CN207266941U - Sorting machine - Google Patents

Abstract

The utility model is suitable for electronic component technical field of measurement and test, provide a kind of sorting machine, the sorting machine includes controller, workbench, controlled by controller and be fixedly installed in workbench and be used for the feed device that semiconductor devices is provided, controlled by controller and be fixedly installed in workbench and be used for the marking device to semiconductor devices mark, controlled by controller and be fixedly installed in workbench and for storing classifiedly the feeding-distribution device of semiconductor devices and being controlled by controller and be installed on workbench and for picking up and transfer semiconductor devices with the rotating-table apparatus of transport semiconductor device.Mark and sub-material function have been integrated on a board by sorting machine provided by the utility model, reduce equipment purchase quantity, reduce production cost, in addition above-mentioned work is completed relative to multiple boards, the utility model reduces the link of the material transportation between board, substantially increases production efficiency.

Description

Sorting machine

Technical field

The utility model belongs to electronic component technical field of measurement and test, more particularly to a kind of for testing and sorting semiconductor The sorting machine of device.

Background technology

Need to carry out mark, sub-material to it after the completion of semiconductor devices manufacture, in the prior art, above-mentioned each course of work It is to be respectively completed by different boards, low production efficiency, equipment is more and miscellaneous.

Utility model content

The purpose of this utility model is to provide a kind of sorting machine, it is intended to solves in the prior art since semiconductor devices is adopted Mark and sub-material are carried out with distinct device and cause low production efficiency, equipment miscellaneous technical problem more.

The utility model is realized in this way a kind of sorting machine, the sorting machine includes controller, workbench, by described Controller controls and is fixedly installed in the workbench and is used to provide the feed device of semiconductor devices, by the controller control Make and be fixedly installed in the workbench and be used to control to the marking device of the semiconductor devices mark, by the controller And it is fixedly installed in the workbench and is used to store classifiedly the feeding-distribution device of the semiconductor devices and by the controller Control and be installed on the workbench and transport turning for the semiconductor devices for picking up and transferring the semiconductor devices Disk device, the feed device, the marking device and the feeding-distribution device surround and are arranged at around the rotating-table apparatus, The rotating-table apparatus picks up the semiconductor devices from the feed device, and the semiconductor devices is first moved to described beat Device for mark moves put to the feeding-distribution device to be classified by the feeding-distribution device afterwards to carry out mark by the marking device Storage.

The utility model has the technical effect that relative to the prior art：Sorting machine provided by the utility model is included by controlling Feed device, marking device, feeding-distribution device and the rotating-table apparatus of device control, rotating-table apparatus can pick up semiconductor from feed device Device and each semiconductor devices is placed sequentially in marking device and feeding-distribution device carries out mark and sub-material operation respectively.This reality Mark and sub-material function have been integrated on a board with the sorting machine of new offer, reduced equipment purchase quantity, has been reduced Production cost, in addition completes above-mentioned work relative to multiple boards, and the utility model reduces the material between board The link of transport, substantially increases production efficiency.

Brief description of the drawings

In order to illustrate more clearly of the technical solution of the utility model embodiment, below will to the utility model embodiment or Attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, drawings described below is only Some embodiments of the utility model, for those of ordinary skill in the art, without creative efforts, Other attached drawings can also be obtained according to these attached drawings.

Fig. 1 is the stereogram for the sorting machine that the utility model embodiment provides；

Fig. 2 is the stereogram for the sorting machine that the utility model embodiment provides；

Fig. 3 is the stereogram for the feed device that the utility model embodiment provides；

Fig. 4 is the stereogram for the feed device that the utility model embodiment provides；

Fig. 5 is the partial enlarged view in Fig. 4；

Fig. 6 be the utility model embodiment provide keep out component keep out schematic diagram；

Fig. 7 is the stereogram for the delivery mechanism that the utility model embodiment provides；

Fig. 8 is the front view for the delivery mechanism that the utility model embodiment provides；

Fig. 9 is the stereogram for the support structure that the utility model embodiment provides；

Figure 10 is the exploded view for the support structure that the utility model embodiment provides；

Figure 11 is the partial enlarged view for the support structure that the utility model embodiment provides；

Figure 12 is the stereogram for the supporting that the utility model embodiment provides；

Figure 13 is the stereogram for the marking device that the utility model embodiment provides；

Figure 14 is the stereogram for the marking device that the utility model embodiment provides；

Figure 15 is the sectional view for the marking device that the utility model embodiment provides；

Figure 16 is the sectional view for the marking device that the utility model embodiment provides；

Figure 17 is the exploded view for the marking device that the utility model embodiment provides；

Figure 18 is the stereogram for the buffer table that the utility model embodiment provides；

Figure 19 is the sectional view for the buffer table that the utility model embodiment provides；

Figure 20 is the stereogram for the satellite turntable that the utility model embodiment provides；

Figure 21 is the sectional view for the satellite turntable that the utility model embodiment provides；

Figure 22 is the stereogram for the feeding-distribution device that the utility model embodiment provides；

Figure 23 is the stereogram for the feeding-distribution device that the utility model embodiment provides；

Figure 24 is the stereogram for the sub-material component that the utility model embodiment provides；

Figure 25 is the sectional view for the feeding-distribution device that the utility model embodiment provides；

Figure 26 is the sectional view for the sub-material component that the utility model embodiment provides；

Figure 27 is the sectional view for the feeding assembly that the utility model embodiment provides；

Figure 28 is the stereogram for the rotating-table apparatus that the utility model embodiment provides；

Figure 29 is the sectional view for the rotating-table apparatus that the utility model embodiment provides；

Figure 30 is the partial enlarged view of Figure 29；

Figure 31 is the partial perspective view of Figure 28；

Figure 32 is the sectional view after the inner ring body that the utility model embodiment provides and outer ring body installation；

Figure 33 is the stereogram for the inner ring body that the utility model embodiment provides；

Figure 34 is the stereogram for the stator pipe fitting that the utility model embodiment provides；

Figure 35 is the suction nozzle that the utility model embodiment provides and the stereogram for pushing component；

Figure 36 is the suction nozzle that the utility model embodiment provides and the sectional view for pushing component.

Embodiment

The embodiment of the utility model is described below in detail, the example of the embodiment is shown in the drawings, wherein from beginning Same or similar element is represented to same or similar label eventually or there is same or like element.Below by ginseng The embodiment for examining attached drawing description is exemplary, it is intended to for explaining the utility model, and it is not intended that to the utility model Limitation.

, it is necessary to which explanation, when element, to be referred to as " being fixed on " or " being arranged at " another in the description of the utility model A element, it directly on another element or can be connected on another element.When an element is known as " even It is connected to " another element, it can be directly to another element or be indirectly connected on another element.

It is to be appreciated that term " length ", " width ", " on ", " under ", "front", "rear", "left", "right", " vertical ", The orientation or position relationship of the instruction such as " level ", " top ", " bottom " " interior ", " outer " are to be closed based on orientation shown in the drawings or position System, is for only for ease of and describes the utility model and simplified description, rather than the device or element of instruction or hint meaning are necessary With specific orientation, with specific azimuth configuration and operation, therefore it is not intended that limitation to the utility model.

In addition, term " first ", " second " are only used for description purpose, and it is not intended that instruction or hint relative importance Or the implicit quantity for indicating indicated technical characteristic.Thus, define " first ", the feature of " second " can be expressed or Implicitly include one or more this feature.In the description of the utility model, " multiple " are meant that two or two More than, unless otherwise specifically defined.

In the utility model, " connection " can be direct connection or some pipeline parts of midfeather are mutual Connection, can be described as " connecting " as long as having and carrying out gas exchanges, for the ordinary skill in the art, can be according to tool Body situation understands concrete meaning of the above-mentioned term in the utility model.

In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation Example, is further elaborated the utility model.

Fig. 1 and Fig. 2 are referred to, the sorting machine that the utility model embodiment provides includes controller (not shown), workbench 100th, controlled by the controller and be fixedly installed in the workbench 100 and be used for the feeding dress that semiconductor devices 800 is provided 200 are put, is controlled by the controller and is fixedly installed in the workbench 100 and is used for 800 mark of semiconductor devices Marking device 300, controlled by the controller and be fixedly installed in the workbench 100 and described partly led for storing classifiedly The feeding-distribution device 400 of body device 800 and controlled by the controller and be installed on the workbench 100 and for pick up and under The semiconductor devices 800 is put to transport the rotating-table apparatus 500 of the semiconductor devices 800, it is the feed device 200, described Marking device 300 and the feeding-distribution device 400, which are surround, to be arranged at around the rotating-table apparatus 500, the rotating-table apparatus 500 The semiconductor devices 800 is picked up from the feed device 200, and the semiconductor devices 800 is first moved to the mark Device 300 moves put to the feeding-distribution device 400 with by the feeding-distribution device afterwards to carry out mark by the marking device 300 400 are stored classifiedly.

