CN206783568U - Alcoholysis method handles the reaction and rectification device of tail gas containing chlorsilane - Google Patents
Alcoholysis method handles the reaction and rectification device of tail gas containing chlorsilane Download PDFInfo
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- CN206783568U CN206783568U CN201720614378.XU CN201720614378U CN206783568U CN 206783568 U CN206783568 U CN 206783568U CN 201720614378 U CN201720614378 U CN 201720614378U CN 206783568 U CN206783568 U CN 206783568U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
The utility model discloses a kind of reaction and rectification device of alcoholysis method processing tail gas containing chlorsilane, including alcoholysis absorption system；Wherein, described alcoholysis absorption system, including absorption tower and rectifying column；Alcohols pipeline is passed through described absorption tower top, and chlorosilane exhaust pipe is passed through in the middle part of described absorption tower；Pipeline at the top of described absorption tower is passed through absorption overhead condenser, then flows back and be connected to described absorption tower top, absorbs overhead condenser and is provided with downtake pipe；The pipeline of described absorb the bottom of the tower is by absorption tower circulating pump with being connected in the middle part of described rectifying column；Described rectifying column top duct is passed through rectifying tower top condenser, then flows back and be sequentially connected alcohols recycling can, alcohols reflux pump to described rectifier, and rectifying tower top condenser is provided with second exhaust pipe；Pass through pipeline communication to products pot in the middle part of described rectifying column；Described rectifier bottoms are back to described rectifying column middle and lower part by pipeline again by pipeline communication to reboiler.
Description
Technical field
The Integrated Processing Unit of polysilicon industry chlorine-containing silane emptying end gas is the utility model is related to, belongs to polysilicon waste gas
A kind of process field, and in particular to reaction and rectification device of alcoholysis method processing tail gas containing chlorsilane.
Background technology
Domestic and international production of polysilicon enterprise is mostly using improved Siemens production polysilicon, using the art production process
Tail gas containing chlorsilane can be produced, the tail gas is mainly chlorosilane, hydrogen chloride, hydrogen, nitrogen etc., and polysilicon enterprise is chloride at present
Silane exhaust gas processing device it is commonly used be in alkali cleaning and technique, Fig. 1 is shown in double tower alkali cleaning and technique：Chlorosilane tail gas
3 enter from the middle part of one-level eluting column 1 or bottom, tail gas contacted from bottom to top with the top-down alkali lye from tower top into
Row neutralization reaction；The bottom of one-level eluting column 1 is provided with serum pot 4, collects the liquid of eluting column discharge and is sent through serum pot circulating pump 5
Alkali cleaning is circulated to one-level eluting column top；The tail gas of the remaining a small amount of complete chlorosilane of unreacted and hydrogen chloride is from one-level eluting column
Top discharge enters back into the middle part of two-step washing tower 2 or bottom, neutralization reaction is carried out again with the alkali lye from tower top, by two
Tail gas 7 after level neutralization reaction reaches emission request, passes through smoke stack emission to air.
The subject matter of the tail gas treatment process is：
1st, chlorosilane tail gas easily produces the materials such as silica, waterglass after neutralizer washs, and makes serum pot, washes
The blocking of the equipment such as tower is washed, causes the plant running cycle short；
2nd, the hydrolysis of chlorosilane tail gas needs substantial amounts of water and alkali (lime or piece alkali) to be neutralized to hydrolyze, therefore produces a large amount of
Sewage, add the load of follow-up sewage disposal system, and easily cause the chloride ion content in sewage to increase；
3rd, waste material can all be become as the chlorosilane and hydrogen chloride of raw material originally, this is undoubtedly the pole to resource
It is big to waste.
Utility model content
Technical problem to be solved in the utility model is for above shortcomings in the prior art, there is provided Yi Zhonghan
The novel process device of chlorosilane tail gas, the device can recycle the chlorosilane discharged in production of polysilicon.
In order to solve the above technical problems, thinking of the present utility model is：Generation ester can be reacted with alcohols using chlorosilane
Principle, esterification is occurred into for the chlorosilane in emptying end gas and alcohols, produces silicate class, realizes the recycling of waste material,
The environmental protection pressure of manufacturing enterprise can be not only reduced, and economic benefit will be produced.
