CN207232257U - A kind of alternating temperature four-point probe measurment system - Google Patents
A kind of alternating temperature four-point probe measurment system Download PDFInfo
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- CN207232257U CN207232257U CN201721347908.5U CN201721347908U CN207232257U CN 207232257 U CN207232257 U CN 207232257U CN 201721347908 U CN201721347908 U CN 201721347908U CN 207232257 U CN207232257 U CN 207232257U
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- point probe
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Abstract
The utility model discloses a kind of alternating temperature four-point probe measurment system, the vacuum chamber is built-in with " Xi " four probe supports of font; the bottom of four probe support is provided with warm table; the warm table is connected with the temperature controller outside vacuum chamber; is provided with liftable resistant detector at the top of four probe support; the resistant detector is connected with the four-point probe outside vacuum chamber, and the vacuum chamber is connected with vacuum pump, inert gas bottle gas circuit respectively.The alternating temperature four-point probe measurment system of the utility model has the characteristics that good accuracy, wide temperature range, reliability are high and simple in structure.
Description
Technical field
It the utility model is related to four probe tester technical fields, in particular to a kind of alternating temperature four-point probe measurment system.
Background technology
It is proposed that four probe test principles and Valdes in 1954 use it for semiconductor resistor first from thomson in 1861
Since rate is tested, since four point probe technique principle is simple, contact resistance influence can be eliminated, there is higher measuring accuracy, therefore
Four point probe technique is become to use one of most commonly used process-monitor means in production process of semiconductor.It is in silicon substrate
Extensively should in the test events such as the sheet resistance of piece, epitaxial wafer, diffusion sheet, ion implanting piece, gettering piece, metal film and coating etc.
With being tested by resistance value and on this basis, control the substrate of film sample, extension, diffusion, ion implanting, gettering, annealing etc.
Each processing quality.As shown in Figure 1, conventional four probe method be the probe that four are arranged in a line with certain pressure perpendicular
It is pressed on sample surface, electric current I (mA) is passed between a, d probe, certain voltage V (mV) is just produced between b, c probe.Survey
Measure this voltage and according to the size of measurement method and sample difference, can be respectively by the resistivity of corresponding formula calculating sample, side
Block resistance, resistance.
At present, standard detection tools producing in serial form of the four-point probe as semicon industry, in the market compared with
To be common for RTS and RDY series.Such as：Digital four probe of RTS-8 types of four probe Science and Technology Ltd. of Guangzhou is surveyed
Examination instrument is the multipurpose composite measurement equipment with four-point probe measurment principle, it is according to monocrystalline silicon physical test method national standard
And designed with reference to U.S.'s A.S.T.M standards, it is exclusively used in test semi-conducting material resistivity and square resistance (thin-layer electric
Resistance) special instrument, but the system can only use at ambient temperature, it is impossible to which the data for testing sample under Elevated Temperature Conditions become
Change.Donghua University professor Xu Xiaofeng etc. devises a kind of four probe square resistance tests test method of temperature adjustable, can measure
Square resistance under room temperature, and room temperature can be fast and accurately measured to the square resistance of any temperature between 120 DEG C, also can be fast
Speed analyzes the phase transition performance that some functional materials vary with temperature, but the system heating rate is difficult to control, more than 120 DEG C
Square resistance can not then be measured, and there is the problem of inert free gas when temperature is excessive protects easily meeting lesioned sample etc..
