CN216510330U - Vacuumizing mechanism - Google Patents
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- CN216510330U CN216510330U CN202123353970.4U CN202123353970U CN216510330U CN 216510330 U CN216510330 U CN 216510330U CN 202123353970 U CN202123353970 U CN 202123353970U CN 216510330 U CN216510330 U CN 216510330U
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Abstract
The utility model relates to the technical field of vacuum pumping, in particular to a vacuum pumping mechanism, which comprises a vacuum pumping tool, a heating device, a nitrogen displacement device, a switch valve group, a cold trap, a rough pumping device, a fine pumping device, a measuring device and a control device, wherein the vacuum pumping tool is connected with the heating device through a pipeline; the evacuating tool is arranged on the container to be processed and is used for communicating the interlayer to be evacuated; one end of a vacuum hose of the evacuation tool is communicated with an evacuation port, the other end of the vacuum hose is communicated with a main pipeline, and a vacuum valve is arranged in the middle of the vacuum hose and used for communicating or closing the vacuum hose; the heating device is arranged on the evacuating tool, and the nitrogen displacement device and the switch valve group are respectively communicated with the interlayer through a main pipeline; the cold trap is communicated with the switch valve group, and the rough pumping device and the fine pumping device are respectively communicated with the cold trap through the same pipeline; the measuring device is connected with a plurality of pipelines of the mechanism; all devices in the mechanism are electrically connected with the control device through wires respectively. The utility model can realize full-automatic vacuum pumping operation and simultaneously ensure that the vacuum degree of the product reaches the standard.
Description
Technical Field
The utility model relates to the technical field of vacuumizing, in particular to a vacuumizing mechanism.
Background
In the production and manufacturing processes of deep cooling products such as Dewar flasks, quick cooling and the like, a vacuumizing process is an important link, and the quality of the vacuum degree often determines the basic performance indexes of the Dewar flasks and the quick cooling, so that the quality of the whole life cycle of the products is influenced.
At present, a common vacuum pumping mechanism on the market is composed of simple parts such as a vacuum pump, a pipeline, a valve and the like, only a single vacuum pump is adopted to carry out vacuum pumping operation on a product, the product cannot be accurately monitored, and the vacuum degree in each product cannot be ensured.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a vacuumizing mechanism which can realize full-automatic vacuumizing operation and ensure that the vacuum degree of a product reaches the standard.
In order to achieve the purpose, the utility model adopts the following technical scheme:
a vacuumizing mechanism comprises a vacuumizing tool, a heating device, a nitrogen replacement device, a switch valve group, a cold trap, a rough vacuumizing device, a fine vacuumizing device, a measuring device and a control device;
the evacuation tool is arranged on a container to be processed and is used for communicating an interlayer to be evacuated; the evacuation tool is provided with an evacuation port, a vacuum valve and a vacuum hose, one end of the vacuum hose is communicated with the evacuation port, the other end of the vacuum hose is communicated with a main pipeline, and the vacuum valve is arranged in the middle of the vacuum hose and used for communicating or closing the vacuum hose;
the heating device is arranged on the evacuation tool, and the nitrogen displacement device and the switch valve group are respectively communicated with the interlayer through the main pipeline; the cold trap is communicated with the switch valve group, and the rough pumping device and the fine pumping device are respectively communicated with the cold trap through the same pipeline; the measuring device is connected with a plurality of pipelines of the mechanism; the heating device, the nitrogen displacement device, the switch valve group, the cold trap, the rough pumping device, the fine pumping device and the measuring device are respectively and electrically connected with the control device through leads;
the heating device is used for increasing the temperature of the interlayer so as to activate gas molecules in the interlayer; the nitrogen displacement device is used for displacing gas in the interlayer; the switch valve group is used for communicating or closing the main pipeline between the cold trap and the evacuation tool, and the switch valve group can adjust the flow rate of the main pipeline; the cold trap is used for adsorbing the extracted gas molecules; the rough pumping device is used for vacuumizing an interlayer of the container to obtain low vacuum, and the fine pumping device is used for vacuumizing the interlayer of the container to obtain high vacuum; the measuring device is used for measuring the vacuum degree of each pipeline.
