CN206567987U - Cleaning device and mechanical grinding device - Google Patents
Cleaning device and mechanical grinding device Download PDFInfo
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- CN206567987U CN206567987U CN201720257511.0U CN201720257511U CN206567987U CN 206567987 U CN206567987 U CN 206567987U CN 201720257511 U CN201720257511 U CN 201720257511U CN 206567987 U CN206567987 U CN 206567987U
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- cleaning
- grinding table
- grinding
- cleaning device
- side wall
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Abstract
The utility model provides a kind of cleaning device and mechanical grinding device, and the cleaning device is used to clean the side wall of grinding table in mechanical grinding device, and the cleaning device includes：At least one cleaning brush；The connection component being connected with the cleaning brush；Drive the drive device of the connection component movement.That is, in cleaning process, cleaning brush is made to be contacted with the side wall of grinding table by the drive device, and then realize the purpose of automation cleaning, cleaning efficiency is effectively increased, and the grinding residue on the wall of grinding table side can be removed in time, it is to avoid substantial amounts of deposit is produced on the side wall of grinding table.
Description
Technical field
The utility model is related to technical field of semiconductors, more particularly to a kind of cleaning device and mechanical grinding device.
Background technology
In the manufacturing process of semiconductor, it will usually be related to the mechanical milling tech to chip, i.e. chip is positioned over into machine
In tool milling apparatus, the processing such as planarized or polished to chip by the grinding table of mechanical grinding device.
At present, a cleaning device, to be cleaned to mechanical grinding device, example would generally be configured in mechanical grinding device
Such as, the slurry on the grinding table for removing mechanical grinding device and grinding residue, it is to avoid to follow-up chip to be ground
Cause abrasion.However, the cleaning device of most mechanical grinding device is cleaned just for the table top of grinding table, without
Cleaned for other regions, the cleaning to mechanical grinding device is limited in scope, the problem of easily triggering cross pollution.
Utility model content
The purpose of this utility model is to provide a kind of cleaning device and mechanical grinding device, to solve existing mechanical grinding
Grind in equipment, there is no corresponding cleaning device for grinding table side wall, and then grinding table side wall timely can not be cleaned
And cause the problem of grinding table side wall produces substantial amounts of deposit.
Above-mentioned technical problem, the utility model provides a kind of cleaning device, and the cleaning device is used to set mechanical lapping
The side wall of standby middle grinding table is cleaned, and the cleaning device includes：
At least one is used for the cleaning brush contacted with the side wall of the grinding table；
For the connection component for controlling the cleaning brush to move, one end of the connection component connects the cleaning brush
Head；And,
With the connection component mobile drive deivce is driven, the drive device connects the other end of the connection component.
Optionally, the cleaning brush is rotatable brush.
Optionally, the grinding table is cylindrical structural and rotated along the axis direction of the cylindrical structural, described clear
The direction of rotation of washing head is opposite with the direction of rotation of the grinding table.
Optionally, when grinding table side wall and the cleaning head contacts, described in the mobile drive of grinding table side wall
Clean brush rotation.
Optionally, first jet, the first jet and a cleaning solution supplying device are additionally provided with the cleaning brush
Connection.
Optionally, the connection component includes head rod and at least one second connecting rod；The head rod
It is connected with the drive device, the drive device drives the head rod to be moved along specific direction；Second connection
One end of bar is connected with cleaning brush, and the other end of second connecting rod is connected with the head rod, and described second connects
Extension bar is moved along by the arc direction in the center of circle of head rod and the tie point of the second connecting rod.
Optionally, the cleaning device also includes a base, and the drive device is installed on the base.
Optionally, the base is the hollow structure of strip, and one is offered on the side wall of the length direction of the base
Opening, the drive device is installed in the hollow structure, and the connection component is extended out by the opening.
Optionally, at least one second nozzle, the second nozzle and a cleaning solution supplying are additionally provided with the base
Device is connected.
It is of the present utility model it is further an object to provide a kind of mechanical grinding device, it includes cleaning dress as described above
Put；And, at least one grinding table.
Optionally, the mechanical grinding device includes two grinding tables, and the cleaning device includes two cleaning brushes.
Optionally, the cleaning device is located between two grinding tables.
