CN206696510U - A kind of Ultra-Violet Laser telecentricity F theta field mirrors - Google Patents
A kind of Ultra-Violet Laser telecentricity F theta field mirrors Download PDFInfo
- Publication number
- CN206696510U CN206696510U CN201720220339.1U CN201720220339U CN206696510U CN 206696510 U CN206696510 U CN 206696510U CN 201720220339 U CN201720220339 U CN 201720220339U CN 206696510 U CN206696510 U CN 206696510U
- Authority
- CN
- China
- Prior art keywords
- lens
- field
- telecentricity
- ultra
- violet laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Lenses (AREA)
Abstract
It the utility model is related to a kind of Ultra-Violet Laser telecentricity F theta field mirrors, since laser light incident direction, including the first lens, the second lens, the 3rd lens, the 4th lens and the 5th lens, wherein the first lens are double-concave negative lens, second lens are bent moon positive lens of the concave surface towards incident light side, and for the 3rd concave lens surface towards the bent moon positive lens of incident light side, the 4th lens are biconvex positive lens, 5th lens are convex flat positive lens, wherein convex surface facing incident light side.Compared with prior art, the utility model field mirror is arranged into the optical power profile of " ++++", the emergent pupil of field mirror is located at unlimited distance, the telecentricity of the image space chief ray in visual field<1.5 °, the good correction of the aberration of field mirror, the wave aberration of each visual field is respectively less than λ/10, and field mirror has big visual field, and machining eyeglass is easy, cheap.
Description
Technical field
A kind of Ultra-Violet Laser scanning system is the utility model is related to, more particularly, to a kind of Ultra-Violet Laser telecentricity F-theta
Field mirror.
Background technology
With the continuous development of Laser Processing, the requirement more and more higher to laser process equipment, processing effect is not only embodied in
In rate, also require that the lines that process are more and more finer.Wavelength X=1064nm, 532nm laser can not meet related add
Work requirement.In order to reach more fine, clearly processing effect, using short wavelength UV laser, its focal beam spot can be made minimum, such as
Shown in following formula：
Airy spot diameter δ=2.44 × λ/F#
As can be seen from the above equation, identical F is being used#Field mirror when, during using laser wavelength lambda=355nm, it ends
In spot diameter δ can be smaller than using the laser of 1064nm, 532nm wavelength.Therefore, using the Laser Processing for being equipped with 355nm laser
Equipment, either punch, rule or cut, all can be more preferable than being equipped with 532nm or 1064nm laser effects, lines are more smart
Carefully.Ultraviolet processing is mainly used for hyperfine mark, special material mark and precise scoring lines etc. at present.Such as in food, medicine bag
Mark on package material, micropore is beaten, mark, cutting scribing, are removed to metal or non-metallic coatings in flexible PCB,
Micropore, blind hole processing etc. are carried out in silicon wafer.
When being punched using non-telecentricity F-theta field mirrors, have between its image space chief ray and focal plane certain
Inclination angle, therefore the hole processed has certain gradient in the depth direction, and also hole shape is also non-round.In addition, when processed
When object has certain defocus with field mirror, due to non-telecentricity reason, extra distortion can be caused, reduces Working position essence
Degree.And telecentricity F-theta field lenses pass through particular design, by making the emergent pupil of camera lens realize poly- in image space infinity
The chief ray of defocused laser beam is in the case of any angle of visual field all perpendicular to focal plane.Telecentricity F-theta field mirrors are poly- in reduction
The distortion of burnt hot spot and bore angle have special advantage, thus are widely used in precise laser mark and drilling, wherein
One typical application is the drilling of electronic circuit board.The field mirror of small working field of view, do not moving workpiece or work
In the case of platform, smaller field range is disposably processed, if to process larger part, it is necessary to travelling workpiece or work
Platform, reduce processing efficiency and machining accuracy.F-theta field mirrors described in the U of patent CN 204964857, are a
355nm, telecentric scanning field lens, but the field mirror telecentricity is bigger, reaches 2.5 °, and above-mentioned telecentricity can not be overcome too big
Bring defect.F-theta field mirrors described in the U of patent CN 203799099, it is a 355nm, the scanning field of telecentricity
Mirror, the field mirror visual field is smaller, only φ 80mm or so, and in the case where not moving workpiece, the range of work is smaller.
The defects of above-mentioned processing efficiency and machining accuracy can not be overcome to decline.