Preferably, the rough pumping device comprises a rough pumping valve group, a rough pumping main pump and a rough pumping auxiliary pump;
the rough pumping valve group, the rough pumping main pump and the rough pumping auxiliary pump are sequentially connected to the cold trap in sequence, the rough pumping valve group is used for communicating or closing the rough pumping main pump and the rough pumping auxiliary pump and pipelines between the cold traps, and the flow rate of the pipeline can be adjusted by the rough pumping valve group.
Preferably, the fine pumping device comprises a fine pumping valve group, a fine pumping main pump and a fine pumping auxiliary pump;
the fine pumping valve group, the fine pumping main pump and the fine pumping auxiliary pump are sequentially connected with the cold trap in sequence, the fine pumping valve group is used for communicating or closing the fine pumping main pump and the fine pumping auxiliary pump with a pipeline between the cold trap, and the rough pumping valve group can adjust the flow rate of the pipeline.
Preferably, the rough pumping auxiliary pump and the fine pumping auxiliary pump are respectively rotary-vane vacuum pumps, the rough pumping main pump is a roots vacuum pump, and the fine pumping main pump is a molecular pump.
Preferably, the rough pumping valve group comprises a bypass valve and a gate valve, and the fine pumping valve group comprises a bypass valve and a gate valve;
the bypass valve is used for controlling the small flow rate of the connecting pipeline, and the gate valve is used for controlling the large flow rate of the connecting pipeline.
Preferably, the switch valve group comprises a bypass valve and a high valve, the bypass valve is used for controlling the small flow rate of the connecting pipeline, and the high valve is used for controlling the large flow rate of the connecting pipeline.
Preferably, the nitrogen gas replacement device comprises a control valve and a liquid nitrogen bottle, liquid nitrogen is stored in the liquid nitrogen bottle, the control valve is arranged between the liquid nitrogen bottle and the communication pipeline of the main pipeline, and the control valve is used for communicating or closing the communication pipeline between the liquid nitrogen bottle and the main pipeline.
Preferably, the heating device comprises a heating rod and a heating cable, the heating rod is arranged on the evacuation tool, one end of the heating cable is connected with the heating rod, and the other end of the heating cable is connected with the control device.
Preferably, the measuring device comprises a vacuum instrument and a plurality of vacuum gauges, the vacuum gauges are electrically connected to the vacuum instrument, the vacuum instrument is electrically connected to the control device, and the vacuum instrument is used for displaying the vacuum degree index measured by the vacuum gauges.
Preferably, the control device is a PLC controller, and the PLC controller includes a timing module.
Compared with the prior art, the technical scheme has the following beneficial effects: the utility model respectively communicates the rough pumping device and the fine pumping device of the main pipeline through the same pipeline, so as to realize the thorough vacuum pumping operation of the interlayer of the product to be vacuumized, which communicates with the main pipeline, wherein the rough vacuum pumping treatment is firstly carried out, and then the fine vacuum pumping treatment is carried out, so that the influence on the use performance of the product caused by the residual air or impurities due to the incomplete vacuum pumping treatment is avoided; after rough vacuum-pumping treatment and fine vacuum-pumping treatment, the interlayer of the product to be vacuum-pumped is reprocessed, including heating treatment of heating device, displacement treatment of nitrogen gas displacement device and adsorption treatment of cold trap, and other gas molecules which are not easy to be extracted in the interlayer are extracted together, and the control device is combined with the vacuum degree measurement data of measurement device to make judgement and control the opening and closing of every mechanism so as to implement automation and intellectualization of said mechanism.
Drawings
FIG. 1 is a schematic view of the apparatus connection of the vacuum mechanism of the present invention;
FIG. 2 is a schematic view of the vacuum mechanism of the present invention;
FIG. 3 is an enlarged view of a portion of area A of FIG. 2;
in the drawings: the device comprises an evacuation tool 1, an evacuation port 11, a vacuum valve 12, a vacuum hose 13, a heating device 2, a heating rod 21, a heating cable 22, a nitrogen replacement device 3, a control valve 31, a liquid nitrogen bottle 32, a switch valve group 4, a high valve 42, a cold trap 5, a rough-pumping device 6, a rough-pumping valve group 61, a rough-pumping main pump 62, a rough-pumping auxiliary pump 63, a fine-pumping device 7, a fine-pumping valve group 71, a fine-pumping main pump 72, a fine-pumping auxiliary pump 73, a measuring device 8, a vacuum instrument 81, a vacuum gauge pipe 82, a control device 9, a PLC 91, a to-be-processed container bypass valve 100, a main pipeline 200, 611/711/41 and a gate valve 612/712.