Refer to Fig. 1 and Fig. 2, sorting machine provided by the utility model include by controller control feed device 200, beat Device for mark 300, feeding-distribution device 400 and rotating-table apparatus 500, rotating-table apparatus 500 can be from 200 picks up semiconductor devices of feed device 800 and each semiconductor devices 800 is placed sequentially in marking device 300 and feeding-distribution device 400 carries out mark and sub-material respectively Operation.Mark and sub-material function have been integrated on a board by sorting machine provided by the utility model, reduce equipment purchase Quantity, reduces production cost, in addition completes above-mentioned work relative to multiple boards, the utility model reduce board it Between material transportation link, substantially increase production efficiency.It should be noted that the control in the utility model in embodiment Device can include a mainframe computer system and multiple control device subsystems, for example, each device can be by a controller subsystem System control, each control device subsystem can be transported together with mainframe computer system networking to manipulate each device with cooperative mode Make.But not limited to this.

Refer to Fig. 3 to Fig. 8 further, the feed device 200 include feeding rack 210, be fixedly installed in it is described into Rack 210 and for isolating the single semiconductor devices 800 from multiple semiconductor devices 800 and being transmitted Delivery mechanism 220 and for accepting the single semiconductor devices 800 that is passed over by the delivery mechanism 220 for institute The support structure 240 of the pickup of rotating-table apparatus 500 is stated, the delivery mechanism 220 includes transfer component 221 and keeps out component 230, The transfer component 221 is used to transport each semiconductor devices 800 to 240 direction of support structure, described to keep out group Part 230 picks up institute after a semiconductor devices 800 is transported to the support structure 240 and in the rotating-table apparatus 500 Remaining each described semiconductor devices 800, which is limited, before stating semiconductor devices 800 is transported to the support structure 240.This practicality is new The feed device 200 that type embodiment provides can isolate single semiconductor devices 800 from multiple semiconductor devices 800 and come out Picked up for rotating-table apparatus 500, so avoid rotating-table apparatus 500 while be drawn to multiple semiconductor devices 800 and influence The posture put of Subsequent semiconductor device 800, and then avoid influencing the yields of subsequent job, if in addition rotating-table apparatus 500 are drawn to multiple semiconductor devices 800 at the same time, subsequently also have the larger mistake that semiconductor devices 800 may occur in transport Drop in journey, cause the waste of material.In the present embodiment, transported in single semiconductor devices 800 by transfer component 221 to holding After on connection mechanism 240, remaining semiconductor devices 800 can be kept out by keeping out component 230, further to reduce rotating-table apparatus 500 It is drawn to the possibility of multiple semiconductor devices 800.

Fig. 5 to Fig. 8 is referred to, further, the transfer component 221 includes being fixed on the delivering of the feeding rack 210 Rail 222, the delivering rail 222 are extended to the support structure 240 and for respectively having towards the support structure 240 movement The semiconductor devices 800 of trend is arranged in order placement；The transfer component 221, which further includes, to be installed on the feeding rack 210 and uses In the support structure 240 will be blown to positioned at the semiconductor devices 800 of each 800 direction of motion file leader position of semiconductor devices Blow gun 229, it is described keep out component 230 include be fixedly installed in the drive component 231 of the feeding rack 210 and by the drive What dynamic component 231 drove movement keeps out bar 234, and the blow gun 229 is in the rotating-table apparatus 500 from the support structure 2,400 After taking the semiconductor devices 800, the semiconductor devices 800 of file leader position is blown to the support structure 240；Yu Dan A semiconductor devices 800 is transported to after the support structure 240 and picks up single described partly lead in the rotating-table apparatus 500 Before body device 800, the driving component 231 drives the bar 234 of keeping out to move so that the bar 234 of keeping out is kept out subsequently respectively The semiconductor devices 800, and after the rotating-table apparatus 500 picks up the semiconductor devices 800, the driving component Bar 234 is kept out described in 231 drivings move and described keep out the keeping out to follow-up each semiconductor devices 800 of bar 234 to cancel.

Specifically, Fig. 5 to Fig. 8 is referred to, in the present embodiment, semiconductor devices 800, which is sized, is placed on delivering On rail 222, the semiconductor devices 800 of file leader position of the definition in each 800 moving direction of semiconductor devices is the first semiconductor Device 801, take second place for the second semiconductor devices 802, when the first semiconductor devices 801 is blown to support structure 240 by blow gun 229 Afterwards, the driving of drive component 231 is kept out bar 234 and is moved, and the second semiconductor devices 802 is stopped, it can not be rethought support structure 240 movements, it is possible to understand that ground, is placed on delivering rail 222 since each semiconductor devices 800 is sized, and leads when the second half After body device 802 is kept out, follow-up each semiconductor devices 800 can not also continue to move along, and thereby realize from multiple Single semiconductor devices 800 is isolated in semiconductor devices 800.It is to be appreciated that when the first semiconductor devices 801 is transported it Afterwards, the second semiconductor devices 802 moves forward and is changed into herein referred the first semiconductor devices 801 wait and transports, and with The adjacent semiconductor devices 800 of the semiconductor devices 800 is referred to alternatively as the second semiconductor devices 802.Those skilled in the art Reference that can be as the case may be to the first semiconductor devices 801 and the second semiconductor devices 802 is rationally inferred.

Fig. 5 to Fig. 8 is referred to, further, the delivering rail 222 is disposed with along its length and external pressure Source connect and for blow to each semiconductor devices 800 so that each semiconductor devices 800 along it is described delivering rail 222 to Multiple gas holes (not shown) that the support structure 240 moves.In the present embodiment, the forward movement of each semiconductor devices 800 Power from the multiple gas holes being arranged on delivering rail 222, it is preferable that the opening of each semiconductor devices 800 is set In the upper surface of delivering rail 222, it fifty-fifty conductor device 800 is in suspended state during moving, reduce Frictional resistance so that the process that each semiconductor devices 800 moves is more steady.

Fig. 6 is referred to, further, the delivering rail 222 is equipped with described in confession close to one end of the support structure 240 and supports The perforation 224 that bar 234 passes through, it is described to deliver on rail 222 positioned at 224 sides away from the support structure 240 of the perforation Adsorption hole 225 equipped with being connected with external pressure source and for adsorbing the semiconductor devices 800.Specifically, when the first half lead After body device 801 is blown to support structure 240, adsorption hole 225 is opened, the second semiconductor devices 802 is sucked in delivering rail 222 On, increase the second semiconductor devices 802 and deliver rail 222 between frictional force, can reduce the second semiconductor devices 802 and The translational speed of follow-up each semiconductor devices 800, then controls to keep out bar 234 and rise and supports the second semiconductor devices 802 again Gear, so can be that the rising for keeping out bar 234 is raced against time, can effectively keep out the second semiconductor devices 802, further carry Height isolates the reliability of single semiconductor devices 800.

Fig. 5 to Fig. 8 is referred to, further, the transfer component 221 includes being fixed on the feeding rack 210 and being located at The guide plate 226 of 222 top of delivering rail, the side of the guide plate 226 towards the delivering rail 222 are equipped with opening direction The bar shaped guide groove 227 of the delivering rail 222, the side of each semiconductor devices 800 are set up on the delivering rail 222, Opposite side is inserted into the bar shaped guide groove 227 and is slided in the bar shaped guide groove 227.The present embodiment is oriented to by setting Plate 226, and set bar shaped guide groove 227 that each semiconductor devices 800 is stabilized on delivering rail 222 on guide plate 226, Semiconductor devices 800 is avoided to slide from delivering rail 222 during movement.

Fig. 5 to Fig. 8 is referred to, further, the guide plate 226 is close to the side of first semiconductor devices 801 Equipped with notch 228, the guide plate 226 is fixed in described 229 one end of blow gun, and the other end extends with to institute to the notch 228 The first semiconductor devices 801 is stated to blow.The sinuous flow that the gas that this notch 228 can blow out to avoid blow gun 229 produces is led fifty-fifty Body device 800, which blows off, delivers rail 222.

Fig. 5 to Fig. 8 is referred to, further, the driving component 231 includes being fixed on the feeding rack 210 and being used for Keep out the electromagnet 232 of bar 234 described in drop-down and one end pushes the feeding rack 210 and the other end and pushes and described keeps out bar 234 and the bar 234 of keeping out above is pushed away so that the elastic top kept out bar 234 and keep out second semiconductor devices 802 Push piece 233.Specifically, elastic yoke frame 233 provides upward thrust to keep out bar 234, and electromagnet 232 carries to keep out bar 234 For downward pulling force, when needing to keep out the second semiconductor devices 802, electromagnet 232 powers off, and keeps out bar 234 in elastic pushing tow Under the promotion of part 233, move up, and the second semiconductor devices 802 is kept out, when needing to blow single semiconductor devices 800 During to support structure 240, electromagnet 232 is powered, and will keep out bar 234 and moves down, i.e., no longer keeps out semiconductor devices 800.

