CN207095949U - A kind of gas enrichment resolver and gas pretreatment system - Google Patents

A kind of gas enrichment resolver and gas pretreatment system Download PDF

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Publication number
CN207095949U
CN207095949U CN201720838342.XU CN201720838342U CN207095949U CN 207095949 U CN207095949 U CN 207095949U CN 201720838342 U CN201720838342 U CN 201720838342U CN 207095949 U CN207095949 U CN 207095949U
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cold
gas
resolver
trap
heating bath
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CN201720838342.XU
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王丙军
曹岩德
宗冰
安军林
陈兆峰
李伟珍
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Asia Silicon Qinghai Co Ltd
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Asia Silicon Qinghai Co Ltd
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Abstract

Field of gas detection is the utility model is related to, especially for the detection of tail gas in production of polysilicon, discloses a kind of gas enrichment resolver and gas pretreatment system.The cold-trap pond of gas enrichment resolver is connected with heating bath, conversion equipment one end is arranged at cold-trap pond or heating bath, the other end of conversion equipment is provided with adsorption column, and optionally adsorption column can be placed in cold-trap pond or heating bath by flexible and/or rotation conversion equipment.Gas pretreatment system of the present utility model includes gas enrichment resolver.So by cold-trap pond and heating bath integrated setting, reduce technical staff when being detected to gas, it is easy to use to the arrangement of cooling enriching apparatus and heating resolver.In cooling can be enriched with that adsorption column is transferred in heating bath using conversion equipment at once and heated, parse, so by impurity enriched and heating parsing integration, simplify the operation for shifting gas to be tested, stable experiment height.

