CN109507789A - A kind of telecentric lens, laser processing device and processing method for laser processing - Google Patents
A kind of telecentric lens, laser processing device and processing method for laser processing Download PDFInfo
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- CN109507789A CN109507789A CN201811623627.7A CN201811623627A CN109507789A CN 109507789 A CN109507789 A CN 109507789A CN 201811623627 A CN201811623627 A CN 201811623627A CN 109507789 A CN109507789 A CN 109507789A
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- curved surface
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/22—Telecentric objectives or lens systems
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
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- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
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- Laser Beam Processing (AREA)
Abstract
The present invention is suitable for technical field of laser processing, discloses a kind of telecentric lens, laser processing device and processing method for laser processing.Telecentric lens include the first lens to the 5th lens being arranged from the object side to the image side, first lens to the 5th lens include first surface to the tenth curved surface, wherein: the radius of curvature of first surface to the tenth curved surface respectively is -57mm, 131.75mm, -18mm, -22.5mm, -187.5mm, -49.5mm, 133.5mm, -181mm, 101.5mm, ∞ mm, and the radius of curvature allowable tolerance of first surface to the tenth curved surface is 10%, the upper deviation is+5%, and lower deviation is -5%.Method and step includes: incident ray by once passing through the first lens to the 5th lens after aperture diaphragm and reaching image space, and and is parallel to optical axis.A kind of telecentric lens, laser processing device and processing method for laser processing provided by the present invention, the hole for ensuring to process can be perpendicular to plane, and effectively corrects astigmatism and distortion, improves machining accuracy.
Description
Technical field
The invention belongs to technical field of laser processing more particularly to a kind of telecentric lens, laser for laser processing to add
Tooling is set and processing method.
Background technique
In technical field of laser processing, the wavelength of laser is shorter, amasthenic lens focal length is shorter, can more obtain more smart
Thin focal beam spot, and the quite maturation that the ultraviolet laser of 355nm wave band has developed, power are also improving always, this makes
Much hyperfine industrial processes are obtained to be possibly realized.
Using the ultraviolet laser of 355nm wave band, and when being punched using common lens, image space chief ray and focal plane it
Between have certain inclination angle, cause the hole processed to have certain gradient；In addition, when object to be processed and common lens have one
When fixed defocus, it will cause additional distortion, machining accuracy caused to reduce.
Summary of the invention
The present invention is directed at least solve one of above-mentioned technical problem, provide a kind of telecentric lens for laser processing,
Laser processing device and processing method, instead of common lens, avoid using common lens carry out punching generate it is certain
Inclination angle, it is ensured that the hole processed will not have gradient；In addition, also can avoid the defocus that object to be processed and common lens generate
And additional distortion is caused, improve machining accuracy.
The technical scheme is that a kind of telecentric lens, laser processing device and processing method for laser processing,
It is described including the first lens, the second lens, the third lens, the 4th lens and the 5th lens set gradually from the object side to the image side
First lens are double-concave negative lens, and second lens are bent moon negative lens, and the third lens are bent moon positive lens, described the
Four lens are biconvex positive lens, and the 5th lens are plano-convex positive lens；First lens include first surface, the second curved surface, institute
Stating the second lens includes third curved surface, the 4th curved surface, and the third lens include the 5th curved surface, the 6th curved surface, and the described 4th thoroughly
Mirror includes the 7th curved surface, the 8th curved surface, and the 5th lens include zigzag face, the tenth curved surface, in which: the first surface is extremely
The radius of curvature of tenth curved surface respectively be -57mm, 131.75mm, -18mm, -22.5mm, -187.5mm, -
49.5mm, 133.5mm, -181mm, 101.5mm, ∞ mm, and the radius of curvature of the first surface to the tenth curved surface allows
Tolerance is 10%, and the upper deviation is+5%, and lower deviation is -5%.