At the same time, a kind of high temperature four-point probe measurment systems of Chinese utility model patent CN 204925182U, it is included very
Air atmosphere stove, four probe clamp modules, electric up-down module, vacuum pump, controller, temperature controller, probe lead, test instrumentation with
And PC machines；Wherein, the four probe clamps module is inserted into vacuum atmosphere oven；The electric up-down module connection is simultaneously
Four probe clamp modules are driven to lift；The vacuum pump is connected with vacuum atmosphere oven, and can be by vacuum atmosphere stove evacuation；Institute
State controller one end connection vacuum pump, other end connection PC machines；Described temperature controller one end extends into vacuum atmosphere oven, another
End connection PC machines；The probe lead connects four probe clamp modules and controller；Between controller and the PC machine
A test lead is connected with, in being provided with test instrumentation on test lead.The high temperature four-point probe measurment system has good airproof performance,
Good in oxidation resistance, and it is adapted to room temperature to 600 DEG C of continuous warmings many advantages, such as testing.But in practical applications, which needs
It is arranged on and includes in vacuum atmosphere oven, its structure setting is extremely complex, and high-temperature furnace body lasting for a long time also can be to the use of probe
The accuracy of service life and test impacts, and testing reliability can have a greatly reduced quality with the extension using process.
Although in conclusion four-point probe has been widely used, existing four-point probe is all only
It can test under room temperature and the metastable square resistance of temperature, for temperature consecutive variations or different temperatures lower semiconductor material
Square resistance, resistivity and some thermal induced phase transition materials（Such as：VO2With GST phase-change storage materials）Square resistance is with temperature
Degree change curve cannot be tested, and limit its application.
Utility model content
The purpose of this utility model is to provide a kind of alternating temperature four-point probe measurment system, have accuracy is good, wide temperature range,
The characteristics of reliability is high and simple in structure.
The utility model can be achieved through the following technical solutions：
The utility model discloses a kind of alternating temperature four-point probe measurment system, including vacuum chamber, the vacuum chamber is built-in with
Four probe supports of " Xi " font, the bottom of four probe support are provided with warm table, the warm table with outside vacuum chamber
Temperature controller connection, be provided with liftable resistant detector at the top of four probe support, the resistant detector with it is true
Four-point probe connection outside cavity, the vacuum chamber are connected with vacuum pump, inert gas bottle gas circuit respectively.Inert gas
The alternating temperature four-point probe measurment system of protection is by vacuum system, inert gas protection system, temperature control system and four probe test systems
Effective integration is got up, and effectively realizes the function of becoming temperature measurement and nitrogen protection, meets temperature variation testing requirement, and test accuracy is high；
Effectively the resistance of sample can be tested or 500 DEG C of tests to room temperature continuous cooling in room temperature to 500 DEG C of continuous warmings, control temp
It is wide to spend scope；The temperature control system of system is not affected by the external environment in vacuum chamber can effectively realize certain heating or cooling speed
Rate, temperature control, which is adjusted, stablizes, and the service life and its measurement sensitivity of probe can be effectively ensured；By being used in vacuum chamber
Four probe carriage structure of " Xi " font, warm table and resistant detector are set in four probe carriage bottoms and top respectively, are effectively simplified
The structure of test system.
Further, the inert gas bottle is connected by flowmeter with the vacuum chamber gas circuit, can be in order to inertia
Gas carries out flow control, meets the test request of different materials, has expanded test systematic difference scope.
Further, vacuum meter is additionally provided with the vacuum chamber, visualized management is carried out for the vacuum of vacuum chamber,
Meet its accurate test needs.
Further, the four-point probe is connected with test computer.
Further, the resistant detector is realized by Three-axis drive mechanism and lifted.The Three-axis drive mechanism is existing
The structure actuator of technology, without being separately processed design, simplifies it and manufactures link, save cost of testing system.
Further, the resistant detector is the probe of tungsten carbide material, has longer service life and high temperature resistant
Ability, ensure that the accuracy of test and the service life of probe.
Further, the inert gas bottle is nitrogen and/or argon gas, can be met according to flexibly selection is actually needed
The test request of different materials.