Description

A kind of gas enrichment resolver and gas pretreatment system
Technical field
The utility model is related to field of gas detection, especially for the detection of tail gas in polysilicon production process, it is specific and Speech, it is related to a kind of gas enrichment resolver and gas pretreatment system.
Background technology
In production of polysilicon, the number of impurity directly represent the whether clean of whole system in tail gas, work as impurity content When reaching a certain higher scope, whole system and the quality of subsequent product can be had a strong impact on.Wherein, the serious shadow of boron phosphorus compound Ring polysilicon product quality.It is about even lower in units ppb scopes but some impurity are nearly all ultra trace levels, This causes testing conditions to become harsher.For the problem, existing method is first that foreign gas is dense by being enriched with progress Contracting, is easy to detect so as to increase content.But so first foreign gas is enriched with, then gas is transferred to heater Middle heating parsing, is then detected.The transfer transportation trouble of gas to be tested, and have impact on the stability of experiment. And also need to be arranged each device in test site, complex operation, be unfavorable for deploying to test at the scene.
Utility model content
The purpose of this utility model is that providing a kind of gas is enriched with resolver, and it is parsed by impurity enriched, heating Journey integration, easy to operate, detection stability is high.
Another object of the present utility model is to provide a kind of gas pretreatment system, the system collection impurity enriched, heated Parsing is integrated, easy to operate, and detection process stability is high.
What embodiment of the present utility model was realized in:
A kind of gas is enriched with resolver, and it includes the heating bath and conversion equipment that cold-trap pond is connected with cold-trap pond, turns Changing device one end is arranged at cold-trap pond or heating bath, and the other end of conversion equipment is provided with adsorption column, passes through flexible and/or rotation Adsorption column optionally can be placed in cold-trap pond or heating bath by conversion equipment.
In a kind of embodiment of the present utility model, above-mentioned gas enrichment resolver conversion equipment include connecting rod, The drive division moved for drive connection bar relative to cold-trap pond or heating bath, one end of connecting rod are connected to adsorption column, connect The other end of bar is connected to drive division.
In a kind of embodiment of the present utility model, the drive division of above-mentioned gas enrichment resolver includes being used for the company of driving The jacking drive division of extension bar lifting, and the rotation drive division rotated for drive connection bar.
In a kind of embodiment of the present utility model, above-mentioned gas enrichment resolver cold-trap pond include the first outer wall and First inwall, the first inwall form the cold-trap cavity with opening, heat-insulating material are filled between the first outer wall and the first inwall.
In a kind of embodiment of the present utility model, above-mentioned gas enrichment resolver heating bath include the second outer wall and Second inwall, the second inwall form the heating cavity with opening, heat-insulating material are filled between the second outer wall and the second inwall.
In a kind of embodiment of the present utility model, the opening of the cold-trap cavity of above-mentioned gas enrichment resolver is set There is cold-trap lid, cold-trap lid is provided with multiple heat exchange mouths, and cold-trap lid is additionally provided with the electricity for controlling heat exchange mouth to switch Magnet valve.
In a kind of embodiment of the present utility model, the gas resolver of above-mentioned gas enrichment resolver also includes temperature Device and display screen are controlled, with being respectively arranged with temperature inductor in heating bath, temperature inductor electrically connects with display screen in cold-trap pond, temperature Control device is electrically connected with the solenoid valve.
In a kind of embodiment of the present utility model, the adsorption column of above-mentioned gas enrichment resolver is provided at both ends with sealing Device.
In a kind of embodiment of the present utility model, the cold-trap pond of above-mentioned gas enrichment resolver and heating bath pass through conjunction Page connection.
A kind of gas pretreatment system, it includes above-mentioned gas enrichment resolver.
The beneficial effect of the utility model embodiment is:
Gas of the present utility model is enriched with resolver, including the heating bath that is connected with cold-trap pond of cold-trap pond and conversion Device, conversion equipment one end are arranged at cold-trap pond or heating bath, and the other end of conversion equipment is provided with adsorption column, by flexible And/or adsorption column optionally can be placed in cold-trap pond or heating bath by rotation conversion equipment.Gas of the present utility model is pre- Processing system includes gas enrichment resolver.So by cold-trap pond and heating bath integrated setting, reduce technical staff It is easy to use to the arrangement of cooling enriching apparatus and heating resolver in the pretreatment before being detected to gas.Can Heated, parsed in cooling to be enriched with that adsorption column is transferred in heating bath using conversion equipment at once, which simplify The operation of gas to be tested is shifted, stable experiment is high.
Brief description of the drawings