Optionally, the first surface is recessed towards object space and to image space, and second curved surface is towards image space and to object space
Recess；
The third curved surface is recessed towards object space and to image space, and the 4th curved surface is towards image space and raised to image space；
5th curved surface is recessed towards object space and to image space, and the 6th curved surface is towards image space and raised to image space；
For 7th curved surface towards object space and to object space protrusion, the 8th curved surface is towards image space and raised to image space；
For the zigzag facing towards object space and to object space protrusion, the tenth curved surface is towards image space and is plane.
Optionally, the center thickness of first lens is 3mm,
The center thickness of second lens is 7.5mm,
The center thickness of the third lens, the 4th lens and the 5th lens is 10mm；
And the center thickness allowable tolerance of first lens to the 5th lens is 10%, the upper deviation is+5%,
Lower deviation is -5%.
Optionally, the spacing between second curved surface and the third curved surface is 12.5mm,
Spacing, the 6th curved surface between 4th curved surface and the 5th curved surface and between the 7th curved surface
Spacing between spacing, the 8th curved surface and zigzag face is 0.4mm；
And the allowable tolerance of the spacing is 10% among the above, the upper deviation is+5%, and lower deviation is -5%.
Optionally, first lens, second lens, the third lens, the 4th lens and the described 5th
The refractive index and Abbe number ratio of lens are 1.4584/67.82；
And the refractive index and Abbe number ratio allowable tolerance of first lens to the 5th lens are 10%, it is upper inclined
Difference is+5%, and lower deviation is -5%.
Optionally, the focal length of telecentric lens is 74mm, and the Entry pupil diameters of telecentric lens are 10mm.
Optionally, the field angle of the telecentric lens is 32%.
Optionally, the telecentricity of the telecentric lens is less than 1 °.
Optionally, first lens, the second lens, the third lens, the 4th lens and the 5th lens are all made of tekite
English.
The present invention also provides a kind of laser processing devices, including a kind of for the remote of laser processing as described in above-mentioned
Heart camera lens.
Invention additionally provides a kind of laser processings, using a kind of for laser processing as described in above-mentioned
Telecentric lens, comprising the following steps:
S1, incident ray propagate to second after the first the beams extended by lens by first passing through the first lens after aperture diaphragm
Lens；
S2, incident ray propagate to the third lens after the second the beams extended by lens；
S3, incident ray propagate to the 4th lens after the third lens converge；
S4, incident ray propagate to the 5th lens after the convergence of the 4th lens；
S5, incident ray reach image space after the convergence of the 5th lens and are formed in emergent ray and are parallel to optical axis.
A kind of telecentric lens, laser processing device and processing method for laser processing provided by the present invention, packet
The first lens, the second lens, the third lens, the 4th lens and the 5th lens are included, the first lens are double-concave negative lens, the second lens
For bent moon negative lens, the third lens are bent moon positive lens, and the 4th lens are biconvex positive lens, and the 5th lens are plano-convex positive lens,
Incident ray is propagated along the first lens to the 5th lens, and when can overcome using common lens, one is generated between chief ray and focal plane
Fixed inclination angle, it is ensured that the hole processed can be perpendicular to plane；And be not in defocus phenomenon, effectively correct astigmatism and
Distortion, improves machining accuracy.
Detailed description of the invention
It to describe the technical solutions in the embodiments of the present invention more clearly, below will be to needed in the embodiment
Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for ability
For the those of ordinary skill of domain, without creative efforts, it can also be obtained according to these attached drawings other attached
Figure.
