CN206385255U - A kind of work rest that electric arc chemical vapor deposition field is stretched applied to direct current - Google Patents
A kind of work rest that electric arc chemical vapor deposition field is stretched applied to direct current Download PDFInfo
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- CN206385255U CN206385255U CN201621128320.6U CN201621128320U CN206385255U CN 206385255 U CN206385255 U CN 206385255U CN 201621128320 U CN201621128320 U CN 201621128320U CN 206385255 U CN206385255 U CN 206385255U
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Abstract
The utility model discloses a kind of work rest that electric arc chemical vapor deposition field is stretched applied to direct current, including bevel type gear（2）, dynamic sealing device（3）, stepper motor（4）, drive plate（5）, the first fixed gear（6）, the second fixed gear（7）, planetary gear（8）, central gear（9）, central gear power transmission shaft（10）With revolution travelling gear（12）.It is characterized in that workpiece pipe sleeve is fixed on planetary gear（8）On, planetary gear（8）In central gear（9）Effect carry out rotation, central gear（9）Rotary power come from drive plate（5）With the first fixed gear（6）, at the same time revolve round the sun travelling gear（12）In the second fixed gear（7）Effect is lower to drive planetary gear revolution, realizes the multidimensional rotation of workpiece.The utility model can improve the uniformity of workpiece depositing coating.
Description
Technical field
The utility model is related to a kind of work rest that electric arc chemical vapor deposition field is stretched applied to direct current, belongs to vacuum
Coatings art.
Background technology
When stretching electric arc chemical vapor deposition vacuum coating using direct current, with the arc plasma between negative electrode and anode
Body is thermal source, and plasma arc is located at the center of vacuum chamber, and workpiece is arranged around plasma column, carries out chemical vapor deposition.By
Deposition atmosphere around plasma has differences, and there is thermograde along plasma radial.On the one hand, if
Workpiece is radially successively distributed, then due to deposition atmosphere and the difference of depositing temperature depositing coating can be caused thickness and group occur
The difference knitted；On the other hand, if workpiece is without autobiography, the problem of being likely to form male and female face.Patent No.
CN202139292U's《A kind of novel workpiece holder applied to vacuum coating field》, it is characterized in that it is simple in construction, but it is adopted
Workpiece is rotated with fixed shift fork, workpiece only can just rotate when being contacted with shift fork, and due to shift fork application power not
Uniformly, acutely rotate, just stopped the rotation quickly after contact in time of contact workpiece.Make the depositing coating of workpiece more equal
It is even, then need work rest to be revolved round the sun around electric arc, and need not stop rotation and revolve round the sun apart from the workpiece of electric arc different distance, only
It so just can guarantee that the sedimentary condition of each workpiece is basically identical, obtain uniform vacuum coating.
The content of the invention
The purpose of this utility model is to provide a kind of workpiece for stretching electric arc chemical vapor deposition field applied to direct current
Frame, can make workpiece carry out multidimensional rotation when carrying out chemical vapor deposition, so as to obtain uniform sedimentary.
Design of the present utility model includes：Bevel type gear 2, dynamic sealing device 3, stepper motor 4, drive plate 5, first
Fixed gear 6, the second fixed gear 7, planetary gear 8, central gear 9, central gear power transmission shaft 10 and revolution travelling gear 12.
The work rest, the bottom of to can above be divided into 5 layers, is stepper motor 4 in lowermost end, and it is located on the outside of vacuum chamber, passes through umbrella shape tooth
Wheel 2 and dynamic sealing device 3 transfer power to the drive plate 5 of the second layer, drive plate 5 is rotated around piccolo arc；In
Three layers are the gear parts and the first fixed gear 6 for being distributed on the central gear power transmission shaft 10 on the circumference of drive plate 5（It is fixed
In circular vacuum chamber interior walls）；In the 4th layer be revolution the fixed gear 7 of travelling gear 12 and second（It is fixed on circular vacuum
In chamber interior walls）；What it is in layer 5 is central gear 9 and planetary gear 8.Central gear power transmission shaft 10 is the crucial portion of transmission
Part, it is supreme and be divided into four parts bottom of from, and bottommost is fixed on above drive plate 5 by ceramic bearing, and Part II is teeth,
The teeth are engaged with the first fixed gear 6, and teeth top is by ceramic bearing carrying revolution travelling gear 12, and top passes through key
Groove fixes central gear 9.The central gear power transmission shaft 10 being located on its circumference is driven to be revolved around piccolo arc when drive plate 5 rotates
Turn, but the teeth part due to central gear power transmission shaft 10 is engaged with the first fixed gear 6, in the effect of the first fixed gear 6
Rotation can occur for lower central gear power transmission shaft 10 and central gear 9.At the same time, central gear power transmission shaft is fixed on by bearing
Revolution travelling gear 12 on 10 can also be rotated in the presence of the second fixed gear 7.Due to the first fixed gear 6 and
The internal tooth pitch radius of two fixed gears 7 is different, is relatively rotated so central gear 9 and revolution travelling gear 12 are present.Then too
Positive gear 9 can drive the planetary gear 8 on the revolution circumference of travelling gear 12 to rotate again.Workpiece to be deposited is fixed on planet
On gear 8, therefore, workpiece is in vapor deposition processes, you can around piccolo arc revolution, can be revolved round the sun again around central gear 9, also
Uniform rotation can be carried out, so as to ensure that the uniformity of depositing coating.
