CN207074099U - A kind of differential pressure sensor arrangement - Google Patents
A kind of differential pressure sensor arrangement Download PDFInfo
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- CN207074099U CN207074099U CN201720858011.2U CN201720858011U CN207074099U CN 207074099 U CN207074099 U CN 207074099U CN 201720858011 U CN201720858011 U CN 201720858011U CN 207074099 U CN207074099 U CN 207074099U
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Abstract
The utility model discloses a kind of differential pressure sensor arrangement, wherein the differential pressure sensor arrangement includes：One differential pressure pick-up body, it has two pressure-sensitive faces；One differential pressure pick-up base；One differential pressure pick-up sleeve pipe；Two pressure-sensitive diaphragms, the pressure-sensitive diaphragm are connected with the pressure-sensitive face；With a separator, it is arranged at a supporting part of the differential pressure pick-up body endoporus operating space, wherein described pressure-sensitive face forms the texture structure of 8 waveform grooves by being machined, while increases the depth of waveform groove so that the pilot medium storage in receiving space increases；The separator has a spliced eye, the spliced eye corresponds to the limiting section of the differential pressure pick-up base, when the differential pressure pick-up base sinks to differential pressure pick-up body endoporus operating space by the separator, the separator is caused deformation by the differential pressure pick-up base pressing-in force, with the fixation differential pressure pick-up base in differential pressure pick-up body endoporus operating space, while seal the junction gap of the limiting section and the supporting part.
Description
Technical field
It the utility model is related to a kind of detection instrument, more particularly to a kind of differential pressure sensor arrangement.
Background technology
Sensor is a kind of electronic component, for measuring the common tool of the pressure difference value of liquid or gas, has body
The characteristics of product is small, in light weight, precision is high, high sensitivity, low cost, it is indispensable to have become microelectromechanical systems field
A kind of electronic component.With the fast development of microelectric technique, differential pressure pick-up is widely used in vapour as detecting system at present
The all trades and professions such as car and locomotive equipment, thermal power generation, health care, chemical industry, petroleum refining, industrial electronic, Internet of Things, for example,
The differential pressure for being used to measure the tail gas pressure differential of automobile engine tail gas grain catcher (DPF) antero-posterior pathway of vehicle electric field
Sensor, the differential pressure pick-up for the detection of automobile braking master cylinder air-tightness, the differential pressure for controlling load differential pressure pick-up hydraulic pressure
Sensor, the differential pressure pick-up for automobile brake system, for gasbag pressure measurement differential pressure pick-up, for automobile chassis
The differential pressure pick-up of electronic control system；Sphygmomanometer, the tire gauge of medical field；Digital stream scale, the number of industrial electronic field
Word pressure gauge etc., and with the constantly progressive innovation of technology and the continuous improvement of economic level, intelligent differential pressure sensor is micro-
Many high-acruracy survey occasions such as flow measurement, leak-testing, clean room monitoring, gas flow measurement, height of liquid level measurement are all
Have a wide range of applications, it has also become a kind of indispensable electronic component of microelectronic industry.
At present, the differential pressure pick-up operation principle of main flow is that differential pressure pick-up body is provided with pressure-sensitive face, generally and pressure sensitive film
Piece coordinates to measure the pressure difference of a certain equipment or part rear and front end.Specifically, by oil-filled pipeline into sensor body
Silicone oil is injected in portion so that the silicone oil for conducting pressure is full of in each pressure guide hole in sensor body, works as differential pressure pick-up
Both sides pressure-sensitive diaphragm stress it is inconsistent when, pressure-sensitive diaphragm by the external world pressure after produce displacement, when pressure-sensitive film surface and pressure-sensitive
When the distance between face changes, an active force is produced to differential pressure pick-up inside silicone oil (i.e. pilot medium), passes through silicon
Oil carries out the lossless transmission of pressure, suppresses chip (such as the gloomy MD chips of Dare) in differential pressure pick-up respectively from pressure guide hole
Tow sides, so as to cause the resistance of the bridge resistance, of chip internal to change, by vibration and demodulating link, be converted into
The directly proportional signal of pressure, it is changed into standard electric signal output by processing such as amplifications, and then is able to measure the change of ambient pressure.