Fig. 1 is a kind of structural schematic diagram of telecentric lens for laser processing provided in an embodiment of the present invention；
Fig. 2 is a kind of structural schematic diagram of telecentric lens for laser processing provided in an embodiment of the present invention；
Fig. 3 is a kind of astigmatism curve synoptic diagram of telecentric lens for laser processing provided in an embodiment of the present invention；
Fig. 4 is a kind of distortion curve schematic diagram of telecentric lens for laser processing provided in an embodiment of the present invention；
Fig. 5 is that a kind of optical transfer function OFT of telecentric lens for laser processing provided in an embodiment of the present invention is bent
Line schematic diagram；
Fig. 6 is that a kind of modulation transfer functions MFT of telecentric lens for laser processing provided in an embodiment of the present invention is bent
Line schematic diagram；
Fig. 7 is a kind of disperse hot spot schematic diagram of telecentric lens for laser processing provided in an embodiment of the present invention；
Fig. 8 is a kind of encircled energy schematic diagram of telecentric lens for laser processing provided in an embodiment of the present invention；
Fig. 9 is a kind of flow chart of laser processing provided in an embodiment of the present invention.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
It should be noted that term " setting ", " connection " shall be understood in a broad sense, for example, it may be directly arranged, install,
Connection, can also be arranged indirectly by component placed in the middle, center configuration, be connected.
If in addition, have in the embodiment of the present invention "left", "right", " recessed ", " convex ", " parallel ", " vertical ", " big ", " small ",
" just ", the orientation or positional relationship of the instructions such as " negative ", " expanding ", " convergence ", "high", " low ", " entering ", " out " is based on attached drawing institute
The orientation or positional relationship or conventional placement status or use state shown, are merely for convenience of the description present invention and simplification are retouched
It states, rather than structure, feature, device or the element of indication or suggestion meaning must have a particular orientation, with specific orientation
Construction and operation, therefore be not considered as limiting the invention.In the description of the present invention, unless otherwise indicated, " multiple "
It is meant that two or more.
Described each particular technique feature and each embodiment in a specific embodiment, in the case of no contradiction,
It can be combined in any appropriate way, such as can be with shape by different particular technique feature/embodiment combinations
At different embodiments, in order to avoid unnecessary repetition, each the various of particular technique feature/embodiment can in the present invention
No further explanation will be given for the combination of energy.
As shown in Figures 1 to 8, provided in an embodiment of the present invention to provide a kind of telecentric lens for laser processing, packet
The first lens 1 set gradually from the object side to the image side, the second lens 2, the third lens 3, the 4th lens 4 and the 5th lens 5 are included, are entered
Penetrating light can propagate along 1 to the 5th lens 5 of the first lens.In the present embodiment, incident ray can be propagated from left to right, be located at telecentricity
The camera lens left side is object side, i.e. object space, is image-side on the right of telecentric lens, i.e. image space.First lens 1 can be with
For double-concave negative lens, the second lens 2 can be bent moon negative lens, and the third lens 3 can be bent moon positive lens, and the 4th lens 4 can
Think that biconvex positive lens, the 5th lens 5 can be plano-convex positive lens, it is possible to understand that ground, the first lens 1 are negative with the second lens 2
Lens have the effect that expands, and 3 to the 5th lens 5 of the third lens are positive lens, have the function of convergence；Incident ray is first from the
One lens 1, the second lens 2 expand, and are then imaged onto processing plane from 3 to the 5th lens 5 of the third lens.First surface 11 to
The radius of curvature of tenth curved surface 51 respectively be -57mm, 131.75mm, -18mm, -22.5mm, -187.5mm, -49.5mm,
133.5mm, -181mm, 101.5mm, ∞ mm, and the radius of curvature allowable tolerance of 11 to the tenth curved surface 51 of first surface can be with
It is 10%, wherein the upper deviation can be+5%, and lower deviation can be -5%.Incident ray is propagated from left to right, can successively be penetrated
In 1 to the 5th lens 5 of the first lens, pass through the first lens 1, the second lens 2, the third lens 3, the 4th lens 4 and the 5th lens 5
The laying of respective shape and position can get aperture diaphragm, which can be located at object space, and emergent ray is finally saturating by the 5th
The image space chief ray that the plane refraction of mirror 5 is formed after coming out can be located at object space infinity, such light perpendicular to focal plane, emergent pupil
Road is telecentric beam path in image space, which can ensure that the hole processed perpendicular to processing plane, effectively corrects
Astigmatism and distortion, improve machining accuracy.