Utility model content
The purpose of this utility model is exactly to provide a kind of Ultra-Violet Laser the defects of overcoming above-mentioned prior art to exist
Telecentricity F-theta field mirrors, the operation wavelength of the field lens be 355nm, and the field lens has that telecentricity is small, aberration is small, visual field is big
Feature, high-precision fine micro Process can be met；And when processing slightly larger part, it also can guarantee that machining accuracy and processing are imitated
Rate.
The purpose of this utility model can be achieved through the following technical solutions：
A kind of Ultra-Violet Laser telecentricity F-theta field mirrors, since laser light incident direction, including the first lens, second
Lens, the 3rd lens, the 4th lens and the 5th lens, wherein the first described lens are double-concave negative lens, the second lens are recessed
Facing to the bent moon positive lens of incident light side, for the 3rd concave lens surface towards the bent moon positive lens of incident light side, the 4th lens are double
Convex positive lens, the 5th lens are convex flat positive lens, wherein convex surface facing incident light side.
First lens, the second lens, the 3rd lens, the 4th lens and the focal length of the 5th lens and the focal length of field mirror are expired
Foot：- 1 ＜ f1/ f ＜ -0.4,3 ＜ f2The ＜ f of/f ＜ 5.5,1.83The ＜ f of/f ＜ 3.5,14The ＜ f of/f ＜ 2.5,1.85/ f ＜ 3.5, it is preferable that
f1/ f=-0.67, f2/ f=4.65, f3/ f=2.29, f4/ f=1.67, f5/ f=2.77, wherein, f1For Jiao of the first lens
Away from f2For the focal length of the second lens, f3For the focal length of the 3rd lens, f4For the focal length of the 4th lens, f5For Jiao of the 5th lens
Away from f is the focal length of field mirror.
First curvature radius of the first lens meets：- 50mm ＜ R1＜ -20mm, preferably R1=-38.28mm, R1For
First curvature radius of the first lens.
Two Spherical Surface Ss of the first lens1And S2, its radius of curvature is respectively -38.28mm and 426.05mm, the first lens
Center thickness is 3mm, and material is fused quartz glass, and its refractive index is Nd=1.46, Abbe number VdFor 68；
Two Spherical Surface Ss of the second lens3And S4, its radius of curvature is respectively -92.82mm and -72.04mm, the second lens
Center thickness is 21.16mm, and material is fused quartz glass, and its refractive index is Nd=1.46, Abbe number VdFor 68；
Two Spherical Surface Ss of the 3rd lens5And S6, its radius of curvature respectively -474.92mm and -92.55mm, the 3rd lens
Center thickness be 12.32mm, material is fused quartz glass, and its refractive index is Nd=1.46, Abbe number VdFor 68；
Two Spherical Surface Ss of the 4th lens7And S8, its radius of curvature is respectively 4266.52mm and -88.69mm, the 4th lens
Center thickness be 18.36mm, material is fused quartz glass, and its refractive index is Nd=1.46, Abbe number VdFor 68；
Two Spherical Surface Ss of the 5th lens9And S10, its radius of curvature is respectively 144.33mm and infinity, the 5th lens
Center thickness is 13.44mm, and material is fused quartz glass, and its refractive index is Nd=1.46, Abbe number VdFor 68.
The air gap between first lens and the second lens on optical axis is 3.95mm, the second lens and the 3rd lens it
Between the air gap on optical axis be 0.5mm, the air gap between the 3rd lens and the 4th lens on optical axis is 0.5mm,
The air gap between 4th lens and the 5th lens on optical axis is 0.5mm, the 5th lens and air of the image planes on optical axis
Gap is 153.27mm.
The incident light beam wavelength of described field mirror is 355nm.
Image planes chief ray and image planes inclination angle in the full filed of described field mirror<1.5°.
Wave aberration in the full filed of described field mirror<λ/10.
The big working field of view φ of described field mirror>90mm.
The distance of first lens distance galvanometer is 20mm-50mm, preferably 39.11mm.
A kind of optical scanning system based on described field mirror, since laser light incident end, the optical system includes
Beam expanding lens, galvanometer, telecentricity F-theta field mirrors and the image planes set gradually, galvanometer by orthogonal x directions speculum and
Y directions speculum group is into light beam passes through beam expanding lens, the x directions speculum in galvanometer and y directions speculum, the reflection of x directions successively
Mirror, which rotates, can be such that laser facula is moved up in the x side of processing object, and y directions speculum, which rotates, can make laser facula in machining object
The y side of part moves up, and is focused the laser beam to finally by telecentricity F-theta field mirrors in image planes.