Need to consider that a more problems is its pressure-sensitive performance at the pressure-sensitive face of application differential pressure pick-up, for
Sensitive use of differential pressure pick-up will especially consider the problem of such, and differential pressure pick-up pressure-sensitive face is specially according to differential pressure pick-up
The characteristic design of chip, therefore the depth of lines in pressure-sensitive face, lines distance all influence the service behaviour in pressure-sensitive face.Traditional
In structure, the pressure-sensitive facial contour lines of differential pressure pick-up selects the sine curve of five or six lines quantity, but with microelectronics
The fast development of technology, also gradually it is exposed the defects of currently used pressure-sensitive face, is mainly shown as that pressure-sensitive performance is not good enough
More application scenarios are not adapted to, in some occasions, due to some limitations, are shown as because temperature drift is bigger, differential pressure sensing
Oil mass balance in device is also not good enough, causes measurement data not accurate enough.As application scenario becomes increasingly complex, in order to improve difference
The sensitivity of pressure sensor, the simple thickness for increasing pressure-sensitive face or increase lines quantity can be all influenceed in differential pressure pick-up
Silicone oil amount balances, and the imbalance of oil mass can cause differential pressure pick-up silicone oil expands, right under different ambient operating temperatures
The dynamics of suppressing of chip also can be different, so will result in the deviation of differential pressure pick-up precision, and differential pressure sensor arrangement inspection
The unstability of survey.Therefore, the quality of sensor is very relevant with the oil mass balance of sensor internal, by researcher repeatedly
Experiment test and experimental data design and process pressure-sensitive face to realize that the oil mass in differential pressure pick-up balances, and oil mass
Balance is better, and the pressure-sensitive performance of differential pressure pick-up is also better, so as to improve the measurement accuracy of differential pressure sensor arrangement and response spirit
Sensitivity.
In addition, the problem of traditional differential pressure sensor arrangement is present and defect limit its application, with science skill
The continuous development of art, the demand of differential pressure sensor arrangement is continued to increase, therefore, solve problems of the prior art and go forward side by side
The higher differential pressure sensor arrangement of one step research precision is imperative.The utility model is directed to differential pressure sensor arrangement traditional structure
The problem of and defect, proposition targetedly improve, to improve the measurement accuracy of differential pressure sensor arrangement and stability.
Utility model content
A purpose of the present utility model is to provide a kind of differential pressure sensor arrangement, by being filled to traditional differential pressure sensors
The pressure-sensitive face put is modified, and the differential pressure pick-up is had more preferable pressure-sensitive performance, can preferably resist ambient temperature and
Stress variation exporting change to caused by it, to improve the sensitivity of the differential pressure pick-up, expand the differential pressure pick-up
Application.
Another purpose of the present utility model is to provide a kind of differential pressure sensor arrangement, by being machined in heritage
Increasing the quantity of waveform groove on pressure surface, while increase the depth of waveform groove so that the pilot medium storage in waveform groove increases, with
Ensure that the pilot medium volume of positive/negative-pressure intracavitary is equal, to improve the balance of the pilot medium inside the differential pressure pick-up,
Solves the problems, such as traditional differential pressure sensors device pressure-sensitive poor performance, to ensure the reliable of the differential pressure sensor arrangement measurement result
Property.
Another purpose of the present utility model is to provide a kind of differential pressure sensor arrangement, by the differential pressure pick-up
The operating space of body endoporus and the junction of the differential pressure pick-up base set a separator, to ensure the differential pressure sensing
Device base is fixed on the differential pressure pick-up body endoporus operating space.
Another purpose of the present utility model is to provide a kind of differential pressure sensor arrangement, is advantageous to sense in the differential pressure
During device base Rig up error, the detachable differential pressure pick-up base is reinstalled, and then is convenient for changing use.