In the present embodiment, incident ray is propagated from left to right, and is propagated from object space to image space, with spherical surface (i.e. curved surface) and
Subject to the intersection point of primary optical axis, the centre of sphere is in the intersection point with a left side, then radius of curvature is negative value；Conversely, the centre of sphere in the intersection point with the right side, then it is bent
Rate radius is positive value.It is to be appreciated that the sign of radius of curvature numerical value only indicates the curved direction of curved surface, and Digital size is then
Indicate the bending degree of curved surface.
Optionally, first surface 11, the second curved surface 12 can be oppositely arranged, and first surface 11 is the one side towards object space, and
And the face can be recessed to image space, the second curved surface 12 is the one side towards image space, and the face can be recessed to object space；
Third curved surface 21, the 4th curved surface 22 can be oppositely arranged, and third curved surface 21 is the one side towards object space, and the face can
It is recessed to image space, the 4th curved surface 22 is the one side towards image space, and the face can be to image space protrusion；
5th curved surface 31, the 6th curved surface 32 can be oppositely arranged, and the 5th curved surface 31 is the one side towards object space, and the face can
It is recessed to image space, the 6th curved surface 32 is the one side towards image space, and the face can be to image space protrusion；
7th curved surface 41, the 8th curved surface 42 can be oppositely arranged, and the 7th curved surface 41 is the one side towards object space, and the face can
To object space protrusion, the 8th curved surface 42 is the one side towards image space, and the face can be to image space protrusion；
Zigzag face 51, the tenth curved surface 52 can be oppositely arranged, and zigzag face 51 is the one side towards object space, and the face can
To object space protrusion, the tenth curved surface 52 is the one side towards image space, and the face can be plane.
Incident ray can be propagated successively from 11 to the tenth curved surface 52 of first surface, finally reflect shape by the tenth curved surface 52
At image space chief ray can be parallel to optical axis, it can be ensured that the hole processed perpendicular to processing plane.
Optionally, the center thickness allowable tolerance of 1 to the 5th lens 5 of the first lens all can be 10%, and the upper deviation
It can be+5%, lower deviation can be -5%, in which:
The center thickness 13 of first lens 1 can be 3 ± 5%mm,
The center thickness 23 of second lens 2 can be 7.5 ± 5%mm,
The center thickness 33 of the third lens 3 can be 10 ± 5%mm,
The center thickness 43 of 4th lens 4 can be 10 ± 5%mm,
The center thickness 53 of 5th lens 5 can be 10 ± 5%mm；
It is to be appreciated that the center thickness of 3 to the 5th lens 5 of the third lens can be consistent.
Optionally, between the second curved surface 12 and third curved surface 21, between the 4th curved surface 22 and the 5th curved surface 31, the 6th curved surface
32 and the 7th spacing allowable tolerance between curved surface 41, between the 8th curved surface 42 and zigzag face 51 all can be 10%, and
The upper deviation can be+5%, and lower deviation can be -5%, in which:
Spacing 6 between second curved surface 12 and third curved surface 21 can be 12.5 ± 5%mm,
Spacing 7 between 4th curved surface 22 and the 5th curved surface 31 can be 0.4 ± 5%mm,
Spacing 8 between 6th curved surface 32 and the 7th curved surface 41 can be 0.4 ± 5%mm,
Spacing 9 between 8th curved surface 42 and zigzag face 51 can be 0.4 ± 5%mm；
It is to be appreciated that between the 4th curved surface 22 and the 5th curved surface 31, between the 6th curved surface 32 and the 7th curved surface 41, the 8th
Spacing between curved surface 42 and zigzag face 51 can be consistent.