Brief description of the drawings
Fig. 1 is the planetary workpiece carrier for direct current plasma electric arc chemical vapor deposition field；
Fig. 2 is the structural representation of the central gear power transmission shaft 10 in the utility model Fig. 1；
Fig. 3 is the A-A cross section structure diagrams in the utility model Fig. 1.
In figure：1- plasma power supply anodes；2- bevel type gears；3- dynamic sealing devices；4- stepper motors；5- drive plates；6-
First fixed gear；The fixed gears of 7- second；8- planetary gears；9- central gears；10- central gear power transmission shafts；11- workpiece；
12- revolution travelling gears.
Embodiment
The utility model is described further below in conjunction with the accompanying drawings：
As shown in figure 1, when carrying out chemical vapor deposition using direct current plasma electric arc, in plasma power supply anode 1 and upper
The negative electrode at end（It is not drawn into）Between form plasma column, work rest is arranged in the peripheral space of plasma column.In air
The stepper motor 4 of environment transmits the force to drive plate 5 by moving sealing element 3 and bevel gear 2, whole work rest is surrounded center
Electric arc is rotated, at the same time, the gear and the first fixed gear 6 of the latter half of central gear power transmission shaft 10 shown in Fig. 2
Engagement, drives central gear 9 to rotate；The revolution travelling gear 12 and second being fixed on by ceramic bearing on power transmission shaft 10 is fixed
Gear 7 is engaged, and the first fixed gear 6 is different with the pitch radius of the second fixed gear 7, therefore revolution travelling gear 12 and the sun
Exist between gear 9 and relatively rotate, and be distributed on around central gear and engaged with planetary gear due to planetary gear, such as Fig. 3
It is shown, just drive planetary gear to realize revolution and rotation when central gear exists and relatively rotated with revolution travelling gear.
Workpiece pipe sleeve is fixed on planetary gear, and the rotating speed of work rest can be adjusted according to working condition, thus may be used
To ensure in whole chemical deposition process, workpiece is constantly in multidimensional rotation status, and rotary course is sufficiently stable and uniform, from
And uniform vacuum coating can be obtained in workpiece surface.
Claims (1)
1. a kind of work rest that electric arc chemical vapor deposition field is stretched applied to direct current, including bevel type gear（2）, dynamic sealing dress
Put（3）, stepper motor（4）, drive plate（5）, the first fixed gear（6）, the second fixed gear（7）, planetary gear（8）, the sun
Gear（9）, central gear power transmission shaft（10）With revolution travelling gear（12）, it is characterised in that：The rotary power of whole work rest
From the stepper motor in vacuum chamber side（4）, stepper motor passes through bevel type gear（2）And drive plate（5）It is driven, is led to
Cross drive plate（5）Plasma column of the work rest around its center is set to revolve round the sun, the first fixed gear（6）With the second fixed gear
（7）It is fixed in vacuum chamber interior walls, central gear power transmission shaft（10）Drive plate is fixed on by ceramic bearing（5）It is upper and with first
Fixed gear（6）Engagement, the central gear on top（9）With power transmission shaft（10）Connected by keyway, and and planetary gear（8）Nibble
Close, the rotation of workpiece can be achieved, revolve round the sun travelling gear（12）Power transmission shaft is fixed on by ceramic bearing（10）On, and consolidate with second
Fixed gear（7）Engagement, planetary gear is fixed on revolution travelling gear by ceramic bearing（12）On, workpiece can be achieved along transmission
Axle（10）Revolution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621128320.6U CN206385255U (en) | 2016-10-17 | 2016-10-17 | A kind of work rest that electric arc chemical vapor deposition field is stretched applied to direct current |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621128320.6U CN206385255U (en) | 2016-10-17 | 2016-10-17 | A kind of work rest that electric arc chemical vapor deposition field is stretched applied to direct current |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206385255U true CN206385255U (en) | 2017-08-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621128320.6U Active CN206385255U (en) | 2016-10-17 | 2016-10-17 | A kind of work rest that electric arc chemical vapor deposition field is stretched applied to direct current |
Country Status (1)
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| CN (1) | CN206385255U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108277476A (en) * | 2018-03-14 | 2018-07-13 | 深圳市志橙半导体材料有限公司 | A kind of depositing SiC processing equipment using thermal cvd |
| CN110512192A (en) * | 2019-09-20 | 2019-11-29 | 深圳第三代半导体研究院 | A kind of chemical vapor deposition planet pallet device and air inlet method |
-
2016
- 2016-10-17 CN CN201621128320.6U patent/CN206385255U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108277476A (en) * | 2018-03-14 | 2018-07-13 | 深圳市志橙半导体材料有限公司 | A kind of depositing SiC processing equipment using thermal cvd |
| CN108277476B (en) * | 2018-03-14 | 2024-01-16 | 深圳市志橙半导体材料有限公司 | Silicon carbide deposition treatment equipment utilizing thermal CVD method |
| CN110512192A (en) * | 2019-09-20 | 2019-11-29 | 深圳第三代半导体研究院 | A kind of chemical vapor deposition planet pallet device and air inlet method |
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