Another purpose of the present utility model is to provide a kind of differential pressure sensor arrangement, closed by the separator
The junction gap of differential pressure pick-up base and the differential pressure pick-up body, to isolate positive/negative-pressure chamber, prevents positive/negative-pressure intracavitary
Pilot medium be connected, the normal measurement to the chip has an impact, and then influences the normal of the differential pressure pick-up and make
With.
Another purpose of the present utility model is to provide a kind of differential pressure sensor arrangement, by the separator, with solution
The problem of energy is too high, temperature is too high is produced when certainly tradition takes welding sequence, less with the radiating shadow for worrying sensor device
The normal use to the differential pressure pick-up chip is rung, to improve yields.
Another purpose of the present utility model is to provide a kind of differential pressure sensor arrangement, caused by using the separator
The structure operation that differential pressure pick-up base sinks to differential pressure pick-up body endoporus bottom simplifies step, can preferably improve installation
Efficiency, to improve the production efficiency of differential pressure pick-up.
Another purpose of the present utility model is to provide a kind of differential pressure sensor arrangement, reduction waste of material, with routine
Differential pressure pick-up manufacturing process flow is compatible, and application field is extensive.
Another purpose of the present utility model is to provide a kind of differential pressure sensor arrangement, it is not necessary to changes Traditional differential pressure biography
Sensor arrangement is that the installation of the separator can be achieved, and to form the differential pressure pick-up provided by the utility model, passes through this
The mode of sample can reduce the popularization cost of the differential pressure pick-up, while be advantageous to the extensive of the differential pressure pick-up and push away
Extensively.
Another purpose of the present utility model is to provide a kind of differential pressure sensor arrangement, and traditional differential pressure pick-up phase
Than realizing the stability of high-precision output and output on the basis of lower-cost, while need not be added to and originally can
Mass manufacture production.
In order to meet object above of the present utility model and other purposes of the present utility model and advantage, the utility model
One differential pressure sensor arrangement is provided, including：
One differential pressure pick-up body, it has two pressure-sensitive faces；
One differential pressure pick-up base；
Two pressure-sensitive diaphragms, the pressure-sensitive diaphragm are connected with the pressure-sensitive face；With
One separator, it is arranged at a supporting part of the differential pressure pick-up body endoporus operating space, the isolation
Part has a spliced eye, and the spliced eye corresponds to the limiting section of the differential pressure pick-up base, when the differential pressure pick-up pipe
When seat sinks to differential pressure pick-up body endoporus operating space by the separator, the separator is by the differential pressure pick-up pipe
Seat pressing-in force and cause deformation, with the fixation differential pressure pick-up base in differential pressure pick-up body endoporus operating space, simultaneously
Seal the junction gap of the limiting section and the supporting part.
According to a preferred embodiment of the present utility model, the pressure-sensitive diaphragm is connected and formed with the pressure-sensitive face
One receiving space, to accommodate the pilot medium.
Preferably, the differential pressure pick-up body further comprises two pressure guide holes, and the receiving space passes through company respectively
Connect and a pressure guide hole so that the differential pressure pick-up has a malleation chamber and a negative pressure cavity.
Preferably, the pressure-sensitive face forms the texture structure of 8 waveform grooves by being machined, and compares traditional differential pressure sensors
Pressure-sensitive face waveform groove quantitatively add, while add the depth of waveform groove so that the pilot medium in receiving space
Storage increases, to solve the problems, such as traditional differential pressure sensors device pressure-sensitive poor performance, to ensure differential pressure sensor arrangement measurement knot
The reliability of fruit.
It is that, because the pilot medium volume in sensor is certain, pilot medium is in receiving space with being worth mentioning
Amount it is more, the pilot medium volume accounting accounted in the whole sensor device also increases, differential pressure sensor arrangement it is positive and negative
Pressing the unbalanced ratio of chamber, the balance of the pilot medium of positive/negative-pressure chamber is better so that differential pressure sensor arrangement pressure-sensitive with regard to smaller
Performance is better.
Further, the differential pressure sensor arrangement of different sizes, the diameter in its pressure-sensitive face is also inconsistent, its model
29.9mm~36mm is trapped among, the equidistant scope of the waveform groove is 1.50mm~1.60mm, and the waveform groove sinking amplitude is
0.25mm~0.30mm.