Detailed Description
The technical scheme of the utility model is further explained by the specific implementation mode in combination with the attached drawings.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
As shown in fig. 1-3, a vacuum pumping mechanism comprises a vacuum pumping tool 1, a heating device 2, a nitrogen gas replacement device 3, a switch valve bank 4, a cold trap 5, a rough pumping device 6, a fine pumping device 7, a measuring device 8 and a control device 9;
the evacuation tool 1 is arranged on a container 100 to be processed and is used for communicating an interlayer to be evacuated; the evacuation tool 1 is provided with an evacuation port 11, a vacuum valve 12 and a vacuum hose 13, one end of the vacuum hose 13 is communicated with the evacuation port 11, the other end of the vacuum hose 13 is communicated with a main pipeline 200, and the vacuum valve 12 is arranged in the middle of the vacuum hose 13 and used for communicating or closing the vacuum hose 13;
the heating device 2 is arranged on the evacuation tool 1, and the nitrogen displacement device 3 and the switch valve group 4 are respectively communicated with the interlayer through the main pipeline 200; the cold trap 5 is communicated with the switch valve group 4, and the rough pumping device 6 and the fine pumping device 7 are respectively communicated with the cold trap 5 through the same pipeline; the measuring device 8 is connected to a plurality of pipelines of the mechanism; the heating device 2, the nitrogen displacement device 3, the switch valve group 4, the cold trap 5, the rough pumping device 6, the fine pumping device 7 and the measuring device 8 are electrically connected with the control device 9 through wires respectively;
the heating device 2 is used for increasing the temperature of the interlayer to activate gas molecules in the interlayer; the nitrogen displacement device 3 is used for displacing the gas in the interlayer; the switch valve group 4 is used for communicating or closing the main pipeline 200 between the cold trap 5 and the evacuation tool 1, and the switch valve group 4 can adjust the flow rate of the main pipeline 200; the cold trap 5 is used for adsorbing the extracted gas molecules; the rough pumping device 6 is used for vacuumizing the interlayer of the container 100 to obtain low vacuum, and the fine pumping device 7 is used for vacuumizing the interlayer of the container 100 to obtain high vacuum; the measuring device 8 is used for measuring the vacuum degree of each pipeline.
The utility model respectively communicates the rough pumping device 6 and the fine pumping device 7 of the main pipeline through the same pipeline, realizes the thorough vacuum pumping operation of the interlayer of the product to be vacuumized which communicates with the main pipeline 200, and comprises the steps of firstly carrying out rough vacuum pumping treatment and then carrying out fine vacuum pumping treatment, thereby avoiding the influence on the service performance of the product caused by air or impurity residue due to incomplete vacuum pumping treatment; after rough vacuum-pumping treatment and fine vacuum-pumping treatment, the interlayer of the product to be vacuum-pumped is reprocessed, including heating treatment of the heating device 2, displacement treatment of the nitrogen displacement device 3 and adsorption treatment of the cold trap 5, other gas molecules which are not easy to be extracted in the interlayer are extracted together, and the control device 9 is combined with the vacuum degree measurement data of the measurement device 8 to judge and control the opening and closing of each mechanism, so that the automation and the intellectualization of the mechanism are realized, each mechanism plays its own role, and does not influence each other, and the mechanisms assist each other, thereby improving the vacuum-pumping quality of the product while meeting the vacuum degree requirement.
Specifically, the substance stored in the cold trap 5 is liquid nitrogen, the temperature is-196 ℃, the pressure is normal pressure, and the purity is about 99.999%. And in actual operation, the cold trap 5 does not store liquid nitrogen, and the cold trap 5 is filled with liquid nitrogen for adsorption treatment only when the mechanism operates to the fine pumping stage.