Compared with prior art, the utility model field mirror is arranged into the optical power profile of "-++++", makes field mirror
Emergent pupil be located at unlimited distance, the telecentricity of the image space chief ray in visual field<1.5 °, the good correction of the aberration of field mirror, respectively
The wave aberration of visual field is respectively less than λ/10, and field mirror has big visual field, and machining eyeglass is easy, cheap.
Brief description of the drawings
Fig. 1 is the optical system structure schematic diagram based on telecentricity F-theta field mirrors.
Fig. 2 is telecentricity F-theta field mirror structural representations of the present utility model.
Fig. 3 is the ray tracing figure of the preferred embodiment of telecentricity F-theta field mirrors one of the present utility model.
Fig. 4 is astigmatism, the curvature of field and the distortion figure of the preferred embodiment of telecentricity F-theta field mirrors one of the present utility model.
Fig. 5 be the preferred embodiment of telecentricity F-theta field mirrors one of the present utility model visual field be respectively 0,0.3F,
0.5F, 0.7F and 1.0F optical path difference figure.
Fig. 6 be the preferred embodiment of telecentricity F-theta field mirrors one of the present utility model visual field be respectively 0,0.3F,
Optical transfer function figure in 0.5F, 0.7F and 1.0F situation.
Fig. 7 be the preferred embodiment of telecentricity F-theta field mirrors one of the present utility model visual field be respectively 0,0.3F,
0.5F, 0.7F and 1.0F diffraction energy concentrate figure.
Embodiment
The utility model is described in detail with specific embodiment below in conjunction with the accompanying drawings.
Embodiment
Fig. 1 is the optical system structure schematic diagram based on telecentricity F-theta field mirrors.As shown in figure 1, the optical system
It can be widely applied in laser boring, laser marking and laser cutting.The light beam sent by LASER Light Source (being not drawn into figure)
Successively meeting is rotated by two pieces of speculums in beam expanding lens, galvanometer, x directions speculum and y directions speculum, x directions speculum
Laser facula is set to be moved up in the x side of processing object, y directions speculum, which rotates, can make laser facula in the y side of processing object
Move up, two speculums are orthogonal, focused the laser beam to finally by telecentricity F-theta field mirrors in image planes.
Two-dimensional scan of the laser beam on imaging surface is realized by x, y direction speculum pivoting in galvanometer.On the one hand, this is remote
Heart field mirror will meet the angle of visual field of common F-theta field mirrors and the linear relationship of image height, on the other hand, telecentricity F-
Chief ray on each visual field direction of theta field mirrors is vertical with image planes, so as to avoid punching inclination or hole non-round, also avoids
The distortion processed caused by the slight defocus of object, so as to ensure machining accuracy.
To realize above-mentioned requirements, using 5 fused quartz eyeglasses, and eyeglass is using the optical power profile of "-++++".Such as Fig. 2
Shown, telecentricity F-theta field mirrors of the present utility model are followed successively by along incident light：First lens 1, the second lens the 2, the 3rd are saturating
Mirror 3, the 4th lens 4 and the 5th lens 5, the first lens 1 are double-concave negative lens, focal length f1, the second lens 2 are that concave surface direction enters
Penetrate the bent moon positive lens at end, focal length f2, the 3rd lens 3 are bent moon positive lens of the concave surface towards incidence end, focal length f3, the 4th
Lens 4 are biconvex positive lens, focal length f4, the 5th lens are convex flat positive lens, focal length f5, in a preferred embodiment, each eyeglass
Focal length and field mirror focal length f meet：
- 1 ＜ f1/ f ＜ -0.4,3 ＜ f2The ＜ f of/f ＜ 5.5,1.83The ＜ f of/f ＜ 3.5,14The ＜ f of/f ＜ 2.5,1.85/ f ＜ 3.5.
First curvature radius of the first lens meets：- 50mm ＜ R1＜ -20mm.
Its mid-focal length, radius of curvature are that the situation of negative represents its direction and the situation phase that focal length, radius of curvature are positive number
Instead.