Refer to Fig. 8, further, it is described keep out bar 234 and be fixedly installed in its side wall keep out disk 235, the driving Component 231 further includes that one end and the feeding rack 210 are fixed and the other end extends and for described in keeping out to the bar 234 of keeping out Disk 235 is kept out to keep out the limited block 236 that bar 234 moves up described in prevention.Based on this structure, the utility model embodiment can be with The stroke of bar 234 is kept out in limitation, with ensure electromagnet 232 be able to will be kept out in the regular hour every time bar 234 be displaced downwardly to it is specified Position, with semiconductor devices 800 of timely letting pass, similarly, can ensure that elastic yoke frame 233 every time can be in a timing Interior will keep out moves on to designated position on bar 234, and timely to keep out semiconductor devices 800, further improve is isolated The reliability of single semiconductor devices 800.

Fig. 9 to Figure 12 is referred to, further, the support structure 240 includes being fixedly installed on the feeding rack 210 First motor cabinet 241, the first motor 242 for being fixedly installed on first motor cabinet 241 and driven by first motor 242 Dynamic movement and the supporting 245 for accepting first semiconductor devices 801, the supporting 245 is including by described first Motor 242 drive movement undertaking pedestal 246, be fixed on be arranged at it is described undertaking pedestal 246 and with it is described undertaking pedestal 246 The mobile undertaking rail 248 to connect with the delivering rail 222.Specifically, accepting rail 248 can under the driving of the first motor 242 It to do the reciprocating motion of horizontal direction, and can connect with delivering rail 222, be held when needing semiconductor devices 800 being transferred to During connection mechanism 240, controllable first motor 242 operates so that accepts rail 248 and connects with delivering rail 222.Semiconductor devices 800 It can be slided from delivering rail 222 to rail 248 is accepted, then, the first motor 242 of control operates so that accepts rail 248 and delivering Rail 222 separates, and has thus got single semiconductor devices 800.In the present embodiment, single semiconductor devices 800 is being got Afterwards, separated at once with delivery mechanism 220, so when rotating-table apparatus 500 is from picks up semiconductor devices 800 on undertaking rail 248, just Other semiconductor devices 800 will not be compromised, rotating-table apparatus 500 is further avoided while is drawn to multiple semiconductor devices 800。

Figure 11 is referred to, further, the undertaking rail 248 is recessed formed with negative pressure cavity 249, institute downwards on surface thereon State and accept the bottom of rail 248 and be equipped with that one end is connected with external pressure source and the other end is connected with the negative pressure cavity 249 with described in general First semiconductor devices 801 is adsorbed in the first negative pressure hole 250 on the undertaking rail 248.The undertaking rail 248 is away from described negative The side of pressure chamber 249 is equipped with the baffle 251 for being used for keeping out first semiconductor devices 801, and the baffle 251 is equipped with Opening is located at the baffle 251 towards the second negative pressure hole 252 on the end face of the negative pressure cavity 249, second negative pressure hole 252 one end is connected with external pressure source and the other end is connected with the negative pressure cavity 249 with by first semiconductor devices 801 It is adsorbed on the undertaking rail 248.When single semiconductor devices 800 is blown to and accepts on rail 248 by blow gun 229, the first negative pressure 250 and second negative pressure hole 252 of hole can adsorb semiconductor devices 800 on rail 248 is accepted, to prevent semiconductor devices 800 Drop.Baffle 251 also has the function that fast positioning at the same time so that semiconductor devices 800 can quickly reach what is specified Picked up for rotating-table apparatus 500 position.

Refer to Fig. 9 to Figure 12, further, the support structure 240 further include be arranged on the supporting 245 and It whether there is the first photoelectric sensor 253 of semiconductor devices 800 on the undertaking rail 248 for detecting.Pass through the first photoelectricity Sensor 253, system can learn accept whether placed semiconductor devices 800 on rail 248, can be with when not placing successfully Control feed device 200 carries out once placement action again, to avoid the work rhythm of each device is upset.

Fig. 9 to Figure 12 is referred to, further, first motor 242 includes being fixedly installed on first motor cabinet 241 the first motor body 243 and rotating first motor shaft 244, the undertaking are driven by first motor body 243 Mechanism 240 include be fixedly installed on first motor cabinet 241 and to 220 direction of delivery mechanism extend guide rail 254 with And one end is connected on first motor shaft 244 and the other end shaking along what is extended perpendicular to 244 direction of the first motor shaft Bar 255, the supporting 245 are slidably connected to the guide rail 254, and 245 bottom of supporting is provided with along perpendicular to described The guide groove 247 of 254 length direction of guide rail extension, the rocking bar 255 are equipped with its one end away from first motor shaft 244 It is inserted into the guide groove 247 and the supporting and pushing column 256 for promoting the supporting 245 to be slided along the guide rail 254.Specifically, When the first motor shaft 244 rotates, rocking bar 255 can be driven to be swung around the first motor shaft 244, rocking bar 255 during swing, Supporting and pushing column 256 can stir supporting 245 and slidably reciprocate on guide rail 254, thereby realize and accept rail 248 and delivering rail 222 Connect and separating action, it is possible to understand that ground, supporting and pushing column 256 are being promoted during supporting 245 slides on guide rail 254, It should be moved at the same time along the length direction respective guide slot 247 of guide groove 247.

Fig. 9 to Figure 12 is referred to, further, the supporting 245 is equipped with the spacing of outstanding extension in its side Convex block 257, on first motor cabinet 241 fixed setting be useful for keeping out the spacing block set 257 to limit the supporting The gag lever post 258 of 245 strokes.Gag lever post 258 can limit the stroke of supporting 245 so that accept rail 248 with delivering rail After 222 separation, same position is rested on all the time, rotating-table apparatus 500 can be allowed more accurately to get semiconductor devices 800.

Refer to Figure 13 to Figure 17, further, the marking device 300 include mark stent 330, the second motor 348, Satellite turntable 351 and mark device 310, the mark stent 330 include support base 331 and with the support base 331 connect and are fixedly installed the supporting table 332 of second motor 348, have in the supporting table 332 and pick and place station 338 And mark station 330, second motor 348 include with the supporting table 332 fixed setting the second motor body 349 with And rotation and the second motor shaft 350 being fixedly connected with the satellite turntable 351, institute are driven by second motor body 349 State satellite turntable 351 include be fixedly connected with second motor shaft 350 basal disc 352, be arranged on the basal disc 352 and use The station 338 and described of picking and placeing is circulated through successively in carry the semiconductor devices 800 and moving with the basal disc 352 First maintaining part 353 of mark station 330 and it is arranged on the basal disc 352 and for carrying the semiconductor devices 800 And the second maintaining part 354 moved with the basal disc 352, second maintaining part 354 pass through institute in first maintaining part 353 State and pass through the mark station 330 when picking and placeing station 338, and when first maintaining part 353 is by the mark station 330 Station 338 is picked and placeed by described, the mark device 310 is used in the semiconductor devices 800 with first maintaining part 353 Or second maintaining part 354 to the semiconductor devices 800 during the mark station 330 by carrying out mark, the turntable Device 500 is partly led when station 338 is picked and placeed described in first maintaining part 353 or second maintaining part 354 process to described Body device 800 is picked and placeed.

Further, it is equipped with the satellite turntable 351 at first maintaining part 353 by first maintaining part 353 extend and are used for the first holding suction hole 357 for adsorbing semiconductor devices 800, the satellite turntable to the supporting table 332 It is equipped with and extends from second maintaining part 354 to the supporting table 332 and for adsorbing half at the second maintaining part 354 on 351 The second of conductor device 800 keeps suction hole 358, and the supporting table 332 is equipped with the mark station 339 and external pressure Source connects and the first station for being connected with the described first holding suction hole 357 and the second holding suction hole 358 is inhaled Stomata 340, the supporting table 332 are equipped with towards the side of the satellite turntable 351 and are connected with the first station suction hole 340 And by the two lateral negative pressure troughs 344 for picking and placeing station 338 and extending of the first station suction hole 340, described first keeps Suction hole 357 and it is described second holding suction hole 358 by second motor 348 drive rotation to it is described pick and place station 338 when, Connected with the negative pressure trough 344.