To be further explained, the rough pumping device 6 comprises a rough pumping valve group 61, a rough pumping main pump 62 and a rough pumping auxiliary pump 63;
rough valves 61, rough main pump 62 and rough auxiliary pump 63 of taking out in proper order connect in cold-trap 5, rough valves 61 is used for the intercommunication or closes rough main pump 62 with rough auxiliary pump 63 with pipeline between the cold-trap 5, just rough valves 61 adjustable pipeline's the circulation flow of group.
To be further explained, the fine pumping device 7 comprises a fine pumping valve group 71, a fine pumping main pump 72 and a fine pumping auxiliary pump 73;
the fine pumping valve group 71, the fine pumping main pump 72 and the fine pumping auxiliary pump 73 are sequentially connected to the cold trap 5, the fine pumping valve group 71 is used for communicating or closing the fine pumping main pump 72 and the fine pumping auxiliary pump 73 and pipelines between the cold trap 5, and the rough pumping valve group 71 can adjust the flow rate of the pipelines.
To be further explained, the rough pumping auxiliary pump 63 and the fine pumping auxiliary pump 73 are respectively a rotary vane vacuum pump, the rough pumping main pump 62 is a roots vacuum pump, and the fine pumping main pump 72 is a molecular pump.
The rotary-vane vacuum pump is operated in advance, so that the extracted vacuum degree meets the optimal operation condition of the specified conditions of the Roots vacuum pump and the molecular pump, and then the Roots vacuum pump and the molecular pump are operated, so that the Roots vacuum pump and the molecular pump are put into normal operation in a shorter time, and unnecessary power consumption can be reduced. In addition, the Roots vacuum pump of the rough pumping device 6 is mainly used for pumping out a large amount of gas molecules in a viscous flow state so as to obtain a low vacuum degree of the container 100 interlayer, and is also used as a front machine pump of the fine pumping device 7 so as to be capable of being started smoothly, and the fine pumping device 7 is mainly used for capturing the gas molecules in a molecular flow state so as to obtain a high vacuum degree of the container 100 interlayer.
Stated further, the rough-drawing valve group 61 comprises a bypass valve 611 and a gate valve 612, and the fine-drawing valve group 71 comprises a bypass valve 711 and a gate valve 712;
the bypass valve 611/711 is used for controlling the small flow rate of the connecting pipeline, and the gate valve 612/712 is used for controlling the large flow rate of the connecting pipeline.
In a further illustration, the valve block 4 comprises a bypass valve 41 and a high valve 42, the bypass valve 41 being used for controlling the low flow rate of the connecting line, and the high valve 42 being used for controlling the high flow rate of the connecting line. The control device 9 controls the switching of the valve with small flow rate and the valve with large flow rate according to the flow set value in the pipeline, thereby shortening the pipeline switching time and improving the production efficiency.
More specifically, the nitrogen displacement device 3 includes a control valve 31 and a liquid nitrogen bottle 32, liquid nitrogen is stored in the liquid nitrogen bottle 32, the control valve 31 is disposed between the liquid nitrogen bottle 32 and the communication pipeline of the main pipeline 200, and the control valve 31 is used for communicating or closing the communication pipeline of the liquid nitrogen bottle 32 and the main pipeline 200. Since the gas in the interlayer of the container 100 is an atmospheric component, it contains H which is not easy to be pumped out20 and H2For example, it is necessary to replace the nitrogen gas with a high-purity nitrogen gas and replace the nitrogen gas with a nitrogen gas which can be easily evacuated to obtain a high vacuum.
Specifically, the substance stored in the liquid nitrogen bottle 32 is liquid nitrogen, the temperature is-196 ℃, the pressure is normal pressure, and the purity is about 99.999%. The liquid nitrogen bottle 32 provides a highly integrated and functionally integrated liquid nitrogen supply, and after being converted, the liquid nitrogen can continuously provide nitrogen gas at constant temperature and constant pressure to meet the use requirements of the plurality of containers 100 for nitrogen gas replacement.
