CN206725960U - 光罩组件以及曝光装置 - Google Patents
光罩组件以及曝光装置 Download PDFInfo
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Effective date of registration: 20230605 Address after: 241000 No.36 weier'er Road, Wanchun street, Wuhu Economic and Technological Development Zone, Anhui Province Patentee after: WUHU TUNGHSU PHOTOELECTRIC SCIENCE AND TECHNOLOGY Co.,Ltd. Patentee after: TUNGHSU GROUP Co.,Ltd. Patentee after: TUNGHSU TECHNOLOGY GROUP Co.,Ltd. Address before: Room 1517, Building 1 (International Building), No. 167 Qianjin Middle Road, Development Zone, Kunshan City, Suzhou City, Jiangsu Province, 215300 Patentee before: DONGXU (KUNSHAN) DISPLAY MATERIAL Co.,Ltd. Patentee before: TUNGHSU GROUP Co.,Ltd. Patentee before: TUNGHSU TECHNOLOGY GROUP Co.,Ltd. |