Optionally, the grinding table is cylindrical structural and can rotated around the axis direction of the cylindrical structural.
Optionally, the rotary speed of the grinding table is 8rpm/min~15rpm/min.
In the cleaning device and mechanical grinding device that the utility model is provided, the cleaning device has a cleaning brush
With a drive device, cleaning brush is contacted with the side wall of grinding table by the drive device, realize and abrasive side wall is carried out
Automate the purpose of cleaning.Cleaning performance not only can be effectively provided, while the grinding residual on the wall of grinding table side can be removed in time
Thing, it is to avoid form hard deposit on the side wall of grinding table and impacted to abrasive product.
Brief description of the drawings
Fig. 1 is a kind of structural representation of mechanical grinding device；
Fig. 2 be the embodiment of the utility model one in cleaning device structural representation；
For the cleaning device in the embodiment of the utility model one, it cleans structural representation of the brush when cleaning grinding table to Fig. 3
Figure；
Fig. 4 be the embodiment of the utility model one in cleaning device base structural representation；
Fig. 5 be the embodiment of the utility model one in mechanical grinding device structural representation；
Fig. 6 shows for the structure of the cleaning process of grinding table side wall in the mechanical grinding device in the embodiment of the utility model one
It is intended to.
Embodiment
As stated in the Background Art, in the cleaning device of mechanical grinding device, it is generally only to the table top for grinding table
Cleaned, so that substantial amounts of pollutant is accumulated in the region that is not cleaned, and then the problem of easily trigger cross pollution.
With specific reference to shown in Fig. 1, milling apparatus generally includes a grinding table 11 and a grinding head 12, and wafer W is fixed on institute
State on grinding head 12, so as to be ground on the grinding table 11 with slurry (slurry).As can be seen here, ground
Cheng Zhong, slurry and grinding residue etc. can be also remained on the side wall 11b of grinding table 11, so that in the side wall of grinding table 11
Substantial amounts of deposit is formed on 11b, and then easily causes the problem of table top 11a of grinding table 11 is contaminated.Meanwhile, work as grinding
When deposit on the wall 11b of platform side is higher by grinding table 11, then during chip is ground, easily chip is caused to scrape
Wound, causes scrapping for product.Also, substantial amounts of slurry crystal is generally comprised in deposit, it further can be to grinding table
11 cause to corrode, so as to influence the service life of grinding table.Meanwhile, bulk deposition thing also can result in drainage system blocking.For
Overcome above mentioned problem, be typically that the artificial regular side wall to grinding table is cleaned, it is clear that this cleaning way is not only at present
Substantial amounts of manpower need to be wasted, and can not timely remove the deposit on the wall of grinding table side, while in personnel to grinding table
When side wall is cleaned, the hard deposit formed can also cause to scratch to personnel.
Therefore, the utility model provides a kind of cleaning device, the cleaning device is used for being ground in mechanical grinding device
The side wall of mill platform is cleaned, and it includes：At least one is used for the cleaning brush contacted with the side wall of the grinding table；For controlling
The connection component of the system cleaning brush movement, one end of the connection component connects the cleaning brush；And, with driving institute
Connection component mobile drive deivce is stated, the drive device connects the other end of the connection component.
In the cleaning device that the utility model is provided, by a moveable cleaning brush, the side wall to grinding table is realized
Automation cleaning is carried out, so as to effectively improve cleaning efficiency, scavenging period is saved, greatly reduces the dimension of mechanical grinding device
Protect cost.Also, the side wall of grinding table can be cleaned at any time when equipment is idle, grinding on the wall of grinding table side is removed in time
Grinding slurry and grinding residue, it is to avoid hard crystal is formed on the wall of side.Therefore, in the machinery with the cleaning device
In milling apparatus, because the deposit on the side wall of grinding table can be removed in time, so as to prevent the crystalline substance positioned at grinding table
Piece is scraped off；In addition, can also improve the problem of grinding table is corroded, the service life of grinding table is extended.
Below in conjunction with the drawings and specific embodiments to the utility model proposes cleaning device and mechanical grinding device make into
One step is described in detail.According to following explanation and claims, advantages and features of the present utility model will become apparent from.It should be noted
That accompanying drawing is using very simplified form and uses non-accurately ratio, only to it is convenient, lucidly aid in illustrating this reality
With the purpose of new embodiment.