In a further description, the heating device 2 includes a heating rod 21 and a heating cable 22, the heating rod 21 is disposed on the evacuation tool 1, one end of the heating cable 22 is connected to the heating rod 21, and the other end of the heating cable 22 is connected to the control device 9. The heating device 2 is mainly used for heating substances in the interlayer to activate gas molecules in the interlayer and improve the extraction efficiency, the heating mode is indirect heating, namely heating is realized through heat conduction of the heating rod 21 and the interlayer, and the connecting heating cable 22 realizes automatic heating control on the heating rod 21 by means of the control device 9.
In a further description, the measuring device 8 includes a vacuum gauge 81 and a plurality of vacuum gauges 82, the vacuum gauges 82 are electrically connected to the vacuum gauge 81, the vacuum gauge 81 is electrically connected to the control device 9, and the vacuum gauge 81 is configured to display a vacuum degree index measured by the vacuum gauges 82.
The vacuum gauge pipe 82 is a sensor for detecting the vacuum degree, the detected vacuum degree is sent to the vacuum instrument 81, the numerical value of the vacuum degree is displayed through the vacuum instrument 81, meanwhile, the control device 9 is electrically connected with the measuring device 8, the vacuum degree of each detected pipeline is acquired in real time, the control device 9 can conveniently judge whether the vacuum degree of each pipeline reaches the condition of opening in the next step, and then the container 100 to be vacuumized is continuously processed, so that the reliability and the accuracy of the vacuumizing mechanism are ensured.
Specifically, one of the vacuum gauges 82 is disposed between the vacuum hose 13 and the main pipe 200, one of the vacuum gauges 82 is disposed between the evacuation tool 1 and the pipe of the nitrogen gas replacement device 3, one of the vacuum gauges 82 is disposed between the cold trap 5 and the pipes of the rough evacuation device 6 and the fine evacuation device 7, and one of the vacuum gauges 82 is disposed between the internal pipes of the fine evacuation device 7. In practice, the position where the vacuum gauge 82 is provided is not limited to the above, and may be adjusted according to the actual situation.
To be further described, the control device 9 is a PLC controller 91, and the PLC controller 91 includes a timing module. The PLC 91 can realize the intellectualization and automation of the mechanism, automatically control the nitrogen gas replacement device 3, the switch valve group 4, the cold trap 5, the rough pumping device 6, the fine pumping device 7, the heating device 2 and the measuring device 8 to carry out vacuum pumping treatment according to a preset vacuum pumping flow by combining a timing module with a built-in editable program logic algorithm, and automatically reset each device of the mechanism after the vacuum pumping treatment is finished, thereby ensuring the accuracy of the next vacuum pumping treatment.
The workflow of one embodiment is as follows:
the method comprises the following steps: connecting the evacuation tool 1 with a Dewar flask, opening the vacuum valve 12, pressing a start button on the PLC 91, and automatically operating the mechanism according to the following operations;
step two: the heating device 2 is activated to heat the container 100 in place, setting the temperature at 180 °.
Step three: after the set temperature is reached, the pre-pumping and nitrogen replacement program is automatically started:
(1) automatically opening a bypass valve 41 of the switch valve group 4, a bypass valve 611 of the rough pumping device 6 and a rotary vane vacuum pump, automatically opening a high valve 42 of the switch valve group 4 and a gate valve 612 of the rough pumping device 6 when the vacuum degree displayed by the vacuum instrument 81 reaches 5pa, and automatically closing the bypass valve 41 of the switch valve group 4 and the bypass valve 611 of the rough pumping device 6;
(2) when the vacuum degree of the vacuum instrument 81 reaches 2.0 x 10E-2, the Roots vacuum pump of the rough pumping device 6 is automatically opened, and the operation time is set to be 15 minutes;
(3) after 15 minutes, automatically closing the high valve 42 of the switch valve group 4 and the gate valve 612 of the rough pumping device 6, then automatically closing the Roots vacuum pump of the rough pumping device 6, and after the Roots vacuum pump of the rough pumping device 6 is completely stopped, setting the Roots vacuum pump as 10 minutes, then automatically closing the rotary-vane vacuum pump of the rough pumping device 6, and then automatically opening the nitrogen replacement device 3 for nitrogen replacement treatment;
step four: and after 5 times of operations of the step three, automatically starting a rough drawing program:
(1) the bypass valve 611 and the rotary vane vacuum pump of the rough pumping device 6 are automatically opened, when the vacuum degree displayed by the vacuum instrument 81 reaches 5pa, the high valve 42 of the switch valve group 4 and the gate valve 612 of the rough pumping device 6 are automatically opened, and the bypass valve 611 of the rough pumping device 6 is automatically closed;
