CN206293414U - Wet process device - Google Patents
Wet process device Download PDFInfo
- Publication number
- CN206293414U CN206293414U CN201621190332.1U CN201621190332U CN206293414U CN 206293414 U CN206293414 U CN 206293414U CN 201621190332 U CN201621190332 U CN 201621190332U CN 206293414 U CN206293414 U CN 206293414U
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- Prior art keywords
- liquid removal
- removal unit
- air port
- wet process
- main liquid
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Abstract
The utility model provides a kind of wet process device.The utility model is by the secondary liquid removal unit of setting one by a main liquid removal unit, and one second air port is formed between the secondary liquid removal unit and the main liquid removal unit, produce a Bernoulli phenomenon, and then take away the liquid near a container side wall by second air port, it is to avoid the accumulation of liquid.
Description
Technical field
The utility model is related to a kind of processing apparatus, is especially adapted for use in the wet process of panel industry and semiconductor industry
Device.
Background technology
In panel industry and semiconductor industry, it is quite ripe that wet process develops.However, being limited to existing
Mechanism design, many problems are still suffered from practical operation.For example, wet process needs to be continuously applied different liquid
To a substrate, for example, the substrate may be etched using A etching liquids in a container, adjacent another
The substrate may be cleaned using pure water in container.In general, being to allow the substrate to store different liquid in multiple
Sequentially transmission and movement in the container of body, however, in order to ensure liquid will not be produced each other from a container band to another container
The situation of pollution, it is necessary to using liquid removal device (being commonly called as air knife) when substrate leaves each container, institute can not be taken away
In stating liquid to another container in container, with avoid polluting and product flaw.
With reference to Fig. 1-2, Fig. 1 illustrates the schematic diagram of the wet process device 10 of prior art.Fig. 2 illustrates the wet of prior art
The cross sectional side view of formula processing apparatus 10.The wet process device 10 includes one first container 11 and a main liquid removal list
Unit 15.First container 11 includes an opening 12 of a first side wall 19, for allowing a substrate 14 along first container
First container 10 is left or entered to 11 first axle 13 from the opening 12.The main liquid removal unit 15 is arranged on institute
State region of the inside of the first container 11 near the first side wall 19 with the opening 12, and the main liquid removal unit 15
Including one first air port 16.The direction 21 in first air port 16 be towards lower left (be defined by the first axle 13, about 225
Degree, it is however generally that, the direction 21 can be between 180-270 degree), so that the liquid 18 on the substrate 14 is blown down.However,
The side wall 19 is provided with the opening 12 so that the side wall 19 is more fragile, it is impossible to for fixing the main liquid removal unit
15.Therefore it is merely able to for the main liquid removal unit 15 to be fixed operation by other inwalls, and then makes the main liquid
Body removes unit 15 and cannot be fixed on the side wall 11.Therefore, it will usually add in the top of the main liquid removal unit 15
A guide plate 17 is filled, the guide plate 17 can avoid the liquid 18 between the main liquid removal unit 15 and the side wall 11
Space drop to the substrate 14.Although the liquid 18 of the top of the guide plate 17 can be avoided to drop to the substrate 14
On, but pass through over time, how much still can in the gap of the guide plate 17 and the side wall 11 accumulation liquid 18, enter
And it is dropped in the technical problem on the substrate 14.
In sum, the structure problem based on the side wall 11, it is impossible to which the main liquid removal unit 15 is fixed on institute
State on side wall 11.Allow to be fixed on the main liquid removal unit 15 on the side wall 11, it is possible in the master
The liquid 18 is accumulated between liquid removal unit 15 and the side wall, and then is dropped in the technical problem on the substrate 14.
Therefore, it is necessary to a kind of wet process device is provided, to solve above-mentioned problem.
The content of the invention
In view of this, the utility model purpose is to provide a kind of wet process device, by a main liquid removal list
First secondary liquid removal unit of other setting one, and form one between the secondary liquid removal unit and the main liquid removal unit
Second air port, produces a Bernoulli phenomenon, and then take away the liquid near a container side wall by second air port, it is to avoid liquid
The accumulation of body.
To reach above-mentioned purpose, the utility model provides a kind of wet process device, and it includes one first container, a main liquid
Body removes unit, a gas and provides unit and a secondary liquid removal unit.
First container, including a first side wall an opening, for allowing a substrate along the of first container
One axle leaves or enters first container from the opening.The main liquid removal unit is arranged on inside first container
Near the region of the first side wall with the opening, and the main liquid removal unit includes the first air port.The gas
Unit is provided and provides a gas to the main liquid removal unit, the substrate is flowed to by first air port.The secondary liquid
Body removes cell abutment between the main liquid removal unit, the secondary liquid removal unit and the main liquid removal unit
Form one second air port.The secondary liquid removal unit includes being connected to a guide plate of the first side wall.