Fig. 2 be the embodiment of the utility model one in cleaning device structural representation, as shown in Fig. 2 it is described cleaning dress
Put including：
At least one cleaning brush 110；
Connection component 120, one end connection cleaning brush 110 of the connection component 120 simultaneously can control the cleaning
Brush 110 is moved；
Drive device 130, the drive device 130 connects the other end of the connection component 120, described for driving
Connection component 120 is moved, and connects the side wall of the cleaning brush 110 and the grinding table 200 that are located on the connection component 120
Touch.
For the cleaning device in the embodiment of the utility model one, it cleans structural representation of the brush when cleaning grinding table to Fig. 3
Figure, with reference to shown in Fig. 2 and Fig. 3, when being cleaned using the cleaning device to the side wall 210 of grinding table 200, the cleaning
Brush 110 is contacted with the side wall 210, so as to be cleaned to it.In the present embodiment, the grinding table 200 is cylindrical type
Structure can simultaneously be moved along its axis direction, during cleaning, and the grinding table 200 is rotated with certain rotary speed.Enter
One step, the cleaning brush 110 is also rotatable brush, in the present embodiment, and the cleaning brush 110 is cylindrical structure,
The cleaning brush 110 can rotate along its axis direction.That is, in cleaning process, cleaning brush 110 is with the side of spiral
Formula is cleaned to grinding table 200, thus the chip dropped in cleaning also can the hand of spiral drop, and then avoid what is dropped
Chip is thrown on the table top of grinding table.
Wherein, the direction of rotation of the cleaning brush 110 can be identical with the direction of rotation of the grinding table 200, for example
Both of which is rotated in a clockwise direction, and the contact surface for now cleaning brush 110 and grinding table side wall 210 is relative motion, therefore
Cleansing power can be effectively provided.Certainly, the rotation that the direction of rotation of the cleaning brush 110 can also be with the grinding table 200
Direction is different, for example, clean brush 110 and be rotated in a clockwise direction, grinding table 200 rotates in the counterclockwise direction, now cleaning brush
First 110 and the contact surface of grinding table side wall 210 there is less relative motion, relative motion is not produced even, consequently, it is possible to can
Abrasion of the cleaning brush 110 to grinding table 200 is effectively reduced, can also reduce cleaning brush 110 degree of wear of itself certainly, from
And its service life can be extended.In the present embodiment, the cleaning brush 110 is movement by the grinding table 200, and then band
Move it to rotate, i.e. when the grinding table 200 and the cleaning brush 110 are contacted, the grinding table being rotated
200 directly drive the cleaning brush 110 to be rotated with same speed.This cleaning way, not only can reach to grinding
The cleaning performance of platform side wall, and can avoid causing abrasion to grinding table and cleaning brush.
In addition, a first jet 111, the first jet and a cleaning fluid also can be set in the cleaning brush 110
Feedway (not shown) is connected.As shown in Fig. 2 in the present embodiment, the first jet 111 passes through a pipeline and cleaning
Liquid supplying device is connected, and the pipeline is arranged inside the cleaning brush 110.The first jet 111 sprays cleaning fluid, from
And cleaning brush 110 can be soaked, and the frictional force between cleaning brush 110 and grinding table 200 can be alleviated, and,
Cleaning fluid is provided in cleaning process, cleaning efficiency is effectively improved.Wherein, the first jet 111 is preferably rotatable nozzle,
Its anglec of rotation is preferably 360 degree, and the spray angle of the first jet 111 is preferably 60 °~120 °, larger to make it have
Spraying range.In addition, the cleaning fluid that the cleaning solution supplying device is provided can be pure water or other chemicals, this
Place is not limited.