(2) when the vacuum degree displayed by the vacuum instrument 81 reaches 2.0 × 10E-2, the Roots vacuum pump of the rough pumping device 6 is automatically opened;
step five: automatically starting a fine extraction program:
(1) the rotary vane type vacuum pump of the fine pumping device 7 is automatically started firstly, then the molecular pump of the fine pumping device 7 is automatically started, when the rotating speed reaches more than 10000 revolutions, the bypass valve 711 of the fine pumping device 7 is opened, after the molecular pump of the fine pumping device 7 runs stably and is set for 10 minutes, the gate valve 712 of the fine pumping device 7 is opened, and then the bypass valve 711 of the fine pumping device 7 is closed;
(2) when the vacuum degree of the vacuum instrument 81 reaches 2.5 × 10E-2, closing the gate valve 612 of the rough pumping device 6, and after the Roots vacuum pump of the rough pumping device 6 is completely stopped and set for 10 minutes, closing the Roots vacuum pump of the rough pumping device 6;
step six: the heating device 2 is automatically started after the fine pumping procedure is finished,
(1) adjusting the set temperature of the heating device 2 to 250 degrees, and setting the extraction for 12 hours;
(2) then, the set temperature of the heating device 2 is adjusted to 380 degrees, and the extraction is set for 12 hours;
step seven: after heating and pumping are completed for 24 hours, automatically closing the heating device 2, then filling liquid nitrogen into the cold trap 5, and continuing the fine pumping procedure in the fifth step;
step eight: when the vacuum degree of the vacuum instrument 81 reaches 3.0 × 10E-3, the control device 9 prompts the program to be sealed, the vacuum valve 12 of the evacuation tool 1 is closed, then the vacuum instrument 81, the high valve 42 of the switch valve group 4 and the gate valve 712 of the fine pumping device 7 are closed, then the molecular pump of the fine pumping device 7 is closed, the rotary vane vacuum pump of the fine pumping device 7 is closed after the rotation speed of the molecular pump is completely stopped, and the mechanism enters a standby state to wait for the next start.
The technical principle of the present invention is described above in connection with specific embodiments. The description is made for the purpose of illustrating the principles of the utility model and should not be construed in any way as limiting the scope of the utility model. Other embodiments of the utility model will occur to those skilled in the art without the exercise of inventive faculty based on the explanations herein, and such equivalent modifications or substitutions are intended to be included within the scope of the present invention as defined in the appended claims.
Claims (10)
1. A vacuum pumping mechanism is characterized by comprising a vacuum pumping tool, a heating device, a nitrogen displacement device, a switch valve group, a cold trap, a rough pumping device, a fine pumping device, a measuring device and a control device;
the evacuation tool is arranged on a container to be processed and is used for communicating an interlayer to be evacuated; the evacuation tool is provided with an evacuation port, a vacuum valve and a vacuum hose, one end of the vacuum hose is communicated with the evacuation port, the other end of the vacuum hose is communicated with a main pipeline, and the vacuum valve is arranged in the middle of the vacuum hose and used for communicating or closing the vacuum hose;
the heating device is arranged on the evacuation tool, and the nitrogen displacement device and the switch valve group are respectively communicated with the interlayer through the main pipeline; the cold trap is communicated with the switch valve group, and the rough pumping device and the fine pumping device are respectively communicated with the cold trap through the same pipeline; the measuring device is connected with a plurality of pipelines of the mechanism; the heating device, the nitrogen displacement device, the switch valve group, the cold trap, the rough pumping device, the fine pumping device and the measuring device are respectively and electrically connected with the control device through leads;
the heating device is used for increasing the temperature of the interlayer so as to activate gas molecules in the interlayer; the nitrogen displacement device is used for displacing gas in the interlayer; the switch valve group is used for communicating or closing the main pipeline between the cold trap and the evacuation tool, and the switch valve group can adjust the flow rate of the main pipeline; the cold trap is used for adsorbing the extracted gas molecules; the rough pumping device is used for vacuumizing an interlayer of the container to obtain low vacuum, and the fine pumping device is used for vacuumizing the interlayer of the container to obtain high vacuum; the measuring device is used for measuring the vacuum degree of each pipeline.