Figure 13 to Figure 17 is referred to, rotating-table apparatus 500 can treat this from placement semiconductor devices 800 at station 338 is picked and placeed After 800 mark of semiconductor devices, the semiconductor devices 800 is taken at station 338 away from picking and placeing；Specifically, turntable fills first Put 500 semiconductor devices 800 is placed in the first maintaining part 353 picked and placeed at station 338, first keep air-breathing at this time Hole 357 is connected by negative pressure trough 344 with the first station suction hole 340, is protected so as to suck semiconductor devices 800 first Hold in portion 353, and the second maintaining part 354 at this time should be located at mark station 339 and just carry out mark operation, and second protects Hold suction hole 358 just to connect with the first station suction hole 340, so as to which the semiconductor devices 800 of mark process will be in Suck in the second maintaining part 354.Then, rotating-table apparatus 500 places semiconductor devices 800 and mark component is also completed After mark, the second motor 348 driving satellite turntable 351 rotates so that the second maintaining part 354 is rotated to station 338 is picked and placeed, and is turned The good semiconductor subassembly of mark is taken away and places next semiconductor devices 800 by disk device 500, and the first maintaining part 353 rotates Mark operation is carried out to mark station 339, and the first holding 357 and first station suction hole 340 of suction hole is connected to incite somebody to action at this time Semiconductor devices 800 is sucked in the first maintaining part 353.The utility model embodiment is by setting the first station suction hole 340 Semiconductor devices 800 is sucked in the first maintaining part 353 and the second maintaining part 354 with negative pressure trough 344, avoids semiconductor device Part 800 slides during mark operation, so that mark process is more smooth.

Refer to Figure 15 to Figure 21, further, the supporting table 332 in it is described pick and place at station 338 be equipped with one end with The second station relieving stagnant Qi hole 341 that external pressure source connects and the other end is connected with the negative pressure trough 344.Specifically, when first protects Hold 353 or second maintaining part 354 of portion to rotate to after picking and placeing station 338, rotating-table apparatus 500 needs to take away semiconductor devices 800 When, second station relieving stagnant Qi hole 341 keeps suction hole 357 or second to keep suction hole 358 to positioned at first picked and placeed at station 338 Blow so that the first holding suction hole 357 or second keeps negative pressure in suction hole 358 to switch to positive pressure, reduces to the semiconductor device The suction of part 800, so that semiconductor devices 800 is removed.The utility model embodiment is by setting second station Relieving stagnant Qi hole 341 carries out vacuum breaker, so that when semiconductor devices 800 needs to be removed, can ensure semiconductor Device 800 is picked, and position is vacated, and is placed for next semiconductor devices 800, carries out mark operation.

Figure 15 to Figure 21 is referred to, further, the negative pressure trough 344 is surrounded on institute in protruding upward be provided with its bottom That states second station relieving stagnant Qi hole 341 is less than the depth of the negative pressure trough 344 every beam 345, the height raised every beam 345.Base In this structure, when blowing in second station relieving stagnant Qi hole 341, it can obstruct air-flow every beam 345 and be inhaled along negative pressure trough 344 to the first station 340 direction of stomata is circulated, and is turned so that the semiconductor devices 800 in mark station 339 still can be sucked in satellite On disk 351, effectively avoid in the progress vacuum breaker of second station relieving stagnant Qi hole 341, the semiconductor device in mark station 339 Part 800 drops from satellite turntable 351.

Figure 15 to Figure 21 is referred to, further, the negative pressure trough 344 is in arc-shaped so that described first keeps suction hole 357 and the second holding suction hole 358 when being rotated with the satellite turntable 351, connected all the time with the negative pressure trough 344.Can To understand ground, for the utility model embodiment during satellite turntable 351 is rotating, first keeps suction hole 357 and second to protect Hold suction hole 358 all the time with negative pressure trough 344 to be connected, so avoid, during satellite turntable 351 is rotating, partly lead Body device 800 drops from satellite turntable 351.

Figure 15 to Figure 21 is referred to, further, is additionally provided with the supporting table 332 and is symmetrically disposed on second motor The Image detection station 346 and idle station 347 of 350 both sides of axis, the marking device 300 are further included positioned at the supporting table 332 close to 346 side of Image detection station image detector 320, the Image detection station 346, the idle work Position 347, it is described pick and place station 338 and the distance of the mark station 339 and second motor shaft 350 is equal, it is described Line between Image detection station 346 and the idle station 347 picks and places station 338 and the mark station 339 with described Between line it is vertical, the satellite turntable 351, which further includes, to be arranged on the basal disc 352 and for fixing the semiconductor device 3rd maintaining part 355 of part 800 and it is arranged on the basal disc 352 and for fixing the 4th of the semiconductor devices 800 Maintaining part 356, the 3rd maintaining part 355 and the 4th maintaining part 356 are symmetrically arranged at second motor shaft 350 Both sides, first maintaining part 353, second maintaining part 354, the 3rd maintaining part 355 and the 4th maintaining part 356 are equal with the distance of second motor shaft 350, between first maintaining part 353 and second maintaining part 354 Line between line and the 3rd maintaining part 355 and the 4th maintaining part 356 is vertical, on the satellite turntable 351 in It is equipped with 3rd maintaining part 355 and extends and for adsorbing semiconductor from the 3rd maintaining part 355 to the supporting table 332 The 3rd of device 800 keeps suction hole 359, is equipped with the 4th maintaining part 356 on the satellite turntable 351 and is protected by the described 4th Hold portion 356 to extend to the supporting table 332 and keep suction hole 360 for adsorbing the 4th of semiconductor devices 800 the, the described 3rd Suction hole 359 and the 4th holding suction hole 360 is kept to be connected with the negative pressure trough 344.

Refer to Figure 15 to Figure 21, in the present embodiment, the semiconductor device good to mark by adding Image detection station 346 Part 800 carries out Image detection, to confirm whether mark is qualified, is in addition additionally arranged an idle station 347 at the same time, as spare, For example, when needing air exercise to be denoted as industry increase process, operation can be carried out in idle station 347.Specifically, based on above-mentioned knot Structure, satellite turntable 351 should often rotate a quarter circle, just slightly stop, so that each station completes corresponding operation.

Figure 15 to Figure 21 is referred to, further, the supporting table 332 is equipped with one at the Image detection station 346 The 3rd station suction hole 342 that end is connected with external pressure source and the other end is connected with the negative pressure trough 344.The supporting table 332 are equipped with that one end is connected with external pressure source and the other end is connected with the negative pressure trough 344 the at the idle station 347 Four station suction holes 343.Based on this structure, it can make it that the pressure in negative pressure trough 344 is more uniform, and increase each guarantor Hold when portion is located at Image detection station 346 and idle station 347 to the pretightening force of semiconductor devices 800, further avoid Semiconductor devices 800 drops.

Figure 15 to Figure 17 is referred to, further, the supporting table 332 includes being fixedly connected on the support base 331 And it is fixedly installed the supporting substrate 333 of second motor 348 and positioned at the supporting substrate 333 and the satellite turntable Between 351 and the buffer table 334 that is located on second motor shaft 350, the negative pressure trough 344 are arranged at the buffer table 334 are equipped with leading through 334 upper and lower surface of buffer table towards the side of the satellite turntable 351, the buffer table 334 To hole 335, the supporting table 332 further includes one end and is fixed on supporting substrate 333 and the other end insertion pilot hole 335 And it can push the supporting substrate 333 and the other end in the lead 336 and one end slided in the pilot hole 335 and support The buffer table 334 is pushed away so that the satellite turntable 351 is close to the resilient snubber 337 of the buffer table 334.It is appreciated that Ground, during the second motor 348 drives satellite turntable 351 rotating, buffer table 334 should not rotate, satellite turntable 351 should slide rotation on buffer table 334, and the effect of resilient snubber 337 is mainly so that buffer table 334 is close to satellite Turntable 351 so that negative pressure trough 344 consistently forms a relatively closed space with satellite turntable 351, in this way, could be effective Keep suction hole 357 and second to keep forming negative pressure in suction hole 358 first, semiconductor devices 800 is sucked in satellite On turntable 351.

Figure 15 is referred to, further, the marking device 300, which further includes, is arranged at the top of mark station 339 Dust suction part 361.The dust suction part 361 is equipped with to 339 direction of mark station close to one end of the mark station 339 to be extended The first air suction opening 362 and one end is connected with first air suction opening 362 and the other end is connected and is used for external pressure source Second air suction opening 363 of air-breathing, the laser sent described in the mark device 310 arrive at institute through first air suction opening 362 Semiconductor devices 800 is stated with to 800 mark of semiconductor devices.It is to be appreciated that during mark, can produce more Dust, influences the environment in the quality and workshop of mark, and therefore, the utility model embodiment is by setting dust suction part 361 can be with Improve mark quality, cleaning shop environment.