With continued reference to shown in Fig. 2, in the present embodiment, the connection component 120 includes head rod 121 and at least one
Second connecting rod 122, one end of the head rod 121 is connected with the drive device 130, the head rod 121
The other end be connected with second connecting rod 122, second connecting rod 122 with it is described cleaning brush 110 be connected.Further
, the head rod 121 and second connecting rod 122 are removable connecting rod.Wherein, the head rod
121 can move along specific direction, i.e. be moved under the driving of drive device 130, in the present embodiment, the head rod 121
X-direction shown in Fig. 2 is moved；Second connecting rod can be along with the connecting rod 122 of head rod 121 and second along 122
Tie point for the center of circle arc direction move, i.e. the second connecting rod 122 can be moved in the plane of the XY shown in Fig. 2.Clear
During washing, under the driving of drive device 130, the head rod 121 is moved to after ad-hoc location in X direction, is true
Cleaning brush 110 is protected to contact with the side wall of grinding table 200 really, can be by mobile second connecting rod 121 with to cleaning brush
First 110 position is finely adjusted.In actual application process, the length of the connecting rod 122 of head rod 121 and second
And angle can be adjusted according to the actual requirements, to ensure that the cleaning brush 110 being connected with connection component 120 can be with grinding
The side wall contact of platform.
In the present embodiment, the cleaning device also includes a base 140, and the drive device 130 is installed on the base
On 140.That is, by the base 140, on the one hand a mounting platform can be provided for drive device 130；On the other hand can also be to driving
The height and position of dynamic device 130 is adjusted, so that it is guaranteed that the height and position of cleaning brush 110 and grinding table side wall is mutually right
Should.
Fig. 4 be the embodiment of the utility model one in cleaning device base structural representation, with reference to Fig. 2 and Fig. 4 institutes
Show, in the present embodiment, the base 140 is the hollow structure of strip, and an opening is further opened with the side wall of its length direction
142, the drive device 130 is installed in the hollow structure, the connection component driven by the drive device 130
120 are extended by the opening 142.As shown in Fig. 2 the head rod 121 being connected with the drive device 130 is located at institute
State in base 140, the second connecting rod 122 being connected with the head rod 121 is extended by the opening 142, and then
The cleaning brush 110 in the second connecting rod 122 is set to be contacted with grinding table.It is preferred that, it is additionally provided with least on the base 140
One second nozzle 141, the second nozzle 141 can also be connected with a cleaning solution supplying device (not shown).Base 140
On second nozzle 141 quantity and position can set accordingly according to the actual requirements.In the present embodiment, set on base 140
5 second nozzles 141 are equipped with, two of which second nozzle 141 sets the bottom of close cleaning brush 110 side of base 140,
In cleaning process, the chip scrubbed and dropped by cleaning brush 110, you can two second nozzles 141 through the bottom of base 140 are rushed
Wash off；The other three second nozzle 141 is arranged at the base 140 and leaned on the upper table surface of proximal wall, three second nozzles
141 can be used for being rinsed other devices on grinding table periphery；It is preferred that, in the interposition of the upper table surface of the base 140
Put and be provided with two second nozzles 141, the height of described two second nozzles 141 is less than the height of the grinding table, so that
It cannot be only used for cleaning other devices, while can also clean the side wall of grinding table.
Similar with the first jet 111 on cleaning brush 110, the second nozzle 141 on base 140 can also be
Rotatable nozzle, it can also have certain nozzle angle, and it is sector to make the spraying range of second nozzle 141.In addition, with cleaning
The cleaning solution supplying device that first jet 111 is connected on brush 110 is similar, the institute of second nozzle 141 on base 140
In the cleaning solution supplying device of connection, its cleaning fluid provided can be pure water or chemical reagent.
Further, the drive device 130 can be cylinder.Specifically, the cylinder includes：Digital IO plate
Block (DIO board) and pneumatic board (Pneumatic F board), DIO board are used to send instruction, and the pneumatic board is received
The corresponding action of instruction and execution that DIO board are sent.
Based on above-described cleaning device, the utility model additionally provides a kind of mechanical grinding device, and it has as above
Described cleaning device；And, at least one grinding table.The side wall of grinding table can be cleaned by the cleaning device,
Mechanical grinding device is avoided cleaning blind area occur, it is ensured that can comprehensively be cleaned to grinding table, so as to place to be ground
Product is impacted, and extends the service life of the grinding table.