According to requirements above, it is further provided a design example, design parameter reference table 1：
Two Spherical Surface Ss of the first lens1And S2, its radius of curvature is respectively -38.28mm and 426.05mm, S1Apart from galvanometer
The distance d of y directions speculum0=20-50mm, the center thickness of the first lens is 3mm, and material is fused quartz glass, and it is reflected
Rate is Nd=1.46, Abbe number VdFor 68；Two Spherical Surface Ss of the second lens3And S4, its radius of curvature be respectively -92.82mm and -
72.04mm, the center thickness of the second lens is 21.16mm, and material is fused quartz glass, and its refractive index is Nd=1.46, Abbe
Number VdFor 68；Two Spherical Surface Ss of the 3rd lens5And S6, its radius of curvature respectively -474.92mm and -92.55mm, the 3rd lens
Center thickness be 12.32mm, material is fused quartz glass, and its refractive index is Nd=1.46, Abbe number VdFor 68；4th lens
Two Spherical Surface Ss7And S8, its radius of curvature is respectively 4266.52mm and -88.69mm, and the center thickness of the 4th lens is
18.36mm, material are fused quartz glass, and its refractive index is Nd=1.46, Abbe number VdFor 68；Two Spherical Surface Ss of the 5th lens9
And S10, its radius of curvature is respectively 144.33mm and infinity, and the center thickness of the 5th lens is 13.44mm, and material is molten stone
English glass, its refractive index are Nd=1.46, Abbe number VdFor 68.
The air gap between first lens and the second lens on optical axis is 3.95mm, the second lens and the 3rd lens it
Between the air gap on optical axis be 0.5mm, the air gap between the 3rd lens and the 4th lens on optical axis is 0.5mm,
The air gap between 4th lens and the 5th lens on optical axis is 0.5mm, the 5th lens and air of the image planes on optical axis
Gap is 153.27mm.
The various parameters of the field mirror of table 1
It is as follows with the corresponding other specification of above-described embodiment design：
F=109.5mm, EPD=10mm, λ=355nm, 2 ω=49 °
f1/ f=-0.67, f2/ f=4.65, f3/ f=2.29, f4/ f=1.67, f5/ f=2.77, R1=-38.28mm
Wherein f be telecentricity F-theta field mirrors focal length, f1、f2、f3、f4、f5The focal length of respectively five lens, 2 ω
For the angle of visual field of field mirror, EPD is field mirror Entry pupil diameters, R1For the first face curvature half of the lens of field mirror first
Footpath.
Designed according to above-described embodiment, draw Fig. 3~Fig. 7 field mirror performance simulation data, wherein, Fig. 3 is telecentricity
The index path of F-theta field mirrors, as seen in Figure 3, the image space chief ray of each visual field are almost vertical with image planes, telecentricity
<1.5°.Fig. 4 be telecentricity F-theta field mirrors astigmatism, the curvature of field and distortion figure, Fig. 5 be telecentric scanning field lens 0 visual field,
The optical path difference figure of 0.3 visual field, the visual field of 0.5 visual field 0.7 and 1.0 visual fields, optical path difference are no more than 0.1 λ, and Fig. 6 is telecentric scanning field lens
In the optical transfer function figure of 0 visual field, 0.3 visual field, the visual field of 0.5 visual field 0.7 and 1.0 visual fields, each visual field MTF, which is substantially all, to be reached
Diffraction limit, Fig. 7 are diffraction energy collection of the telecentric scanning field lens in 0 visual field, 0.3 visual field, the visual field of 0.5 visual field 0.7 and 1.0 visual fields
Middle figure, as can be seen that 86% energy of each visual field is all concentrated in a diameter of 8um diameter range from figure.
The above-mentioned description to embodiment is understood that for ease of those skilled in the art and using practicality
It is new.Person skilled in the art obviously can easily make various modifications to these embodiments, and illustrating herein
General Principle be applied in other embodiment without by performing creative labour.Therefore, the utility model is not limited to above-mentioned
Embodiment, those skilled in the art according to announcement of the present utility model, do not depart from improvement that the utility model category made and
Modification all should be within the scope of protection of the utility model.
Claims (10)
- A kind of 1. Ultra-Violet Laser telecentricity F-theta field mirrors, it is characterised in that since laser light incident direction, including first Lens, the second lens, the 3rd lens, the 4th lens and the 5th lens, wherein the first described lens are double-concave negative lens, second Lens are bent moon positive lens of the concave surface towards incident light side, the 3rd concave lens surface towards incident light side bent moon positive lens, the 4th Lens are biconvex positive lens, and the 5th lens are convex flat positive lens, wherein convex surface facing incident light side.