Figure 22 to Figure 27 is referred to, further, the feeding-distribution device 400 is located at institute relative to the marking device 300 The downstream of 500 direction of rotation of rotating-table apparatus is stated, the feeding-distribution device 400 includes material distributing rest 401, close to the rotating-table apparatus 500 Side and enter the feeding assembly 402 of the feeding-distribution device 400 and for by the semiconductor for the semiconductor devices 800 The sub-material component 410 of the classification transport of device 800, the side of the sub-material component 410 is connected and separately with the feeding assembly 402 Side is used to be connected with storing classifiedly the container (not shown) of the semiconductor devices 800, and the sub-material component 410 includes turning The dynamic tap turntable 411 for being connected to the material distributing rest 401, the rotating driving device 417 of the driving tap turntable 411, run through Tap turntable 411 both ends of the surface are set and one end is connected with the feeding assembly 402 pipe tap 412 and for it is described Multiple terminating pipes 424 that the other end of pipe tap 412 connects and circumferentially shaped formation is set, each terminating pipe 424 are distinguished Lead to each container for storing the different types of semiconductor devices 800, the driving device 417 drives described point Switch through disk 411 to rotate so that the pipe tap 412 is connected from the different terminating pipes 424.

Figure 22 to Figure 27 is referred to, different types of semiconductor devices 800 is mainly classified transport simultaneously by feeding-distribution device 400 And deposit among different containers, specifically, when the semiconductor devices 800 of storage to be sorted is placed on by rotating-table apparatus 500 During feeding assembly 402, turntable rotation, makes pipe tap 412 connect with corresponding terminating pipe 424, then feeding assembly 402 will partly be led Body device 800 is transported to sub-material component 410, which can pass through pipe tap 412 and terminating pipe 424 enters Among cell therefor, storing classifiedly for semiconductor devices 800 is realized.

Figure 22 to Figure 27 is referred to, further, the feeding assembly 402 includes being fixedly installed on the material distributing rest 401 On feed pipe 403, the feed pipe 403 includes close to the feed inlet 404 of described 500 one end of rotating-table apparatus and close to described The discharge port 405 of 410 one end of sub-material component, the feeding assembly 402, which further includes, is arranged at the feed inlet 404 and for inciting somebody to action The semiconductor devices 800 blows to the charging blowing nozzle 406 of the sub-material component 410.Partly led by feeding blowing nozzle 406 Body device 800 obtains initial kinetic energy, is then moved to sub-material component 410, and such a mode is simple in structure, and movement is efficient.

Refer to Figure 22 to Figure 27, further, the feeding assembly 402 include be arranged at the feed inlet 404 and It whether there is the charging photoelectric sensor 407 of the semiconductor devices 800 for detecting the feed inlet 404.It is to be appreciated that Charging photoelectric sensor 407 can detect semiconductor devices 800 is placed on feed inlet 404 whether, to be confirmed whether to want Open charging blowing nozzle 406 and blow semiconductor devices 800, avoid not being placed on designated position also in semiconductor devices 800 and start Blow, so may result in and blow to semiconductor devices 800 elsewhere.

It is to be appreciated that after tap turntable 411 takes a turn for the better position, feeding assembly 402 must be in the short period of time by half Conductor device 800 is blown in cell therefor, if semiconductor devices 800 is long in intraductal retention time, system may be missed Sentence the semiconductor devices 800 and come into corresponding container, and rotate tap turntable 411 again come next semiconductor devices of classifying 800, thus therefore, further, Figure 22 to Figure 27 can be referred to, the feeding assembly 402 also wraps there is a phenomenon where mistake point Include that one end is connected with external pressure source and the other end is through 403 side wall of feed pipe and for by the semiconductor devices 800 the first auxiliary gas blow pipes 408 blown to the feeding assembly 402.The sub-material component 410 further include be arranged at it is each described 424 lateral wall of terminating pipe and one end are connected with external pressure source and the other end runs through 424 side wall of terminating pipe and is used for institute State the second auxiliary gas blow pipe 425 that semiconductor devices 800 is blown to each container.Pass through the first auxiliary gas blow pipe 408 and the Two auxiliary gas blow pipes 425 carry out the movement of accelerated semiconductor device 800, can effectively avoid above-mentioned phenomenon.

Figure 22 to Figure 27 is referred to, further, the feeding-distribution device 400 is connected including one end with the pipe tap 412 The connecting tube 409 for connecting and being rotated relative to the discharge port 405 with the discharge port 405 with the other end.It is to be appreciated that When tap turntable 411 is rotating, connecting tube 409 can be subject to torsion, and the utility model embodiment sets the connecting tube 409 It can be rotated relative to discharge port 405 so that it can be rotated after being subject to torsion relative to feed pipe 403 so that tap turntable 411 exists Connecting tube 409 will not be subject to produce the resistance to tapping turntable 411 because resisting torsion during rotating so that tap turntable 411 rotation is more smooth.Meanwhile this structure can also reduce the size for the torsion that connecting tube 409 is subject to, play protection and connect The effect of adapter 409.Preferably, the connecting tube 409 be connected by bearing with feeding assembly 402 so that connecting tube 409 with into In the case that expects pipe 403 is connected, it can be rotated relative to feed pipe 403.

Figure 22 to Figure 27 is referred to, further, the driving device 417 drives the tap turntable by V belt translation 411 rotations, threeth motor 418 and conveyer belt 421 of the driving device 417 including being fixed on the material distributing rest 401, the described 3rd Motor 418 includes being fixedly installed on the 3rd motor body 419 of the material distributing rest 401 and by the 3rd motor body 419 Rotating 3rd motor shaft 420 is driven, the conveyer belt 421 is tightened in the 3rd motor shaft 420 and the tap turntable 411 Periphery and rolling is driven by the 3rd motor 418.3rd motor 418, which further includes, is fixedly installed on the 3rd electricity Belt wheel 422 on arbor 420, the periphery of the belt wheel 422 are equipped with the first external tooth 423, the periphery of the tap turntable 411 Equipped with the second external tooth 416, the conveyer belt 421 is equipped with and institute in towards the side of the belt wheel 422 and the tap turntable 411 State the first external tooth 423 and the internal tooth of second external tooth 416 engagement.It is to be appreciated that the sub-material in the utility model embodiment Required precision of the device 400 to tapping the rotation angle of turntable 411 is higher, i.e., it must essence under the drive of the 3rd motor 418 Accurate connects with corresponding terminating pipe 424, otherwise will occur wrong point, or cause semiconductor devices 800 to leak outside outlet pipe Situation, therefore the utility model embodiment drives tap turntable 411 to rotate using V belt translation, and connect in motor outer shaft sleeve Belt wheel 422 is equipped with the first external tooth 423, decomposes turntable and is equipped with the second external tooth 416, be provided with conveyer belt 421 with outside first The internal tooth of 423 and second external tooth 416 of tooth engagement, it is this by way of gear teeth meshing, transmission accuracy can be greatly improved, so that Realize the precise classification of semiconductor devices 800.

Figure 22 to Figure 27 is referred to, further, is further fixedly arranged on the material distributing rest 401 for limiting the tap The rotating limited post 426 of turntable 411, it is described tap turntable 411 on be fixedly installed along it is described tap 411 radial direction of turntable to Outer protrusion extends and for keeping out in the spacing abutment 427 on the limited post 426.Abutment 427 can limit tap and turn Maximum can only rotate a circle disk 411 in one direction, need to such as dock next terminating pipe 424, can only reversely rotate, this rotation The pipeline that mode can be connected with tapping turntable 411 will not be entangled since the tap 411 rotating number of turns of turntable is excessive Twine with it is in disorder.

Figure 22 to Figure 27 is referred to, further, the pipe tap 412 includes being fixed in the tap turntable 411 First adapter 413 and one end are connected with first adapter 413 and the other end is used to connecting with each terminating pipe 424 the Two adapters 414, second adapter 414 are transparent pipe, and the sub-material component 410 further includes ring set and is arranged at second adapter Outside 414 and for recording photoelectric counter 415 of the semiconductor devices 800 by quantity.The utility model embodiment passes through Set photoelectric counter 415 to calculate the quantity of each type semiconductor device 800 of classification storage, repeated for follow-up During using these semiconductor devices 800, make data reference.