Optionally, the refractive index of 1 to the 5th lens 5 of the first lens and Abbe number ratio allowable tolerance can be 10%, and
And the upper deviation can be+5%, lower deviation can be -5%, and identical material can be used in 1 to the 5th lens 5 of the first lens,
Wherein: the first lens 1, the second lens 2, the third lens 3, the refractive index and Abbe number ratio of the 4th lens 4 and the 5th lens 5 are equal
It can be 1.4584/67.82 ± 5%.It is to be appreciated that the first lens 1, the second lens 2, the third lens 3,4 and of the 4th lens
5th lens 5 are all made of identical material, obtain identical refractive index and identical dispersion system (Abbe using identical material
Number), and then obtain identical refractive index and Abbe number ratio.
Further, the first lens 1, the second lens 2, the third lens 3, the 4th lens 4 and the 5th lens 5 can use
Fused silica material is made.Vitreous silica has anti-scratch, anti-pollution, durable, high temperature resistant and radiationless etc. excellent of environmental protection
Point can make telecentric lens be suitble to high power density due to the above-mentioned characteristic of vitreous silica, can be applied to high-power laser and add
Construction equipment.
Optionally, since telecentric lens are to can be used for being imaged at a distance, so its field angle need to be set within 40 °, then
It the full filed angle of the present embodiment telecentric lens can be for 32 °, it can be achieved that the remote imaging of telecentric lens.
Optionally, when incident ray, which penetrates telecentric lens, obtains telecentric beam path in image space, the telecentricity of telecentric lens can
Less than 1 °.It is to be appreciated that since telecentric lens provided in this embodiment are image space telecentric lens, image space chief ray and light
Be formed with an angle between axis, be exactly stringent telecentricity when this angle is 0, when this angle value very little and
It is essentially close to 0, is not ideal telecentric beam path, and the degree of this angle is exactly telecentricity.The degree of telecentricity is opposite more
It is small, indicate that telecentricity is better, i.e., telecentric lens are also more accurate.
Optionally, the focal length of telecentric lens can be 74mm, and the Entry pupil diameters of telecentric lens can be 10mm；
Disperse hot spot theoretical calculation formula after being focused according to laser: spot φ=1.83* λ * FL/beam φ, using λ=
The incident ray of 355nm；Wherein, spot φ is the spot diameter after laser focuses, and λ is the wavelength of incident ray, and FL is telecentricity
The focal length of camera lens, the Entry pupil diameters of beam φ telecentric lens.
It follows that more fine joint-cutting can be obtained by carrying out cutting with the laser beam of ultrashort wavelength.It is commonly used
The wavelength of ultraviolet laser incident ray be λ=355nm, the resolution ratio wavelength that theoretically wavelength is 355nm is
The laser resolution ratio of 1064nm is three times greater.Since first lens 1, the second lens 2, the third lens the 3, the 4th of the present embodiment are saturating
The material of mirror 4 and the 5th lens 5 all can be vitreous silica, then the telecentric lens can be suitable for wavelength be λ=355nm purple
Outer laser can obtain very high-resolution point away from that is, the disperse hot spot after hyperfine focusing being obtained, due to molten
The characteristic of fused silica makes the telecentric lens 100 be suitble to high power density, can be applied on the ultraviolet laser of 20w.Further
Ground, Entry pupil diameters are set as 10mm, it can be ensured that the light passing amount in the unit time, while it is smaller that telecentric lens can again obtained
Volume.
As shown in Figure 3 and Figure 4, wherein Fig. 3 is the astigmatism curve graph of telecentric lens in the present embodiment, and Fig. 4 is the present embodiment
The distortion curve of middle telecentric lens.Telecentric lens provided in this embodiment and with above-mentioned condition, astigmatism curve and abnormal
The bending degree of varied curve is substantially accomplished ideal correcting state, and image planes significantly flatten, that is to say, that entirely cut model
Image planes in enclosing are all very flat, and on axis with outside axis without significant difference.Astigmatism is small, distortion is small, that is, can reach hyperfine, high-precision
The processing of degree.