- A kind of 2. Ultra-Violet Laser telecentricity F-theta field mirrors according to claim 1, it is characterised in that the first lens, Second lens, the 3rd lens, the 4th lens and the focal length of the 5th lens and the focal length of field mirror meet：- 1 ＜ f1/ f ＜- 0.4,3 ＜ f2The ＜ f of/f ＜ 5.5,1.83The ＜ f of/f ＜ 3.5,14The ＜ f of/f ＜ 2.5,1.85/ f ＜ 3.5, wherein, f1For the first lens Focal length, f2For the focal length of the second lens, f3For the focal length of the 3rd lens, f4For the focal length of the 4th lens, f5For Jiao of the 5th lens Away from f is the focal length of field mirror.
- A kind of 3. Ultra-Violet Laser telecentricity F-theta field mirrors according to claim 1, it is characterised in that the first lens The first curvature radius meet：- 50mm ＜ R1＜ -20mm, R1For the first curvature radius of the first lens.
- A kind of 4. Ultra-Violet Laser telecentricity F-theta field mirrors according to claim 1, it is characterised in that the first lens Two Spherical Surface Ss1And S2, its radius of curvature is respectively -38.28mm and 426.05mm, and the center thicknesses of the first lens is 3mm, material Expect that for fused quartz glass, its refractive index be Nd=1.46, Abbe number VdFor 68；Two Spherical Surface Ss of the second lens3And S4, its radius of curvature respectively -92.82mm and -72.04mm, the center of the second lens Thickness is 21.16mm, and material is fused quartz glass, and its refractive index is Nd=1.46, Abbe number VdFor 68；Two Spherical Surface Ss of the 3rd lens5And S6, its radius of curvature is respectively -474.92mm and -92.55mm, in the 3rd lens Heart thickness is 12.32mm, and material is fused quartz glass, and its refractive index is Nd=1.46, Abbe number VdFor 68；Two Spherical Surface Ss of the 4th lens7And S8, its radius of curvature is respectively 4266.52mm and -88.69mm, in the 4th lens Heart thickness is 18.36mm, and material is fused quartz glass, and its refractive index is Nd=1.46, Abbe number VdFor 68；Two Spherical Surface Ss of the 5th lens9And S10, its radius of curvature is respectively 144.33mm and infinity, the center of the 5th lens Thickness is 13.44mm, and material is fused quartz glass, and its refractive index is Nd=1.46, Abbe number VdFor 68.
- A kind of 5. Ultra-Violet Laser telecentricity F-theta field mirrors according to claim 1, it is characterised in that the first lens The air gap between the second lens on optical axis is 3.95mm, the air between the second lens and the 3rd lens on optical axis Gap is 0.5mm, and the air gap between the 3rd lens and the 4th lens on optical axis is 0.5mm, the 4th lens and the 5th saturating The air gap between mirror on optical axis is 0.5mm, and the 5th lens and the air gap of the image planes on optical axis are 153.27mm.
- 6. a kind of Ultra-Violet Laser telecentricity F-theta field mirrors according to claim 1, it is characterised in that described sweeps The incident light beam wavelength for retouching field lens is 355nm.
- 7. a kind of Ultra-Violet Laser telecentricity F-theta field mirrors according to claim 1, it is characterised in that described sweeps Retouch image planes chief ray and image planes inclination angle in the full filed of field lens<1.5°.
- 8. a kind of Ultra-Violet Laser telecentricity F-theta field mirrors according to claim 1, it is characterised in that described sweeps Retouch wave aberration in the full filed of field lens<λ/10.
- 9. a kind of Ultra-Violet Laser telecentricity F-theta field mirrors according to claim 1, it is characterised in that described sweeps Retouch the big working field of view φ of field lens>90mm.