2. The vacuum pumping mechanism as claimed in claim 1, wherein the rough pumping device comprises a rough pumping valve group, a rough pumping main pump and a rough pumping auxiliary pump;
the rough pumping valve group, the rough pumping main pump and the rough pumping auxiliary pump are sequentially connected to the cold trap in sequence, the rough pumping valve group is used for communicating or closing the rough pumping main pump and the rough pumping auxiliary pump and pipelines between the cold traps, and the flow rate of the pipeline can be adjusted by the rough pumping valve group.
3. The vacuum pumping mechanism as claimed in claim 2, wherein the fine pumping device comprises a fine pumping valve group, a fine pumping main pump and a fine pumping auxiliary pump;
the fine pumping valve group, the fine pumping main pump and the fine pumping auxiliary pump are sequentially connected with the cold trap in sequence, the fine pumping valve group is used for communicating or closing the fine pumping main pump and the fine pumping auxiliary pump with a pipeline between the cold trap, and the rough pumping valve group can adjust the flow rate of the pipeline.
4. The vacuum pumping mechanism as claimed in claim 3, wherein the rough pumping auxiliary pump and the fine pumping auxiliary pump are rotary vane vacuum pumps, respectively, the rough pumping main pump is a roots vacuum pump, and the fine pumping main pump is a molecular pump.
5. The vacuum pumping mechanism as claimed in claim 3, wherein the rough pumping valve set comprises a bypass valve and a gate valve, and the fine pumping valve set comprises a bypass valve and a gate valve;
the bypass valve is used for controlling the small flow rate of the connecting pipeline, and the gate valve is used for controlling the large flow rate of the connecting pipeline.
6. An evacuation mechanism according to claim 1, wherein the switch valve group comprises a bypass valve for controlling a small flow rate of the connecting line and a high valve for controlling a large flow rate of the connecting line.
7. The vacuum pumping mechanism according to claim 1, wherein the nitrogen displacement device comprises a control valve and a liquid nitrogen bottle, liquid nitrogen is stored in the liquid nitrogen bottle, the control valve is arranged between the liquid nitrogen bottle and the communication pipeline of the main pipeline, and the control valve is used for communicating or closing the communication pipeline of the liquid nitrogen bottle and the main pipeline.
8. An evacuation mechanism according to claim 1, wherein the heating means comprises a heating rod and a heating cable, the heating rod being disposed on the evacuation tool, one end of the heating cable being connected to the heating rod, and the other end of the heating cable being connected to the control means.
9. A vacuum pumping mechanism as claimed in claim 1, wherein the measuring device comprises a vacuum gauge and a plurality of vacuum gauges, the vacuum gauges are electrically connected to the vacuum gauge, the vacuum gauge is electrically connected to the control device, and the vacuum gauge is used for displaying the index of the vacuum degree measured by the vacuum gauge.
10. The evacuation mechanism of claim 1, wherein the control device is a PLC controller, the PLC controller comprising a timing module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123353970.4U CN216510330U (en) | 2021-12-28 | 2021-12-28 | Vacuumizing mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123353970.4U CN216510330U (en) | 2021-12-28 | 2021-12-28 | Vacuumizing mechanism |
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| CN216510330U true CN216510330U (en) | 2022-05-13 |
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| CN202123353970.4U Active CN216510330U (en) | 2021-12-28 | 2021-12-28 | Vacuumizing mechanism |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116791056A (en) * | 2023-06-30 | 2023-09-22 | 安徽其芒光电科技有限公司 | Exhaust heating method of vacuum coating equipment |
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2021
- 2021-12-28 CN CN202123353970.4U patent/CN216510330U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116791056A (en) * | 2023-06-30 | 2023-09-22 | 安徽其芒光电科技有限公司 | Exhaust heating method of vacuum coating equipment |
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