Figure 28 to Figure 34 is referred to, further, the rotating-table apparatus 500 includes being fixedly connected with the workbench 100 Stator module 501, be surrounded on the stator module 501 it is outer and around the rotating rotor assembly 509 of the stator module 501, with The rotor assembly 509 is fixedly connected and for driving the rotating turntable actuator 510 of the rotor assembly 509 and being fixed on 509 outer edge of rotor assembly and rotated with the rotor assembly 509 and for picking and placeing the multiple of the semiconductor devices 800 Suction nozzle 600, each suction nozzle 600 are internally provided with the suction nozzle tracheae 601 for adsorbing the semiconductor devices 800, the stator Component 501 includes connecting with external pressure source and outwards the stator pipe fitting 502 of air-breathing, the inside of stator pipe fitting 502 have The endoporus 503 connected with external pressure source, the lateral wall of the stator module 501 and the madial wall of the rotor assembly 509 close The first annular negative pressure space 522 to be formed and be connected with the endoporus 503 is enclosed, the rotor assembly 509 is fixed in its side wall and set Be equipped with one end be connected with the first annular negative pressure space 522 be connected with the other end and each suction nozzle tracheae 601 it is more A suction blowing nozzle 521.Specifically, suction nozzle tracheae 601 and external pressure source are turned on for outside air-breathing, and first annular negative pressure Space 522 is connected with suction nozzle tracheae 601, so that the state of negative pressure is in first annular negative pressure space 522 all the time, and it is each One end of suction blowing nozzle 521 is connected with first annular negative pressure space 522, the other end connects with each suction nozzle tracheae 601, from And make it that suction nozzle 600 is able to carry out air-breathing, realizes the absorption to semiconductor devices 800.

Figure 28 to Figure 34 is referred to, further, the stator module 501 is equipped with its side wall and is connected with external pressure source And the multiple vacuum breaker suction nozzles 505 and one end is connected with the vacuum breaker suction nozzle 505 and the other end that supplied gas enters Connected with the first annular negative pressure space 522 and multiple vacuum breaker outlet nozzles 506 of supplied gas discharge, it is multiple described broken true Empty suction nozzle 505 is corresponded with multiple vacuum breaker outlet nozzles 506, and each vacuum breaker outlet nozzle 506 is spaced in a ring Array in the stator module 501 side wall and be respectively aligned to each suction blowing nozzle 521 with from the first annular negative pressure Blow in space 522 to each suction blowing nozzle 521.Specifically, since each suction blowing nozzle 521 is empty with first annular negative pressure all the time Between 522 connections, therefore, suction nozzle 600 is after semiconductor devices 800 is drawn, the state in air-breathing all the time, such semiconductor device Part 800 would not drop, when needing to control some suction nozzle 600 to put down semiconductor devices 800, to corresponding vacuum breaker suction nozzle 505 blow, and corresponding vacuum breaker outlet nozzle 506 will be to aligned with it and blown with the suction blowing nozzle 521 that the suction nozzle 600 connects Gas, in this way, the suction blowing nozzle 521 is just changed into the state of air blowing from the state of air-breathing, the suction of suction nozzle 600 will disappear, should Semiconductor devices 800 will drop from the suction nozzle 600, so as to fulfill the decentralization of semiconductor devices 800.It should be noted that For rotor assembly 509 during rotating, vacuum breaker suction nozzle 505 and vacuum breaker outlet nozzle 506 on stator module 501 will not Rotate, and inhaling blowing nozzle 521 can rotate with the rotation of rotor assembly 509, but inhale blowing nozzle 521 and often rotate one After unit angle, can be aligned with next vacuum breaker outlet nozzle 506, system can calculate automatically it is each suction blowing nozzle 521 this When it is this moment corresponding be which vacuum breaker outlet nozzle 506, it is thus possible to control corresponding vacuum breaker outlet nozzle 506 to needs The suction blowing nozzle 521 of vacuum breaker is blown.The utility model embodiment can realize the absorption of each suction nozzle 600 by said structure With put down function.

Figure 28 to Figure 34 is referred to, further, the stator module 501 includes being sheathed on outside the stator pipe fitting 502 Side wall and the inner ring body 507 equipped with the vacuum breaker suction nozzle 505 and the vacuum breaker outlet nozzle 506, the rotor assembly 509 It is outer and equipped with the outer ring body 512 of the suction blowing nozzle 521 including being sheathed on the inner ring body 507, the inner ring body 507 and described It is close with that the upper sealing bearing 513 for supplying the inner ring body 507 and the outer ring body 512 to relatively rotate is equipped between outer ring body 512 Bearing 514 is sealed, the inner ring body 507, the outer ring body 512, the upper sealing bearing 513 and the lower sealing bearing 514 close Enclose to form the first annular negative pressure space 522.Based on this structure, the rotating-table apparatus 500 that the utility model embodiment provides exists In the case that rotor assembly 509 and stator module 501 relatively rotate, still it can be formed for providing the first annular negative of negative pressure Press space 522.

Figure 28 to Figure 34 is referred to, further, the stator module 501, which further includes, is arranged at the upper sealing bearing The first sealing ring 515 between 513 and the inner ring body 507, be arranged at the lower sealing bearing 514 and the inner ring body 507 Between the second sealing ring 516, be arranged at it is described it is upper sealing bearing 513 and the outer ring body 512 between the 3rd sealing ring 517 And it is arranged at the 4th sealing ring 518 between the lower sealing bearing 514 and the outer ring body 512.It is close by setting first Seal 515, the second sealing ring 516, the 3rd sealing ring 517 and the 4th sealing ring 518, can prevent first annular negative pressure space 522 gas leakage, absorption semiconductor devices 800 that can be more reliable.

Figure 28 to Figure 34 is referred to, further, the lateral wall of the inner ring body 507 and the stator pipe fitting 502 surrounds Form the second annular negative pressure space 523, the stator pipe fitting 502 is equipped with its side wall to be used for the endoporus 503 and described the The first side wall through hole 504 that second ring negative pressure space 523 connects, the inner ring body 507 are equipped with first ring in its side wall The second sidewall through hole 508 that shape negative pressure space 522 is connected with the described second annular negative pressure space 523.Draw in suction nozzle 600 and partly lead During body device 800, air enters from suction nozzle tracheae 601, then arrives at first annular negative pressure sky by inhaling blowing nozzle 521 Between 522, then arrived at by second sidewall through hole 508 in the second annular negative pressure space 523, finally by the first side wall through hole 504 arrive at endoporus 503, and are extracted out by external pressure source.

Figure 28 to Figure 34 is referred to, further, between the stator pipe fitting 502 and the inner ring body 507 is equipped with and is located at 5th sealing ring 519 of the described second annular top of negative pressure space 523, between the stator pipe fitting 502 and the inner ring body 507 Equipped with the 6th sealing ring 520 positioned at the described second annular lower section of negative pressure space 523.By setting the 5th sealing ring 519 and the Six sealing rings 520 can prevent the second ring packing space gas leakage, so as to more reliable from first annular negative pressure space 522 Interior pumping.

Figure 28 to Figure 34 is referred to, further, the rotor assembly 509 includes the drive with the turntable actuator 510 Moving axis is fixedly connected and drives rotating disc 511 by the turntable actuator 510, and each suction nozzle 600 is fixedly installed on The outer edge of the disc 511.

Figure 35 to Figure 36 is referred to, further, the suction nozzle 600 includes being fixedly installed on the outside of disc 511 The suction nozzle seat 604 of edge, the suction nozzle seat 604 are equipped with the first sliding hole 605 passed through for the suction nozzle tracheae 601, the suction Mouth tracheae 601 is equipped with the first plug 602 in its top, and the suction nozzle 600 further includes the first plug 602 described in the pushing tow of one end and separately First elastic component 603 of suction nozzle seat 604 described in the pushing tow of one end, the rotating-table apparatus 500, which further includes, is fixedly installed on the stator Component 501 and for depressing the pushing component 700 of the suction nozzle tracheae 601., can be with when needing to pick and place semiconductor devices 800 Control pushes component 700 and pushes suction nozzle tracheae 601 so that the lower end of suction nozzle tracheae 601 arrives at distance and picks and places a little nearer position Carry out picking and placeing action, so can to avoid it is remote pick and place semiconductor devices 800 when, easily occur taking less than and putting inaccurate Problem.After pickup or decentralization, lift and push component 700, suction nozzle tracheae 601 is under the action of the first elastic component 603, meeting Reset to home position.Preferably, first elastic component 603 is the spring for being located on the suction nozzle tracheae 601.