, below will be to required use in embodiment in order to illustrate more clearly of the technical scheme of the utility model embodiment Accompanying drawing be briefly described, it will be appreciated that the following drawings illustrate only some embodiments of the present utility model, therefore should not be by Regard the restriction to scope as, for those of ordinary skill in the art, on the premise of not paying creative work, may be used also To obtain other related accompanying drawings according to these accompanying drawings.
Fig. 1 is the structural representation that gas is enriched with resolver in the utility model embodiment;
Fig. 2 is that gas is enriched with the structural representation after resolver folds in the utility model embodiment;
Fig. 3 is the structural representation of cold-trap lid in the utility model embodiment;
Fig. 4 is the structural representation of gas pretreatment system in the utility model embodiment.
Icon:100- gases are enriched with resolver;110- cold-traps pond;111- hinges;112- cold-trap lids;113- points of lids; 114- half round cut;115- heat exchange mouths;116- liquid nitrogen adds mouth;120- heating baths;122- heaters;124- is recessed; 130- conversion equipments;132- drive divisions;The bodies of rod of 134- first;The bodies of rod of 135- second;140- adsorption columns;142- sealers;150- Display screen;160- temperature controllers;200- gas pretreatment systems;210- air storage chambers;220- nitrogen chambers;230- gas transmission lines;232- Flowmeter.
Embodiment
It is new below in conjunction with this practicality to make the purpose, technical scheme and advantage of the utility model embodiment clearer Accompanying drawing in type embodiment, the technical scheme in the embodiment of the utility model is clearly and completely described, it is clear that is retouched The embodiment stated is the utility model part of the embodiment, rather than whole embodiments.Generally here described in accompanying drawing and The component of the utility model embodiment shown can be configured to arrange and design with a variety of.
Therefore, the detailed description of the embodiment of the present utility model to providing in the accompanying drawings is not intended to limit requirement below The scope of the utility model of protection, but it is merely representative of selected embodiment of the present utility model.Based in the utility model Embodiment, the every other embodiment that those of ordinary skill in the art are obtained under the premise of creative work is not made, all Belong to the scope of the utility model protection.
It should be noted that:Similar label and letter represents similar terms in following accompanying drawing, therefore, once a certain Xiang Yi It is defined, then it further need not be defined and explained in subsequent accompanying drawing in individual accompanying drawing.
, it is necessary to explanation, the orientation of the instruction such as term " vertical ", " transverse direction " in the description of the utility model embodiment Or position relationship be based on orientation shown in the drawings or position relationship, or the utility model product using when usually put Orientation or position relationship, it is for only for ease of description embodiment of the present utility model and simplifies description, rather than indicates or imply Signified device or element must have specific orientation, with specific azimuth configuration and operation, therefore it is not intended that to this The limitation of utility model.In addition, term " first ", " second " etc. are only used for distinguishing description, and it is not intended that instruction or hint Relative importance.
In the description of the utility model embodiment, it is also necessary to explanation, unless otherwise clearly defined and limited, art Language " setting ", " connected ", " connection " should be interpreted broadly, for example, it may be fixedly connected or be detachably connected, or It is integrally connected;Can be joined directly together, can also be indirectly connected by intermediary, can be the company of two element internals It is logical.For the ordinary skill in the art, it can understand that above-mentioned term is specific in the utility model with concrete condition Implication.
Embodiment
Fig. 1 is the structural representation that gas is enriched with resolver 100 in the utility model embodiment.It refer to Fig. 1, this reality Apply example and a kind of gas enrichment resolver 100 is provided, it includes cold-trap pond 110, heating bath 120 and is connected with adsorption column 140 Conversion equipment 130.Cold-trap pond 110 can treat detection gas and be cooled down, and the foreign gas in gas is liquefied and be enriched with, from And separated with main gas.Heating bath 120 can carry out heating parsing to the impurity of enrichment.In the present embodiment, the He of cold-trap pond 110 Heating bath 120 links together, cold-trap pond 110 and heating bath 120 it is opening up, and substantially in same level.Conversion Device 130 is arranged at cold-trap pond 110, and when in use, can utilize the lifting and rotation of conversion equipment 130, selectivity Adsorption column 140 is placed in cold-trap pond 110 or heating bath 120 by ground.Which simplify the operation of test, by enrichment and parses same Completed on one device, stability is high, decreases the arrangement respectively to cooling device and heater.The gas of the present embodiment is rich Collection resolver 100 can be used for the test experience of tail gas in production of polysilicon.
It should be noted that being enriched with the method for foreign gas using cold-trap pond 110, it is higher than main gas suitable for the boiling point of impurity Situation.In other embodiment of the present utility model, conversion equipment 130 can also be arranged at heating bath 120, as long as can pass through Rotate and/or lift, adsorption column 140 is switched in cold-trap pond 110 and in heating bath 120.