As shown in Figure 5 and Figure 6, wherein Fig. 5 is the optical transfer function OTF (Optical of telecentric lens in the present embodiment
Transfer Function) curve graph, Fig. 6 is the modulation transfer functions MTF (Modulation of telecentric lens in the present embodiment
Transfer Function) curve graph.It follows that incident ray is acted on the axis after the telecentric lens and is put and off-axis point
Without significant difference, the purpose that image field flattens out can reach, it can be achieved that hyperfine, high-precision processing.
As shown in Figure 7 and Figure 8, wherein Fig. 7 is the disperse hot spot schematic diagram of telecentric lens in the present embodiment, and Fig. 8 is this reality
Apply the encircled energy schematic diagram of telecentric lens in example.It follows that the diameter of disperse hot spot is in 5 μ in all visual fields
M or so, and encircled energy is high, realizes high quality imaging mark, improves image quality, and then superfinishing may be implemented
Carefully, high-precision processing, such as accurately punch, cut etc..
In conclusion needing to reduce to the greatest extent the scanning field of view range of telecentric lens to obtain more fine machining area.
The focal length of telecentric lens is set as 74mm, and field angle is set as 32 °, in the case where not moving processing object or workbench,
The scanning field of view of telecentric lens provided in an embodiment of the present invention may range from 28mm*28mm, can be obtained hyperfine processing
Precision.
The embodiment of the invention also provides a kind of laser processing device, including as it is one of above-mentioned for laser processing
Telecentric lens.Laser processing device may also include laser, beam expanding lens, X galvanometer and Y galvanometer, and laser can be incident ray
Wavelength is the ultraviolet laser of 355nm, and the power of the ultraviolet laser can be equal to or be greater than 20W.Ultraviolet laser issues
Incident ray successively pass through beam expanding lens, X galvanometer and Y galvanometer, propagated on each visual field direction finally by telecentric lens, and
Its image space chief ray is vertical with image planes, to avoid punching from tilting, while caused by being avoided that object to be processed because of slight defocus
Distortion, improves machining accuracy.Simultaneously as the astigmatism of telecentric lens has reached ideal correcting state, can avoid being processed
Object has slight defocus or tilts the acute variation of bring machining shape.
The embodiment of the present invention is additionally provided with a kind of laser processing, using such as one of above-mentioned for laser machining
Telecentric lens, comprising the following steps:
As shown in figure 9,
S1, incident ray first pass through the first lens 1 after passing through aperture diaphragm, and can be to image space after the first the beams extended by lens
Propagate to the second lens 2.Since the first lens 1 are double-concave negative lens, so the first lens 1 can expand incident ray；
S2, incident ray can propagate to the third lens 3 after the second lens 2 expand to image space.Since the second lens 2 are curved
Month negative lens, so the second lens 2 can expand incident ray；
S3, incident ray can propagate to the 4th lens 4 after the convergence of the third lens 3 to image space.Since the third lens 3 are curved
Month positive lens, so the third lens 3 can converge incident ray；
S4, incident ray can propagate to the 5th lens 5 after the convergence of the 4th lens 4 to image space.Since the 4th lens 4 are double
Convex positive lens, so the 4th lens 4 can converge incident ray；
S5, incident ray reach image space after the convergence of the 5th lens 5, and incident ray, which is formed in, at this time is parallel to optical axis
Emergent ray.Due to 5 plano-convex positive lens of the 5th lens, so the 5th lens 5 can converge incident ray.
It follows that incident ray is after the first lens 1 to the refraction of 5 different angle of the 5th lens, it is finally saturating by the 5th
Mirror 5 projects to form emergent ray in the one side of plane, and the emergent ray can be parallel to optical axis, it is ensured that emergent ray can be vertical
In focal plane, that is, it can avoid having certain inclination angle between image space chief ray and focal plane, it is ensured that the hole processed can be vertical
In processing plane；Moreover it is possible to effectively correct astigmatism and distortion, machining accuracy is improved.