Figure 35 to Figure 36 is referred to, further, the pushing component 700, which includes fixing with the stator module 501, to be connected Connect and mounting base 701, the lower piezoelectric being fixedly connected in the mounting base 701 in hole 705 are slipped equipped with second extended downwardly Machine 706, be fixed on the motor shaft of the lower piezoelectric machine 706 and drive rotating pushing cam by the lower piezoelectric machine 706 707th, slide and be inserted in the described second sliding hole 705 and for compressing the suction nozzle tracheae 601 so that the suction nozzle tracheae 601 The lower compression leg 708 slided up and down, the lower compression leg 708 are equipped with the second plug 709 in its top, and the pushing component 700 also wraps Include one end and push the second elastic component 710 that second plug 709 and the other end push the mounting base 701.Lower piezoelectric machine 706 Driving pushes cam 707 and rotates, and pushes compression leg 708 under cam 707 can be pushed during rotating, and lower compression leg 708 can be up and down It is mobile, and suction nozzle tracheae 601 is pressed, so as to fulfill the up and down motion of suction nozzle tracheae 601.Led it is to be appreciated that pushing cam 707 Downward pressure is provided to lower compression leg 708, the second elastic component 710 mainly provides upward thrust to lower compression leg 708, final real Now compression leg 708 pumps.Preferably, second elastic component 710 is the bullet for being located on the lower compression leg 708 Spring.

Figure 35 to Figure 36 is referred to, further, the pushing component 700, which further includes, is rotationally connected with the lower compression leg 708 top and connected with the rolling of the pushing cam 707 to drive the roller 711 that the lower compression leg 708 moves up and down.Institute Roller 711 is stated to be rotationally connected with second plug 709.It is to be appreciated that cam 707 is pushed during rotating, its The one side of compression leg 708 will be moved relative to lower compression leg 708 downwards, and therefore, the utility model embodiment is by setting roller 711 can To reduce the frictional force pushed between cam 707 and lower compression leg 708 so that moving up and down for lower compression leg 708 is more smooth.

Figure 35 to Figure 36 is referred to, further, the suction nozzle seat 604 is equipped with along parallel to the suction nozzle tracheae 601 Direction extension the first pilot hole 606, the suction nozzle 600 further includes one end and the suction nozzle tracheae 601 and fixes and the other end It is inserted into first pilot hole 606 and can be in the first lead 607 slided in first pilot hole 606.The peace Fill seat 701 and be equipped with the second pilot hole 702 extended along the direction parallel to the lower compression leg 708, the pushing component 700 is also Fixed including one end with the lower compression leg 708 and the other end is inserted into second pilot hole 702 and can be led in described second The second lead 703 slided into hole 702.First lead 607 provides guiding for the up and down motion of suction nozzle tracheae 601, has Semiconductor devices 800 is accurately picked up and placed beneficial to suction nozzle 600.Likewise, the second lead 703 is the upper of lower compression leg 708 Lower movement provides guiding, is conducive to lower compression leg 708 and is accurately pressed into suction nozzle tracheae 601.

Figure 35 to Figure 36 is referred to, further, the suction nozzle 600 is included the suction nozzle tracheae 601 and described first The first clamping member that lead 607 is fixed, the first clamping member include holder body 609, from the holder body 609 to one Side extend and spaced a pair of first clamping piece 610 and from the holder body 609 to opposite side extend and be spaced set The second clamping piece of a pair 613 put, a pair of interval of first clamping piece 610, which is formed, to be used to clamp the suction nozzle tracheae 601 First clamp port, a pair of interval of second clamping piece 613, which is formed, is used for the second clamping for clamping first lead 607 Mouthful, the suction nozzle 600 further includes the first locking member 612 for locking first clamp port and for locking described second Second locking member 615 of clamp port.This structure can adjust the length that the first lead 607 upwardly extends, to ensure that first leads During being moved up and down under to column 607, it is always positioned in the first pilot hole 606.

Figure 35 to Figure 36 is referred to, further, the pushing component 700, which further includes, is arranged at 701 bottom of mounting base Portion and the second photoelectric sensor 704 at second pilot hole 702, second lead 703 can hide after moving down Keep off the light that second photoelectric sensor 704 is sent.Whether second photoelectric sensor 704 can detect the second lead 703 It has been be pressed down that, to ensure suction nozzle tracheae 601 when picking and placeing semiconductor devices 800, lower end indeed close to picking and placeing a little, is conducive to suction nozzle 600 accurately pick up and place semiconductor devices 800.

The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this All any modification, equivalent and improvement made within the spirit and principle of utility model etc., should be included in the utility model Protection domain within.

Claims (10)

1. a kind of sorting machine, it is characterised in that the sorting machine includes controller, workbench, controlled by the controller and consolidated Dingan County is loaded on the workbench and for providing the feed device of semiconductor devices, being controlled and be fixedly installed in by the controller The workbench and for the marking device to the semiconductor devices mark, controlled by the controller and be fixedly installed in institute State workbench and for storing classifiedly the feeding-distribution device of the semiconductor devices and being controlled by the controller and be installed on institute State workbench and for picking up and transferring the semiconductor devices to transport the rotating-table apparatus of the semiconductor devices, the feeding Device, the marking device and the feeding-distribution device around being arranged at around the rotating-table apparatus, the rotating-table apparatus from The feed device picks up the semiconductor devices, and the semiconductor devices is first moved to the marking device with by described Marking device carries out mark, moves put to the feeding-distribution device to be stored classifiedly by the feeding-distribution device afterwards.

2. sorting machine as claimed in claim 1, it is characterised in that the feed device includes feeding rack, is fixedly installed in institute State feeding rack and for isolating the single semiconductor devices and the delivering transmitted from multiple semiconductor devices Mechanism and for accepting the single semiconductor devices that is passed over by the delivery mechanism so that the rotating-table apparatus picks up The support structure taken, the delivery mechanism include keep out component and for by each semiconductor devices successively to the undertaking The transfer component that mechanism direction is transported, it is described to keep out component after the single semiconductor devices is transported to the support structure simultaneously Remaining each described semiconductor devices, which is limited, before the rotating-table apparatus picks up the semiconductor devices is transported to the undertaking machine Structure.

3. sorting machine as claimed in claim 2, it is characterised in that the transfer component includes being fixed on passing for the feeding rack Rail is sent, the delivering rail is extended to the support structure and supplies respectively have partly leading for the trend moved towards the support structure Body device is arranged in order placement；

The transfer component, which further includes, is installed on the feeding rack and for that will be located at each semiconductor devices direction of motion row The semiconductor devices of head position is blown to the blow gun of the support structure, and the component of keeping out includes being fixedly installed in the feeding rack Drive component and by the driving component driving it is mobile keep out bar, the blow gun is in the rotating-table apparatus from the undertaking After the semiconductor devices picks up in mechanism, the semiconductor devices of file leader position is blown to the support structure；

Described partly led after the single semiconductor devices is transported to the support structure and in rotating-table apparatus pickup is single Before body device, bar movement is kept out described in the driving component driving so that the bar of keeping out keeps out follow-up each semiconductor device Part, and after the rotating-table apparatus picks up the semiconductor devices, bar movement is kept out to remove described in the driving component driving Keep out bar described in pin to keep out follow-up each semiconductor devices, the delivering rail is equipped with close to one end of the support structure For the perforation kept out bar and passed through, it is described delivering rail on positioned at it is described perforation away from the support structure side be equipped with it is outer Portion's pneumatic supply connection and the adsorption hole for adsorbing the semiconductor devices.

4. sorting machine as claimed in claim 3, it is characterised in that the driving component includes being fixed on the feeding rack and use The feeding rack and the other end, which are pushed, in the electromagnet and one end that bar is kept out described in drop-down pushes described keep out described in bar and general Bar is kept out above to push away so that the elastic yoke frame kept out bar and keep out remaining each described semiconductor devices.

5. sorting machine as claimed in claim 3, it is characterised in that the support structure includes being fixedly installed on the feeding rack The first motor cabinet, be fixedly installed on the first motor of first motor cabinet and driven mobile by first motor and used In the supporting for accepting the single semiconductor devices, the supporting is included by the mobile undertaking base of first motor driving Seat, be fixed on be arranged at the undertaking pedestal and with the undertaking pedestal movement with the undertaking rail that connects of delivering rail, First motor includes being fixedly installed on the first motor body of first motor cabinet and by first motor body Drive rotating first motor shaft, the support structure includes being fixedly installed on first motor cabinet and to the delivery mechanism The guide rail of direction extension and one end are connected on first motor shaft and the other end is along perpendicular to the first motor shaft side To the rocking bar of extension, the supporting is slidably connected to the guide rail, and the supporting bottom is provided with edge and is led perpendicular to described The guide groove of rail length direction extension, the rocking bar are equipped with its one end away from first motor shaft and are inserted into the guide groove And for promoting the supporting and pushing column that the supporting is slided along the guide rail.