A kind of alternating temperature four-point probe measurment system of the utility model, has following beneficial effect：
Firstth, accuracy is good, and the alternating temperature four-point probe measurment system of inert gas shielding is by vacuum system, inert gas shielding
System, temperature control system and four probe test system effective integrations are got up, and effectively realize the function of becoming temperature measurement and nitrogen protection, full
Sufficient temperature variation testing requirement, test accuracy are high；
Secondth, wide temperature range, can effectively to the resistance of sample room temperature tested to 500 DEG C of continuous warmings or 500 DEG C extremely
The test of room temperature continuous cooling, temperature control wide temperature range；
3rd, reliabilities are high, and the temperature control system of system is not affected by the external environment in vacuum chamber can effectively realize necessarily
Heating or rate of temperature fall, temperature control adjust stablize, and can be effectively ensured probe service life and its measurement sensitivity；
4th, simple in structure, by using " Xi in vacuum chamber " four probe carriage structure of font, in four probe carriage bottoms and
Top sets warm table and resistant detector respectively, effectively simplifies the structure of test system.
Brief description of the drawings
Attached drawing 1 is four probes in a line skill of handling needles test philosophy figure；
Attached drawing 2 is a kind of system composition schematic diagram of alternating temperature four-point probe measurment system of the utility model；
Attached drawing 3 varies with temperature curve for the resistivity of GeSb phase-change storage materials in the range of 25 DEG C~320 DEG C；
Mark in attached drawing includes：1st, vacuum chamber, 2, vacuum meter, 3, vacuum pump, 4, flowmeter, 5, inert gas bottle, 6,
Resistant detector, 7, four probe supports, 8, warm table, 9, temperature controller, 10, four-point probe, 11, computer.
Embodiment
In order to make those skilled in the art more fully understand the technical solution of the utility model, with reference to embodiment and
Attached drawing is described in further detail the utility model product.
As shown in Fig. 2, the utility model can be achieved through the following technical solutions：
The utility model discloses a kind of alternating temperature four-point probe measurment system, including vacuum chamber 1, the vacuum chamber 1 is built-in with
Four probe supports 7 of " Xi " font, the bottom of four probe support 7 are provided with warm table 8, the warm table 8 and vacuum chamber 1
Exterior temperature controller 9 connects, and the top of four probe support 7 is provided with liftable resistant detector 6, and the high temperature resistant is visited
First 6 are connected with the four-point probe 10 outside vacuum chamber 1, the vacuum chamber 1 respectively with vacuum pump 3,5 gas circuit of inert gas bottle
Connection.The inert gas bottle 5 is connected by flowmeter 4 with 1 gas circuit of vacuum chamber.It is additionally provided with the vacuum chamber 1 true
Sky meter 2.The four-point probe 10 is connected with test computer 11.The resistant detector 6 is realized by Three-axis drive mechanism
Lifting.The resistant detector 6 is the probe of tungsten carbide material.The inert gas bottle 5 is nitrogen and/or argon gas.
The test system of the utility model is relative to traditional RTS type four-point probes, the alternating temperature of inert gas shielding
On the one hand four-point probe measurment system realizes and the resistance of metal, semiconductor thin film is surveyed in room temperature to 500 DEG C of continuous warmings
Examination or 500 DEG C of tests to room temperature continuous cooling；On the other hand, the vacuum system of this system and inert gas protection system are sample
Product provide a preferable test environment, avoid sample from being subject to the influence of moisture and oxygen during test and damage；
In addition, the temperature control system of system is not affected by the external environment in vacuum chamber can effectively realize certain heating or rate of temperature fall,
The impact for avoiding sample from being brought due to rapid temperature rise and drop.Therefore this system directly serves in metal, semiconductor and some heat
Phase-change material square resistance is caused to vary with temperature the test of curve.
In practical applications, the test system of the utility model according to monocrystalline silicon physical test method national standard and can join
That examines U.S.'s A.S.T.M standards design is exclusively used in measurement silicon crystal block, slice resistivity and diffusion layer, epitaxial layer, ITO conductive foils
The material square resistance such as film, conductive rubber.The technical parameter of this system reaches：
1. resistance measurement scope：Resistivity：0.01~107 （Ω/cm）；Square resistance：0.1~107 （Ω/□）；
2. extent of alternating temperature：25 DEG C~500 DEG C；Heating rate：1 DEG C/min~20 DEG C/min, cooling rate：1 DEG C/min~
18℃/min；
3. overall measurement maximum relative error (uses silicon standard specimen piece：0.01-180 Ω/cm are tested)≤± 4%.