Fig. 5 be the embodiment of the utility model one in mechanical grinding device structural representation, as shown in figure 5, the machine
Tool milling apparatus includes cleaning device and at least one grinding table 200.As described above in Example, have in the cleaning device
There are a cleaning brush 110, a connection component 120 and a drive device 130, connection component 120 is made by the drive device 130
It is mobile, and then drive the cleaning brush 110 to move and contacted with the side wall of grinding table 200, realize the side wall to grinding table 200
The purpose cleaned.Further, a base 140 is also provided with the cleaning device, the drive device 130 is installed
In on the base 140.It is preferred that scheme in, it is described cleaning brush 110 and the base 140 on be provided with nozzle, it is described
Nozzle is connected with cleaning solution supplying device, and then the sprayable cleaning fluid in cleaning process.
In the present embodiment, there are two grinding tables 200 in the mechanical grinding device, it is corresponding, in the cleaning device
Two cleaning brushes 110 are provided with, to be cleaned respectively to two grinding tables 200.It should be appreciated, however, that the cleaning
Device can also set multiple cleaning brushes 110 to be cleaned to same grinding table 200, and then lift its cleaning efficiency.With
Above-described embodiment is similar, and two connection components 120 are provided with the cleaning device, and two connection components 120 are connected respectively
Two cleaning brushes 110, so as to be controlled respectively to two cleaning brushes 110.
Further, the cleaning device is arranged between two grinding tables 200, so as to simultaneously to two grinding tables
200 are cleaned, and save scavenging period.Specifically, in cleaning process, making two cleaning brush by two connection components 120
First 110 contact with the grinding table 200 of both sides respectively, so as to be cleaned to two grinding tables 200 simultaneously.
With continued reference to shown in Fig. 4, in the present embodiment, the grinding table 200 is cylindrical structure and can be around its axis direction
Rotation, its rotary speed is, for example, 8rpm/min~15rpm/min.Wherein, the cleaning brush 110 can also be cylindrical type knot
Structure can simultaneously rotate around its axis direction, further, the direction of rotation of the cleaning brush 110 and the rotation of the grinding table 200
Turn in opposite direction, to avoid causing damage to grinding table and cleaning brush, increase the service life.In the present embodiment, the cleaning
The rotation of brush 110 is in the rotary course of grinding table 200, to move cleaning brush 110 by the side cornice of grinding table 200 and revolve
Turn.
Fig. 6 shows for the structure of the cleaning process of grinding table side wall in the mechanical grinding device in the embodiment of the utility model one
It is intended to, the cleaning process of grinding table is described in detail below in conjunction with Fig. 5 and Fig. 6.
First, the mechanical grinding device is in state A, i.e. cleaning brush 110 in the cleaning device not with it is described
Grinding table 200 is contacted；
Then, move connection component 120 by drive device 130 and drive cleaning brush 110 to move to grinding table
Sidewall locations, make cleaning brush 110 be contacted with the side wall of grinding table 200, even if the mechanical grinding device handles state B,
During this, the grinding table 200 can be driven to rotate simultaneously；
Then, with the rotation of grinding table 200, the cleaning device starts to clean the side wall of grinding table, herein
During, its cleaning performance can be improved by cleaning the nozzles spray cleaning fluid of brush 110, and can be by base 140
Nozzles spray cleaning fluid, the chip that drops when removing cleaning in time；
After cleaning is finished, the drive device 130 drives the connection component 120 to move again, makes cleaning brush 110
Leave grinding table, i.e. the mechanical grinding device is returned to state A.
In summary, in the cleaning device that the utility model is provided, by the way that cleaning brush is contacted with the side wall of grinding table,
Realize that the automation to grinding table side wall is cleaned, so as to effectively improve cleaning efficiency, save the time.
And then, in the mechanical grinding device with the cleaning device, by using the cleaning device to grinding table
Side wall cleaned, can be prevented effectively from accumulated on the side wall of grinding table substantial amounts of slurry crystal or grinding residue
Deng so as to prevent chip is scraped off during grinding wafers phenomenon.Also, timely remove the slurry knot on the wall of grinding table side
Brilliant thing can also avoid the problem of grinding table is etched, and be conducive to extending the service life of grinding table.
The embodiment of each in this specification is described by the way of progressive, and what each embodiment was stressed is and other
Between the difference of embodiment, each embodiment identical similar portion mutually referring to.