Between the main liquid removal unit, the first side wall, the guide plate and the secondary liquid removal unit
Material is sequentially moved by the guide plate, the secondary liquid removal unit toward second air port.
In a preferred embodiment, the position in second air port first air port is away from the opening.
In a preferred embodiment, the gas is less than the main liquid in the first gas pressure that second air port produces
Body removes unit, the second gas pressure between the first side wall, the guide plate and the secondary liquid removal unit.
In a preferred embodiment, the gas is clean dried gas.
In a preferred embodiment, the main liquid removal unit and the secondary liquid removal unit are arranged at the base
The top of plate.
In a preferred embodiment, the direction in first air port and the first angle of the first axle are between 180-270
Degree.
In a preferred embodiment, the direction in second air port and the second angle of the first axle are between 180-270
Degree.
In a preferred embodiment, second angle is less than first angle.
Compared to prior art, the utility model by a main liquid removal unit by setting a secondary liquid removal list
Unit, and one second air port is formed between the secondary liquid removal unit and the main liquid removal unit, produce a Bernoulli Jacob
Phenomenon, and then take away the liquid near a container side wall by second air port, it is to avoid the accumulation of liquid.
Brief description of the drawings
Fig. 1, illustrates the schematic diagram of the wet process device of prior art；
Fig. 2, illustrates the cross sectional side view of the wet process device of prior art；
Fig. 3, illustrates the schematic diagram of wet process device of the present utility model；
Fig. 4, illustrates the cross sectional side view of wet process device of the present utility model；And
Fig. 5, illustrates the schematic diagram of the first angle of the present utility model and the second angle.
Specific embodiment
The embodiment for describing in detail referring to the drawings will cause advantages and features of the present utility model and realize this
The method of a little advantages and features is definitely.But, the utility model is not limited to embodiment as disclosed below, and this practicality is new
Type can be implemented in mutually different various modes, and embodiment as disclosed below is only used for making disclosure of the present utility model
It is more complete, contribute to the utility model person of an ordinary skill in the technical field can be fully understood by the utility model it
Category, the utility model is defined according to claim.In the specification, identical reference represents identical
Device assembly.
With reference to Fig. 3-5.Fig. 3 illustrates the schematic diagram of wet process device 100 of the present utility model.It is new that Fig. 4 illustrates this practicality
The cross sectional side view of the wet process device 100 of type.Fig. 5 illustrates the angle 181 of the first angle of the present utility model 161 and second
Schematic diagram.
It is single that the wet process device 100 includes that one first container 110, a main liquid removal unit 150, a gas are provided
The secondary liquid removal unit 170 of unit 210 and.
First container 110 includes that an opening 120 of a first side wall 112 is used to allow a substrate 140 along described the
First container 110 is left or entered to the first axle 130 of one container 110 from the opening 120.The main liquid removal unit
150 set region of the inside of the first container 110 near the first side wall 112 with the opening 120, and the main liquid is moved
Except unit 150 includes the first air port 160.The direction in first air port 160 is situated between with the first angle 161 of the first axle 130
In 180-270 degree.The gas provides unit 210 and provides a gas to the main liquid removal unit 150, with by described first
Air port 160 flows to the substrate 140.Preferably, the gas is dried and clean gas (clean dry air, CDA).It is described
Secondary liquid removal unit 170 is adjacent to the main liquid removal unit 150, and away from the opening 120, the secondary liquid is moved
Except one second air port 180 of formation between unit 170 and the main liquid removal unit 150.The secondary liquid removal unit 170 connects
It is connected to a guide plate 190 of the first side wall 112.Position first air port 160 in second air port 180 is away from described
Opening 120.Second angle 181 of the direction in second air port 180 and the first axle 130 is between 180-270 degree.
By using Bernoulli's theorem (Bernoulli's principle) in the utility model, the gas provides single
Unit 210 provides gas, liquid 200 of the gas from first air port 160 is turned left and is blown, can be at second air port 180
Produce a flow field for high speed.The gas is less than the main liquid in the first gas pressure P1 that second air port 180 produces
Body removes unit 150, between the first side wall 112, the guide plate 190 and the secondary liquid removal unit 170 second
Gas pressure P2.In detail, according to Bernoulli's theorem, in a horizontal liquid (difference of height herein is negligible), stream
Speed local its pressure high will be small, therefore the first gas pressure P1 at second air port 180 can be less than the gas
Body pressure P2, therefore, the main liquid removal unit 150, the first side wall 112, the guide plate 190 and the secondary liquid
Removing the air between unit 170 will be pull towards second air port 180 with the liquid 200 of surrounding, and then be removed close
The liquid of the first side wall 112.