Preferably, the pressure-sensitive face is provided with continuous 8 waveform grooves equidistantly arranged, and sets between 8 waveform grooves
Away from for 1.60mm, and when the waveform groove sinking amplitude is 0.25mm, amount of the pilot medium in receiving space is more, to ensure
Pilot medium volume in the positive/negative-pressure chamber is equal, and the pilot medium of the receiving space is accounted in the whole sensor device
Pilot medium volume accounting it is also maximum so that the balance of the pilot medium inside the differential pressure pick-up is optimal, solution
Certainly the problem of traditional differential pressure sensors device pressure-sensitive poor performance, to ensure the reliable of the differential pressure sensor arrangement measurement result
Property.
The differential pressure pick-up base can be traditional differential pressure pick-up base structure, including a limiting section, a chip,
One oil-filled pipeline and an electrical interface.The differential pressure pick-up base and the differential pressure pick-up body of above preferred embodiment match
Set, the differential pressure pick-up base can be arranged to the endoporus operating space of above-mentioned differential pressure pick-up body, the differential pressure sensing
The diameter of the diameter of device base≤endoporus operating space.
The differential pressure pick-up operation principle is sensed as the operation principle of traditional differential pressure sensors by the differential pressure
The oil-filled pipeline of device base injects pilot medium to sensor body inside so that each institute in the sensor body
State the pilot medium being full of in pressure guide hole for conducting pressure, when pressure-sensitive diaphragm stress described in the both sides of the differential pressure pick-up not
When consistent, the pressure-sensitive diaphragm by the external world pressure after produce displacement, between the pressure-sensitive film surface and the pressure-sensitive face away from
During from changing, an active force is produced to the pilot medium in the receiving space, pressure is carried out by pilot medium
Lossless transmission, the tow sides of the chip in the differential pressure pick-up base are suppressed respectively from the pressure guide hole, so as to cause
The resistance of the bridge resistance, of chip internal changes, and by vibration and demodulating link, is converted into the signal being directly proportional to the pressure,
It is changed into standard electric signal output by processing such as amplifications, and then is able to measure the change of ambient pressure.
Brief description of the drawings
Fig. 1 is according to a kind of the vertical of differential pressure sensor arrangement connected mode of first preferred embodiment of the present utility model
Body decomposing schematic representation.
Fig. 2 is the diagrammatic cross-section according to a kind of pressure-sensitive face of above preferred embodiment of the present utility model.
Fig. 3 is the diagrammatic cross-section according to a kind of differential pressure pick-up body of above preferred embodiment of the present utility model.
Fig. 4 is the diagrammatic cross-section according to a kind of differential pressure pick-up base of above preferred embodiment of the present utility model.
Fig. 5 A are to pass through separator according to a kind of differential pressure pick-up base of the 3rd preferred embodiment of the present utility model
Insert internal structure diagrammatic cross-section during differential pressure pick-up body endoporus operating space.
Fig. 5 B are to be inserted according to a kind of differential pressure pick-up base of above preferred embodiment of the present utility model by separator
Enter the partial structurtes section 2 during differential pressure pick-up body endoporus operating space:1 enlarged drawing.
Embodiment
Below will the utility model is described in further detail with embodiment in conjunction with the accompanying drawings so that any art
Technical staff can manufacture and using the utility model.Embodiment in the following description is only as an example with modification thing to this
Field those skilled in the art will be apparent.The General Principle defined in the following description will be applied to other implementations
Example, substitute, change thing, equivalence enforcement and application in, without departing from spirit and scope of the present utility model.
Fig. 1 is a kind of solid of differential pressure sensor arrangement connected mode of a preferred embodiment provided by the utility model
Decomposing schematic representation.As shown in figure 1, a kind of differential pressure sensor arrangement, it include a differential pressure pick-up body 10, a separator 20,
One differential pressure pick-up base 30 and at least a pressure-sensitive diaphragm 50, wherein the separator 20 is connected to the differential pressure pick-up differential pressure
Sensor base 30, it is mounted on inside the differential pressure pick-up body 10, to detect the change of ambient pressure environment.This practicality
New differential pressure sensor arrangement can be implemented as a detection terminal in a specific embodiment, its be applied to petrochemical industry,
The fields such as electric power, automobile, ship, industrial automation instrument.