Foregoing description is only the description to the utility model preferred embodiment, not to any limit of the utility model scope
Calmly, the those of ordinary skill in the utility model field does according to the disclosure above content any change, modification, belonging to right will
Seek the protection domain of book.
Claims (14)
1. a kind of cleaning device, it is characterised in that the cleaning device is used to enter the side wall of grinding table in mechanical grinding device
Row cleaning, the cleaning device includes：
At least one is used for the cleaning brush contacted with the side wall of the grinding table；
For the connection component for controlling the cleaning brush to move, one end of the connection component connects the cleaning brush；With
And,
With the connection component mobile drive deivce is driven, the drive device connects the other end of the connection component.
2. cleaning device as claimed in claim 1, it is characterised in that the cleaning brush is rotatable brush.
3. cleaning device as claimed in claim 2, it is characterised in that the grinding table is cylindrical structural and along the cylinder
The axis direction rotation of shape structure, the direction of rotation of the cleaning brush is opposite with the direction of rotation of the grinding table.
4. cleaning device as claimed in claim 2, it is characterised in that when the side wall and the cleaning brush of the grinding table connect
When touching, the mobile drive cleaning brush rotation of grinding table side wall.
5. cleaning device as claimed in claim 1, it is characterised in that be additionally provided with a first jet in the cleaning brush,
The first jet is connected with a cleaning solution supplying device.
6. cleaning device as claimed in claim 1, it is characterised in that the connection component includes head rod and at least one
Individual second connecting rod；The head rod is connected with the drive device, and the drive device drives the head rod
Moved along specific direction；One end of second connecting rod is connected with cleaning brush, the other end of second connecting rod and institute
Head rod connection is stated, second connecting rod is along using head rod and the tie point of the second connecting rod as the arc in the center of circle
Move in line direction.
7. cleaning device as claimed in claim 1, it is characterised in that the cleaning device also includes a base, the driving
Device is installed on the base.
8. cleaning device as claimed in claim 7, it is characterised in that the base is the hollow structure of strip, at the bottom
An opening is offered on the side wall of the length direction of seat, the drive device is installed in the hollow structure, the connection group
Part is extended out by the opening.
9. cleaning device as claimed in claim 7, it is characterised in that at least one second spray is additionally provided with the base
Mouth, the second nozzle is connected with a cleaning solution supplying device.
10. a kind of mechanical grinding device, it is characterised in that including：Cleaning device as described in one of claim 1~9；With
And, at least one grinding table.
11. mechanical grinding device as claimed in claim 10, it is characterised in that the mechanical grinding device includes two grindings
Platform, the cleaning device includes two cleaning brushes.
12. mechanical grinding device as claimed in claim 11, it is characterised in that the cleaning device is located at two grindings
Between platform.
13. mechanical grinding device as claimed in claim 10, it is characterised in that the grinding table is for cylindrical structural and around institute
State the axis direction rotation of cylindrical structural.
14. mechanical grinding device as claimed in claim 13, it is characterised in that the rotary speed of the grinding table is 8rpm/
Min~15rpm/min.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720257511.0U CN206567987U (en) | 2017-03-16 | 2017-03-16 | Cleaning device and mechanical grinding device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720257511.0U CN206567987U (en) | 2017-03-16 | 2017-03-16 | Cleaning device and mechanical grinding device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206567987U true CN206567987U (en) | 2017-10-20 |
Family
ID=60055784
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720257511.0U Active CN206567987U (en) | 2017-03-16 | 2017-03-16 | Cleaning device and mechanical grinding device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206567987U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113798998A (en) * | 2021-08-04 | 2021-12-17 | 山西光兴光电科技有限公司 | Cleaning device for grinding workbench and grinding system |
| CN110282601B (en) * | 2019-08-06 | 2022-06-17 | 贵州工程应用技术学院 | Device is prepared to hydrogen storage material that graphite alkene mixes |
-
2017
- 2017-03-16 CN CN201720257511.0U patent/CN206567987U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110282601B (en) * | 2019-08-06 | 2022-06-17 | 贵州工程应用技术学院 | Device is prepared to hydrogen storage material that graphite alkene mixes |
| CN113798998A (en) * | 2021-08-04 | 2021-12-17 | 山西光兴光电科技有限公司 | Cleaning device for grinding workbench and grinding system |
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