- A kind of 10. Ultra-Violet Laser telecentricity F-theta field mirrors according to claim 1, it is characterised in that the first lens Distance apart from galvanometer is 20mm-50mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720220339.1U CN206696510U (en) | 2017-03-08 | 2017-03-08 | A kind of Ultra-Violet Laser telecentricity F theta field mirrors |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720220339.1U CN206696510U (en) | 2017-03-08 | 2017-03-08 | A kind of Ultra-Violet Laser telecentricity F theta field mirrors |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206696510U true CN206696510U (en) | 2017-12-01 |
Family
ID=60443104
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720220339.1U Active CN206696510U (en) | 2017-03-08 | 2017-03-08 | A kind of Ultra-Violet Laser telecentricity F theta field mirrors |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206696510U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109507789A (en) * | 2018-12-28 | 2019-03-22 | 大族激光科技产业集团股份有限公司 | A kind of telecentric lens, laser processing device and processing method for laser processing |
| CN110146968A (en) * | 2019-04-04 | 2019-08-20 | 南京波长光电科技股份有限公司 | One kind disappears the curvature of field and the ultraviolet telecentricity f-theta camera lens of anastigmatic 355nm |
| WO2020010538A1 (en) * | 2018-07-11 | 2020-01-16 | 大族激光科技产业集团股份有限公司 | Telecentric lens and laser processing equipment |
-
2017
- 2017-03-08 CN CN201720220339.1U patent/CN206696510U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020010538A1 (en) * | 2018-07-11 | 2020-01-16 | 大族激光科技产业集团股份有限公司 | Telecentric lens and laser processing equipment |
| CN112292627A (en) * | 2018-07-11 | 2021-01-29 | 大族激光科技产业集团股份有限公司 | Telecentric lens and laser processing equipment |
| CN109507789A (en) * | 2018-12-28 | 2019-03-22 | 大族激光科技产业集团股份有限公司 | A kind of telecentric lens, laser processing device and processing method for laser processing |
| CN109507789B (en) * | 2018-12-28 | 2021-04-02 | 大族激光科技产业集团股份有限公司 | Telecentric lens for laser processing, laser processing device and processing method |
| CN110146968A (en) * | 2019-04-04 | 2019-08-20 | 南京波长光电科技股份有限公司 | One kind disappears the curvature of field and the ultraviolet telecentricity f-theta camera lens of anastigmatic 355nm |
| CN110146968B (en) * | 2019-04-04 | 2023-11-28 | 南京波长光电科技股份有限公司 | 355nm ultraviolet telecentric f-theta lens capable of eliminating field curvature and astigmatism |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105527706B (en) | Ultra-Violet Laser telecentricity F theta field mirrors and the optical scanning system based on the field lens | |
| CN206696510U (en) | A kind of Ultra-Violet Laser telecentricity F theta field mirrors | |
| JP3201394B2 (en) | fθ lens | |
| CN100582853C (en) | Telecentric f-theta optical lens and optical system | |
| CN203786376U (en) | F-theta objective lens | |
| CN207067511U (en) | Big visual field Ultra-Violet Laser F theta field mirrors and optical scanning system | |
| CN111123480A (en) | Telecentric F-theta optical lens applied to ultraviolet laser | |
| CN104769474B (en) | A kind of Submillineter Wave Technology processing F θ camera lenses and laser process equipment | |
| CN211375164U (en) | Telecentric F-theta optical lens applied to ultraviolet laser | |
| CN107797224A (en) | Optical lens and laser process equipment and laser processing | |
| CN204964857U (en) | Ultraviolet heart laser scanning camera lens far away | |
| CN109633865A (en) | A kind of high-precision laser processing telecentricity F-Theta scanning lens | |
| CN205485046U (en) | Ultraviolet laser heart F -theta far away scans field lens | |
| CN102809804B (en) | F-theta lens and optical system | |
| CN101885113B (en) | Ultraviolet laser machining system | |
| CN101776790B (en) | Laser engraving focusing optical lens and using method thereof | |
| CN112578538B (en) | Telecentric F-Theta scanning lens for blue laser processing | |
| CN114326055B (en) | Infrared field lens with large scanning angle | |
| CN210720852U (en) | Telecentric f-theta scanning lens of ultraviolet laser marking machine | |
| CN213764444U (en) | Laser micro-machining long-working-distance focusing lens group | |
| CN213437880U (en) | Bessel laser cutting device for processing glass | |
| CN211438581U (en) | Ultraviolet light scanning field lens | |
| CN109507789B (en) | Telecentric lens for laser processing, laser processing device and processing method | |
| CN107797225B (en) | Optical lens and laser processing equipment thereof | |
| CN112292627B (en) | Telecentric lens and laser processing equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |