0.67 0.85um.
Incident light 5 is incident with the corresponding Littrow angle θ of centre wavelength from air in Fig. 1, and diffraction light 6 and incident light 5 are flat
Row is reversed, and b represents raster width, and d represents the cycle of grating, and grating duty cycle is defined as f=b/d.Metal layer has spectrum very wide
In the range of all have a higher reflectivity, therefore the grating of geometry as shown in Figure 1 can be used for designed central wavelength for 1550
The uncorrelated broadband reflection grating of polarization of nanometer.Under optical grating construction as shown in Figure 1, as shown in Fig. 2, the present invention is using stringent
Coupled-mode theory calculates the cycle that -1 order diffraction efficiency of the reflecting grating works as grating with the change curve of lambda1-wavelength
For 1060 nanometers, grating duty cycle is 0.55, first and second refracting film layer（3、4）When thickness is respectively 0.32um, 0.73um, TE
Or TM polarised lights with 1550 nanometers of corresponding 46.6 degree of incidence of Littrow angle of centre wavelength when, -1 order diffraction efficiency of the grating exists
100 nano wave length bandwidth（1500 1600 nanometers) in be all higher than 90%.
Table 1 gives a series of embodiments of the present invention.When first and second refracting film layer（3、4）Thickness is respectively
0.32um, 0.73um, grating duty cycle be 0.55 when, centre wavelength diffraction efficiency with the cycle of grating delta data.By table 1
It understands, for the cycle d of grating at 0.99 1.14 microns, incident center wavelength of light 1550nm TE and TM polarized diffraction efficiencies are big
In 90%.
Table 2 gives another series embodiment of the present invention, and the wherein cycle d of grating is 1060 nanometers, grating duty cycle
For 0.55, when 3 thickness of first refractive film layer of grating bottom is 0.32um, centre wavelength diffraction efficiency with grating the second refraction
The delta data of 4 thickness of film layer.As shown in Table 2, when 4 thickness of the second refracting film layer is 067 0.8um, incident center wavelength of light
Two polarization TE and TM mould diffraction efficiencies of 1550nm are all higher than 90%.
Table 3 gives another series embodiment of the present invention.When first and second refracting film layer（3、4）Thickness is respectively
When 0.32um, 0.73um, centre wavelength diffraction efficiency with grating duty cycle delta data.As shown in Table 3, grating duty cycle f
Between 0.52 0.57, incident two polarization TE and TM diffraction efficiencies of centre wavelength 1550nm are all higher than 90%.
Table 1
Table 2
Table 3
Use above specific case is illustrated the present invention, is only intended to help to understand the present invention, not limiting
The system present invention.For those skilled in the art, thought according to the invention can also be made several simple
It deduces, deform or replaces.
Claims (7)
1. the uncorrelated broadband reflection grating of polarization of 1550 nano wavebands of a kind of optic communication, which is characterized in that including substrate, institute
It states above substrate covered with reflective metal layer, being made on the metal layer has grating, which includes setting gradually from lower to upper
First refractive film layer, the second refracting film layer, the refractive index of first refractive film layer is less than the refractive index of the second refracting film layer, the light
The cycle of grid is 0.99 1.15um, grating duty cycle is 0.52 0.57, and first refractive thicknesses of layers is 0.27 0.55um,
Second refracting film layer thickness is 0.67 0.85um.
2. a kind of uncorrelated broadband reflection grating of polarization of 1550 nano wavebands of optic communication as described in claim 1, special
Sign is, cycle of the grating is 1060 nanometers, grating duty cycle is 0.55, and first and second refracting film layer thickness is respectively
0.32、0.73um。
3. a kind of uncorrelated broadband reflection grating of polarization of 1550 nano wavebands of optic communication as claimed in claim 2, special
Sign is that the refractive index of first and second refracting film layer is respectively 1.444,1.998.
4. a kind of uncorrelated broadband reflection grating of polarization of 1550 nano wavebands of optic communication as claimed in claim 3, special
Sign is that the first refractive film layer material is silica.
5. a kind of uncorrelated broadband reflection grating of polarization of 1550 nano wavebands of optic communication as claimed in claim 4, special
Sign is that the second refracting film layer material is silicon nitride, tantalum pentoxide or hafnium oxide.
6. a kind of uncorrelated broadband reflection grating of polarization of 1550 nano wavebands of optic communication as claimed in claim 5, special
Sign is that the substrate is silicon chip, vitreous silica, metal, glass or ceramics.
7. a kind of uncorrelated broadband reflection grating of polarization of 1550 nano wavebands of optic communication as claimed in claim 6, special
Sign is that the material of the metal layer is gold, silver, aluminium or copper.
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| CN109655951A (en) * | 2017-10-11 | 2019-04-19 | 上海矽安光电科技有限公司 | A kind of polarization uncorrelated broadband reflection grating of 1550 nano wavebands of optic communication |
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| CN109655951A (en) * | 2017-10-11 | 2019-04-19 | 上海矽安光电科技有限公司 | A kind of polarization uncorrelated broadband reflection grating of 1550 nano wavebands of optic communication |
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