A kind of telecentric lens, laser processing device and processing side for laser processing provided by the embodiment of the present invention
Method, telecentric lens include the first lens 1, the second lens 2, the third lens 3, the 4th lens 4 and the 5th lens 5, the first lens 1
For double-concave negative lens, the second lens 2 are bent moon negative lens, and the third lens 3 are bent moon positive lens, and the 4th lens 4 are that biconvex is just saturating
Mirror, the 5th lens 5 are plano-convex positive lens, and incident ray is successively propagated along 1 to the 5th lens 5 of the first lens and obtains image space telecentricity
Optical path passes through the first lens 1, the second lens 2, the third lens 3, the 4th lens 4 and each shape of the 5th lens 5 and relative position
Design, certain inclination angle is generated when overcoming using common lens, between chief ray and focal plane, it is ensured that the hole processed can hang down
Directly in focal plane；And astigmatism and distortion are effectively corrected, encircled energy is very high, and the telecentric beam path in image space of realization improves
Image quality, the telecentric lens structure is simple, convenient for design, effectively improves machining accuracy, can be widely applied to various
In fine laser processing device.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modification, equivalent replacement or improvement etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (11)
1. a kind of telecentric lens for laser processing, which is characterized in that first including setting gradually from the object side to the image side is saturating
Mirror, the second lens, the third lens, the 4th lens and the 5th lens, first lens are double-concave negative lens, second lens
For bent moon negative lens, the third lens are bent moon positive lens, and the 4th lens are biconvex positive lens, and the 5th lens are
Plano-convex positive lens；First lens include first surface, the second curved surface, and second lens include third curved surface, the 4th curved surface, institute
Stating the third lens includes the 5th curved surface, the 6th curved surface, and the 4th lens include the 7th curved surface, the 8th curved surface, and the described 5th thoroughly
Mirror includes zigzag face, the tenth curved surface, in which: and the radius of curvature of the first surface to the tenth curved surface respectively is-
57mm, 131.75mm, -18mm, -22.5mm, -187.5mm, -49.5mm, 133.5mm, -181mm, 101.5mm, ∞ mm, and institute
The radius of curvature allowable tolerance for stating first surface to the tenth curved surface is 10%, and the upper deviation is+5%, and lower deviation is -5%.
2. a kind of telecentric lens for laser processing as described in claim 1, which is characterized in that the first surface direction
Object space and to image space be recessed, second curved surface towards image space and to object space be recessed；
The third curved surface is recessed towards object space and to image space, and the 4th curved surface is towards image space and raised to image space；
5th curved surface is recessed towards object space and to image space, and the 6th curved surface is towards image space and raised to image space；
For 7th curved surface towards object space and to object space protrusion, the 8th curved surface is towards image space and raised to image space；
For the zigzag facing towards object space and to object space protrusion, the tenth curved surface is towards image space and is plane.
3. a kind of telecentric lens for laser processing as described in claim 1, which is characterized in that in first lens
The heart with a thickness of 3mm,
The center thickness of second lens is 7.5mm,
The center thickness of the third lens, the 4th lens and the 5th lens is 10mm；
And the center thickness allowable tolerance of first lens to the 5th lens is 10%, the upper deviation is+5%, lower inclined
Difference is -5%.
4. a kind of telecentric lens for laser processing as described in claim 1, which is characterized in that second curved surface and institute
Stating the spacing between third curved surface is 12.5mm,
Spacing, the 6th curved surface between 4th curved surface and the 5th curved surface and between the 7th curved surface between
It is 0.4mm away from the spacing between, the 8th curved surface and zigzag face；
And the allowable tolerance of the spacing is 10% among the above, the upper deviation is+5%, and lower deviation is -5%.