Further, the pressure-sensitive diaphragm 50 is molded to obtain and the identical waveform groove of pressure-sensitive face 11 by diaphragm
Road.The pressure-sensitive diaphragm 50 is additionally operable to prevent the foreign matters such as the water, steam, dust of the external environment condition of the differential pressure sensor arrangement from entering
Enter the inner space of the differential pressure pick-up body 10 and cause to be arranged at the machine of the inner space of differential pressure pick-up body 10
Structure damages.
The both sides of differential pressure pick-up body 10 set a pressure-sensitive face 11 respectively, wherein the pressure-sensitive face 11 and the pressure-sensitive
Diaphragm 50 is connected, the differential pressure sensor arrangement be able to by the pressure-sensitive diaphragm 50 come pressure-sensitive, processing, transmit pressure and its
Change.
It is noted that although institute of the present utility model is described in Fig. 1 of Figure of description of the present utility model
A kind of possible embodiment, but the description of its being only for example property are stated, is not intended as to content of the present utility model and scope
Limitation.
As shown in Fig. 2 it is the diagrammatic cross-section according to a kind of pressure-sensitive face of above preferred embodiment of the present utility model.Its
Described in pressure-sensitive face 11 machining form multiple waveform grooves 111.
It is that to be adapted to machining, its center has a platform 112 in the pressure-sensitive face 11 with being worth mentioning.
The pressure-sensitive diaphragm 50 of 0.03mm thickness through researcher's selection standard, repeatedly experiment test different wave groove
The pressure-sensitive face 11 of 111 quantity, 3 temperature points is tested at the same temperature, 9 pressure points gained of test go out following several groups of numbers
According to it was found from experimental result, when the arrangement mode of 11 waveform groove of pressure-sensitive face 111 is with continuous 8 waveform grooves equidistantly arranged
When 111, arranged than the pressure-sensitive face 11 continuously to have the trapped fuel amount more balanced for 6 equidistant waveform grooves 111.And when arrangement
During 9 111 quantity of waveform groove, because the elastic deformation of pressure-sensitive face stretching reaches ultimate attainment and it is broken, thus it is excellent
Selection of land, when the quantity of 11 waveform groove of pressure-sensitive face 111 is 8, positive/negative-pressure chamber oil mass reaches best balanced effect, makes the differential pressure
Sensor device has more preferable pressure-sensitive performance.
The different wave slot number amount of table one temperature for -20 DEG C when the error value changes that are showed
The error value changes that the different lines quantity of table two show when temperature is by 60 DEG C
The error value changes that the different lines quantity of table three show when temperature is by 20 DEG C
When through another group of experiment of researcher, to test the quantity of pressure-sensitive face 11 repeatedly be 8 waveform grooves 111 equidistantly arranged,
3 temperature points are tested at the same temperature, 9 pressure points gained of test go out following several groups of data.It was found from result of study,
When the sinking amplitude of waveform groove 111 is 0.25mm, reach differential pressure sensor arrangement oil mass of positive/negative-pressure intracavitary after oil-filled
It is best to best balanced requirement, pressure-sensitive effect.And after depth of lines is deepened again, the stress that the pressure-sensitive diaphragm 50 is redrawn can increase
Add, then influence pressure-sensitive performance, and then influence the normal use of differential pressure sensor arrangement.
Table four temperature for -20 DEG C when the situation of change of error amount that is showed of difference depth of lines
The situation of change of the error amount that difference depth of lines shows when temperature is by 60 DEG C of table five
The situation of change of the error amount that difference depth of lines shows when temperature is by 20 DEG C of table six
It is that in a specific embodiment, the pressure-sensitive diaphragm 50 can be metal, alloy and other materials with being worth mentioning
Material is made, and is not intended to limit the utility model.
Preferably, the pressure-sensitive face 11 is using high-precision 316L stainless steels diaphragm.