Fig. 2 is that gas is enriched with the structural representation after resolver 100 folds in the utility model embodiment.It refer to figure 1 and Fig. 2, in the present embodiment, cold-trap pond 110 and heating bath 120 are two cuboids similar in size, the one of cold-trap pond 110 End is connected with one end of heating bath 120.Further, cold-trap pond 110 on a seamed edge of the adjacent face of heating bath 120 with setting There is hinge 111, cold-trap pond 110 and heating bath 120 can relatively rotate by being arranged at the hinge 111 of seamed edge, so as to roll over Gather into folds, convenience in transport or carrying.In the present embodiment, motor (not shown) is set at hinge 111, controlled by motor cold Trap pond 110 and the folding or expansion of heating bath 120, it is more convenient, laborsaving.It should be appreciated that motor conduct in the present embodiment Actuator, it can omit, be folded or deployed using manual mode.In other embodiments, such as in the He of cold-trap pond 110 When the length and width of heating bath 120 is close, hinge 111 can also be omitted, directly by cold-trap pond 110 and heating bath 120 End face link together, so as to abandon fold function.
In the present embodiment, cold-trap pond 110 includes the first inwall and the first outer wall matched with the first inner wall shape.The One inwall forms the cold-trap cavity with opening, in the present embodiment, cold-trap cavity it is opening up.In first inwall and second Heat-insulating material is provided between wall, to reduce outside heat intrusion, cooling effect is lifted and ensures the stability of temperature.It is optional Ground, the first inwall and the first outer wall are made of stainless steel.It should be appreciated that in other embodiment of the present utility model, cold-trap The shape in pond 110 can use cylinder, and the first inwall can select rigid and low temperature resistant other materials;First outer wall Can also be that there is rigid other materials, such as cast iron etc..
Fig. 3 is the structural representation of cold-trap lid 112 in the utility model embodiment.It refer to Fig. 1 to Fig. 3, cold-trap pond 110 Opening be provided with cold-trap lid 112, cold-trap lid 112 includes two points of lids 113, and two points of lids 113 are symmetricly set in cold-trap pond 110 In the both sides of length direction.Two points of lids 113 are slidably disposed in the both sides of the opening of cold-trap pond 110, and two points of lids 113 pass through Toward or away from slip, can close or open the opening in cold-trap pond 110.For more preferable heat-insulated, the interlayer of cold-trap lid 112 Among be filled with heat-insulating material.
Further, in order to enabling the both ends of U-shaped adsorption column 140 to be stretched out in cold-trap cavity.Two points of lids 113 Opposite side is each provided with two half round cut 114, and when two points of lids 113 close up, four half round cut 114 can be combined into Two circular ports, the both ends of adsorption column 140 can be stretched out out of two circular ports.In order that during two points of 113 splits of lid, can The opening in cold-trap pond 110 is preferably sealed, two points of opposite sides of lid 113 are provided with sealing strip (not shown), and sealing strip can To be flexible rubber.
Four angles of cold-trap lid 112 are provided with four heat exchange mouths at (two are divided to two angles of lid 113 away from each other) 115, four heat flows exchange mouth and are turned on and off by four magnetic valve (not shown) being correspondingly arranged therewith to control, i.e., logical The opening and closing for crossing solenoid valve control heat exchange mouth 115 controls the temperature in cold-trap pond 110.It should be appreciated that of the present utility model In other embodiment, the number of the number of heat exchange mouth 115 and corresponding magnetic valve can be increased according to being actually needed Subtract.
Liquid nitrogen is provided with the end face of the one end of cold-trap pond 110 away from heating bath 120 and adds mouth 116 and matched Lid.Liquid nitrogen addition mouth 116 tilts on this end face to be opened up, and liquid nitrogen adds mouth 116 and designs funneling, to facilitate liquid nitrogen Addition.
Heating bath 120 is for carrying out heating parsing to the impurity of cooling liquid, so as to follow-up detection.In the present embodiment In, the shape of heating bath 120 is generally close with cold-trap pond 110, is cuboid.One end and cold-trap pond on its length direction 110 are connected by hinge 111.Heating bath 120 includes for forming the second inwall of heating cavity and being wrapped in outside the second inwall Two outer walls, heating is also stabilized filled with heat-insulating material to provide preferable heat-insulating property between the second inwall and the second outer wall Temperature in pond 120.Heating bath 120 is provided with heater 122 and is used as thermal source.
Conversion equipment 130 includes drive division 132 and connecting rod, and one end of connecting rod is connected with drive division 132, connecting rod The other end is connected with adsorption column 140, so that drive division 132 can be lifted and/or rotated with drive connection bar, drives adsorption column 140 shift between cold-trap pond 110 and heating bath 120, avoid troublesome manual operation, also reduce technical staff's frostbite or The risk of scald.
Further, connecting rod includes first body of rod 134 of transverse direction and second body of rod 135 of a vertical direction (using Fig. 1 as reference direction).One end of first body of rod 134 is connected to adsorption column 140, and one end of second body of rod 135 is connected to One body of rod 134, the other end and the drive division 132 of second body of rod 135 coordinate.