The alternating temperature four-point probe measurment system of the utility model is applied in actual test, measures GeSb phase-change storage materials
It is as shown in Figure 3 that resistivity varies with temperature curve in the range of 25 DEG C~320 DEG C.It can see from the test curve of Fig. 3, this reality
With new alternating temperature four-point probe measurment system have it is easy to operate, good in oxidation resistance, temperature rate is controllable, can survey sheet resistance（Electricity
Resistance rate）Scope is wide, and be adapted to room temperature tested to 500 DEG C of continuous warmings or 500 DEG C to room temperature continuous cooling test many advantages, such as.
More than, the only preferred embodiment of the utility model, not makees the utility model limit in any form
System；The those of ordinary skill of all industry can swimmingly implement the utility model shown in by specification attached drawing and above；But
It is that all those skilled in the art are not being departed from the range of technical solutions of the utility model, using disclosed above
Technology contents and the equivalent variations of a little variation, modification and evolution made, are the equivalent embodiment of the utility model；Together
When, the variation, modification and evolution for any equivalent variations that all substantial technologicals according to the utility model make above example
Deng still falling within the protection domain of the technical solution of the utility model.
Claims (7)
1. a kind of alternating temperature four-point probe measurment system, including vacuum chamber（1）, it is characterised in that：The vacuum chamber（1）It is built-in with " Xi "
Four probe supports of font（7）, four probe support（7）Bottom be provided with warm table（8）, the warm table（8）With it is true
Cavity（1）Exterior temperature controller（9）Connection, four probe support（7）Top be provided with liftable resistant detector
（6）, the resistant detector（6）With vacuum chamber（1）Exterior four-point probe（10）Connection, the vacuum chamber（1）Respectively
With vacuum pump（3）, inert gas bottle（5）Gas circuit connects.
2. alternating temperature four-point probe measurment system according to claim 1, it is characterised in that：The inert gas bottle（5）Pass through
Flowmeter（4）With the vacuum chamber（1）Gas circuit connects.
3. alternating temperature four-point probe measurment system according to claim 2, it is characterised in that：The vacuum chamber（1）Inside also set up
There is vacuum meter（2）.
4. alternating temperature four-point probe measurment system according to claim 3, it is characterised in that：The four-point probe（10）With
Test computer（11）Connection.
5. alternating temperature four-point probe measurment system according to claim 4, it is characterised in that：The resistant detector（6）Pass through
Three-axis drive mechanism realizes lifting.
6. alternating temperature four-point probe measurment system according to claim 5, it is characterised in that：The resistant detector（6）For carbon
Change the probe of tungsten material.
7. alternating temperature four-point probe measurment system according to claim 6, it is characterised in that：The inert gas bottle（5）For nitrogen
Gas and/or argon gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721347908.5U CN207232257U (en) | 2017-10-19 | 2017-10-19 | A kind of alternating temperature four-point probe measurment system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721347908.5U CN207232257U (en) | 2017-10-19 | 2017-10-19 | A kind of alternating temperature four-point probe measurment system |
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| Publication Number | Publication Date |
|---|---|
| CN207232257U true CN207232257U (en) | 2018-04-13 |
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| CN201721347908.5U Expired - Fee Related CN207232257U (en) | 2017-10-19 | 2017-10-19 | A kind of alternating temperature four-point probe measurment system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113466557A (en) * | 2021-05-19 | 2021-10-01 | 包头稀土研究院 | Neodymium iron boron resistivity measuring system and measuring method thereof |
-
2017
- 2017-10-19 CN CN201721347908.5U patent/CN207232257U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113466557A (en) * | 2021-05-19 | 2021-10-01 | 包头稀土研究院 | Neodymium iron boron resistivity measuring system and measuring method thereof |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180413 Termination date: 20181019 |