As shown in figure 3, wherein described differential pressure pick-up body 10 includes a pressure guide hole 13, an endoporus operating space 14, one
Supporting part 15, an alignment pin 16, a upper limit groove 17 and two pressure-sensitive faces 11.The pressure-sensitive face 11 is arranged at the sensing
The side of device body 10.
Wherein described pressure-sensitive face 11 links together with the pressure-sensitive diaphragm 50 and forms a receiving space 60, is accommodated
The pilot medium.
It is noted that the pilot medium can be silicone oil, fluorocarbon oil, vegetable oil and other media, it is not intended to limit
The utility model.
Preferably, the receiving space 60 forms a pressure chamber, when ambient pressure acts on by connection and the pressure guide hole 13
When the pressure-sensitive diaphragm 50 promotes extruding to be present in the pilot medium at the receiving space 60, the pilot medium is being pressed
Pressure is nondestructively transmitted in chamber.
It is noted that the receiving space 60a and pressure guide hole 13a forms malleation chamber, the receiving space 60b
Negative pressure cavity is formed with the pressure guide hole 13b.
The separator 20 has a spliced eye 21, to connect the differential pressure pick-up base 30 and the differential pressure pick-up
The endoporus operating space 14 of body 10.
Preferably, the separator 20 is an elastic material element, when can be sunk to by the differential pressure pick-up base 30
The pressure extrusion brought produces deformation, to seal the junction of the separator 20 and the differential pressure pick-up base 30.
Preferably, the separator 20 is a sealing ring using fluosilicic material, and fluosilicic sealing ring seals than other materials
Circle has more preferable oil resistivity.
Further, the pressure-sensitive face 11a is correspondingly connected accordingly connects with the pressure guide hole 13a, the pressure-sensitive face 11b
Connect and the pressure guide hole 13b.
The endoporus operating space 14 of the differential pressure pick-up body 10 is respectively communicated with and the differential pressure pick-up body 10
External environment condition and the pressure guide hole 13 for being placed in inner space.When being filled with pilot medium, pilot medium can be empty by interior hole operation
Between 14 enter pressure guide holes 13.
It will be appreciated that though the differential pressure pick-up body 10 is described in Figure of description is implemented as traditional difference
The cylindrical exterior structure of pressure sensor, but the differential pressure pick-up body can also be implemented as other shapes, such as
Spherical, oval etc., therefore, the type and size of the differential pressure pick-up 10 are simultaneously not construed as to content of the present utility model
With the limitation of scope.
As shown in figure 4, a differential pressure pick-up base 30, the differential pressure pick-up base 30 includes a limiting section 31, a core
Piece 32, an oil-filled electrical interface 34 of pipeline 33 and one.Difference based on the differential pressure pick-up base 30 Yu above preferred embodiment
Pressure sensor body 10 matches, and the differential pressure pick-up base 30 can be arranged to the endoporus of above-mentioned differential pressure pick-up body 10
Operating space 14, the diameter of diameter≤endoporus operating space 14 of the differential pressure pick-up base 30.
Wherein described differential pressure sensor arrangement allows the pressure-sensitive diaphragm 50 to experience measured information, and will can feel
The information being subject to passes to the chip 32 in the differential pressure pick-up base by pilot medium, and chip 32 is designed with by certain
The information that bio signal is for conversion into electric signal or other required forms by rule exports, to meet the transmission of information, handle, deposit
Storage, display, record and control etc. require.
When the differential pressure pick-up base 30 works, by oil-filled pipeline 33 to the sensor endoporus operating space 14
Inject silicone oil so that the silicone oil for conducting pressure is full of in each pressure guide hole 13 of the sensor endoporus operating space 14；
In actual measurement process, by the way that the sensor device is immersed in measured medium, to cause measured medium to sensor just
Press chamber to form normal pressure, and negative pressure is formed to the sensor negative pressure cavity；Normal pressure passes through the silicone oil in the pressure guide hole 13a
The lossless lower surface for being transferred to chip, negative pressure are transferred to the upper of the chip by the way that the silicone oil in the pressure guide hole 13b is lossless
Small deformation can occur in the presence of positive/negative pressure for end face, the chip, so as to cause the bridge of the chip internal electric
The resistance of resistance changes, and by vibration and demodulating link, is converted into the signal being directly proportional to the pressure.By connecting supply unit
To provide burning voltage to chip, among the output current of the chip being transferred into corresponding instrument and meter again, surveyed
Measure the pressure differential at sensor both ends.