5. a kind of telecentric lens for laser processing as described in claim 1, which is characterized in that first lens, institute
The refractive index and Abbe number ratio for stating the second lens, the third lens, the 4th lens and the 5th lens be
1.4584/67.82；
And the refractive index and Abbe number ratio allowable tolerance of first lens to the 5th lens are 10%, the upper deviation is
+ 5%, lower deviation is -5%.
6. a kind of telecentric lens for laser processing as described in claim 1, which is characterized in that the focal length of telecentric lens is
74mm, the Entry pupil diameters of telecentric lens are 10mm.
7. a kind of telecentric lens for laser processing as described in claim 1, which is characterized in that the view of the telecentric lens
Rink corner is 32%.
8. a kind of telecentric lens for laser processing as described in claim 1, which is characterized in that the telecentric lens it is remote
Heart degree is less than 1 °.
9. a kind of telecentric lens for laser processing as described in claim 1, which is characterized in that first lens, the
Two lens, the third lens, the 4th lens and the 5th lens are all made of vitreous silica.
10. a kind of laser processing device, which is characterized in that including a kind of for swashing as claimed in any one of claims 1-9 wherein
The telecentric lens of light processing.
11. a kind of laser processing, which is characterized in that using a kind of laser processing device as claimed in claim 10, packet
Include following steps:
S1, incident ray propagate to the second lens by first passing through the first lens after aperture diaphragm after the first the beams extended by lens；
S2, incident ray propagate to the third lens after the second the beams extended by lens；
S3, incident ray propagate to the 4th lens after the third lens converge；
S4, incident ray propagate to the 5th lens after the convergence of the 4th lens；
S5, incident ray reach image space after the convergence of the 5th lens and are formed in emergent ray and are parallel to optical axis.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811623627.7A CN109507789B (en) | 2018-12-28 | 2018-12-28 | Telecentric lens for laser processing, laser processing device and processing method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811623627.7A CN109507789B (en) | 2018-12-28 | 2018-12-28 | Telecentric lens for laser processing, laser processing device and processing method |
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| Publication Number | Publication Date |
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| CN109507789B CN109507789B (en) | 2021-04-02 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114488526A (en) * | 2022-04-18 | 2022-05-13 | 杭州灵西机器人智能科技有限公司 | Optical system for laser 3D scanning and design method |
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| JPH07287163A (en) * | 1994-04-19 | 1995-10-31 | Nikon Corp | Telecentric ftheta lens |
| US5663837A (en) * | 1995-04-04 | 1997-09-02 | Nikon Corporation | Lens system |
| US8228611B2 (en) * | 2010-01-20 | 2012-07-24 | Young Optics Inc. | Lens module |
| CN206696510U (en) * | 2017-03-08 | 2017-12-01 | 上海仪万光电科技有限公司 | A kind of Ultra-Violet Laser telecentricity F theta field mirrors |
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|---|---|---|---|---|
| US4925279A (en) * | 1988-09-20 | 1990-05-15 | Dainippon Screen Mfg. Co., Ltd. | Telecentric f-θ lens system |
| JPH07287163A (en) * | 1994-04-19 | 1995-10-31 | Nikon Corp | Telecentric ftheta lens |
| US5663837A (en) * | 1995-04-04 | 1997-09-02 | Nikon Corporation | Lens system |
| US8228611B2 (en) * | 2010-01-20 | 2012-07-24 | Young Optics Inc. | Lens module |
| CN206696510U (en) * | 2017-03-08 | 2017-12-01 | 上海仪万光电科技有限公司 | A kind of Ultra-Violet Laser telecentricity F theta field mirrors |
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| CN114488526A (en) * | 2022-04-18 | 2022-05-13 | 杭州灵西机器人智能科技有限公司 | Optical system for laser 3D scanning and design method |
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| CN109507789B (en) | 2021-04-02 |
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