By taking ethanol common in alcohols as an example, the equation that above-mentioned reaction is related to is as follows：
SiCl4+4C2H5OH→Si(OC2H5)4+4HCl↑
SiHCl3+4C2H5OH→Si(OC2H5)4+3HCl↑+H2↑
SiH2Cl2+4C2H5OH→Si(OC2H5)4+2HCl↑+2H2↑
Quickly, the chlorosilane in emptying end gas can be completely absorbed generation silester to the reaction rate of above-mentioned reaction；
It can be seen that simultaneously by above-mentioned reaction equation：Hydrogen chloride gas can be produced in course of reaction, the utility model is also by chlorine
Change hydrogenolysis analysis apparatus and recycling, while the hydrogen chloride including containing originally in tail gas are carried out to hydrogen chloride caused by reaction
It is recovered together, there was only hydrogen and nitrogen in final emptying end gas, can be directly discharged in air.
More than for reaction, alcohols can be used as raw material, and esterification, such as methanol, second occurs with chlorosilane
Alcohol, propyl alcohol etc., and the products such as methyl silicate, silester, the fat of silicic acid third are correspondingly prepared respectively.
In order to solve the above technical problems, the technical solution adopted in the utility model is as follows：
A kind of reaction and rectification device of alcoholysis method processing tail gas containing chlorsilane, including alcoholysis absorption system；
Wherein, described alcoholysis absorption system, including absorption tower and rectifying column；Alcohols pipeline is passed through on described absorption tower
Portion, chlorosilane exhaust pipe are passed through in the middle part of described absorption tower；Pipeline at the top of described absorption tower is passed through absorption overhead condensation
Device, then flow back and be connected to described absorption tower top, absorb overhead condenser and be provided with downtake pipe；Described absorption tower bottom
The pipeline in portion is by absorption tower circulating pump with being connected in the middle part of described rectifying column；Described rectifying column top duct is passed through rectifying column
Condenser is pushed up, then flows back and is sequentially connected alcohols recycling can, alcohols reflux pump to described rectifier, rectifying tower top condenser
It is provided with second exhaust pipe；Pass through pipeline communication to products pot in the middle part of described rectifying column；Described rectifier bottoms pass through pipe
Road is communicated to reboiler and is back to described rectifying column middle and lower part by pipeline again.
Wherein, described absorption tower is preferably packed tower.
Wherein, described rectifying column is preferably packed tower.More preferably it is divided into three sections of fillers in described rectifying column.
To solve technical problem of the present utility model, the utility model comprises at least described alcoholysis absorption system.
As another preferred embodiment of the utility model device, it includes alcoholysis absorption system and neutralized system, described
Alcoholysis absorption system connected with described neutralized system；
Wherein, described neutralized system, including silicate class pipeline, nertralizer pipeline, blender, decolorizer, filter
With product ethyl acetate storage tank；The ethyl acetate pipeline and the nertralizer pipeline connect with described blender respectively, institute
The outlet conduit for the blender the stated decolorizer described in sequential communication, filter and product ethyl acetate storage tank successively；
Products pot and described silicate class pipeline communication in described alcoholysis absorption system.
Wherein, it is preferably filled with activated carbon in described decolorizer.
Wherein, described filter is preferably 1~3 grade of filter.
As another preferred embodiment of the present utility model, it includes alcoholysis absorption system and hydrogen chloride recovery system, or
Person includes alcoholysis absorption system, hydrogen chloride recovery system and neutralized system simultaneously；Described alcoholysis absorption system and described chlorine
Change hydrogen retrieval Cascade System；
Wherein, described hydrogen chloride recovery system, including emptying end gas pipeline after alcoholysis absorbs, hydrogen chloride absorption
Tower, salt acid cooler, hydrochloric acid circulating line, waterpipe, HCl solution circulating pump, offgas outlet；Described emptying end gas pipeline communication
To described hydrogen chloride absorption tower middle and lower part；Described hydrogen chloride absorption tower bottom is sequentially communicated hydrochloric acid by cyclic salt acid tube road
Circulating pump, salt acid cooler are back in the middle part of described hydrogen chloride absorption tower again；Described waterpipe is communicated to described chlorination
Hydrogen absorption tower top；Described hydrogen chloride absorption top of tower is provided with offgas outlet；
Downtake pipe and second exhaust pipe in described alcoholysis absorption system are collected to described alcoholysis and absorbed respectively
Emptying end gas pipeline afterwards.
Wherein, described hydrogen chloride absorption tower is preferably film-falling absorption tower.Inside described hydrogen chloride absorption tower more preferably
Provided with graphite packing.
Beneficial effect：The utility model provides a kind of novel process device of tail gas containing chlorsilane, and the device can reclaim
Using the chlorosilane and hydrogen chloride tail gas discharged in production of polysilicon, the tail gas after recycling can row directly up to standard
Put, can not only effectively solve the deficiency of existing process, can also synthesize and be sold outside addition product, reduce production of polysilicon cost.
Brief description of the drawings
Fig. 1 is existing chlorosilane tail gas treatment process schematic diagram；
In figure：1- one-level eluting columns；2- two-step washing towers；3- chlorosilane tail gas；4- serum pots；5- serum pot circulating pumps；
6- two-step washing tower circulating pumps；Tail gas after 7- washings.
Fig. 2 is the utility model structure diagram；
In figure：8- alcoholysis absorption systems；9- hydrogen chloride recovery systems；10- neutralized systems.
Fig. 3 is the alcoholysis absorption system schematic diagram of embodiment 1；
In figure：801- absorption towers；802- rectifying columns；803- absorbs overhead condenser；804- rectifying tower top condensers；805-
Alcohols recycling can；806- absorption towers circulating pump；807- alcohols reflux pumps；808- alcohols pipelines；809- chlorosilane exhaust pipes；
8010- products pots；8011- reboilers.
Fig. 4 is the hydrogen chloride recovery system schematic diagram of embodiment 1；
In figure：Emptying end gas pipelines of the 901- after alcoholysis absorbs；902- hydrogen chloride absorption towers；903- salt acid coolers；
904- cyclic salt acid tubes road；905- waterpipes；906- HCl solution circulating pumps.
Fig. 5 is the neutralized system schematic diagram of embodiment 1；
In figure：101- silicate class pipelines；102- nertralizer pipelines；103- blenders；104- decolorizers；105- is filtered
Device；106- product silicate class storage tanks.
Embodiment
Below by way of specific embodiment and with reference to accompanying drawing to tail gas containing chlorsilane reaction and rectification device of the present utility model
It is described in detail, it is necessary to which explanation, involved connected mode and link position are only illustrate in embodiment
Utility model, the scope of protection of the utility model be not limited to these specific embodiments.
A kind of reaction and rectification device of alcoholysis method processing tail gas containing chlorsilane, including alcoholysis absorption system 8；
Wherein, described alcoholysis absorption system 8, including absorption tower 801 and rectifying column 802；Alcohols pipeline 808 is passed through described
The top of absorption tower 801, chlorosilane exhaust pipe 809 is passed through the described middle part of absorption tower 801；The described top of absorption tower 801
Pipeline be passed through and absorb overhead condenser 803, then flow back and be connected to the described top of absorption tower 801, absorb overhead condenser 803
It is provided with downtake pipe 8012；The pipeline of the described bottom of absorption tower 801 passes through absorption tower circulating pump 806 and described rectifying
The middle part of tower 802 connects；The described top duct of rectifying column 802 is passed through rectifying tower top condenser 804, then flows back and be sequentially connected alcohols
Recycling can 805, alcohols reflux pump 807 to the described top of rectifying column 802, rectifying tower top condenser 804 are provided with second exhaust
Pipe 8013；The described middle part of rectifying column 802 passes through pipeline communication to products pot 8010；The described bottom of rectifying column 802 passes through pipe
Road is communicated to reboiler 8011 and is back to the described middle and lower part of rectifying column 802 by pipeline again.
Wherein, described absorption tower 801 is preferably packed tower.
Wherein, described rectifying column 802 is preferably packed tower.More preferably it is divided into three sections of fillers in described rectifying column 802.
To solve technical problem of the present utility model, the utility model comprises at least described alcoholysis absorption system 8.
As another preferred embodiment of the utility model device, it includes alcoholysis absorption system 8 and neutralized system 10, institute
The alcoholysis absorption system 8 stated is connected with described neutralized system 10；
Wherein, described neutralized system 10, including it is silicate class pipeline 101, nertralizer pipeline 102, blender 103, de-
Color device 104, filter 105 and product ethyl acetate storage tank 106；The ethyl acetate pipeline 101 and the nertralizer pipeline 102
Connected respectively with described blender 103, the outlet conduit of described blender 103 decolorizer described in sequential communication successively
104th, filter 105 and product ethyl acetate storage tank 106；
Products pot 8010 in described alcoholysis absorption system 8 connects with described silicate class pipeline 101.
Wherein, it is preferably filled with activated carbon in described decolorizer 104.
Wherein, described filter 105 is preferably 1~3 grade of filter.
As another preferred embodiment of the present utility model, it includes alcoholysis absorption system 8 and hydrogen chloride recovery system 9,
Or include alcoholysis absorption system 8, hydrogen chloride recovery system 9 and neutralized system 10 simultaneously；Described alcoholysis absorption system 8 and institute
The hydrogen chloride recovery system 9 stated is connected；
Wherein, described hydrogen chloride recovery system 9, including emptying end gas pipeline 901 after alcoholysis absorbs, hydrogen chloride are inhaled
Receive tower 902, salt acid cooler 903, hydrochloric acid circulating line 904, waterpipe 905, HCl solution circulating pump 906, offgas outlet 907；Institute
The emptying end gas pipeline 901 stated is communicated to the described middle and lower part of hydrogen chloride absorption tower 902；The described bottom of hydrogen chloride absorption tower 902
Portion is sequentially communicated HCl solution circulating pump 906 by cyclic salt acid tube road 904, salt acid cooler 903 is back to described hydrogen chloride again
The middle part of absorption tower 902；Described waterpipe 905 is communicated to the described top of hydrogen chloride absorption tower 902；Described hydrogen chloride absorption
The top of tower 902 is provided with offgas outlet 907；
Downtake pipe 8012 and second exhaust pipe 8013 in described alcoholysis absorption system 8 are collected to described respectively
Emptying end gas pipeline 901 after alcoholysis absorption.
Wherein, described hydrogen chloride absorption tower 902 is preferably film-falling absorption tower.Inside described hydrogen chloride absorption tower 902
More preferably it is provided with graphite packing.
Optimum way of the present utility model is elaborated below in conjunction with the accompanying drawings.
Embodiment 1：
As shown in Fig. 2 a kind of reaction and rectification device of alcoholysis method processing tail gas containing chlorsilane include alcoholysis absorption system 8,
Hydrogen chloride recovery system 9 and neutralized system 10.Described alcoholysis absorption system 8 respectively with hydrogen chloride recovery system 9, neutralized system
10 series connection.
Fig. 3 is described alcoholysis absorption system schematic diagram, described alcoholysis absorption system 8, including absorption tower 801 and rectifying
Tower 802.Alcohols is passed through the described top of absorption tower 801 by alcohols pipeline 808, and tail gas containing chlorsilane passes through chlorosilane offgas duct
Road 809 is passed through the described middle part of absorption tower 801, and tail gas containing chlorsilane directly reacts with alcohols in absorption tower 801.Described suction
The pipeline for receiving the top of tower 801 is passed through absorption overhead condenser 803, then flows back and be connected to the described top of absorption tower 801, described
Absorption overhead condenser 803 condenses unreacted alcohols and returned to be recycled in absorption tower 801, absorbs overhead condenser 803
It is provided with downtake pipe 8012.The pipeline of the described bottom of absorption tower 801 passes through absorption tower circulating pump 806 and described rectifying
The middle part of tower 802 connects, and the material in absorption tower 801 after alcoholysis is sent into rectifying column 802, thing by absorption tower circulating pump 806
Material carries out reactive distillation simultaneously in rectifying column.The described top duct of rectifying column 802 is passed through rectifying tower top condenser 804, then
Backflow is sequentially connected alcohols recycling can 805, alcohols reflux pump 807 to the described top of rectifying column 802, rectifying tower top condenser
The light component alcohols of 804 recovery tower top distillations is simultaneously collected in return tank 805, and rectifying column is fed again into by alcohols reflux pump 807
In recycle；Rectifying tower top condenser 804 is provided with second exhaust pipe 8013.Pass through in the middle part of the described side line of rectifying column 802
Pipeline communication is to products pot 8010；The described bottom of rectifying column 802 passes through back of pipeline again by pipeline communication to reboiler 8011
It flow to the described middle and lower part of rectifying column 802.Wherein, described absorption tower 801 is packed tower.Described rectifying column 802 is preferably
Three-stage packed tower.The gas that downtake pipe 8012 and second exhaust pipe 8013 are discharged is mainly hydrogen chloride.Described boils again
Device 8011 is heat-conducting oil heating.
Fig. 4 is described hydrogen chloride recovery system schematic diagram.Described hydrogen chloride recovery system 9, including absorbed through alcoholysis
Rear emptying end gas pipeline 901, hydrogen chloride absorption tower 902, salt acid cooler 903, hydrochloric acid circulating line 904, waterpipe 905,
HCl solution circulating pump 906, offgas outlet 907；Downtake pipe 8012 and second exhaust pipe in described alcoholysis absorption system 8
8013 are collected to the emptying end gas pipeline 901 after described alcoholysis absorbs respectively.Described emptying end gas pipeline 901 is communicated to institute
The middle and lower part of hydrogen chloride absorption tower 902 stated；The described bottom of hydrogen chloride absorption tower 902 is connected successively by cyclic salt acid tube road 904
Logical HCl solution circulating pump 906, salt acid cooler 903 are back to the described middle part of hydrogen chloride absorption tower 902 again；Described waterpipe
905 are communicated to the described top of hydrogen chloride absorption tower 902；The described top of hydrogen chloride absorption tower 902 is provided with offgas outlet 907.
Wherein, described hydrogen chloride absorption tower 902 is film-falling absorption tower, and inside is provided with graphite packing.Tail in emptying end gas pipeline 901
Gas by the tower top of hydrogen chloride absorption tower 902 water absorb after form watery hydrochloric acid, by HCl solution circulating pump repeatedly circulate concentration after into
Downstream resolving hydrochloric acid device is delivered to for concentrated hydrochloric acid, is parsed into after hydrogen chloride and is returned to polysilicon synthesis system and recycle；Also may be used
It is directly outer to sell concentrated hydrochloric acid
Fig. 5 is described neutralized system schematic diagram.Described neutralized system 10, including silicate class pipeline 101, nertralizer
Pipeline 102, blender 103, decolorizer 104, filter 105 and product ethyl acetate storage tank 106；Described alcoholysis absorption system
Products pot 8010 in 8 connects with described silicate class pipeline 101.The ethyl acetate pipeline 101 and the nertralizer pipe
Road 102 connects with described blender 103 respectively, and the outlet conduit of described blender 103 is de- described in sequential communication successively
Color device 104, filter 105 and product ethyl acetate storage tank 106.Wherein, filling activated carbon in described decolorizer 104.It is described
Filter 105 be preferably 3 grades of filters.The nertralizer being passed through in the nertralizer pipeline 102 is sodium alkoxide or piece alkali (preferred alcohols
Class sodium).The pH value of product in timely detection mixer outlet is needed in N-process, until reaching the outer of the product sells requirement.
For the product silicate class after neutralizing, decolourize, filter, product colour, acidity value all can reach sells standard outside.The product
Outer sell of silicate class requires to be that silicate class content is more than 98%, and alcohol content is less than 2%, and acidity is less than (in terms of HCl)
0.1%.
The utility model alcoholysis method processing tail gas containing chlorsilane is a kind of new tail gas treatment process, and tail gas is washed using alcohol
In chlorosilane and hydrogen chloride, chlorosilane is changed into esters of silicon acis, and the hydrogen chloride in the hydrogen chloride and tail gas of by-product is complete
Portion is absorbed into concentrated hydrochloric acid, and pure hydrogen chloride is isolated into resolving hydrochloric acid device, is added to again in system.Major technique effect
It is the chlorosilane that original needs hydrolyze producing positive silicate class, reduces the integrated cost of production of polysilicon, reduce whole
The chlorine damage of individual system is lost, while reduces the load of sewerage, reduces outer row's chloride ion content, reduces the same of production cost
When also greatly reduce environmental protection pressure.
Although detailed description and explanation are given to specific embodiment of the present utility model above, it should be noted that
It is that we can carry out various equivalent changes, modification, replacement, group according to conception of the present utility model to above-mentioned embodiment
Close, simplify, all should be in the utility model during the spirit that its caused function is still covered without departing from specification and accompanying drawing
Protection domain within.