Further, the gloomy MD chips of 32 preferred Dare of chip of the differential pressure pick-up base 30.
Fig. 5 A to Fig. 5 B are a kind of separators of one preferred embodiment of differential pressure sensor arrangement provided by the utility model
Seal the differential pressure pick-up body endoporus operating space and the internal structure during differential pressure pick-up base bottom junctions
Schematic diagram.Specifically, based in above-mentioned specific embodiment, the separator 20 is arranged at the differential pressure pick-up body 10
Supporting part 15, entered when the limiting section 31 of the differential pressure pick-up base 30 by the spliced eye 21 of the separator 20 described in
After endoporus operating space 14, the separator 20 is produced deformation simultaneously by the pressure that the differential pressure pick-up base 30 is brought into
The fixed limiting section 31, while the supporting part 15 is sealed, positive/negative-pressure chamber is isolated, and then substitute traditional differential pressure pick-up
Device reduces cost, improves the yields for manufacturing the differential pressure sensor arrangement for the welded seal mode of supporting part 15.
It should be understood by those skilled in the art that the embodiment of the present utility model shown in foregoing description and accompanying drawing is only used as
Illustrate and be not intended to limit the utility model.The purpose of this utility model completely and effectively realizes.Work(of the present utility model
Energy and structural principle show and illustrated in embodiment, under without departing from the principle, embodiment of the present utility model
Can there are any deformation or modification.
Claims (6)
1. a kind of differential pressure sensor arrangement, including：
One differential pressure pick-up body, it has two pressure-sensitive faces；
One differential pressure pick-up base；
Two pressure-sensitive diaphragms, the pressure-sensitive diaphragm are connected with the pressure-sensitive face；With
One separator, it is arranged at a supporting part of the differential pressure pick-up body endoporus operating space, the separator tool
There is a spliced eye, the spliced eye corresponds to the limiting section of the differential pressure pick-up base.
2. differential pressure sensor arrangement as claimed in claim 1, wherein the separator is flexible member.
3. differential pressure sensor arrangement as claimed in claim 1, wherein the pressure-sensitive diaphragm is connected with the pressure-sensitive face and shape
Into a receiving space, to accommodate pilot medium.
4. differential pressure sensor arrangement as claimed in claim 3, wherein the differential pressure pick-up body further comprises that two are led
Press hole, the receiving space connection and a pressure guide hole so that the differential pressure pick-up has a malleation chamber and a negative pressure cavity.
5. differential pressure sensor arrangement as claimed in claim 4, the pressure-sensitive face forms the line of 8 waveform grooves by being machined
Line structure, while increase the depth of waveform groove so that the pilot medium storage in receiving space increases.
6. differential pressure sensor arrangement as claimed in claim 5, the pressure-sensitive face is provided with continuous 8 waveforms equidistantly arranged
Groove, the spacing for setting 8 waveform grooves be 1.50mm~1.60mm, and the waveform groove sinking amplitude for 0.25mm~
0.30mm。
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107228731A (en) * | 2017-07-15 | 2017-10-03 | 江苏德尔科测控技术有限公司 | A kind of differential pressure sensor arrangement and its method for packing |
| CN116878720A (en) * | 2023-04-20 | 2023-10-13 | 汉斯韦尔(山东)物联技术有限公司 | High stable silicon differential pressure sensor |
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2017
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107228731A (en) * | 2017-07-15 | 2017-10-03 | 江苏德尔科测控技术有限公司 | A kind of differential pressure sensor arrangement and its method for packing |
| CN116878720A (en) * | 2023-04-20 | 2023-10-13 | 汉斯韦尔(山东)物联技术有限公司 | High stable silicon differential pressure sensor |
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