In the present embodiment, drive division 132 includes that the jacking drive division that second body of rod 135 rises or falls can be driven 132 (not shown), and the (not shown) of rotation drive division 132 that second body of rod 135 can be driven to rotate.Jack drive division 132 Can be hydraulic cylinder, it can be stepper motor to rotate drive division 132.
In the present embodiment, adsorption column 140 is shaped as U-tube shape, and in other embodiments, adsorption column 140 can also It is the other shapes such as spiral shape, waveform.In order to better ensure that the air-tightness of adsorption column 140, the both ends of adsorption column 140 have Sealer 142.Porous media is placed with adsorption column 140 so that the impurity inside adsorption column 140 can be preferably enriched with.
In order to preferably set conversion equipment 130, have on cold-trap pond 110 and the adjacent upon deployment end face of heating bath 120 There is corresponding depression 124.Two depressions 124 are stitched together when gas enrichment resolver 100 deploys, can be common An accommodating cavity is formed, for accommodating the drive division 132 of conversion equipment 130.In the present embodiment, drive division 132 is fixedly connected In the depression 124 of the end face of cold-trap pond 110.It should be appreciated that in other embodiment of the present utility model, conversion equipment 130 Drive division 132 can also be fixed on heating bath 120.
For more preferable automatic detection and control, gas enriching apparatus also include temperature controller 160, display screen 150 and Temperature inductor (not shown).Multiple temperature inductors are respectively arranged in cold-trap pond 110 and heating bath 120, the He of display screen 150 Temperature controller 160 is arranged at the one end of heating bath 120 away from cold-trap pond 110.Temperature inductor and display screen 150 are electrically connected with real-time Monitor the temperature in two ponds.Temperature controller 160 is electrically connected with the solenoid valve to control the temperature in cold-trap pond 110, temperature controller 160 and hair Hot body 122 is electrically connected to control the temperature of heating bath 120.
Fig. 4 is the structural representation of gas pretreatment system 200 in the utility model embodiment.It refer to Fig. 4, this implementation A kind of gas pretreatment system 200 that example provides, it is rich that it includes air storage chamber 210, nitrogen chamber 220, gas transmission line 230 and gas Collect resolver 100.
Gas transmission line 230 connects air storage chamber 210 and adsorption column 140, the appendix between air storage chamber 210 and adsorption column 140 The flowmeter 232 of a monitoring gas flow is provided with line 230.Nitrogen chamber 220 is communicated in adsorption column 140 and flowmeter 232 Between gas transmission line 230 on, to provide nitrogen into system.Nitrogen chamber 220 can be filled with experiment initial stage to whole pipeline Nitrogen carries out gas cleaning, can be used for checking air-tightness.
Be additionally provided with needle valve (not shown) on the gas transmission line 230 at the both ends of adsorption column 140, can be used for open or Seal adsorption column 140.
Gas is enriched with resolver 100 and the use process and operation principle of gas pretreatment system 200:
Gas is enriched with the cold-trap pond 110 of resolver 100 during use and heating bath 120 deploys, adsorption column 140 is placed in cold In trap pond 110, after being cleaned using nitrogen to pipeline, gas to be detected is passed through.Foreign gas is cooled in adsorption column 140 Liquid, and main gas dissipates from the other end of adsorption column 140.After impurity enriched, start conversion equipment 130, will adsorb Post 140 lifts from cold-trap pond 110, and is rotatablely connected bar, adsorption column 140 is turned into heating bath 120, then fall.So complete The automation transfer of adsorption column 140, the step of can then carrying out heating parsing.In whole process, temperature control can be utilized Device 160 enters trip temperature adjustment to cold-trap pond 110 and heating bath 120.Because gas is enriched with resolver 100 by the He of cold-trap pond 110 The integration of heating bath 120, the process of cumbersome transport impurity is reduced, the arrangement for decreasing equipment prepares, easy to operate, experiment Stability is high.Gas enrichment resolver 100 and gas pretreatment system 200 of the present utility model can be used for production of polysilicon Tail gas pretreatment.
In summary, gas enrichment resolver of the present utility model, including the heating bath that cold-trap pond is connected with cold-trap pond And conversion equipment, conversion equipment one end are arranged at cold-trap pond or heating bath, the other end of conversion equipment is provided with adsorption column, leads to Crossing flexible and/or rotation conversion equipment optionally can be placed in adsorption column in cold-trap pond or heating bath.Gas pretreatment system System includes gas enrichment resolver.So by cold-trap pond and heating bath integrated setting, reduce technical staff to gas It is easy to use to the arrangement of cooling enriching apparatus and heating resolver when physical examination is surveyed.Can be enriched with cooling makes at once Adsorption column is transferred in heating bath with conversion equipment and is heated, parsed, which simplify the operation for shifting gas to be tested, Stable experiment is high.
Preferred embodiment of the present utility model is the foregoing is only, is not limited to the utility model, for this For the technical staff in field, the utility model can have various modifications and variations.It is all in the spirit and principles of the utility model Within, any modification, equivalent substitution and improvements made etc., it should be included within the scope of protection of the utility model.