Claims (10)
1. a kind of reaction and rectification device of alcoholysis method processing tail gas containing chlorsilane, it is characterised in that including alcoholysis absorption system
(8)；
Wherein, described alcoholysis absorption system (8), including absorption tower (801) and rectifying column (802)；Alcohols pipeline (808) is passed through
Described absorption tower (801) top, chlorosilane exhaust pipe (809) are passed through in the middle part of described absorption tower (801)；Described absorption
Pipeline at the top of tower (801), which is passed through, absorbs overhead condenser (803), then flows back and be connected to described absorption tower (801) top, inhales
Receive overhead condenser (803) and be provided with downtake pipe (8012)；The pipeline of described absorption tower (801) bottom passes through absorption tower
Circulating pump (806) in the middle part of described rectifying column (802) with connecting；Described rectifying column (802) top duct is passed through rectifying tower top
Condenser (804), then flow back and be sequentially connected alcohols recycling can (805), alcohols reflux pump (807) to described rectifying column (802)
Top, rectifying tower top condenser (804) are provided with second exhaust pipe (8013)；Pass through pipeline in the middle part of described rectifying column (802)
It is communicated to products pot (8010)；Described rectifying column (802) bottom passes through pipeline again by pipeline communication to reboiler (8011)
It is back to described rectifying column (802) middle and lower part.
2. device according to claim 1, it is characterised in that described absorption tower (801) is packed tower.
3. device according to claim 1, it is characterised in that described rectifying column (802) is packed tower.
4. device according to claim 3, it is characterised in that be divided into three sections of fillers in described rectifying column (802).
5. device according to claim 1, it is characterised in that including neutralized system (10), described alcoholysis absorption system
(8) connected with described neutralized system (10)；
Wherein, described neutralized system (10), including silicate class pipeline (101), nertralizer pipeline (102), blender
(103), decolorizer (104), filter (105) and product ethyl acetate storage tank (106)；The ethyl acetate pipeline (101) and
The nertralizer pipeline (102) connects with described blender (103) respectively, the outlet conduit of described blender (103) according to
Decolorizer (104), filter (105) and product ethyl acetate storage tank (106) described in secondary sequential communication；
Products pot (8010) in described alcoholysis absorption system (8) connects with described silicate class pipeline (101).
6. device according to claim 5, it is characterised in that filling activated carbon in described decolorizer (104).
7. device according to claim 5, it is characterised in that described filter (105) is 1~3 grade of filter.
8. device according to claim 1 or 5, it is characterised in that including hydrogen chloride recovery system (9), described alcoholysis
Absorption system (8) is connected with described hydrogen chloride recovery system (9)；
Wherein, described hydrogen chloride recovery system (9), including emptying end gas pipeline (901) after alcoholysis absorbs, hydrogen chloride are inhaled
Receive tower (902), salt acid cooler (903), hydrochloric acid circulating line (904), waterpipe (905), HCl solution circulating pump (906), tail gas
Export (907)；Described emptying end gas pipeline (901) is communicated to described hydrogen chloride absorption tower (902) middle and lower part；Described chlorine
Change hydrogen absorption tower (902) bottom and HCl solution circulating pump (906), salt acid cooler are sequentially communicated by cyclic salt acid tube road (904)
(903) it is back to again in the middle part of described hydrogen chloride absorption tower (902)；Described waterpipe (905) is communicated to described hydrogen chloride
Absorption tower (902) top；Offgas outlet (907) is provided with the top of described hydrogen chloride absorption tower (902)；
Downtake pipe (8012) and second exhaust pipe (8013) in described alcoholysis absorption system (8) are collected to described respectively
Alcoholysis absorb after emptying end gas pipeline (901).
9. device according to claim 8, it is characterised in that described hydrogen chloride absorption tower (902) is film-falling absorption tower.
10. device according to claim 9, it is characterised in that be provided with graphite inside described hydrogen chloride absorption tower (902)
Filler.
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| CN201720614378.XU CN206783568U (en) | 2017-05-27 | 2017-05-27 | Alcoholysis method handles the reaction and rectification device of tail gas containing chlorsilane |
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| CN201720614378.XU CN206783568U (en) | 2017-05-27 | 2017-05-27 | Alcoholysis method handles the reaction and rectification device of tail gas containing chlorsilane |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113087735A (en) * | 2019-12-23 | 2021-07-09 | 新疆新特晶体硅高科技有限公司 | Method for recycling chlorosilane slag slurry and production system thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113087735A (en) * | 2019-12-23 | 2021-07-09 | 新疆新特晶体硅高科技有限公司 | Method for recycling chlorosilane slag slurry and production system thereof |
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