6. sorting machine as claimed in claim 1, it is characterised in that the marking device includes mark stent, the second motor, defends Star turntable and mark device, the mark stent include support base and are connected and are fixedly installed with the support base The supporting table of second motor, has in the supporting table and picks and places station and mark station, second motor include with The second motor body and driven rotation by second motor body and turned with the satellite that the supporting table is fixedly installed The second motor shaft that disk is fixedly connected, the satellite turntable include be fixedly connected with second motor shaft basal disc, be arranged at Station is picked and placeed described in being circulated through successively on the basal disc and for carrying the semiconductor devices and moving with the basal disc With the first maintaining part of the mark station and be arranged on the basal disc and for carrying the semiconductor devices and with institute The second maintaining part of basal disc movement is stated, second maintaining part passes through institute when picking and placeing station described in first maintaining part process Mark station is stated, and station, the mark device are picked and placeed by described when first maintaining part passes through the mark station For when the semiconductor devices passes through the mark station with first maintaining part or second maintaining part to described Semiconductor devices carries out mark, the rotating-table apparatus pass through in first maintaining part or second maintaining part described in pick and place work The semiconductor devices is picked and placeed during position, is equipped with first maintaining part on the satellite turntable and is protected by described first Hold portion to extend to the supporting table and keep suction hole for adsorbing the first of semiconductor devices, in second on the satellite turntable It is equipped with maintaining part and extends from second maintaining part to the supporting table and keep inhaling for adsorbing the second of semiconductor devices Stomata, the supporting table is equipped with the mark station to be connected with external pressure source and for keeping air-breathing with described first The first station suction hole that hole is connected with the described second holding suction hole, the side of the supporting bable tops to the satellite turntable is set Have and connected with the first station suction hole and lateral described pick and place the negative of station extension by the two of the first station suction hole Indent, the first holding suction hole and the second holding suction hole pick and place work by second motor driving rotation to described During position, connected with the negative pressure trough, the supporting table in it is described pick and place at station connected equipped with one end with external pressure source and The second station relieving stagnant Qi hole that the other end is connected with the negative pressure trough, the negative pressure trough are in arc-shaped so that described first keeps air-breathing When hole and the second holding suction hole are with the satellite turntable rotation, connected all the time with the negative pressure trough, in the supporting table The Image detection station for being symmetrically disposed on the second motor shaft both sides and idle station are additionally provided with, the marking device further includes Image detector positioned at the supporting table close to the Image detection station side, it is the Image detection station, described idle Station, described pick and place station and the distance of the mark station and second motor shaft is equal, the Image detection work Line between position and the idle station is vertical with the line picked and placeed between station and the mark station, the satellite Turntable, which further includes, to be arranged on the basal disc and for fixing the 3rd maintaining part of the semiconductor devices and being arranged at described On basal disc and it is used for the 4th maintaining part for fixing the semiconductor devices, the 3rd maintaining part and the 4th maintaining part are symmetrical The both sides for being arranged at second motor shaft, first maintaining part, second maintaining part, the 3rd maintaining part and 4th maintaining part and the distance of second motor shaft are equal, between first maintaining part and second maintaining part Line it is vertical with the line between the 3rd maintaining part and the 4th maintaining part, in the described 3rd on the satellite turntable It is equipped with maintaining part and extends from the 3rd maintaining part to the supporting table and keep inhaling for adsorbing the 3rd of semiconductor devices the Stomata, is equipped with the satellite turntable at the 4th maintaining part and extend from the 4th maintaining part to the supporting table and be used to inhale The 4th of attached semiconductor devices keeps suction hole, and the described 3rd keeps suction hole and the described 4th to keep suction hole to be born with described Indent connect, the supporting table connected at the Image detection station equipped with one end with external pressure source and the other end with it is described The 3rd station suction hole of negative pressure trough connection, the supporting table connect at the idle station equipped with one end with external pressure source The 4th station suction hole connected with the other end with the negative pressure trough.

7. sorting machine as claimed in claim 6, it is characterised in that the supporting table includes being fixedly connected on the support base And it is fixedly installed the supporting substrate of second motor and between the supporting substrate and the satellite turntable and ring The buffer table being placed on second motor shaft, the negative pressure trough are arranged at the buffer table towards the one of the satellite turntable Side, the buffer table are equipped with the pilot hole through the buffer table upper and lower surface, and the supporting table further includes one end and is fixed on The supporting substrate and the other end are inserted into the pilot hole and the lead that can be slided in the pilot hole and one end Push the supporting substrate and the other end and push the buffer table so that the elasticity that the satellite turntable is close to the buffer table is delayed Stamping.

8. sorting machine as claimed in claim 1, it is characterised in that the feeding-distribution device is located at institute relative to the marking device The downstream of rotating-table apparatus direction of rotation is stated, the feeding-distribution device includes material distributing rest, close to described in the rotating-table apparatus side and confession Semiconductor devices enters the feeding assembly of the feeding-distribution device and the sub-material group for semiconductor devices classification to be transported Part, the side of the sub-material component is connected with the feeding assembly to be used for storing classifiedly the semiconductor devices with opposite side Container be connected, the sub-material component includes being rotationally connected with the tap turntable of the material distributing rest, the driving tap turntable Rotating driving device, set through the tap turntable both ends of the surface and pipe tap that one end is connected with the feeding assembly and For the multiple terminating pipes connected with the other end of the pipe tap and circumferentially shaped formation is set, each terminating pipe difference Lead to each container for storing the different types of semiconductor devices, the driving device drives the tap turntable Rotate so that the pipe tap is connected from the different terminating pipes, the feeding assembly includes being fixedly installed on the sub-material Feed pipe on frame, the feed pipe are included close to the feed inlet of described rotating-table apparatus one end and close to the sub-material component one The discharge port at end, the feeding assembly, which further includes, to be arranged at the feed inlet and is used to blow to the semiconductor devices described The charging blowing nozzle of sub-material component, the pipe tap include the first adapter and one end and the institute being fixed in the tap turntable State the second adapter that the first adapter connection and the other end are used to connect with each terminating pipe, described second to take over be transparent pipe, The sub-material component further includes ring set and is arranged at outside second adapter and passes through quantity for recording the semiconductor devices Photoelectric counter.

9. sorting machine as claimed in claim 1, it is characterised in that the rotating-table apparatus includes being fixedly connected with the workbench Stator module, be surrounded on the stator module it is outer and around the rotating rotor assembly of the stator module, with the rotor assembly Be fixedly connected and for drive the rotating turntable actuator of the rotor assembly and be fixed on the rotor assembly outer edge and The multiple suction nozzles for picking and placeing the semiconductor devices are rotated and are used for the rotor assembly, and each suction nozzle is internally provided with for inhaling The suction nozzle tracheae of the attached semiconductor devices, the stator module includes connecting with external pressure source and the stator of outside air-breathing Pipe fitting, the stator inside pipe fitting have the endoporus that connect with external pressure source, the lateral wall of the stator module and described turn The madial wall of sub-component surrounds the first annular negative pressure space to be formed and be connected with the endoporus, and the rotor assembly is in its side wall Be fixedly installed one end be connected with the first annular negative pressure space be connected with the other end and each suction nozzle tracheae it is more A suction blowing nozzle, the stator module is in its side wall equipped with the multiple vacuum breakers connected with external pressure source and supplied gas enters Suction nozzle and one end are connected with the vacuum breaker suction nozzle and the other end is connected and supplied with the first annular negative pressure space Multiple vacuum breaker outlet nozzles of gas discharge, multiple vacuum breaker suction nozzles and multiple vacuum breaker outlet nozzles one are a pair of Should, each vacuum breaker outlet nozzle in a ring spaced array in the stator module side wall and be respectively aligned to it is each it is described suction blow Gas nozzle with out of described first annular negative pressure space to it is each it is described suction blowing nozzle blow.

10. sorting machine as claimed in claim 9, it is characterised in that the rotor assembly includes and the turntable actuator Drive shaft is fixedly connected and drives rotating disc by the turntable actuator, and each suction nozzle is fixedly installed on the disk The outer edge of part, the suction nozzle include being fixedly installed on the outer peripheral suction nozzle seat of the disc, and the suction nozzle seat, which is equipped with, to be supplied The first sliding hole that the suction nozzle tracheae passes through, the suction nozzle tracheae are equipped with the first plug in its top, and the suction nozzle further includes The first elastic component of suction nozzle seat, the rotating-table apparatus further include fixation described in first plug described in the pushing tow of one end and other end pushing tow It is arranged at the stator module and includes and the stator for depressing the pushing component of the suction nozzle tracheae, the pushing component Component is fixedly connected and mounting base, the lower piezoelectric being fixedly connected in the mounting base in hole is slipped equipped with second extended downwardly Machine, be fixed on the motor shaft of the lower piezoelectric machine and be inserted in by the rotating pushing cam of lower piezoelectric machine driving, slip In described second sliding hole and it is used to compress the suction nozzle tracheae so that the lower compression leg that the suction nozzle tracheae slides up and down, under described Compression leg is equipped with the second plug in its top, it is described push component and further include one end and push second plug and the other end push institute State the second elastic component of mounting base.