Claims (10)

1. a kind of gas is enriched with resolver, it is characterised in that the gas enrichment resolver includes cold-trap pond and described cold Trap pond connected heating bath and conversion equipment, described conversion equipment one end is arranged at the cold-trap pond or the heating bath, institute The other end for stating conversion equipment is provided with adsorption column, can be optionally by institute by stretching and/or rotating the conversion equipment Adsorption column is stated to be placed in the cold-trap pond or the heating bath.
2. gas according to claim 1 is enriched with resolver, it is characterised in that the conversion equipment include connecting rod, For the drive division for driving the connecting rod to be moved relative to the cold-trap pond or the heating bath, one end of the connecting rod connects The adsorption column is connected to, the other end of the connecting rod is connected to the drive division.
3. gas according to claim 2 is enriched with resolver, it is characterised in that the drive division includes being used to drive institute State the jacking drive division of connecting rod lifting, and the rotation drive division for driving the connecting rod to rotate.
4. gas according to claim 1 is enriched with resolver, it is characterised in that the cold-trap pond include the first outer wall and First inwall, first inwall form the cold-trap cavity with opening, filled out between first outer wall and first inwall Filled with heat-insulating material.
5. gas according to claim 1 is enriched with resolver, it is characterised in that the heating bath include the second outer wall and Second inwall, second inwall form the heating cavity with opening, filled out between second outer wall and second inwall Filled with heat-insulating material.
6. gas according to claim 1 is enriched with resolver, it is characterised in that the opening in the cold-trap pond is provided with Cold-trap lid, the cold-trap lid are provided with multiple heat exchange mouths, and the cold-trap lid is additionally provided with for controlling the heat exchange The magnetic valve of mouth switch.
7. gas according to claim 6 is enriched with resolver, it is characterised in that the gas enrichment resolver also wraps Temperature controller and display screen are included, the cold-trap pond in the heating bath with being respectively arranged with temperature inductor, the temperature inductor Electrically connected with the display screen, the temperature controller electrically connects with the magnetic valve.
8. gas according to claim 1 is enriched with resolver, it is characterised in that the adsorption column is provided at both ends with envelope Mouthpart.
9. gas according to claim 1 is enriched with resolver, it is characterised in that the cold-trap pond and the heating bath lead to Cross hinge connection.
10. a kind of gas pretreatment system, it is characterised in that it includes the gas enrichment as described in any one of claim 1 to 9 Resolver.
CN201720838342.XU 2017-07-11 2017-07-11 A kind of gas enrichment resolver and gas pretreatment system Active CN207095949U (en)

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Application Number Priority Date Filing Date Title
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111773875A (en) * 2020-05-21 2020-10-16 东南大学 Solid adsorbent heavy metal steam trapping device
CN113164859A (en) * 2018-10-29 2021-07-23 亚利桑那州立大学董事会 Apparatus, system and method for passive collection of atmospheric carbon dioxide

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113164859A (en) * 2018-10-29 2021-07-23 亚利桑那州立大学董事会 Apparatus, system and method for passive collection of atmospheric carbon dioxide
CN113164859B (en) * 2018-10-29 2023-10-24 亚利桑那州立大学董事会 Apparatus, system and method for passive collection of atmospheric carbon dioxide
CN111773875A (en) * 2020-05-21 2020-10-16 东南大学 Solid adsorbent heavy metal steam trapping device

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Address after: 810007 No.1, Jinsi Road, Chengdong economic and Technological Development Zone, Xining City, Qinghai Province

Patentee after: Asia silicon (Qinghai) Co.,Ltd.

Address before: 810007 Qinghai city of Xining Province Economic and Technological Development Zone No. 1 gold Guilu

Patentee before: ASIA SILICON (QINGHAI) Co.,Ltd.

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