Preferably, second angle 181 is less than first angle 161.Therefore second air port 180 can enter one
Step auxiliary first air port 160 removes the liquid 200 from the substrate 140.Further, the main liquid removal list
Unit 150 and the secondary liquid removal unit 170 are arranged at the top of the moving direction of the substrate 140.However, preferred at other
In embodiment, the main liquid removal unit 150 and the secondary liquid removal unit 170 are arranged at the substrate 140 and move
The lower section in direction, so as to the liquid in response to removal below the substrate 140.In the preferred embodiment, the main liquid is moved
Be arranged at the top of the substrate 140 except unit 150 and the secondary liquid removal unit 170, and the opening 120 be
The angle of right side, first angle 161 and second angle 181 can just be so designed that；For example, when the main liquid
Body removes the lower section that unit 150 and the secondary liquid removal unit 170 are arranged at the substrate 140, and the opening 120
It is still that, on right side, the angle of first angle 161 and second angle 181 will be between 90-180 degree.
Compared to prior art, the utility model is not required to provide gas to the secondary liquid removal unit 170, that is, only needs
Identical air capacity is used, however, but can be by producing Bernoulli phenomenon and then the extra product at second air port 180
Pulling force is given birth to, and then the liquid 200 of the first side wall 112 can be will be close to and be pumped by second air port 180, entered
And avoid it from falling to the substrate 140 and be close at the first side wall 112.
Although the utility model has used preferred embodiment disclosed above, so it is not limited to the utility model, this reality
New those of ordinary skill in the art is used, it is each when that can make in the spirit and scope for not departing from the utility model
The change of kind and retouching, thus the utility model protection domain when depending on after the attached claim person of defining be defined.
Claims (8)
1. a kind of wet process device, it is characterised in that including：
One first container, including a first side wall an opening, for allow a substrate along first container first axle from
Leave or enter first container in the opening；
One main liquid removal unit, is arranged on the first container inside near the region of the first side wall with the opening,
And the main liquid removal unit includes the first air port；
One gas provides unit, there is provided a gas to the main liquid removal unit, and the base is flowed to by first air port
Plate；And
One secondary liquid removal unit, is adjacent to the main liquid removal unit, and away from the opening, the secondary liquid removal
One second air port is formed between unit and the main liquid removal unit, the secondary liquid removal unit includes being connected to described the
One guide plate of side wall；
Wherein, between the main liquid removal unit, the first side wall, the guide plate and the secondary liquid removal unit
Material is sequentially moved by the guide plate, the secondary liquid removal unit toward second air port.
2. wet process device as claimed in claim 1, it is characterised in that position first wind in second air port
Mouth is away from the opening.
3. wet process device as claimed in claim 1, it is characterised in that the gas produced in second air port the
One gas pressure is less than the main liquid removal unit, the first side wall, the guide plate and the secondary liquid removal unit
Between second gas pressure.
4. wet process device as claimed in claim 1, it is characterised in that the gas is clean dried gas.
5. wet process device as claimed in claim 1, it is characterised in that the main liquid removal unit and the secondary liquid
Body removes the top that unit is arranged at the substrate.
6. wet process device as claimed in claim 1, it is characterised in that the direction in first air port and the first axle
The first angle between 180-270 degree.
7. wet process device as claimed in claim 6, it is characterised in that the direction in second air port and the first axle
The second angle between 180-270 degree.
8. wet process device as claimed in claim 7, it is characterised in that second angle is less than first angle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621190332.1U CN206293414U (en) | 2016-10-28 | 2016-10-28 | Wet process device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621190332.1U CN206293414U (en) | 2016-10-28 | 2016-10-28 | Wet process device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206293414U true CN206293414U (en) | 2017-06-30 |
Family
ID=59099739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621190332.1U Active CN206293414U (en) | 2016-10-28 | 2016-10-28 | Wet process device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206293414U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108022864A (en) * | 2016-10-28 | 2018-05-11 | 盟立自动化股份有限公司 | Wet process device |
-
2016
- 2016-10-28 CN CN201621190332.1U patent/CN206293414U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108022864A (en) * | 2016-10-28 | 2018-05-11 | 盟立自动化股份有限公司 | Wet process device |
| CN108022864B (en) * | 2016-10-28 | 2020-06-30 | 盟立自动化股份有限公司 | Wet processing device |
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